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@@ -6,20 +6,20 @@
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<config default="false" name="IsATMMode" nameView="ATM Mode" description="ATM Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IsCycleMode" nameView="Cycle Mode" description="Cycle Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="3" name="CycleCount" nameView="Cycle Count" description="Cycle Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
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- <config default="5" name="ATMCyclePMDelayTime" nameView="ATM Cycle PM Delay Time" description="ATM Cycle PM Delay Time" max="9999" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="5" name="ATMCyclePMDelayTime" nameView="ATM Cycle PM Delay Time" description="ATM Cycle PM Delay Time" max="9999" min="1" paramter="" tag="" unit="s" type="Integer"/>
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<config default="25" name="MaxTemperatureToleranceTransferWafer" nameView="Max Temperature Tolerance Transfer Wafer" description="Max Temperature Tolerance Transfer Wafer" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
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<config default="1" name="MaxTemperatureToleranceToTarget" nameView="Max Temperature Tolerance To Target" description="Max Temperature Tolerance To Target" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
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<config default="3" name="SmallWafer" nameView="Small Wafer" description="Small Wafer" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
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<config default="4" name="MidWafer" nameView="Mid Wafer" description="Mid Wafer" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
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<config default="6" name="BigWafer" nameView="Big Wafer" description="Big Wafer" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
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<config default="LP1,LP2,EfemRobot,EFEM,Aligner1,Buffer,PMA,PMB,Flipper" name="InstalledModules" description="Installed modules" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
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- <config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="Max Internal wafer count" max="25" min="1" paramter="" tag="" unit="" visible="true" type="Integer" />
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+ <config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="Max Internal wafer count" max="25" min="1" paramter="" tag="" unit="" visible="false" type="Integer" />
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<!--<config default="30" name="DefaultCoolingTime" nameView="Default Cooling Time" description="Default Cooling Time" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />-->
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<config default="Default" name="LogFilePath" nameView="LogFilePath" description="Log File Path" max="" min="" paramter="" tag="" unit="" type="String" />
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- <config default="true" name="RecipeFolderByType" nameView="Recipe File Saved In Folder Process or Clean" description="Recipe file saved in process or clean folders" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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+ <config default="true" name="RecipeFolderByType" nameView="Recipe File Saved In Folder Process or Clean" description="Recipe file saved in process or clean folders" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="false" name="IsIgnoreCDAPressure2Alarm" nameView="IsIgnoreCDAPressure2Alarm" description="Is Ignore CDAPressure2 Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="0" name="ChamberType" nameView="Chamber Mode" description="0=>VirgoMask,1=>VirgoR" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
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- <config default="false" name="Recipetolerance" nameView="Recipetolerance" description="Recipe tolerance" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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+ <config default="false" name="Recipetolerance" nameView="Recipetolerance" description="Recipe tolerance" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="false" name="EnableSignalTowerLog" nameView="EnableSignalTowerLog" description="Enable Signal Tower Log" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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@@ -34,8 +34,8 @@
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<configs name="FDC" nameView="FDC">
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<config default="Fdc" name="DataGroupName" nameView="FDC Data group" description="FDC data group, defined in DataGroup.xml" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
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- <config default="500" name="DelayTime" nameView="FDC Sample Delay Time" description="Step Delay time before collection FDC data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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- <config default="100" name="SampleInterval" nameView="FDC Sample Interval" description="interval time collection FDC sample data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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+ <config default="500" name="DelayTime" nameView="FDC Sample Delay Time" description="Step Delay time before collection FDC data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" visible="false"/>
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+ <config default="100" name="SampleInterval" nameView="FDC Sample Interval" description="interval time collection FDC sample data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" visible="false"/>
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</configs>
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<configs name="Job" nameView="Job">
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<config default="10" name="BuzzerTimeWhenJobDone" nameView="Buzzer Time When Job Done" description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
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@@ -68,62 +68,62 @@
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<config default="30" name="HomeTimeout" nameView="Home Timeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
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<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
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<config default="20" name="AlignerTimeout" nameView="Aligner Timeout" description="aligner time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
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- <config default="0" name="AlignAngle" nameView="Aligner Angle" description="" max="360" min="0" paramter="" tag="" unit="" type="Double" />
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- <config default="127.0.0.1:13000" name="IPAddress" nameView="IP Address" description="EFEM IP and Port;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
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- <config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="Check side door on EAP map" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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- <config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="Check cassette door on EAP map" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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+ <config default="0" name="AlignAngle" nameView="Aligner Angle" description="" max="360" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
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+ <config default="127.0.0.1:13000" name="IPAddress" nameView="IP Address" description="EFEM IP and Port;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
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+ <config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="Check side door on EAP map" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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+ <config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="Check cassette door on EAP map" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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- <config default="4" name="EfemType" nameView="EFEM Type" description="EFEM type,1=Future 2=Jet 3=Brooks 4=BeamSUNWAY" max="300" min="1" paramter="" tag="" unit="" type="Integer" />
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- <config default="1" name="EfemRobotArmType" nameView="EFEM robot arm type" description="EFEM robot arm type,1=Double arm 2=Single arm" max="300" min="1" paramter="" tag="" unit="" type="Integer" />
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- <config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="auto unlock after unload" max="" min="" paramter="" tag="" unit="" type="Bool" />
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+ <config default="4" name="EfemType" nameView="EFEM Type" description="EFEM type,1=Future 2=Jet 3=Brooks 4=BeamSUNWAY" max="300" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
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+ <config default="1" name="EfemRobotArmType" nameView="EFEM robot arm type" description="EFEM robot arm type,1=Double arm 2=Single arm" max="300" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
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+ <config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="auto unlock after unload" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="Ignore water flow alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IgnoreIonizerError" nameView="Ignore Ionizer alarm" description="Ignore Ionizer alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name ="VerifyWaferExistenceAtferRetract" nameView="Auto Verify Wafer existance after retract robot arm" description="Auto Verify Wafer existance after retract robot arm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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- <config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="Delay Time before lift down" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
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- <config default="0" name="FlipReturnWaferOption" nameView="Flip Option while return wafer" description="FlipOption,0=Not Flip, 1=FaceUp, 2=FaceDown, 3=AlwaysReverse" max="3" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="false" name="EnableResetError" nameView="Enable Reset EFEM Error by Click Reset Button" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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+ <config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="Delay Time before lift down" max="600" min="0" paramter="" tag="" unit="second" type="Integer" visible="false"/>
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+ <config default="0" name="FlipReturnWaferOption" nameView="Flip Option while return wafer" description="FlipOption,0=Not Flip, 1=FaceUp, 2=FaceDown, 3=AlwaysReverse" max="3" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
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+ <config default="false" name="EnableResetError" nameView="Enable Reset EFEM Error by Click Reset Button" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<configs name="EfemRobot" nameView="EfemRobot" >
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- <config default="true" name="UpperBladeEnable" nameView="UpperBladeEnable" description="Upper Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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- <config default="true" name="LowerBladeEnable" nameView="LowerBladeEnable" description="Lower Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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+ <config default="true" name="UpperBladeEnable" nameView="UpperBladeEnable" description="Upper Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
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+ <config default="true" name="LowerBladeEnable" nameView="LowerBladeEnable" description="Lower Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
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</configs>
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<configs name="Buffer" nameView="Buffer" >
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- <config default="2" name="SlotNumber" nameView="Slot number" description="slot number" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
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+ <config default="2" name="SlotNumber" nameView="Slot number" description="slot number" max="60" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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</configs>
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<configs name="LoadPort" nameView="LoadPort" >
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<config default="30" name="MotionTimeout" nameView="Motion Timeout" description="Motion Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
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<config default="30" name="HomeTimeout" nameView="Home Timeout" description="LoadPort Home Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
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- <config default="25" name="SlotNumber" nameView="Slot number" description="Slot number" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
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- <config default="true" name="SlotFromBottom" nameView="Slot number from bottom" description="Slot number from bottom" max="" min="" paramter="" tag="" unit="" type="Bool" />
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+ <config default="25" name="SlotNumber" nameView="Slot number" description="Slot number" max="60" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
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+ <config default="true" name="SlotFromBottom" nameView="Slot number from bottom" description="Slot number from bottom" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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- <config default="false" name="EnableScanner" nameView="Enable Scanner Reader" description="Enable scanner reader" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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+ <config default="false" name="EnableScanner" nameView="Enable Scanner Reader" description="Enable scanner reader" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="true" name="EnableDockUndock" nameView="Enable Dock and Undock" description="Enable Dock and Undock" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
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- <config default="0" name="WaferPlacementParityFlag" nameView="Parity Flag for wafer placement" description="0: all slot; 1:Odd slot; 2: Even slot。" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="true" name="HasMapFunction" nameView="HasMapFunction" description="Has map function" max="0" min="0" paramter="" tag="" unit="" visible="true" type="Bool" />
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- <config default="true" name="HasLoadFunction" nameView="HasLoadFunction" description="Has load/unload function" max="0" min="0" paramter="" tag="" unit="" visible="true" type="Bool" />
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+ <config default="0" name="WaferPlacementParityFlag" nameView="Parity Flag for wafer placement" description="0: all slot; 1:Odd slot; 2: Even slot。" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
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+ <config default="true" name="HasMapFunction" nameView="HasMapFunction" description="Has map function" max="0" min="0" paramter="" tag="" unit="" visible="false" type="Bool" />
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+ <config default="true" name="HasLoadFunction" nameView="HasLoadFunction" description="Has load/unload function" max="0" min="0" paramter="" tag="" unit="" visible="false" type="Bool" />
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<config default="false" name="EnableAutoUnloadFoup" nameView="EnableAutoUnloadFoup" description="Enable Auto Unload Foup" max="0" min="0" paramter="" tag="" unit="" visible="true" type="Bool" />
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</configs>
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</configs>
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<!--Router-->
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- <configs name="Scheduler" nameView="Scheduler" >
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- <config default="true" name="GroupWaferBySequence" nameView="Group Wafer By Sequence" description="GroupWaferBySequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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- <config default="true" name="IsRunInParallelMode" nameView="Is Run In Parallel Mode" description="Is run in parallel mode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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+ <configs name="Scheduler" nameView="Scheduler" visible="false">
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+ <config default="true" name="GroupWaferBySequence" nameView="Group Wafer By Sequence" description="GroupWaferBySequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
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+ <config default="true" name="IsRunInParallelMode" nameView="Is Run In Parallel Mode" description="Is run in parallel mode" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
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</configs>
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<!--PMA-->
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<configs name="PMA" nameView="PMA" >
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<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
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- <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="Open Gas Valve Timeout" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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- <config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
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- <config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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- <config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
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- <config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
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+ <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="Open Gas Valve Timeout" max="60" min="0" paramter="" tag="" unit="second" type="Integer" visible="false"/>
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+ <config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
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+ <config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
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+ <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" visible="false"/>
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+ <config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false"/>
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+ <config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" visible="false"/>
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+ <config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="150" name="ChamberHeaterSetPointLimit" nameView="Chamber Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
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@@ -131,70 +131,70 @@
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<config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
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- <config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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+ <config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" visible="false"/>
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<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
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<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
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<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
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<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
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<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
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<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
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- <config default="0" name="LiftPinPositionAfterPlace" nameView="Lift Pin Position After Place wafer, 0, Down, 1, Middle, 2, Up" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="Strip" name="ChamberLabel" nameView="Chamber Label" description="Chamber label" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="0" name="LiftPinPositionAfterPlace" nameView="Lift Pin Position After Place wafer, 0, Down, 1, Middle, 2, Up" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
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+ <config default="Strip" name="ChamberLabel" nameView="Chamber Label" description="Chamber label" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
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<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification max deviation(%)" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
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<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="0" name="LiftPinMode" nameView="LiftPin Mode" description="liftpin: 0-cylinderliftpin,1-single axis servo liftpin 2-double Axis servo liftpin 4-two double Axis servo liftpin" max="99" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
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- <config default="PortU" name="BrooksPortName" nameView="Brooks EFEM Port Name" description="Brooks EFEM Port Name of PMA" max="" min="" paramter="" tag="" unit="" type="String" />
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- <config default="false" name="EnableResetError" nameView="Enable Reset Chamber Error by Click Reset Button" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="PortU" name="BrooksPortName" nameView="Brooks EFEM Port Name" description="Brooks EFEM Port Name of PMA" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
|
|
|
+ <config default="false" name="EnableResetError" nameView="Enable Reset Chamber Error by Click Reset Button" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
<config default="false" name="ScrubberIsInstalled" nameView="Is Scrubber Installed" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
- <config default="5" name="LiftUpDownTimeout" nameView="Lift Up Down Timeout" description="Lift up/down time out" max="99999" min="1" paramter="" tag="" unit="second" type="Integer" />
|
|
|
+ <config default="5" name="LiftUpDownTimeout" nameView="Lift Up Down Timeout" description="Lift up/down time out" max="99999" min="1" paramter="" tag="" unit="second" type="Integer" visible="false" />
|
|
|
|
|
|
- <config default="30" name="SubstrateTemperatureTCTMDiff" nameView="Substrate Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
- <config default="30" name="ForelineTemperatureTCTMDiff" nameView="Foreline Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
- <config default="30" name="CHBWallTemperatureTCTMDiff" nameView="CHB Wall Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="30" name="SubstrateTemperatureTCTMDiff" nameView="Substrate Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
|
|
|
+ <config default="30" name="ForelineTemperatureTCTMDiff" nameView="Foreline Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
|
|
|
+ <config default="30" name="CHBWallTemperatureTCTMDiff" nameView="CHB Wall Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
|
|
|
|
|
|
- <configs name="MFCVerification" nameView="MFC Verification" >
|
|
|
+ <configs name="MFCVerification" nameView="MFC Verification" visible="false">
|
|
|
<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
|
|
|
<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
|
|
|
- <config default="9" name="TargetPressure" nameView="Target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
|
|
|
- <config default="180" name="GasFlowTime" nameView="Gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
|
|
|
- <config default="30" name="MaxDeviation" nameView="Max deviation" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
- <config default="20" name="PressureStableTolerance" nameView="Pressure stable tolerance" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
|
|
|
- <config default="20" name="FlowStableTolerance" nameView="Flow stable tolerance" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
+ <config default="9" name="TargetPressure" nameView="Target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double"/>
|
|
|
+ <config default="180" name="GasFlowTime" nameView="Gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double"/>
|
|
|
+ <config default="30" name="MaxDeviation" nameView="Max deviation" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
+ <config default="20" name="PressureStableTolerance" nameView="Pressure stable tolerance" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="false" type="Double" />
|
|
|
+ <config default="20" name="FlowStableTolerance" nameView="Flow stable tolerance" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
<config default="5" name="CheckStableTimeout" nameView="Check stable timeout" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
</configs>
|
|
|
|
|
|
- <configs name="Chiller" nameView="Chiller" >
|
|
|
- <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
+ <configs name="Chiller" nameView="Chiller" visible="false">
|
|
|
+ <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" visible="false"/>
|
|
|
<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="COM12" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="COM12" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
|
|
|
+ <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" visible="false"/>
|
|
|
+ <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" visible="false"/>
|
|
|
+ <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" visible="false"/>
|
|
|
<config default="0" name="CoolantInletTcFeedbackOffset" nameView="Coolant Inlet Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false" />
|
|
|
<config default="0" name="CoolantOutletTcFeedbackOffset" nameView="Coolant Outlet Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
</configs>
|
|
|
- <configs name="GridChiller" nameView="Grid Chiller" >
|
|
|
- <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
+ <configs name="GridChiller" nameView="Grid Chiller" visible="false">
|
|
|
+ <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" visible="false"/>
|
|
|
<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="COM12" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="10" min="-10" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="COM12" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
|
|
|
+ <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="10" min="-10" paramter="" tag="" unit="degree" type="Double" visible="false"/>
|
|
|
+ <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" visible="false"/>
|
|
|
+ <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" visible="false"/>
|
|
|
<config default="0" name="CoolantInletTcFeedbackOffset" nameView="Coolant Inlet Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
<config default="0" name="CoolantOutletTcFeedbackOffset" nameView="Coolant Outlet Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
</configs>
|
|
|
- <configs name="DryPump" nameView="Dry Pump" >
|
|
|
+ <configs name="DryPump" nameView="Dry Pump">
|
|
|
<config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM13" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
|
|
|
- <config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
+ <config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" visible="false"/>
|
|
|
+ <config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
|
|
|
</configs>
|
|
|
<configs name="Rf" nameView="Source RF" >
|
|
|
<config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -206,21 +206,21 @@
|
|
|
<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
+ <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
|
|
|
- <config default="false" name="EnableCalibration" nameView="Enable calibration" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
+ <config default="false" name="EnableCalibration" nameView="Enable calibration" max="" min="" paramter="" tag="" unit="" visible="false" type="Bool"/>
|
|
|
<config default="100#100;200#200;" name="CalibrationTable" nameView="Calibration table" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
- <config default="" name="GeneratorSerialNumber" nameView="Generator serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="" name="SensorSerialNumber" nameView="Sensor serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="" name="GeneratorSerialNumber" nameView="Generator serial number" max="" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
|
|
|
+ <config default="" name="SensorSerialNumber" nameView="Sensor serial number" max="" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
|
|
|
<config default="CCFG600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
- <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
+ <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
+ <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
<config default="" name="CalibrationTableDetail" nameView="Calibration table detail" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
</configs>
|
|
|
<configs name="match" nameView="Source Match" >
|
|
@@ -229,13 +229,13 @@
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
<!--<config default="10" name="MatchPositionC1" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="10" name="MatchPositionC2" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
|
|
|
</configs>
|
|
|
|
|
|
- <configs name="BiasRf" nameView="Bias RF" >
|
|
|
+ <configs name="BiasRf" nameView="Bias RF" visible="false" >
|
|
|
<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="2" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -262,7 +262,7 @@
|
|
|
<config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="" name="CalibrationTableDetail" nameView="Calibration table detail" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
</configs>
|
|
|
- <configs name="BiasMatch" nameView="Bias Match" >
|
|
|
+ <configs name="BiasMatch" nameView="Bias Match" visible="false">
|
|
|
<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="2" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -276,8 +276,8 @@
|
|
|
<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
|
|
|
<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
|
|
|
- <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
- <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
+ <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -289,8 +289,8 @@
|
|
|
<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
|
|
|
<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
|
|
|
- <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
|
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|
- <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
|
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|
+ <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
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|
<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -302,8 +302,8 @@
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<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
|
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|
<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
|
|
|
- <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
- <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
+ <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
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|
<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
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|
<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -315,8 +315,8 @@
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<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
|
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|
<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
|
|
|
- <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
- <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
+ <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -328,8 +328,8 @@
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<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
|
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|
<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
|
|
|
- <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
- <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
+ <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -360,26 +360,26 @@
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<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+ <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
</configs>
|
|
|
<configs name="WallHeater" nameView="Heater Wall" >
|
|
|
<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
@@ -387,27 +387,27 @@
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|
|
<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
-
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+ <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
</configs>
|
|
|
|
|
|
<configs name="ForelineHeater" nameView="Heater Foreline" >
|
|
@@ -416,30 +416,30 @@
|
|
|
<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
-
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+ <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
</configs>
|
|
|
|
|
|
- <configs name="GridHeater" nameView="Heater Grid" >
|
|
|
+ <configs name="GridHeater" nameView="Heater Grid" visible="false">
|
|
|
<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -487,7 +487,7 @@
|
|
|
</configs>
|
|
|
|
|
|
|
|
|
- <configs name="EPD" nameView="EPD Setting">
|
|
|
+ <configs name="EPD" nameView="EPD Setting" visible="false">
|
|
|
<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
</configs>
|
|
@@ -504,7 +504,7 @@
|
|
|
<config default="0" name="Position3" nameView="Lift Servo Position3" description="Lift Servo Position3" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
|
|
|
<config default="0" name="PosDiff" nameView="Lift Servo Pos Diff" description="Lift Servo Pos Diff" max="5" min="0" paramter="" tag="" unit="mm" type="Double" />
|
|
|
</configs>
|
|
|
- <configs name="TriStateLiftPin4" nameView="Double Group TriState LiftPin Setting" visible="true">
|
|
|
+ <configs name="TriStateLiftPin4" nameView="Double Group TriState LiftPin Setting" visible="false">
|
|
|
<config default="5" name="AutoSpeed" nameView="Lift Servo Auto speed" description="Lift Servo Auto speed" max="100" min="0" paramter="" tag="" unit="mm/s" type="Double" />
|
|
|
<config default="2" name="ManualSpeed" nameView="Lift Servo manual speed" description="Lift Servo manual speed" max="10" min="0" paramter="" tag="" unit="mm/s" type="Double" />
|
|
|
<config default="200" name="AccOrDecTime" nameView="Lift Servo Acc or Dec time" description="Lift Servo Acc or Dec time" max="1000" min="0" paramter="" tag="" unit="ms" type="Double" />
|
|
@@ -526,13 +526,13 @@
|
|
|
<!--PMB-->
|
|
|
<configs name="PMB" nameView="PMB" >
|
|
|
<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
- <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="Open gas valve timeout" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
|
|
- <config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
|
|
|
- <config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="Open gas valve timeout" max="60" min="0" paramter="" tag="" unit="second" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" visible="false"/>
|
|
|
+ <config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false"/>
|
|
|
+ <config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" visible="false" />
|
|
|
+ <config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
<config default="150" name="ChamberHeaterSetPointLimit" nameView="Chamber Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -540,40 +540,40 @@
|
|
|
<config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
|
|
|
<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
|
|
|
- <config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
|
|
|
+ <config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" visible="false"/>
|
|
|
<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
|
|
|
<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
|
|
|
<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
|
|
|
<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
|
|
|
- <config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
- <config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
- <config default="0" name="LiftPinPositionAfterPlace" nameView="Lift Pin Position After Place wafer, 0, Down, 1, Middle, 2, Up" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="Strip" name="ChamberLabel" nameView="Chamber Label" description="Chamber label" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="true"/>
|
|
|
+ <config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="true"/>
|
|
|
+ <config default="0" name="LiftPinPositionAfterPlace" nameView="Lift Pin Position After Place wafer, 0, Down, 1, Middle, 2, Up" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="Strip" name="ChamberLabel" nameView="Chamber Label" description="Chamber label" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
|
|
|
<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification max deviation(%)" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="0" name="LiftPinMode" nameView="LiftPin Mode" description="liftpin: 0-cylinderliftpin,1-single axis servo liftpin 2-double Axis servo liftpin 4-two double Axis servo liftpin" max="99" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
- <config default="PortV" name="BrooksPortName" nameView="Brooks EFEM Port Name" description="Brooks EFEM Port Name of PMB" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="false" name="EnableResetError" nameView="Enable Reset Chamber Error by Click Reset Button" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="PortV" name="BrooksPortName" nameView="Brooks EFEM Port Name" description="Brooks EFEM Port Name of PMB" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
|
|
|
+ <config default="false" name="EnableResetError" nameView="Enable Reset Chamber Error by Click Reset Button" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
<config default="false" name="ScrubberIsInstalled" nameView="Is Scrubber Installed" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
- <config default="5" name="LiftUpDownTimeout" nameView="Lift Up Down Timeout" description="Lift up/down time out" max="99999" min="1" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="30" name="SubstrateTemperatureTCTMDiff" nameView="Substrate Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
- <config default="30" name="ForelineTemperatureTCTMDiff" nameView="Foreline Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
- <config default="30" name="CHBWallTemperatureTCTMDiff" nameView="CHB Wall Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="5" name="LiftUpDownTimeout" nameView="Lift Up Down Timeout" description="Lift up/down time out" max="99999" min="1" paramter="" tag="" unit="second" type="Integer" visible="false"/>
|
|
|
+ <config default="30" name="SubstrateTemperatureTCTMDiff" nameView="Substrate Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
|
|
|
+ <config default="30" name="ForelineTemperatureTCTMDiff" nameView="Foreline Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
|
|
|
+ <config default="30" name="CHBWallTemperatureTCTMDiff" nameView="CHB Wall Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
|
|
|
|
|
|
- <configs name="MFCVerification" nameView="MFC Verification" >
|
|
|
+ <configs name="MFCVerification" nameView="MFC Verification" visible="false">
|
|
|
<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
|
|
|
<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
|
|
|
- <config default="9" name="TargetPressure" nameView="Target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
|
|
|
- <config default="180" name="GasFlowTime" nameView="Gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
|
|
|
- <config default="30" name="MaxDeviation" nameView="Max deviation" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
- <config default="20" name="PressureStableTolerance" nameView="Pressure stable tolerance" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
|
|
|
- <config default="20" name="FlowStableTolerance" nameView="Flow stable tolerance" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
+ <config default="9" name="TargetPressure" nameView="Target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double"/>
|
|
|
+ <config default="180" name="GasFlowTime" nameView="Gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
|
|
|
+ <config default="30" name="MaxDeviation" nameView="Max deviation" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
+ <config default="20" name="PressureStableTolerance" nameView="Pressure stable tolerance" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="false" type="Double" />
|
|
|
+ <config default="20" name="FlowStableTolerance" nameView="Flow stable tolerance" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
<config default="5" name="CheckStableTimeout" nameView="Check stable timeout" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
</configs>
|
|
|
|
|
|
- <configs name="Chiller" nameView="Chiller" >
|
|
|
+ <configs name="Chiller" nameView="Chiller" visible="false">
|
|
|
<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -586,7 +586,7 @@
|
|
|
<config default="0" name="CoolantOutletTcFeedbackOffset" nameView="Coolant Outlet Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
</configs>
|
|
|
|
|
|
- <configs name="GridChiller" nameView="Grid Chiller" >
|
|
|
+ <configs name="GridChiller" nameView="Grid Chiller" visible="false">
|
|
|
<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
|
|
|
<config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -599,12 +599,12 @@
|
|
|
<config default="0" name="CoolantOutletTcFeedbackOffset" nameView="Coolant Outlet Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
</configs>
|
|
|
|
|
|
- <configs name="DryPump" nameView="Dry Pump" >
|
|
|
+ <configs name="DryPump" nameView="Dry Pump">
|
|
|
<config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM23" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
|
|
|
- <config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
+ <config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" visible="false"/>
|
|
|
+ <config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
|
|
|
</configs>
|
|
|
<configs name="Rf" nameView="Source RF" >
|
|
|
<config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -616,21 +616,21 @@
|
|
|
<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
+ <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
|
|
|
- <config default="false" name="EnableCalibration" nameView="Enable calibration" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
+ <config default="false" name="EnableCalibration" nameView="Enable calibration" max="" min="" paramter="" tag="" unit="" visible="false" type="Bool" />
|
|
|
<config default="100#100;200#200;" name="CalibrationTable" nameView="Calibration table" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
- <config default="" name="GeneratorSerialNumber" nameView="Generator serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="" name="SensorSerialNumber" nameView="Sensor serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="" name="GeneratorSerialNumber" nameView="Generator serial number" max="" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
|
|
|
+ <config default="" name="SensorSerialNumber" nameView="Sensor serial number" max="" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
|
|
|
<config default="CCFG600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
- <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
+ <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
+ <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
<config default="" name="CalibrationTableDetail" nameView="Calibration table detail" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
</configs>
|
|
|
<configs name="match" nameView="Source Match" >
|
|
@@ -639,12 +639,12 @@
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
<!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
|
|
|
</configs>
|
|
|
- <configs name="BiasRf" nameView="Bias RF" >
|
|
|
+ <configs name="BiasRf" nameView="Bias RF" visible="false">
|
|
|
<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="2" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -655,13 +655,13 @@
|
|
|
<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
+ <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
+ <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
<config default="false" name="EnableCalibration" nameView="Enable calibration" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
<config default="100#100;200#200;" name="CalibrationTable" nameView="Calibration table" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
<config default="" name="GeneratorSerialNumber" nameView="Generator serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
@@ -671,7 +671,7 @@
|
|
|
<config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="" name="CalibrationTableDetail" nameView="Calibration table detail" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
</configs>
|
|
|
- <configs name="BiasMatch" nameView="Bias Match" >
|
|
|
+ <configs name="BiasMatch" nameView="Bias Match" visible="false">
|
|
|
<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="2" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -685,8 +685,8 @@
|
|
|
<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
|
|
|
<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
|
|
|
- <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
- <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
+ <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -698,8 +698,8 @@
|
|
|
<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
|
|
|
<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
|
|
|
- <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
- <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
+ <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -711,8 +711,8 @@
|
|
|
<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
|
|
|
<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
|
|
|
- <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
- <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
+ <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -724,8 +724,8 @@
|
|
|
<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
|
|
|
<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
|
|
|
- <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
- <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
+ <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -737,8 +737,8 @@
|
|
|
<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
|
|
|
<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
|
|
|
- <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
- <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
|
|
|
+ <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
+ <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
|
|
|
<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -769,27 +769,27 @@
|
|
|
<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
-
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+ <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
</configs>
|
|
|
<configs name="WallHeater" nameView="Heater Wall" >
|
|
|
<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
@@ -797,27 +797,27 @@
|
|
|
<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
-
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+ <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" visible="false" />
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
</configs>
|
|
|
|
|
|
<configs name="ForelineHeater" nameView="Heater Foreline" >
|
|
@@ -826,30 +826,30 @@
|
|
|
<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
-
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+ <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
+
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" visible="false"/>
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" visible="false"/>
|
|
|
</configs>
|
|
|
|
|
|
- <configs name="GridHeater" nameView="Heater Grid" >
|
|
|
+ <configs name="GridHeater" nameView="Heater Grid" visible="false">
|
|
|
<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -897,7 +897,7 @@
|
|
|
<config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="864000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
</configs>
|
|
|
|
|
|
- <configs name="EPD" nameView="EPD Setting">
|
|
|
+ <configs name="EPD" nameView="EPD Setting" visible="false">
|
|
|
<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="1" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
</configs>
|
|
@@ -914,7 +914,7 @@
|
|
|
<config default="0" name="Position3" nameView="Lift Servo Position3" description="Lift Servo Position3" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
|
|
|
<config default="0" name="PosDiff" nameView="Lift Servo Pos Diff" description="Lift Servo Pos Diff" max="5" min="0" paramter="" tag="" unit="mm" type="Double" />
|
|
|
</configs>
|
|
|
- <configs name="TriStateLiftPin4" nameView="Double Group TriState LiftPin Setting" visible="true">
|
|
|
+ <configs name="TriStateLiftPin4" nameView="Double Group TriState LiftPin Setting" visible="false">
|
|
|
<config default="5" name="AutoSpeed" nameView="Lift Servo Auto speed" description="Lift Servo Auto speed" max="100" min="0" paramter="" tag="" unit="mm/s" type="Double" />
|
|
|
<config default="2" name="ManualSpeed" nameView="Lift Servo manual speed" description="Lift Servo manual speed" max="10" min="0" paramter="" tag="" unit="mm/s" type="Double" />
|
|
|
<config default="200" name="AccOrDecTime" nameView="Lift Servo Acc or Dec time" description="Lift Servo Acc or Dec time" max="1000" min="0" paramter="" tag="" unit="ms" type="Double" />
|