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@@ -5,7 +5,7 @@
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<DI_ITEM Index="1" Name="DI_PM_ATM_SW" Device="" Addr="w20.01" Note="Interlock-PLC" />
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<DI_ITEM Index="2" Name="DI_PM_VAC_SW" Device="9.5T" Addr="w20.02" Note="Interlock-HW" />
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<DI_ITEM Index="3" Name="DI_Cooling_Water_Flow_SW" Device="" Addr="w20.03" Note="Interlock-HW" />
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- <DI_ITEM Index="4" Name="DI_LE_OT_SW_Alarm" Device="" Addr="w20.04" Note="1=OK, 0=alarm" />
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+ <!--<DI_ITEM Index="4" Name="DI_LE_OT_SW_Alarm" Device="" Addr="w20.04" Note="1=OK, 0=alarm" />-->
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<DI_ITEM Index="5" Name="DI_Water_Leak" Device="" Addr="w20.05" Note="1=OK, 0=alarm" />
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<DI_ITEM Index="6" Name="DI_Slit_Door_Open_Pos" Device="" Addr="w20.06" Note="Interlock-HW" />
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<DI_ITEM Index="7" Name="DI_Slit_Door_Close_Pos" Device="" Addr="w20.07" Note="Interlock-HW" />
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@@ -23,16 +23,16 @@
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<DI_ITEM Index="19" Name="DI_Substrate_Control_TC_Broken_Alarm" Device="" Addr="w21.03" Note="0=OK,1=alarm" />
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<DI_ITEM Index="20" Name="DI_Substrate_Monitor_TC_Broken_Alarm" Device="" Addr="w21.04" Note="0=OK,1=alarm" />
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<DI_ITEM Index="21" Name="DI_Substrate_Heater_On_FB" Device="" Addr="w21.05" Note="0=OFF,1=ON" />
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- <DI_ITEM Index="22" Name="DI_CDA_Pressure" Device="" Addr="w21.06" />
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- <DI_ITEM Index="23" Name="DI_CDA_Pressure_Switch_Out_2" Device="" Addr="W21.07" />
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+ <DI_ITEM Index="22" Name="DI_CDA_Pressure_Switch_Out_1" Device="" Addr="w21.06" />
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+ <!--<DI_ITEM Index="23" Name="DI_CDA_Pressure_Switch_Out_2" Device="" Addr="W21.07" />-->
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<DI_ITEM Index="24" Name="DI_SourceFan1" Device="" Addr="w21.08" />
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<DI_ITEM Index="25" Name="DI_CTRL_Box_Fans_Running" Device="" Addr="W21.09" />
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<DI_ITEM Index="26" Name="DI_Source_Match_Interlock" Device="" Addr="W21.10"/>
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<DI_ITEM Index="27" Name="DI_Bais_Match_Interlock" Device="" Addr="W21.11"/>
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<DI_ITEM Index="28" Name="" />
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- <DI_ITEM Index="29" Name="DI_GB_Interlock_Alarm" Device="" Addr="w21.13" Note="0=OK,1=Warning" />
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+ <DI_ITEM Index="29" Name="DI_GB_Door_Interlock" Device="" Addr="w21.13" Note="0=OK,1=Warning" />
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<DI_ITEM Index="30" Name="DI_GB_Pressure_Interlock" Device="" Addr="W21.14" />
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- <DI_ITEM Index="31" Name="DI_CHB_Wall_OT_Switch_Alarm" Device="" Addr="W21.15"/>
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+ <!--<DI_ITEM Index="31" Name="DI_CHB_Wall_OT_Switch_Alarm" Device="" Addr="W21.15"/>-->
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<DI_ITEM Index="32" Name="DI_SRF_Water_Flow_Switch" Device="" Addr="W22.00" />
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<DI_ITEM Index="33" Name="DI_Factory_Scrubber_SYS_Normal" Device="" Addr="W22.01" />
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<DI_ITEM Index="34" Name="" />
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@@ -55,9 +55,9 @@
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<DI_ITEM Index="51" Name="DI_MFC4_Pressure" Device="" Addr="w23.03" />
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<DI_ITEM Index="52" Name="DI_MFC5_Pressure" Device="" Addr="w23.04" />
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<DI_ITEM Index="53" Name="DI_N2_Pressure" Device="" Addr="w23.05" />
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- <DI_ITEM Index="54" Name="DI_Process_pressure_Alarm" Addr="w23.06" />
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- <DI_ITEM Index="55" Name="DI_Chamber_pressure_Alarm" Addr="w23.07" />
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- <DI_ITEM Index="56" Name="DI_Foreline_pressure_Alarm" Addr="w23.08" />
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+ <!--<DI_ITEM Index="54" Name="DI_Process_pressure_Alarm" Addr="w23.06" />-->
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+ <!--<DI_ITEM Index="55" Name="DI_Chamber_pressure_Alarm" Addr="w23.07" />-->
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+ <!--<DI_ITEM Index="56" Name="DI_Foreline_pressure_Alarm" Addr="w23.08" />-->
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<DI_ITEM Index="57" Name="" />
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<DI_ITEM Index="58" Name="" />
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<DI_ITEM Index="59" Name="" />
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@@ -69,7 +69,7 @@
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<DI_ITEM Index="65" Name="" />
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<DI_ITEM Index="66" Name="" />
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<DI_ITEM Index="67" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Addr="w24.03" />
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- <DI_ITEM Index="68" Name="DI_Grid_TC_Broken_Alarm" Addr="w24.04"/>
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+ <!--<DI_ITEM Index="68" Name="DI_Grid_TC_Broken_Alarm" Addr="w24.04"/>-->
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<DI_ITEM Index="69" Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Addr="w24.05"/>
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<DI_ITEM Index="70" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Addr="w24.06"/>
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<DI_ITEM Index="71" Name="DI_CHB_Wall_Heater_On_FB" Addr="w24.07" />
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@@ -105,9 +105,9 @@
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<DI_ITEM Index="101" Name="DI_Lift_Servo_Origin_Sensor" Addr="W26.05" Device="" Note="1=On,0=Off Lift Servo 原点开关(NO)" />
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<DI_ITEM Index="102" Name="DI_Lift_Servo_Up_Limit_Sensor" Addr="W26.06" Device="" Note="1=On,0=Off Lift Servo 上极限开关(NC)" />
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<DI_ITEM Index="103" Name="DI_Lift_Servo_Down_Limit_Sensor" Addr="W26.07" Device="" Note="1=On,0=Off Lift Servo 下极限开关(NC)" />
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- <DI_ITEM Index="104" Name="DI_Lift_Virtual_Servo_On" Addr="W26.08" Device="" Note="1=On,0=Off 虚拟轴伺服On" />
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- <DI_ITEM Index="105" Name="DI_Lift_Virtual_Servo_Origin_Complete" Addr="W26.09" Device="" Note="1=On,0=Off 虚拟轴伺服回原点完成" />
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- <DI_ITEM Index="106" Name="DI_Lift_Virtual_Servo_Busying" Addr="W26.10" Device="" Note="1=On,0=Off 虚拟轴伺服运行中" />
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+ <!--<DI_ITEM Index="104" Name="DI_Lift_Virtual_Servo_On" Addr="W26.08" Device="" Note="1=On,0=Off 虚拟轴伺服On" />-->
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+ <!--<DI_ITEM Index="105" Name="DI_Lift_Virtual_Servo_Origin_Complete" Addr="W26.09" Device="" Note="1=On,0=Off 虚拟轴伺服回原点完成" />-->
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+ <!--<DI_ITEM Index="106" Name="DI_Lift_Virtual_Servo_Busying" Addr="W26.10" Device="" Note="1=On,0=Off 虚拟轴伺服运行中" />-->
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<DI_ITEM Index="107" Name="DI_Lift_Servo_Group_Go_Pos_1_Complete" Addr="W26.11" Device="" />
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<DI_ITEM Index="108" Name="DI_Lift_Servo_Group_Go_Pos_2_Complete" Addr="W26.12" Device="" />
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<DI_ITEM Index="109" Name="DI_Lift_Servo_Group_Go_Pos_3_Complete" Addr="W26.13" Device="" />
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@@ -117,7 +117,7 @@
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<DI_ITEM Index="113" Name="" />
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<DI_ITEM Index="114" Name="DI_Lift_Servo_1_Servo_On" Addr="W27.02" Device="" Note="1=On,0=Off 伺服-1ON" />
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<DI_ITEM Index="115" Name="DI_Lift_Servo_1_Servo_Origin_Complete" Addr="W27.03" Device="" Note="1=On,0=Off 伺服-1回原点完成" />
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- <DI_ITEM Index="116" Name="DI_Lift_Servo_1_Servo_Busying" Addr="W27.04" Device="" Note="1=On,0=Off 伺服-1伺服运行中" />
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+ <!--<DI_ITEM Index="116" Name="DI_Lift_Servo_1_Servo_Busying" Addr="W27.04" Device="" Note="1=On,0=Off 伺服-1伺服运行中" />-->
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<DI_ITEM Index="117" Name="DI_Lift_Servo_1_Braker_Open" Addr="W27.05" Device="" Note="1=On,0=Off 伺服-1抱闸已打开" />
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<DI_ITEM Index="118" Name="DI_Lift_Servo_1_L_Servo_Driver_Alarm" Addr="W27.06" Device="" Note="0=Normal, 1=Alarm 伺服驱动-1器报警" />
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<DI_ITEM Index="119" Name="DI_Lift_Servo_1_L_Servo_Driver_Warning" Addr="W27.07" Device="" Note="0=Normal, 1=Alarm 伺服驱动-1器警告" />
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@@ -133,7 +133,7 @@
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<DI_ITEM Index="129" Name="" />
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<DI_ITEM Index="130" Name="DI_Lift_Servo_2_Servo_On" Addr="W28.02" Device="" Note="1=On,0=Off 伺服-1ON" />
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<DI_ITEM Index="131" Name="DI_Lift_Servo_2_Servo_Origin_Complete" Addr="W28.03" Device="" Note="1=On,0=Off 伺服-1回原点完成" />
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- <DI_ITEM Index="132" Name="DI_Lift_Servo_2_Servo_Busying" Addr="W28.04" Device="" Note="1=On,0=Off 伺服-1伺服运行中" />
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+ <!--<DI_ITEM Index="132" Name="DI_Lift_Servo_2_Servo_Busying" Addr="W28.04" Device="" Note="1=On,0=Off 伺服-1伺服运行中" />-->
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<DI_ITEM Index="133" Name="DI_Lift_Servo_2_Braker_Open" Addr="W28.05" Device="" Note="1=On,0=Off 伺服-1抱闸已打开" />
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<DI_ITEM Index="134" Name="DI_Lift_Servo_2_L_Servo_Driver_Alarm" Addr="W28.06" Device="" Note="0=Normal, 1=Alarm 伺服驱动-1器报警" />
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<DI_ITEM Index="135" Name="DI_Lift_Servo_2_L_Servo_Driver_Warning" Addr="W28.07" Device="" Note="0=Normal, 1=Alarm 伺服驱动-1器警告" />
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@@ -215,7 +215,7 @@
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<DO_ITEM Index="49" Name="" />
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<DO_ITEM Index="50" Name="" />
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<DO_ITEM Index="51" Name="" />
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- <DO_ITEM Index="52" Name="DO_Arm_Extend_Enable" Addr="w3.04" Note="允许EFEM Rorbot Arm伸入PM腔体内,带逻辑"/>
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+ <!--<DO_ITEM Index="52" Name="DO_Arm_Extend_Enable" Addr="w3.04" Note="允许EFEM Rorbot Arm伸入PM腔体内,带逻辑"/>-->
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<DO_ITEM Index="53" Name="" />
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<DO_ITEM Index="54" Name="" />
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<DO_ITEM Index="55" Name="" />
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@@ -259,11 +259,11 @@
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<DO_ITEM Index="93" Name="" />
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<DO_ITEM Index="94" Name="" />
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<DO_ITEM Index="95" Name="" />
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- <DO_ITEM Index="96" Name="DO_Lift_Servo-1_Manual_Up" Addr="W6.00" Device="" />
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- <DO_ITEM Index="97" Name="DO_Lift_Servo-1_Manual_Down" Addr="W6.01" Device="" />
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- <DO_ITEM Index="98" Name="DO_Lift_Servo-1_Stop" Addr="W6.02" Device="" />
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- <DO_ITEM Index="99" Name="DO_Lift_Servo-1_Step_Up" Addr="W6.03" Device="" />
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- <DO_ITEM Index="100" Name="DO_Lift_Servo-1_Step_Down" Addr="W6.04" Device="" />
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+ <!--<DO_ITEM Index="96" Name="DO_Lift_Servo-1_Manual_Up" Addr="W6.00" Device="" />-->
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+ <!--<DO_ITEM Index="97" Name="DO_Lift_Servo-1_Manual_Down" Addr="W6.01" Device="" />-->
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+ <!--<DO_ITEM Index="98" Name="DO_Lift_Servo-1_Stop" Addr="W6.02" Device="" />-->
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+ <!--<DO_ITEM Index="99" Name="DO_Lift_Servo-1_Step_Up" Addr="W6.03" Device="" />-->
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+ <!--<DO_ITEM Index="100" Name="DO_Lift_Servo-1_Step_Down" Addr="W6.04" Device="" />-->
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<DO_ITEM Index="101" Name="" />
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<DO_ITEM Index="102" Name="" />
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<DO_ITEM Index="103" Name="" />
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@@ -275,11 +275,11 @@
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<DO_ITEM Index="109" Name="" />
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<DO_ITEM Index="110" Name="" />
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<DO_ITEM Index="111" Name="" />
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- <DO_ITEM Index="112" Name="DO_Lift_Servo-2_Manual_Up" Addr="W7.00" Device="" />
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- <DO_ITEM Index="113" Name="DO_Lift_Servo-2_Manual_Down" Addr="W7.01" Device="" />
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- <DO_ITEM Index="114" Name="DO_Lift_Servo-2_Stop" Addr="W7.02" Device="" />
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- <DO_ITEM Index="115" Name="DO_Lift_Servo-2_Step_Up" Addr="W7.03" Device="" />
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- <DO_ITEM Index="116" Name="DO_Lift_Servo-2_Step_Down" Addr="W7.04" Device="" />
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+ <!--<DO_ITEM Index="112" Name="DO_Lift_Servo-2_Manual_Up" Addr="W7.00" Device="" />-->
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+ <!--<DO_ITEM Index="113" Name="DO_Lift_Servo-2_Manual_Down" Addr="W7.01" Device="" />-->
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+ <!--<DO_ITEM Index="114" Name="DO_Lift_Servo-2_Stop" Addr="W7.02" Device="" />-->
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+ <!--<DO_ITEM Index="115" Name="DO_Lift_Servo-2_Step_Up" Addr="W7.03" Device="" />-->
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+ <!--<DO_ITEM Index="116" Name="DO_Lift_Servo-2_Step_Down" Addr="W7.04" Device="" />-->
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<DO_ITEM Index="117" Name="" />
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<DO_ITEM Index="118" Name="" />
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<DO_ITEM Index="119" Name="" />
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@@ -335,7 +335,7 @@
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<AO_ITEM Index="23" Name="" />
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<AO_ITEM Index="24" Name="" />
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<AO_ITEM Index="25" Name="AO_BaisRF_Enable" BufferOffset="50" Device="" Addr="d1050" Note="0=Substrate heater mode ,1=Bais RF mode" />
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- <AO_ITEM Index="26" Name="AO_Grid_TC_Enable" BufferOffset="52" Device="" Addr="d1052" Note="1=Grid TC"/>
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+ <!--<AO_ITEM Index="26" Name="AO_Grid_TC_Enable" BufferOffset="52" Device="" Addr="d1052" Note="1=Grid TC"/>-->
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<AO_ITEM Index="27" Name="AO_Lift_Servo_Enable" BufferOffset="54" Device="" Addr="d1054" Note="0=Lift Pin ,1=Lift Servo"/>
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<AO_ITEM Index="28" Name="AO_Lift_Servo_Auto_speed" BufferOffset="56" Device="" Addr="d1056" Note="mm/s"/>
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<AO_ITEM Index="29" Name="AO_Lift_Servo_manual_speed" BufferOffset="58" Device="" Addr="d1058" Note="mm/s" />
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@@ -354,7 +354,7 @@
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<AO_ITEM Index="42" Name="" />
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<AO_ITEM Index="43" Name="" />
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<AO_ITEM Index="44" Name="" />
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- <AO_ITEM Index="45" Name="AO_Lift_Servo_Work_Mode" Addr="D1090" Device="" />
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+ <!--<AO_ITEM Index="45" Name="AO_Lift_Servo_Work_Mode" Addr="D1090" Device="" />-->
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<AO_ITEM Index="46" Name="AO_Lift_Servo_Group_ABS_POS_Diff" Addr="D1092" Device="" />
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<AO_ITEM Index="47" Name="" />
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<AO_ITEM Index="48" Name="" />
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@@ -371,7 +371,7 @@
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<AO_ITEM Index="59" Name="AO_Lift_Servo_Group_Manual_Speed" Addr="D1118" Device="" Note="UI" />
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<AO_ITEM Index="60" Name="AO_Lift_Servo_Group_Soft_Up_Limit" Addr="D1120" Device="" Note="RT" />
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<AO_ITEM Index="61" Name="AO_Lift_Servo_Group_soft_Down_Limit" Addr="D1122" Device="" />
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- <AO_ITEM Index="62" Name="AO_Lift_Servo_Group_ACC_DEC_Speed_Time" Addr="D1124" Device="" />
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+ <!--<AO_ITEM Index="62" Name="AO_Lift_Servo_Group_ACC_DEC_Speed_Time" Addr="D1124" Device="" />-->
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<AO_ITEM Index="63" Name="" />
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<AO_ITEM Index="64" Name="" />
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<AO_ITEM Index="65" Name="" />
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@@ -396,8 +396,8 @@
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<AI_ITEM Index="6" Name="AI_MFC3_Flow" BufferOffset="12" Device="" Addr="d2012" Note="MFC" />
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<AI_ITEM Index="7" Name="AI_MFC4_Flow" BufferOffset="14" Device="" Addr="d2014" Note="MFC" />
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<AI_ITEM Index="8" Name="AI_MFC5_Flow" BufferOffset="16" Device="" Addr="d2016" Note="MFC" />
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- <AI_ITEM Index="9" Name="AI_Coolant_Inlet_Temp" BufferOffset="18" Device="" Addr="d2018" Note="Chiller" />
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- <AI_ITEM Index="10" Name="AI_Coolant_Outlet_Temp" BufferOffset="20" Device="" Addr="d2020" Note="Chiller" />
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+ <!--<AI_ITEM Index="9" Name="AI_Coolant_Inlet_Temp" BufferOffset="18" Device="" Addr="d2018" Note="Chiller" />-->
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+ <!--<AI_ITEM Index="10" Name="AI_Coolant_Outlet_Temp" BufferOffset="20" Device="" Addr="d2020" Note="Chiller" />-->
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<AI_ITEM Index="11" Name="AI_Substrate_Control_TC_Temp" BufferOffset="22" Device="" Addr="d2022" Note="TC temp" />
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<AI_ITEM Index="12" Name="AI_Substrate_Monitor_TC_Temp" BufferOffset="24" Device="" Addr="d2024" Note="TC temp" />
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<AI_ITEM Index="13" Name="" />
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@@ -422,7 +422,7 @@
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<AI_ITEM Index="32" Name="" />
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<AI_ITEM Index="33" Name="" />
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<AI_ITEM Index="34" Name="" />
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- <AI_ITEM Index="35" Name="AI_Grid_TC_Temp" BufferOffset="70" Device="" Addr="d2070" Note="TC temp" />
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+ <!--<AI_ITEM Index="35" Name="AI_Grid_TC_Temp" BufferOffset="70" Device="" Addr="d2070" Note="TC temp" />-->
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<AI_ITEM Index="36" Name="AI_CHB_Wall_Control_TC_Temp" BufferOffset="72" Device="" Addr="d2072" Note="TC temp" />
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<AI_ITEM Index="37" Name="AI_CHB_Wall_Monitor_TC_Temp" BufferOffset="74" Device="" Addr="d2074" Note="TC temp" />
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<AI_ITEM Index="38" Name="" />
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@@ -432,12 +432,12 @@
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<AI_ITEM Index="42" Name="AI_Generator_Forward_Power" BufferOffset="84" Device="" Addr="d2084" Note="ICP Souce/RPS" />
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<AI_ITEM Index="43" Name="AI_Generator_Reflect_Power" BufferOffset="86" Device="" Addr="d2086" />
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<AI_ITEM Index="44" Name="" />
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- <AI_ITEM Index="45" Name="AI_Lift_Virtual_Servo_Current_Position" Addr="d2090" Device="" Note="UNIT:MM" />
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+ <!--<AI_ITEM Index="45" Name="AI_Lift_Virtual_Servo_Current_Position" Addr="d2090" Device="" Note="UNIT:MM" />-->
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<AI_ITEM Index="46" Name="AI_Lift_Servo_1_Current_Position" Addr="d2092" Device="" />
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<AI_ITEM Index="47" Name="AI_Lift_Servo_2_Current_Position" Addr="d2094" Device="" />
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<AI_ITEM Index="48" Name="" />
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<AI_ITEM Index="49" Name="" />
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- <AI_ITEM Index="50" Name="AI_Lift_Virtual_Servo_Current_Speed" Addr="d2100" Device="" Note="Unit:mm/s" />
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+ <!--<AI_ITEM Index="50" Name="AI_Lift_Virtual_Servo_Current_Speed" Addr="d2100" Device="" Note="Unit:mm/s" />-->
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<AI_ITEM Index="51" Name="AI_Lift_Servo_1_Current_Speed" Addr="d2102" Device="" />
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<AI_ITEM Index="52" Name="AI_Lift_Servo_2_Current_Speed" Addr="d2104" Device="" />
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<AI_ITEM Index="53" Name="" />
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