Modify IO Name

Framework/Common/IOCore/InterlockAction.cs

@@ -9,7 +9,7 @@ namespace Aitex.Core.RT.IOCore
 {
     /*
      * 
-  <Action do="DO_MFC1_valve__" value="true" tip="" tip.zh-CN="" tip.en-US="">
+  <Action do="DO_EV8_MFC1_Valve__" value="true" tip="" tip.zh-CN="" tip.en-US="">
     <Limit di="DI_Chamber_door_sw"  value="true" tip="" tip.zh-CN="" tip.en-US="" />
   </Action>
      * 

Framework/Common/IOCore/InterlockLimit.cs

@@ -7,7 +7,7 @@ namespace Aitex.Core.RT.IOCore
 {
     /*
      * 
-  <Action do="DO_MFC1_valve__" value="true" tip="" tip.zh-CN="" tip.en-US="">
+  <Action do="DO_EV8_MFC1_Valve__" value="true" tip="" tip.zh-CN="" tip.en-US="">
     <Limit di="DI_Chamber_door_sw"  value="true" tip="" tip.zh-CN="" tip.en-US="" />
   </Action>
      * 

VirgoRT/Config/_ioDefineVirgo.xml

@@ -2,22 +2,22 @@
 <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
 	<Dig_In>
 		<DI_ITEM Index="0" Name="DI_Lid_Closed" Device="" Addr="w20.00" Note="Interlock-HW" />
-		<DI_ITEM Index="1" Name="DI_PM_ATM_SW" Device="" Addr="w20.01" Note="Interlock-PLC" />
-		<DI_ITEM Index="2" Name="DI_PM_VAC_SW" Device="9.5T" Addr="w20.02" Note="Interlock-HW" />
-		<DI_ITEM Index="3" Name="DI_Cooling_Water_Flow_SW" Device="" Addr="w20.03" Note="Interlock-HW" />
-    <!--<DI_ITEM Index="4" Name="DI_LE_OT_SW_Alarm" Device="" Addr="w20.04" Note="1=OK， 0=alarm" />-->
-		<DI_ITEM Index="5" Name="DI_Water_Leak" Device="" Addr="w20.05" Note="1=OK， 0=alarm" />
+		<DI_ITEM Index="1" Name="DI_PM_ATM_Switch" Device="" Addr="w20.01" Note="Interlock-PLC" />
+		<DI_ITEM Index="2" Name="DI_PM_VAC_Switch" Device="9.5T" Addr="w20.02" Note="Interlock-HW" />
+		<DI_ITEM Index="3" Name="DI_Cooling_Water_Flow_Switch" Device="" Addr="w20.03" Note="Interlock-HW" />
+		<!--<DI_ITEM Index="4" Name="DI_LE_OT_Switch_Alarm" Device="" Addr="w20.04" Note="1=OK， 0=alarm" />-->
+		<DI_ITEM Index="5" Name="DI_Water_Leak_Sensor" Device="" Addr="w20.05" Note="1=OK， 0=alarm" />
 		<DI_ITEM Index="6" Name="DI_Slit_Door_Open_Pos" Device="" Addr="w20.06" Note="Interlock-HW" />
 		<DI_ITEM Index="7" Name="DI_Slit_Door_Close_Pos" Device="" Addr="w20.07" Note="Interlock-HW" />
 		<DI_ITEM Index="8" Name="" Device="" Addr="w20.08" Note="1=on,0=off" />
 		<DI_ITEM Index="9" Name="" Device="" Addr="w20.09" Note="1=on,0=off" />
-    <DI_ITEM Index="10" Name="" Device="" Addr="w20.10" />
-    <DI_ITEM Index="11" Name="" Device="" Addr="w20.11" />
+		<DI_ITEM Index="10" Name="" Device="" Addr="w20.10" />
+		<DI_ITEM Index="11" Name="" Device="" Addr="w20.11" />
 		<DI_ITEM Index="12" Name="" Device="" Addr="w20.12" />
 		<DI_ITEM Index="13" Name="" Device="" Addr="w20.13" />
 		<DI_ITEM Index="14" Name="DI_ARM_Not_Extend_to_PM" Device="" Addr="w20.14" Note="Interlock-PLC" />
 		<DI_ITEM Index="15" Name="DI_Generator_Hardware_Interlock" Device="" Addr="w20.15" Note="1=rf interlock ok,0=rf interlock off" />
-    <DI_ITEM Index="16" Name="" />
+		<DI_ITEM Index="16" Name="" />
 		<DI_ITEM Index="17" Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="" Addr="w21.01" />
 		<DI_ITEM Index="18" Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="" Addr="w21.02" />
 		<DI_ITEM Index="19" Name="DI_Substrate_Control_TC_Broken_Alarm" Device="" Addr="w21.03" Note="0=OK,1=alarm" />
@@ -25,20 +25,20 @@
 		<DI_ITEM Index="21" Name="DI_Substrate_Heater_On_FB" Device="" Addr="w21.05" Note="0=OFF,1=ON" />
 		<DI_ITEM Index="22" Name="DI_CDA_Pressure_Switch_Out_1" Device="" Addr="w21.06" />
 		<!--<DI_ITEM Index="23" Name="DI_CDA_Pressure_Switch_Out_2" Device="" Addr="W21.07" />-->
-		<DI_ITEM Index="24" Name="DI_SourceFan1" Device="" Addr="w21.08" />
+		<DI_ITEM Index="24" Name="DI_Source_Fans_Running" Device="" Addr="w21.08" />
 		<DI_ITEM Index="25" Name="DI_CTRL_Box_Fans_Running" Device="" Addr="W21.09" />
 		<DI_ITEM Index="26" Name="DI_Source_Match_Interlock" Device="" Addr="W21.10"/>
 		<DI_ITEM Index="27" Name="DI_Bais_Match_Interlock" Device="" Addr="W21.11"/>
 		<DI_ITEM Index="28" Name="" />
-    <DI_ITEM Index="29" Name="DI_GB_Door_Interlock" Device="" Addr="w21.13" Note="0=OK，1=Warning" />
-    <DI_ITEM Index="30" Name="DI_GB_Pressure_Interlock" Device="" Addr="W21.14" />
-    <!--<DI_ITEM Index="31" Name="DI_CHB_Wall_OT_Switch_Alarm" Device="" Addr="W21.15"/>-->
-    <DI_ITEM Index="32" Name="DI_SRF_Water_Flow_Switch" Device="" Addr="W22.00" />
-    <DI_ITEM Index="33" Name="DI_Factory_Scrubber_SYS_Normal" Device="" Addr="W22.01" />
-    <DI_ITEM Index="34" Name="" />
-    <DI_ITEM Index="35" Name="" />
-    <DI_ITEM Index="36" Name="DI_Substrate_TC_Deviation_out_of_range" Device="" Addr="w22.04" Note="0=OK，1=alarm" />
-    <DI_ITEM Index="37" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w22.05" Note="0=OK，1=alarm" />
+		<DI_ITEM Index="29" Name="DI_GB_Door_Interlock" Device="" Addr="w21.13" Note="0=OK，1=Warning" />
+		<DI_ITEM Index="30" Name="DI_GB_Pressure_Interlock" Device="" Addr="W21.14" />
+		<!--<DI_ITEM Index="31" Name="DI_CHB_Wall_OT_Switch_Alarm" Device="" Addr="W21.15"/>-->
+		<DI_ITEM Index="32" Name="DI_SRF_Water_Flow_Switch" Device="" Addr="W22.00" />
+		<DI_ITEM Index="33" Name="DI_Factory_Scrubber_SYS_Normal" Device="" Addr="W22.01" />
+		<DI_ITEM Index="34" Name="" />
+		<DI_ITEM Index="35" Name="" />
+		<DI_ITEM Index="36" Name="DI_Substrate_TC_Deviation_out_of_range" Device="" Addr="w22.04" Note="0=OK，1=alarm" />
+		<DI_ITEM Index="37" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w22.05" Note="0=OK，1=alarm" />
 		<DI_ITEM Index="38" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="w22.06" Note="0=OK，1=alarm" />
 		<DI_ITEM Index="39" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="w22.07" Note="0=OK，1=alarm" />
 		<DI_ITEM Index="40" Name="DI_Foreline_Heater_On_FB" Device="" Addr="w22.08" Note="0=OFF,1=ON" />
@@ -49,15 +49,15 @@
 		<DI_ITEM Index="45" Name="DI_ACR_Smoke_Monitoring" Device="" Addr="w22.13" />
 		<DI_ITEM Index="46" Name="DI_ACR_Power_On" Device="" Addr="W22.14"/>
 		<DI_ITEM Index="47" Name="" />
-		<DI_ITEM Index="48" Name="DI_MFC1_Pressure" Device="" Addr="w23.00" />
-		<DI_ITEM Index="49" Name="DI_MFC2_Pressure" Device="" Addr="w23.01" />
-		<DI_ITEM Index="50" Name="DI_MFC3_Pressure" Device="" Addr="w23.02" />
-		<DI_ITEM Index="51" Name="DI_MFC4_Pressure" Device="" Addr="w23.03" />
-		<DI_ITEM Index="52" Name="DI_MFC5_Pressure" Device="" Addr="w23.04" />
-    <DI_ITEM Index="53" Name="DI_N2_Pressure" Device="" Addr="w23.05"  />
-    <!--<DI_ITEM Index="54" Name="DI_Process_pressure_Alarm" Addr="w23.06" />-->
-    <!--<DI_ITEM Index="55" Name="DI_Chamber_pressure_Alarm" Addr="w23.07" />-->
-    <!--<DI_ITEM Index="56" Name="DI_Foreline_pressure_Alarm" Addr="w23.08" />-->
+		<DI_ITEM Index="48" Name="DI_MFC1_Pressure_Switch" Device="" Addr="w23.00" />
+		<DI_ITEM Index="49" Name="DI_MFC2_Pressure_Switch" Device="" Addr="w23.01" />
+		<DI_ITEM Index="50" Name="DI_MFC3_Pressure_Switch" Device="" Addr="w23.02" />
+		<DI_ITEM Index="51" Name="DI_MFC4_Pressure_Switch" Device="" Addr="w23.03" />
+		<DI_ITEM Index="52" Name="DI_MFC5_Pressure_Switch" Device="" Addr="w23.04" />
+		<DI_ITEM Index="53" Name="DI_N2_Pressure_Switch" Device="" Addr="w23.05"  />
+		<!--<DI_ITEM Index="54" Name="DI_Process_Pressure_Guage_Alarm" Addr="w23.06" />-->
+		<!--<DI_ITEM Index="55" Name="DI_Chamber_Pressure_Guage_Alarm" Addr="w23.07" />-->
+		<!--<DI_ITEM Index="56" Name="DI_Foreline_Pressure_Guage_Alarm" Addr="w23.08" />-->
 		<DI_ITEM Index="57" Name="" />
 		<DI_ITEM Index="58" Name="" />
 		<DI_ITEM Index="59" Name="" />
@@ -94,101 +94,101 @@
 		<DI_ITEM Index="90" Name="" Addr="w25.10" Note="定位到位置2完成"/>
 		<DI_ITEM Index="91" Name="" Addr="w25.11" Note="定位到位置3完成"/>
 		<DI_ITEM Index="92" Name=""  Addr="w25.12" Note="原点已建立"/>
-    <DI_ITEM Index="93" Name="" Addr="W25.13" Device=""  Note="Lift Servo到位置4，定位完成" />
-    <DI_ITEM Index="94" Name="" Addr="W25.14" Device=""  Note="Lift Servo到位置5，定位完成" />
-    <DI_ITEM Index="95" Name="" Addr="W25.15" Device=""  Note="0=Normal， 1=Alarm     Interlock-PLC" />
-    <DI_ITEM Index="96" Name="" Addr="W26.00" Device=""  Note="0=Normal， 1=Alarm     Interlock-PLC" />
+		<DI_ITEM Index="93" Name="" Addr="W25.13" Device=""  Note="Lift Servo到位置4，定位完成" />
+		<DI_ITEM Index="94" Name="" Addr="W25.14" Device=""  Note="Lift Servo到位置5，定位完成" />
+		<DI_ITEM Index="95" Name="" Addr="W25.15" Device=""  Note="0=Normal， 1=Alarm     Interlock-PLC" />
+		<DI_ITEM Index="96" Name="" Addr="W26.00" Device=""  Note="0=Normal， 1=Alarm     Interlock-PLC" />
 		<DI_ITEM Index="97" Name="" />
-    <DI_ITEM Index="98" Name="" />
-    <DI_ITEM Index="99" Name="DI_YAS_Servo_Controler_COMM_Alarm" Addr="W26.03" Device=""  Note="0=OK，1=Alarm  安川PLC与欧姆龙PLC通讯正常" />
-    <DI_ITEM Index="100" Name="DI_YAS_Servo_Controler_Battery_Low_Alarm" Addr="W26.04" Device=""  Note="0=OK，1=Alarm  安川伺服控制器电池电压低报警" />
-    <DI_ITEM Index="101" Name="DI_Lift_Servo_Origin_Sensor" Addr="W26.05" Device=""  Note="1=On,0=Off    Lift Servo 原点开关（NO)" />
-    <DI_ITEM Index="102" Name="DI_Lift_Servo_Up_Limit_Sensor" Addr="W26.06" Device=""  Note="1=On,0=Off    Lift Servo 上极限开关(NC)" />
-    <DI_ITEM Index="103" Name="DI_Lift_Servo_Down_Limit_Sensor" Addr="W26.07" Device=""  Note="1=On,0=Off    Lift Servo 下极限开关(NC)" />
-    <!--<DI_ITEM Index="104" Name="DI_Lift_Virtual_Servo_On" Addr="W26.08" Device=""  Note="1=On,0=Off    虚拟轴伺服On" />-->
-    <!--<DI_ITEM Index="105" Name="DI_Lift_Virtual_Servo_Origin_Complete" Addr="W26.09" Device=""  Note="1=On,0=Off    虚拟轴伺服回原点完成" />-->
-    <!--<DI_ITEM Index="106" Name="DI_Lift_Virtual_Servo_Busying" Addr="W26.10" Device=""  Note="1=On,0=Off    虚拟轴伺服运行中" />-->
-    <DI_ITEM Index="107" Name="DI_Lift_Servo_Group_Go_Pos_1_Complete" Addr="W26.11" Device="" />
-    <DI_ITEM Index="108" Name="DI_Lift_Servo_Group_Go_Pos_2_Complete" Addr="W26.12" Device="" />
-    <DI_ITEM Index="109" Name="DI_Lift_Servo_Group_Go_Pos_3_Complete" Addr="W26.13" Device="" />
-    <DI_ITEM Index="110" Name="DI_Lift_Servo_Group_Go_Pos_4_Complete" Addr="W26.14" Device="" />
-    <DI_ITEM Index="111" Name="DI_Lift_Servo_Group_Go_Pos_5_Complete" Addr="W26.15" Device="" />
-    <DI_ITEM Index="112" Name="" />
-    <DI_ITEM Index="113" Name="" />
-    <DI_ITEM Index="114" Name="DI_Lift_Servo_1_Servo_On" Addr="W27.02" Device=""  Note="1=On,0=Off    伺服-1ON" />
-    <DI_ITEM Index="115" Name="DI_Lift_Servo_1_Servo_Origin_Complete" Addr="W27.03" Device=""  Note="1=On,0=Off    伺服-1回原点完成" />
-    <!--<DI_ITEM Index="116" Name="DI_Lift_Servo_1_Servo_Busying" Addr="W27.04" Device=""  Note="1=On,0=Off    伺服-1伺服运行中" />-->
-    <DI_ITEM Index="117" Name="DI_Lift_Servo_1_Braker_Open" Addr="W27.05" Device=""  Note="1=On,0=Off    伺服-1抱闸已打开" />
-    <DI_ITEM Index="118" Name="DI_Lift_Servo_1_L_Servo_Driver_Alarm" Addr="W27.06" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器报警" />
-    <DI_ITEM Index="119" Name="DI_Lift_Servo_1_L_Servo_Driver_Warning" Addr="W27.07" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器警告" />
-    <DI_ITEM Index="120" Name="DI_Lift_Servo_1_Search_ORG_Fail_Alarm" Addr="W27.08" Device=""  Note="0=Normal， 1=Alarm  伺服-1回原点失败报警" />
-    <DI_ITEM Index="121" Name="DI_Lift_Servo_1_ABS_Fail_Alarm" Addr="W27.09" Device=""  Note="0=Normal， 1=Alarm  伺服-1定位失败报警" />
-    <DI_ITEM Index="122" Name="DI_Lift_Servo_1_Up_Limit_Alarm" Addr="W27.10" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发上极限报警" />
-    <DI_ITEM Index="123" Name="DI_Lift_Servo_1_Down_Limit_Alarm" Addr="W27.11" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发下极限报警" />
-    <DI_ITEM Index="124" Name="DI_Lift_Servo_1_Over_Software_Alarm" Addr="W27.12" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1设置软限位超出报警" />
-    <DI_ITEM Index="125" Name="" />
-    <DI_ITEM Index="126" Name="" />
-    <DI_ITEM Index="127" Name="" />
-    <DI_ITEM Index="128" Name="DI_Lift_Servo_Group_Go_Pos_Origin_Complete" Addr="W28.00" Device=""  Note=""/>
-    <DI_ITEM Index="129" Name="" />
-    <DI_ITEM Index="130" Name="DI_Lift_Servo_2_Servo_On" Addr="W28.02" Device=""  Note="1=On,0=Off    伺服-1ON" />
-    <DI_ITEM Index="131" Name="DI_Lift_Servo_2_Servo_Origin_Complete" Addr="W28.03" Device=""  Note="1=On,0=Off    伺服-1回原点完成" />
-    <!--<DI_ITEM Index="132" Name="DI_Lift_Servo_2_Servo_Busying" Addr="W28.04" Device=""  Note="1=On,0=Off    伺服-1伺服运行中" />-->
-    <DI_ITEM Index="133" Name="DI_Lift_Servo_2_Braker_Open" Addr="W28.05" Device=""  Note="1=On,0=Off    伺服-1抱闸已打开" />
-    <DI_ITEM Index="134" Name="DI_Lift_Servo_2_L_Servo_Driver_Alarm" Addr="W28.06" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器报警" />
-    <DI_ITEM Index="135" Name="DI_Lift_Servo_2_L_Servo_Driver_Warning" Addr="W28.07" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器警告" />
-    <DI_ITEM Index="136" Name="DI_Lift_Servo_2_Search_ORG_Fail_Alarm" Addr="W28.08" Device=""  Note="0=Normal， 1=Alarm  伺服-1回原点失败报警" />
-    <DI_ITEM Index="137" Name="DI_Lift_Servo_2_ABS_Fail_Alarm" Addr="W28.09" Device=""  Note="0=Normal， 1=Alarm  伺服-1定位失败报警" />
-    <DI_ITEM Index="138" Name="DI_Lift_Servo_2_Up_Limit_Alarm" Addr="W28.10" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发上极限报警" />
-    <DI_ITEM Index="139" Name="DI_Lift_Servo_2_Down_Limit_Alarm" Addr="W28.11" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发下极限报警" />
-    <DI_ITEM Index="140" Name="DI_Lift_Servo_2_Over_Software_Alarm" Addr="W28.12" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1设置软限位超出报警" />
-    <DI_ITEM Index="141" Name="" />
-    <DI_ITEM Index="142" Name="" />
-    <DI_ITEM Index="143" Name="DI_Lift_Servo_Group_Current_Pos_DIff_Alarm" Addr="W28.15" Device=""  Note="0=Normal， 1=Alarm" />
-    <DI_ITEM Index="144" Name="DI_Substrate_Heat_PID_AT_Star_FB" Addr="W29.00" Device="" />
-    <DI_ITEM Index="145" Name="DI_Substrate_Heat_PID_AT_Stop_FB" Addr="W29.01" Device="" />
-    <DI_ITEM Index="146" Name="DI_CHB_Heat_PID_AT_Star_FB" Addr="W29.02" Device="" />
-    <DI_ITEM Index="147" Name="DI_CHB_Heat_PID_AT_Stop_FB" Addr="W29.03" Device="" />
-    <DI_ITEM Index="148" Name="DI_Foreline_Heat_PID_AT_Star_FB" Addr="W29.04" Device="" />
-    <DI_ITEM Index="149" Name="DI_Foreline_Heat_PID_AT_Stop_FB" Addr="W29.05" Device="" />
-    <DI_ITEM Index="150" Name="" />
-    <DI_ITEM Index="151" Name="" />
-    <DI_ITEM Index="152" Name="DI_Substrate_Heat_PID_AT_Running" Addr="W29.08" Device="" />
-    <DI_ITEM Index="153" Name="DI_Substrate_Heat_PID_AT_Finished" Addr="W29.09" Device="" />
-    <DI_ITEM Index="154" Name="DI_CHB_Heat_PID_AT_Running" Addr="W29.10" Device="" />
-    <DI_ITEM Index="155" Name="DI_CHB_Heat_PID_AT_Finished" Addr="W29.11" Device="" />
-    <DI_ITEM Index="156" Name="DI_Foreline_Heat_PID_AT_Running" Addr="W29.12" Device="" />
-    <DI_ITEM Index="157" Name="DI_Foreline_Heat_PID_AT_Finished" Addr="W29.13" Device="" />
-    <DI_ITEM Index="158" Name="" />
-    <DI_ITEM Index="159" Name="" />
+		<DI_ITEM Index="98" Name="" />
+		<DI_ITEM Index="99" Name="DI_YAS_Servo_Controler_COMM_Alarm" Addr="W26.03" Device=""  Note="0=OK，1=Alarm  安川PLC与欧姆龙PLC通讯正常" />
+		<DI_ITEM Index="100" Name="DI_YAS_Servo_Controler_Battery_Low_Alarm" Addr="W26.04" Device=""  Note="0=OK，1=Alarm  安川伺服控制器电池电压低报警" />
+		<DI_ITEM Index="101" Name="DI_Lift_Servo_Origin_Sensor" Addr="W26.05" Device=""  Note="1=On,0=Off    Lift Servo 原点开关（NO)" />
+		<DI_ITEM Index="102" Name="DI_Lift_Servo_Up_Limit_Sensor" Addr="W26.06" Device=""  Note="1=On,0=Off    Lift Servo 上极限开关(NC)" />
+		<DI_ITEM Index="103" Name="DI_Lift_Servo_Down_Limit_Sensor" Addr="W26.07" Device=""  Note="1=On,0=Off    Lift Servo 下极限开关(NC)" />
+		<!--<DI_ITEM Index="104" Name="DI_Lift_Virtual_Servo_On" Addr="W26.08" Device=""  Note="1=On,0=Off    虚拟轴伺服On" />-->
+		<!--<DI_ITEM Index="105" Name="DI_Lift_Virtual_Servo_Origin_Complete" Addr="W26.09" Device=""  Note="1=On,0=Off    虚拟轴伺服回原点完成" />-->
+		<!--<DI_ITEM Index="106" Name="DI_Lift_Virtual_Servo_Busying" Addr="W26.10" Device=""  Note="1=On,0=Off    虚拟轴伺服运行中" />-->
+		<DI_ITEM Index="107" Name="DI_Lift_Servo_Group_Go_Pos_1_Complete" Addr="W26.11" Device="" />
+		<DI_ITEM Index="108" Name="DI_Lift_Servo_Group_Go_Pos_2_Complete" Addr="W26.12" Device="" />
+		<DI_ITEM Index="109" Name="DI_Lift_Servo_Group_Go_Pos_3_Complete" Addr="W26.13" Device="" />
+		<DI_ITEM Index="110" Name="DI_Lift_Servo_Group_Go_Pos_4_Complete" Addr="W26.14" Device="" />
+		<DI_ITEM Index="111" Name="DI_Lift_Servo_Group_Go_Pos_5_Complete" Addr="W26.15" Device="" />
+		<DI_ITEM Index="112" Name="" />
+		<DI_ITEM Index="113" Name="" />
+		<DI_ITEM Index="114" Name="DI_Lift_Servo_1_Servo_On" Addr="W27.02" Device=""  Note="1=On,0=Off    伺服-1ON" />
+		<DI_ITEM Index="115" Name="DI_Lift_Servo_1_Servo_Origin_Complete" Addr="W27.03" Device=""  Note="1=On,0=Off    伺服-1回原点完成" />
+		<!--<DI_ITEM Index="116" Name="DI_Lift_Servo_1_Servo_Busying" Addr="W27.04" Device=""  Note="1=On,0=Off    伺服-1伺服运行中" />-->
+		<DI_ITEM Index="117" Name="DI_Lift_Servo_1_Braker_Open" Addr="W27.05" Device=""  Note="1=On,0=Off    伺服-1抱闸已打开" />
+		<DI_ITEM Index="118" Name="DI_Lift_Servo_1_L_Servo_Driver_Alarm" Addr="W27.06" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器报警" />
+		<DI_ITEM Index="119" Name="DI_Lift_Servo_1_L_Servo_Driver_Warning" Addr="W27.07" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器警告" />
+		<DI_ITEM Index="120" Name="DI_Lift_Servo_1_Search_ORG_Fail_Alarm" Addr="W27.08" Device=""  Note="0=Normal， 1=Alarm  伺服-1回原点失败报警" />
+		<DI_ITEM Index="121" Name="DI_Lift_Servo_1_ABS_Fail_Alarm" Addr="W27.09" Device=""  Note="0=Normal， 1=Alarm  伺服-1定位失败报警" />
+		<DI_ITEM Index="122" Name="DI_Lift_Servo_1_Up_Limit_Alarm" Addr="W27.10" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发上极限报警" />
+		<DI_ITEM Index="123" Name="DI_Lift_Servo_1_Down_Limit_Alarm" Addr="W27.11" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发下极限报警" />
+		<DI_ITEM Index="124" Name="DI_Lift_Servo_1_Over_Software_Alarm" Addr="W27.12" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1设置软限位超出报警" />
+		<DI_ITEM Index="125" Name="" />
+		<DI_ITEM Index="126" Name="" />
+		<DI_ITEM Index="127" Name="" />
+		<DI_ITEM Index="128" Name="DI_Lift_Servo_Group_Go_Pos_Origin_Complete" Addr="W28.00" Device=""  Note=""/>
+		<DI_ITEM Index="129" Name="" />
+		<DI_ITEM Index="130" Name="DI_Lift_Servo_2_Servo_On" Addr="W28.02" Device=""  Note="1=On,0=Off    伺服-1ON" />
+		<DI_ITEM Index="131" Name="DI_Lift_Servo_2_Servo_Origin_Complete" Addr="W28.03" Device=""  Note="1=On,0=Off    伺服-1回原点完成" />
+		<!--<DI_ITEM Index="132" Name="DI_Lift_Servo_2_Servo_Busying" Addr="W28.04" Device=""  Note="1=On,0=Off    伺服-1伺服运行中" />-->
+		<DI_ITEM Index="133" Name="DI_Lift_Servo_2_Braker_Open" Addr="W28.05" Device=""  Note="1=On,0=Off    伺服-1抱闸已打开" />
+		<DI_ITEM Index="134" Name="DI_Lift_Servo_2_L_Servo_Driver_Alarm" Addr="W28.06" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器报警" />
+		<DI_ITEM Index="135" Name="DI_Lift_Servo_2_L_Servo_Driver_Warning" Addr="W28.07" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器警告" />
+		<DI_ITEM Index="136" Name="DI_Lift_Servo_2_Search_ORG_Fail_Alarm" Addr="W28.08" Device=""  Note="0=Normal， 1=Alarm  伺服-1回原点失败报警" />
+		<DI_ITEM Index="137" Name="DI_Lift_Servo_2_ABS_Fail_Alarm" Addr="W28.09" Device=""  Note="0=Normal， 1=Alarm  伺服-1定位失败报警" />
+		<DI_ITEM Index="138" Name="DI_Lift_Servo_2_Up_Limit_Alarm" Addr="W28.10" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发上极限报警" />
+		<DI_ITEM Index="139" Name="DI_Lift_Servo_2_Down_Limit_Alarm" Addr="W28.11" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发下极限报警" />
+		<DI_ITEM Index="140" Name="DI_Lift_Servo_2_Over_Software_Alarm" Addr="W28.12" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1设置软限位超出报警" />
+		<DI_ITEM Index="141" Name="" />
+		<DI_ITEM Index="142" Name="" />
+		<DI_ITEM Index="143" Name="DI_Lift_Servo_Group_Current_Pos_DIff_Alarm" Addr="W28.15" Device=""  Note="0=Normal， 1=Alarm" />
+		<DI_ITEM Index="144" Name="DI_Substrate_Heat_PID_AT_Star_FB" Addr="W29.00" Device="" />
+		<DI_ITEM Index="145" Name="DI_Substrate_Heat_PID_AT_Stop_FB" Addr="W29.01" Device="" />
+		<DI_ITEM Index="146" Name="DI_CHB_Heat_PID_AT_Star_FB" Addr="W29.02" Device="" />
+		<DI_ITEM Index="147" Name="DI_CHB_Heat_PID_AT_Stop_FB" Addr="W29.03" Device="" />
+		<DI_ITEM Index="148" Name="DI_Foreline_Heat_PID_AT_Star_FB" Addr="W29.04" Device="" />
+		<DI_ITEM Index="149" Name="DI_Foreline_Heat_PID_AT_Stop_FB" Addr="W29.05" Device="" />
+		<DI_ITEM Index="150" Name="" />
+		<DI_ITEM Index="151" Name="" />
+		<DI_ITEM Index="152" Name="DI_Substrate_Heat_PID_AT_Running" Addr="W29.08" Device="" />
+		<DI_ITEM Index="153" Name="DI_Substrate_Heat_PID_AT_Finished" Addr="W29.09" Device="" />
+		<DI_ITEM Index="154" Name="DI_CHB_Heat_PID_AT_Running" Addr="W29.10" Device="" />
+		<DI_ITEM Index="155" Name="DI_CHB_Heat_PID_AT_Finished" Addr="W29.11" Device="" />
+		<DI_ITEM Index="156" Name="DI_Foreline_Heat_PID_AT_Running" Addr="W29.12" Device="" />
+		<DI_ITEM Index="157" Name="DI_Foreline_Heat_PID_AT_Finished" Addr="W29.13" Device="" />
+		<DI_ITEM Index="158" Name="" />
+		<DI_ITEM Index="159" Name="" />
 	</Dig_In>
 	<Dig_Out>
-		<DO_ITEM Index="0" Name="DO_Soft_Pumping_Valve" Device="" Addr="w0.00" />
-		<DO_ITEM Index="1" Name="DO_Fast_Pumping_Valve" Device="" Addr="w0.01" />
+		<DO_ITEM Index="0" Name="DO_EV2_Soft_Pumping_Valve" Device="" Addr="w0.00" />
+		<DO_ITEM Index="1" Name="DO_EV3_Fast_Pumping_Valve" Device="" Addr="w0.01" />
 		<DO_ITEM Index="2" Name="" />
 		<DO_ITEM Index="3" Name="" />
-		<DO_ITEM Index="4" Name="DO_Slit_Door_Open" Device="" Addr="w0.04" />
-		<DO_ITEM Index="5" Name="DO_Slit_Door_Close" Device="" Addr="w0.05" Note="Interlock-HW" />
+		<DO_ITEM Index="4" Name="DO_EV4_Slit_Door_Open" Device="" Addr="w0.04" />
+		<DO_ITEM Index="5" Name="DO_EV4_Slit_Door_Close" Device="" Addr="w0.05" Note="Interlock-HW" />
 		<DO_ITEM Index="6" Name="" Device="" Addr="w0.06" />
 		<DO_ITEM Index="7" Name="" Device="" Addr="w0.07" />
-    <DO_ITEM Index="8" Name="" Device="" Addr="w0.08" />
-    <DO_ITEM Index="9" Name="" Device="" Addr="w0.09" />
+		<DO_ITEM Index="8" Name="" Device="" Addr="w0.08" />
+		<DO_ITEM Index="9" Name="" Device="" Addr="w0.09" />
 		<DO_ITEM Index="10" Name="" Device="" Addr="w0.10" />
 		<DO_ITEM Index="11" Name="" Device="" Addr="w0.11" />
-    <DO_ITEM Index="12" Name="" />
-    <DO_ITEM Index="13" Name="" />
-		<DO_ITEM Index="14" Name="DO_MFC1_Valve" Device="" Addr="w0.14" />
-		<DO_ITEM Index="15" Name="DO_MFC2_Valve" Device="" Addr="w0.15" />
-		<DO_ITEM Index="16" Name="DO_MFC3_Valve" Device="" Addr="w1.00" />
-		<DO_ITEM Index="17" Name="DO_MFC4_Valve" Device="" Addr="w1.01" />
-		<DO_ITEM Index="18" Name="DO_MFC5_Valve" Device="" Addr="w1.02" />
+		<DO_ITEM Index="12" Name="" />
+		<DO_ITEM Index="13" Name="" />
+		<DO_ITEM Index="14" Name="DO_EV8_MFC1_Valve" Device="" Addr="w0.14" />
+		<DO_ITEM Index="15" Name="DO_EV9_MFC2_Valve" Device="" Addr="w0.15" />
+		<DO_ITEM Index="16" Name="DO_EV10_MFC3_Valve" Device="" Addr="w1.00" />
+		<DO_ITEM Index="17" Name="DO_EV11_MFC4_Valve" Device="" Addr="w1.01" />
+		<DO_ITEM Index="18" Name="DO_EV12_MFC5_Valve" Device="" Addr="w1.02" />
 		<DO_ITEM Index="19" Name="" />
 		<DO_ITEM Index="20" Name="" />
 		<DO_ITEM Index="21" Name="" />
 		<DO_ITEM Index="22" Name="" />
-		<DO_ITEM Index="23" Name="DO_Chamber_purge_valve" Device="" Addr="w1.07" />
-		<DO_ITEM Index="24" Name="DO_Chamber_vent_valve" Device="" Addr="w1.08" />
-		<DO_ITEM Index="25" Name="DO_Process_gas_final_valve" Device="" Addr="w1.09" />
+		<DO_ITEM Index="23" Name="DO_EV6_Chamber_Purge_Valve" Device="" Addr="w1.07" />
+		<DO_ITEM Index="24" Name="DO_EV7_Chamber_Vent_Valve" Device="" Addr="w1.08" />
+		<DO_ITEM Index="25" Name="DO_EV1_Process_Gas_Final_Valve" Device="" Addr="w1.09" />
 		<DO_ITEM Index="26" Name="DO_EV5_Water_Valve" Device="" Addr="W1.10"/>
 		<DO_ITEM Index="27" Name="" />
 		<DO_ITEM Index="28" Name="" />
@@ -203,12 +203,12 @@
 		<DO_ITEM Index="37" Name="DO_Substrate_Heater_On" Device="" Addr="w2.05" Note="Interlock-HW" />
 		<DO_ITEM Index="38" Name="" />
 		<DO_ITEM Index="39" Name="" />
-    <DO_ITEM Index="40" Name="DO_Substrate_Heat_PID_AT_Star" Addr="W2.08" Device=""  Note="DI-144为1，将DO-40置0" />
-    <DO_ITEM Index="41" Name="DO_Substrate_Heat_PID_AT_Stop" Addr="W2.09" Device=""  Note="DI-145为1，将DO-41置0" />
-    <DO_ITEM Index="42" Name="DO_CHB_Heat_PID_AT_Star" Addr="W2.10" Device=""  Note="DI-146为1，将DO-42置0" />
-    <DO_ITEM Index="43" Name="DO_CHB_Heat_PID_AT_Stop" Addr="W2.11" Device=""  Note="DI-147为1，将DO-43置0" />
-    <DO_ITEM Index="44" Name="DO_Foreline_Heat_PID_AT_Star" Addr="W2.12" Device=""  Note="DI-148为1，将DO-44置0" />
-    <DO_ITEM Index="45" Name="DO_Foreline_Heat_PID_AT_Stop" Addr="W2.13" Device=""  Note="DI-149为1，将DO-45置0" />
+		<DO_ITEM Index="40" Name="DO_Substrate_Heat_PID_AT_Star" Addr="W2.08" Device=""  Note="DI-144为1，将DO-40置0" />
+		<DO_ITEM Index="41" Name="DO_Substrate_Heat_PID_AT_Stop" Addr="W2.09" Device=""  Note="DI-145为1，将DO-41置0" />
+		<DO_ITEM Index="42" Name="DO_CHB_Heat_PID_AT_Star" Addr="W2.10" Device=""  Note="DI-146为1，将DO-42置0" />
+		<DO_ITEM Index="43" Name="DO_CHB_Heat_PID_AT_Stop" Addr="W2.11" Device=""  Note="DI-147为1，将DO-43置0" />
+		<DO_ITEM Index="44" Name="DO_Foreline_Heat_PID_AT_Star" Addr="W2.12" Device=""  Note="DI-148为1，将DO-44置0" />
+		<DO_ITEM Index="45" Name="DO_Foreline_Heat_PID_AT_Stop" Addr="W2.13" Device=""  Note="DI-149为1，将DO-45置0" />
 		<DO_ITEM Index="46" Name="" />
 		<DO_ITEM Index="47" Name="DO_CHB_Wall_Heater_On" Addr="w2.15"/>
 		<DO_ITEM Index="48" Name="" />
@@ -226,87 +226,87 @@
 		<DO_ITEM Index="60" Name=""         Addr="w3.12" Note="有需求置1，一定时间后置off" />
 		<DO_ITEM Index="61" Name=""       Addr="w3.13" Note="切换型按钮，按住置1，再按置off，非手动模式下强制置off" />
 		<DO_ITEM Index="62" Name=""       Addr="w3.14" Note="切换型按钮，按住置1，再按置off，非手动模式下强制置off" />
-    <DO_ITEM Index="63" Name="" />
-    <DO_ITEM Index="64" Name="" />
-    <DO_ITEM Index="65" Name="" />
-    <DO_ITEM Index="66" Name="" />
-    <DO_ITEM Index="67" Name="" />
-    <DO_ITEM Index="68" Name="" />
-    <DO_ITEM Index="69" Name="" />
-    <DO_ITEM Index="70" Name="" />
-    <DO_ITEM Index="71" Name="" />
-    <DO_ITEM Index="72" Name="" />
-    <DO_ITEM Index="73" Name="" />
-    <DO_ITEM Index="74" Name="" />
-    <DO_ITEM Index="75" Name="" />
-    <DO_ITEM Index="76" Name="" />
-    <DO_ITEM Index="77" Name="" />
-    <DO_ITEM Index="78" Name="" />
-    <DO_ITEM Index="79" Name="" />
-    <DO_ITEM Index="80" Name="DO_Lift_Servo_Group_Origin" Addr="W5.00" Device=""  Note="回原点完成，反馈DI-105" />
-    <DO_ITEM Index="81" Name="" />
-    <DO_ITEM Index="82" Name="DO_Lift_Servo_Group_Manual_Up" Addr="W5.02" Device=""  Note="切换型按钮，非手动模式下强制置off" />
-    <DO_ITEM Index="83" Name="DO_Lift_Servo_Group_Manual_Down" Addr="W5.03" Device=""  Note="切换型按钮，非手动模式下强制置off" />
-    <DO_ITEM Index="84" Name="DO_Lift_Servo_Group_Stop" Addr="W5.04" Device=""  Note="LIFT SERVO立即停止，放弃执行动作" />
-    <DO_ITEM Index="85" Name="DO_Lift_Servo_Group_Go_Position1" Addr="W5.05" Device=""  Note="到达位置后,PLC反馈信号DI-107" />
-    <DO_ITEM Index="86" Name="DO_Lift_Servo_Group_Go_Position2" Addr="W5.06" Device=""  Note="到达位置后,PLC反馈信号DI-108" />
-    <DO_ITEM Index="87" Name="DO_Lift_Servo_Group_Go_Position3" Addr="W5.07" Device=""  Note="到达位置后,PLC反馈信号DI-109" />
-    <DO_ITEM Index="88" Name="DO_Lift_Servo_Group_Go_Position4" Addr="W5.08" Device=""  Note="到达位置后,PLC反馈信号DI-110" />
-    <DO_ITEM Index="89" Name="DO_Lift_Servo_Group_Go_Position5" Addr="W5.09" Device=""  Note="到达位置后,PLC反馈信号DI-111" />
-    <DO_ITEM Index="90" Name="" />
-    <DO_ITEM Index="91" Name="" />
-    <DO_ITEM Index="92" Name="" />
-    <DO_ITEM Index="93" Name="" />
-    <DO_ITEM Index="94" Name="" />
-    <DO_ITEM Index="95" Name="" />
-    <!--<DO_ITEM Index="96" Name="DO_Lift_Servo-1_Manual_Up" Addr="W6.00" Device="" />-->
-    <!--<DO_ITEM Index="97" Name="DO_Lift_Servo-1_Manual_Down" Addr="W6.01" Device="" />-->
-    <!--<DO_ITEM Index="98" Name="DO_Lift_Servo-1_Stop" Addr="W6.02" Device="" />-->
-    <!--<DO_ITEM Index="99" Name="DO_Lift_Servo-1_Step_Up" Addr="W6.03" Device="" />-->
-    <!--<DO_ITEM Index="100" Name="DO_Lift_Servo-1_Step_Down" Addr="W6.04" Device="" />-->
-    <DO_ITEM Index="101" Name="" />
-    <DO_ITEM Index="102" Name="" />
-    <DO_ITEM Index="103" Name="" />
-    <DO_ITEM Index="104" Name="" />
-    <DO_ITEM Index="105" Name="" />
-    <DO_ITEM Index="106" Name="" />
-    <DO_ITEM Index="107" Name="" />
-    <DO_ITEM Index="108" Name="" />
-    <DO_ITEM Index="109" Name="" />
-    <DO_ITEM Index="110" Name="" />
-    <DO_ITEM Index="111" Name="" />
-    <!--<DO_ITEM Index="112" Name="DO_Lift_Servo-2_Manual_Up" Addr="W7.00" Device="" />-->
-    <!--<DO_ITEM Index="113" Name="DO_Lift_Servo-2_Manual_Down" Addr="W7.01" Device="" />-->
-    <!--<DO_ITEM Index="114" Name="DO_Lift_Servo-2_Stop" Addr="W7.02" Device="" />-->
-    <!--<DO_ITEM Index="115" Name="DO_Lift_Servo-2_Step_Up" Addr="W7.03" Device="" />-->
-    <!--<DO_ITEM Index="116" Name="DO_Lift_Servo-2_Step_Down" Addr="W7.04" Device="" />-->
-    <DO_ITEM Index="117" Name="" />
-    <DO_ITEM Index="118" Name="" />
-    <DO_ITEM Index="119" Name="" />
-    <DO_ITEM Index="120" Name="" />
-    <DO_ITEM Index="121" Name="" />
-    <DO_ITEM Index="122" Name="" />
-    <DO_ITEM Index="123" Name="" />
-    <DO_ITEM Index="124" Name="" />
-    <DO_ITEM Index="125" Name="" />
-    <DO_ITEM Index="126" Name="" />
-    <DO_ITEM Index="127" Name="" />
-    <DO_ITEM Index="128" Name="" />
-    <DO_ITEM Index="129" Name="" />
-    <DO_ITEM Index="130" Name="" />
-    <DO_ITEM Index="131" Name="" />
-    <DO_ITEM Index="132" Name="" />
-    <DO_ITEM Index="133" Name="" />
-    <DO_ITEM Index="134" Name="" />
-    <DO_ITEM Index="135" Name="" />
-    <DO_ITEM Index="136" Name="" />
-    <DO_ITEM Index="137" Name="" />
-    <DO_ITEM Index="138" Name="" />
-    <DO_ITEM Index="139" Name="" />
-    <DO_ITEM Index="140" Name="" />
-    <DO_ITEM Index="141" Name="" />
-    <DO_ITEM Index="142" Name="" />
-    <DO_ITEM Index="143" Name="" />
+		<DO_ITEM Index="63" Name="" />
+		<DO_ITEM Index="64" Name="" />
+		<DO_ITEM Index="65" Name="" />
+		<DO_ITEM Index="66" Name="" />
+		<DO_ITEM Index="67" Name="" />
+		<DO_ITEM Index="68" Name="" />
+		<DO_ITEM Index="69" Name="" />
+		<DO_ITEM Index="70" Name="" />
+		<DO_ITEM Index="71" Name="" />
+		<DO_ITEM Index="72" Name="" />
+		<DO_ITEM Index="73" Name="" />
+		<DO_ITEM Index="74" Name="" />
+		<DO_ITEM Index="75" Name="" />
+		<DO_ITEM Index="76" Name="" />
+		<DO_ITEM Index="77" Name="" />
+		<DO_ITEM Index="78" Name="" />
+		<DO_ITEM Index="79" Name="" />
+		<DO_ITEM Index="80" Name="DO_Lift_Servo_Group_Origin" Addr="W5.00" Device=""  Note="回原点完成，反馈DI-105" />
+		<DO_ITEM Index="81" Name="" />
+		<DO_ITEM Index="82" Name="DO_Lift_Servo_Group_Manual_Up" Addr="W5.02" Device=""  Note="切换型按钮，非手动模式下强制置off" />
+		<DO_ITEM Index="83" Name="DO_Lift_Servo_Group_Manual_Down" Addr="W5.03" Device=""  Note="切换型按钮，非手动模式下强制置off" />
+		<DO_ITEM Index="84" Name="DO_Lift_Servo_Group_Stop" Addr="W5.04" Device=""  Note="LIFT SERVO立即停止，放弃执行动作" />
+		<DO_ITEM Index="85" Name="DO_Lift_Servo_Group_Go_Position1" Addr="W5.05" Device=""  Note="到达位置后,PLC反馈信号DI-107" />
+		<DO_ITEM Index="86" Name="DO_Lift_Servo_Group_Go_Position2" Addr="W5.06" Device=""  Note="到达位置后,PLC反馈信号DI-108" />
+		<DO_ITEM Index="87" Name="DO_Lift_Servo_Group_Go_Position3" Addr="W5.07" Device=""  Note="到达位置后,PLC反馈信号DI-109" />
+		<DO_ITEM Index="88" Name="DO_Lift_Servo_Group_Go_Position4" Addr="W5.08" Device=""  Note="到达位置后,PLC反馈信号DI-110" />
+		<DO_ITEM Index="89" Name="DO_Lift_Servo_Group_Go_Position5" Addr="W5.09" Device=""  Note="到达位置后,PLC反馈信号DI-111" />
+		<DO_ITEM Index="90" Name="" />
+		<DO_ITEM Index="91" Name="" />
+		<DO_ITEM Index="92" Name="" />
+		<DO_ITEM Index="93" Name="" />
+		<DO_ITEM Index="94" Name="" />
+		<DO_ITEM Index="95" Name="" />
+		<!--<DO_ITEM Index="96" Name="DO_Lift_Servo-1_Manual_Up" Addr="W6.00" Device="" />-->
+		<!--<DO_ITEM Index="97" Name="DO_Lift_Servo-1_Manual_Down" Addr="W6.01" Device="" />-->
+		<!--<DO_ITEM Index="98" Name="DO_Lift_Servo-1_Stop" Addr="W6.02" Device="" />-->
+		<!--<DO_ITEM Index="99" Name="DO_Lift_Servo-1_Step_Up" Addr="W6.03" Device="" />-->
+		<!--<DO_ITEM Index="100" Name="DO_Lift_Servo-1_Step_Down" Addr="W6.04" Device="" />-->
+		<DO_ITEM Index="101" Name="" />
+		<DO_ITEM Index="102" Name="" />
+		<DO_ITEM Index="103" Name="" />
+		<DO_ITEM Index="104" Name="" />
+		<DO_ITEM Index="105" Name="" />
+		<DO_ITEM Index="106" Name="" />
+		<DO_ITEM Index="107" Name="" />
+		<DO_ITEM Index="108" Name="" />
+		<DO_ITEM Index="109" Name="" />
+		<DO_ITEM Index="110" Name="" />
+		<DO_ITEM Index="111" Name="" />
+		<!--<DO_ITEM Index="112" Name="DO_Lift_Servo-2_Manual_Up" Addr="W7.00" Device="" />-->
+		<!--<DO_ITEM Index="113" Name="DO_Lift_Servo-2_Manual_Down" Addr="W7.01" Device="" />-->
+		<!--<DO_ITEM Index="114" Name="DO_Lift_Servo-2_Stop" Addr="W7.02" Device="" />-->
+		<!--<DO_ITEM Index="115" Name="DO_Lift_Servo-2_Step_Up" Addr="W7.03" Device="" />-->
+		<!--<DO_ITEM Index="116" Name="DO_Lift_Servo-2_Step_Down" Addr="W7.04" Device="" />-->
+		<DO_ITEM Index="117" Name="" />
+		<DO_ITEM Index="118" Name="" />
+		<DO_ITEM Index="119" Name="" />
+		<DO_ITEM Index="120" Name="" />
+		<DO_ITEM Index="121" Name="" />
+		<DO_ITEM Index="122" Name="" />
+		<DO_ITEM Index="123" Name="" />
+		<DO_ITEM Index="124" Name="" />
+		<DO_ITEM Index="125" Name="" />
+		<DO_ITEM Index="126" Name="" />
+		<DO_ITEM Index="127" Name="" />
+		<DO_ITEM Index="128" Name="" />
+		<DO_ITEM Index="129" Name="" />
+		<DO_ITEM Index="130" Name="" />
+		<DO_ITEM Index="131" Name="" />
+		<DO_ITEM Index="132" Name="" />
+		<DO_ITEM Index="133" Name="" />
+		<DO_ITEM Index="134" Name="" />
+		<DO_ITEM Index="135" Name="" />
+		<DO_ITEM Index="136" Name="" />
+		<DO_ITEM Index="137" Name="" />
+		<DO_ITEM Index="138" Name="" />
+		<DO_ITEM Index="139" Name="" />
+		<DO_ITEM Index="140" Name="" />
+		<DO_ITEM Index="141" Name="" />
+		<DO_ITEM Index="142" Name="" />
+		<DO_ITEM Index="143" Name="" />
 	</Dig_Out>
 	<Ana_Out>
 		<AO_ITEM Index="0" Name="AO_Generator_Power_Setpoint" BufferOffset="0" Device="" Addr="d1000" Note="0-6000W" />
@@ -323,8 +323,8 @@
 		<AO_ITEM Index="11" Name="AO_Substrate_Temperature_Setpoint" BufferOffset="22" Device="" Addr="d1022" Note="基座设定温度" />
 		<AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" BufferOffset="24" Device="" Addr="d1024" Note="前级管道设定温度" />
 		<AO_ITEM Index="13" Name="AO_Heartbeat" BufferOffset="26" Device="" Addr="d1026" Note="Check 通讯" />
-    <AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint"  BufferOffset="28" Device="" Addr="d1028" Note="CHB Wall设定温度" />
-    <AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint"  BufferOffset="30" Device="" Addr="d1030" Note="CHB Wall限制温度" />
+		<AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint"  BufferOffset="28" Device="" Addr="d1028" Note="CHB Wall设定温度" />
+		<AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint"  BufferOffset="30" Device="" Addr="d1030" Note="CHB Wall限制温度" />
 		<AO_ITEM Index="16" Name="" />
 		<AO_ITEM Index="17" Name="" />
 		<AO_ITEM Index="18" Name="" />
@@ -354,37 +354,37 @@
 		<AO_ITEM Index="42" Name="" />
 		<AO_ITEM Index="43" Name="" />
 		<AO_ITEM Index="44" Name="" />
-    <!--<AO_ITEM Index="45" Name="AO_Lift_Servo_Work_Mode" Addr="D1090" Device="" />-->
-    <AO_ITEM Index="46" Name="AO_Lift_Servo_Group_ABS_POS_Diff" Addr="D1092" Device="" />
-    <AO_ITEM Index="47" Name="" />
-    <AO_ITEM Index="48" Name="" />
-    <AO_ITEM Index="49" Name="" />
-    <AO_ITEM Index="50" Name="AO_Lift_Servo_Group_ABS_POS1" Addr="D1100" Device=""  Note="RT" />
-    <AO_ITEM Index="51" Name="AO_Lift_Servo_Group_ABS_POS2" Addr="D1102" Device="" />
-    <AO_ITEM Index="52" Name="AO_Lift_Servo_Group_ABS_POS3" Addr="D1104" Device="" />
-    <AO_ITEM Index="53" Name="AO_Lift_Servo_Group_ABS_POS4" Addr="D1106" Device="" />
-    <AO_ITEM Index="54" Name="AO_Lift_Servo_Group_ABS_POS5" Addr="D1108" Device="" />
-    <AO_ITEM Index="55" Name="" />
-    <AO_ITEM Index="56" Name="" />
-    <AO_ITEM Index="57" Name="AO_Lift_Servo_Group_Search_Origin_Speed" Addr="D1114" Device=""  Note="RT" />
-    <AO_ITEM Index="58" Name="AO_Lift_Servo_Group_Auto_Speed" Addr="D1116" Device="" />
-    <AO_ITEM Index="59" Name="AO_Lift_Servo_Group_Manual_Speed" Addr="D1118" Device=""  Note="UI" />
-    <AO_ITEM Index="60" Name="AO_Lift_Servo_Group_Soft_Up_Limit" Addr="D1120" Device=""  Note="RT" />
-    <AO_ITEM Index="61" Name="AO_Lift_Servo_Group_soft_Down_Limit" Addr="D1122" Device="" />
-    <!--<AO_ITEM Index="62" Name="AO_Lift_Servo_Group_ACC_DEC_Speed_Time" Addr="D1124" Device="" />-->
-    <AO_ITEM Index="63" Name="" />
-    <AO_ITEM Index="64" Name="" />
-    <AO_ITEM Index="65" Name="" />
-    <AO_ITEM Index="66" Name="" />
-    <AO_ITEM Index="67" Name="" />
-    <AO_ITEM Index="68" Name="" />
-    <AO_ITEM Index="69" Name="" />
-    <AO_ITEM Index="70" Name="AO_Substrate_Temperature_TC_TM_Diff" Addr="D1140"   Device=""/>
-    <AO_ITEM Index="71" Name="AO_Foreline_Temperature_TC_TM_Diff" Addr="D1142"   Device="" />
-    <AO_ITEM Index="72" Name="AO_CHB_Wall_Temperature_TC_TM_Diff" Addr="D1144"   Device="" />
-    <AO_ITEM Index="73" Name="" />
-    <AO_ITEM Index="74" Name="" />
-    <AO_ITEM Index="75" Name="" />
+		<!--<AO_ITEM Index="45" Name="AO_Lift_Servo_Work_Mode" Addr="D1090" Device="" />-->
+		<AO_ITEM Index="46" Name="AO_Lift_Servo_Group_ABS_POS_Diff" Addr="D1092" Device="" />
+		<AO_ITEM Index="47" Name="" />
+		<AO_ITEM Index="48" Name="" />
+		<AO_ITEM Index="49" Name="" />
+		<AO_ITEM Index="50" Name="AO_Lift_Servo_Group_ABS_POS1" Addr="D1100" Device=""  Note="RT" />
+		<AO_ITEM Index="51" Name="AO_Lift_Servo_Group_ABS_POS2" Addr="D1102" Device="" />
+		<AO_ITEM Index="52" Name="AO_Lift_Servo_Group_ABS_POS3" Addr="D1104" Device="" />
+		<AO_ITEM Index="53" Name="AO_Lift_Servo_Group_ABS_POS4" Addr="D1106" Device="" />
+		<AO_ITEM Index="54" Name="AO_Lift_Servo_Group_ABS_POS5" Addr="D1108" Device="" />
+		<AO_ITEM Index="55" Name="" />
+		<AO_ITEM Index="56" Name="" />
+		<AO_ITEM Index="57" Name="AO_Lift_Servo_Group_Search_Origin_Speed" Addr="D1114" Device=""  Note="RT" />
+		<AO_ITEM Index="58" Name="AO_Lift_Servo_Group_Auto_Speed" Addr="D1116" Device="" />
+		<AO_ITEM Index="59" Name="AO_Lift_Servo_Group_Manual_Speed" Addr="D1118" Device=""  Note="UI" />
+		<AO_ITEM Index="60" Name="AO_Lift_Servo_Group_Soft_Up_Limit" Addr="D1120" Device=""  Note="RT" />
+		<AO_ITEM Index="61" Name="AO_Lift_Servo_Group_soft_Down_Limit" Addr="D1122" Device="" />
+		<!--<AO_ITEM Index="62" Name="AO_Lift_Servo_Group_ACC_DEC_Speed_Time" Addr="D1124" Device="" />-->
+		<AO_ITEM Index="63" Name="" />
+		<AO_ITEM Index="64" Name="" />
+		<AO_ITEM Index="65" Name="" />
+		<AO_ITEM Index="66" Name="" />
+		<AO_ITEM Index="67" Name="" />
+		<AO_ITEM Index="68" Name="" />
+		<AO_ITEM Index="69" Name="" />
+		<AO_ITEM Index="70" Name="AO_Substrate_Temperature_TC_TM_Diff" Addr="D1140"   Device=""/>
+		<AO_ITEM Index="71" Name="AO_Foreline_Temperature_TC_TM_Diff" Addr="D1142"   Device="" />
+		<AO_ITEM Index="72" Name="AO_CHB_Wall_Temperature_TC_TM_Diff" Addr="D1144"   Device="" />
+		<AO_ITEM Index="73" Name="" />
+		<AO_ITEM Index="74" Name="" />
+		<AO_ITEM Index="75" Name="" />
 	</Ana_Out>
 	<Ana_In>
 		<AI_ITEM Index="0" Name="AI_Process_pressure" BufferOffset="0" Device="" Addr="d2000" Note="Process pressure" />
@@ -396,8 +396,8 @@
 		<AI_ITEM Index="6" Name="AI_MFC3_Flow" BufferOffset="12" Device="" Addr="d2012" Note="MFC" />
 		<AI_ITEM Index="7" Name="AI_MFC4_Flow" BufferOffset="14" Device="" Addr="d2014" Note="MFC" />
 		<AI_ITEM Index="8" Name="AI_MFC5_Flow" BufferOffset="16" Device="" Addr="d2016" Note="MFC" />
-    <!--<AI_ITEM Index="9" Name="AI_Coolant_Inlet_Temp" BufferOffset="18" Device="" Addr="d2018" Note="Chiller" />-->
-    <!--<AI_ITEM Index="10" Name="AI_Coolant_Outlet_Temp" BufferOffset="20" Device="" Addr="d2020" Note="Chiller" />-->
+		<!--<AI_ITEM Index="9" Name="AI_Coolant_Inlet_Temp" BufferOffset="18" Device="" Addr="d2018" Note="Chiller" />-->
+		<!--<AI_ITEM Index="10" Name="AI_Coolant_Outlet_Temp" BufferOffset="20" Device="" Addr="d2020" Note="Chiller" />-->
 		<AI_ITEM Index="11" Name="AI_Substrate_Control_TC_Temp" BufferOffset="22" Device="" Addr="d2022" Note="TC temp" />
 		<AI_ITEM Index="12" Name="AI_Substrate_Monitor_TC_Temp" BufferOffset="24" Device="" Addr="d2024" Note="TC temp" />
 		<AI_ITEM Index="13" Name="" />
@@ -422,9 +422,9 @@
 		<AI_ITEM Index="32" Name="" />
 		<AI_ITEM Index="33" Name="" />
 		<AI_ITEM Index="34" Name="" />
-    <!--<AI_ITEM Index="35" Name="AI_Grid_TC_Temp" BufferOffset="70" Device="" Addr="d2070" Note="TC temp" />-->
-    <AI_ITEM Index="36" Name="AI_CHB_Wall_Control_TC_Temp" BufferOffset="72" Device="" Addr="d2072" Note="TC temp" />
-    <AI_ITEM Index="37" Name="AI_CHB_Wall_Monitor_TC_Temp" BufferOffset="74" Device="" Addr="d2074" Note="TC temp" />
+		<!--<AI_ITEM Index="35" Name="AI_Grid_TC_Temp" BufferOffset="70" Device="" Addr="d2070" Note="TC temp" />-->
+		<AI_ITEM Index="36" Name="AI_CHB_Wall_Control_TC_Temp" BufferOffset="72" Device="" Addr="d2072" Note="TC temp" />
+		<AI_ITEM Index="37" Name="AI_CHB_Wall_Monitor_TC_Temp" BufferOffset="74" Device="" Addr="d2074" Note="TC temp" />
 		<AI_ITEM Index="38" Name="" />
 		<AI_ITEM Index="39" Name="" />
 		<AI_ITEM Index="40" Name="" BufferOffset="80" Addr="d2080" Note="定位模块错误代码"/>
@@ -432,21 +432,21 @@
 		<AI_ITEM Index="42" Name="" BufferOffset="84" Device="" Addr="d2084" Note="ICP Souce/RPS" />
 		<AI_ITEM Index="43" Name="" BufferOffset="86" Device="" Addr="d2086" />
 		<AI_ITEM Index="44" Name="" />
-    <!--<AI_ITEM Index="45" Name="AI_Lift_Virtual_Servo_Current_Position" Addr="d2090" Device=""  Note="UNIT:MM" />-->
-    <AI_ITEM Index="46" Name="AI_Lift_Servo_1_Current_Position" Addr="d2092" Device="" />
-    <AI_ITEM Index="47" Name="AI_Lift_Servo_2_Current_Position" Addr="d2094" Device="" />
-    <AI_ITEM Index="48" Name="" />
-    <AI_ITEM Index="49" Name="" />
-    <!--<AI_ITEM Index="50" Name="AI_Lift_Virtual_Servo_Current_Speed" Addr="d2100" Device=""  Note="Unit:mm/s" />-->
-    <AI_ITEM Index="51" Name="AI_Lift_Servo_1_Current_Speed" Addr="d2102" Device="" />
-    <AI_ITEM Index="52" Name="AI_Lift_Servo_2_Current_Speed" Addr="d2104" Device="" />
-    <AI_ITEM Index="53" Name="" />
-    <AI_ITEM Index="54" Name="AI_Lift_Servo_1_Alarm_Code" Addr="d2108" Device="" />
-    <AI_ITEM Index="55" Name="AI_Lift_Servo_2_Alarm_Code" Addr="d2110" Device="" />
-    <AI_ITEM Index="56" Name="AI_Lift_Servo_1_Warning_Code" Addr="d2112" Device="" />
-    <AI_ITEM Index="57" Name="AI_Lift_Servo_2_Warning_Code" Addr="d2114" Device="" />
-    <AI_ITEM Index="58" Name="" />
-    <AI_ITEM Index="59" Name="" />
-    <AI_ITEM Index="60" Name="" />
+		<!--<AI_ITEM Index="45" Name="AI_Lift_Virtual_Servo_Current_Position" Addr="d2090" Device=""  Note="UNIT:MM" />-->
+		<AI_ITEM Index="46" Name="AI_Lift_Servo_1_Current_Position" Addr="d2092" Device="" />
+		<AI_ITEM Index="47" Name="AI_Lift_Servo_2_Current_Position" Addr="d2094" Device="" />
+		<AI_ITEM Index="48" Name="" />
+		<AI_ITEM Index="49" Name="" />
+		<!--<AI_ITEM Index="50" Name="AI_Lift_Virtual_Servo_Current_Speed" Addr="d2100" Device=""  Note="Unit:mm/s" />-->
+		<AI_ITEM Index="51" Name="AI_Lift_Servo_1_Current_Speed" Addr="d2102" Device="" />
+		<AI_ITEM Index="52" Name="AI_Lift_Servo_2_Current_Speed" Addr="d2104" Device="" />
+		<AI_ITEM Index="53" Name="" />
+		<AI_ITEM Index="54" Name="AI_Lift_Servo_1_Alarm_Code" Addr="d2108" Device="" />
+		<AI_ITEM Index="55" Name="AI_Lift_Servo_2_Alarm_Code" Addr="d2110" Device="" />
+		<AI_ITEM Index="56" Name="AI_Lift_Servo_1_Warning_Code" Addr="d2112" Device="" />
+		<AI_ITEM Index="57" Name="AI_Lift_Servo_2_Warning_Code" Addr="d2114" Device="" />
+		<AI_ITEM Index="58" Name="" />
+		<AI_ITEM Index="59" Name="" />
+		<AI_ITEM Index="60" Name="" />
 	</Ana_In>
 </IO_DEFINE>

VirgoSimulator/Config/_ioDefineVirgo.xml

@@ -2,11 +2,11 @@
 <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
   <Dig_In>
     <DI_ITEM Index="0" Name="DI_Lid_Closed" Device="" Addr="w20.00" Note="Interlock-HW" />
-    <DI_ITEM Index="1" Name="DI_PM_ATM_SW" Device="" Addr="w20.01" Note="Interlock-PLC" />
-    <DI_ITEM Index="2" Name="DI_PM_VAC_SW" Device="9.5T" Addr="w20.02" Note="Interlock-HW" />
-    <DI_ITEM Index="3" Name="DI_Cooling_Water_Flow_SW" Device="" Addr="w20.03" Note="Interlock-HW" />
-    <!--<DI_ITEM Index="4" Name="DI_LE_OT_SW_Alarm" Device="" Addr="w20.04" Note="1=OK， 0=alarm" />-->
-    <DI_ITEM Index="5" Name="DI_Water_Leak" Device="" Addr="w20.05" Note="1=OK， 0=alarm" />
+    <DI_ITEM Index="1" Name="DI_PM_ATM_Switch" Device="" Addr="w20.01" Note="Interlock-PLC" />
+    <DI_ITEM Index="2" Name="DI_PM_VAC_Switch" Device="9.5T" Addr="w20.02" Note="Interlock-HW" />
+    <DI_ITEM Index="3" Name="DI_Cooling_Water_Flow_Switch" Device="" Addr="w20.03" Note="Interlock-HW" />
+    <!--<DI_ITEM Index="4" Name="DI_LE_OT_Switch_Alarm" Device="" Addr="w20.04" Note="1=OK， 0=alarm" />-->
+    <DI_ITEM Index="5" Name="DI_Water_Leak_Sensor" Device="" Addr="w20.05" Note="1=OK， 0=alarm" />
     <DI_ITEM Index="6" Name="DI_Slit_Door_Open_Pos" Device="" Addr="w20.06" Note="Interlock-HW" />
     <DI_ITEM Index="7" Name="DI_Slit_Door_Close_Pos" Device="" Addr="w20.07" Note="Interlock-HW" />
     <DI_ITEM Index="8" Name="DI_Lift_Pin_Up" Device="" Addr="w20.08" Note="1=on,0=off" />
@@ -25,7 +25,7 @@
     <DI_ITEM Index="21" Name="DI_Substrate_Heater_On_FB" Device="" Addr="w21.05" Note="0=OFF,1=ON" />
     <DI_ITEM Index="22" Name="DI_CDA_Pressure_Switch_Out_1" Device="" Addr="w21.06" />
     <!--<DI_ITEM Index="23" Name="DI_CDA_Pressure_Switch_Out_2" Device="" Addr="W21.07" />-->
-    <DI_ITEM Index="24" Name="DI_SourceFan1" Device="" Addr="w21.08" />
+    <DI_ITEM Index="24" Name="DI_Source_Fans_Running" Device="" Addr="w21.08" />
     <DI_ITEM Index="25" Name="DI_CTRL_Box_Fans_Running" Device="" Addr="W21.09" />
     <DI_ITEM Index="26" Name="DI_Source_Match_Interlock" Device="" Addr="W21.10"/>
     <DI_ITEM Index="27" Name="DI_Bais_Match_Interlock" Device="" Addr="W21.11"/>
@@ -49,15 +49,15 @@
     <DI_ITEM Index="45" Name="DI_ACR_Smoke_Monitoring" Device="" Addr="w22.13" />
     <DI_ITEM Index="46" Name="DI_ACR_Power_On" Device="" Addr="W22.14"/>
     <DI_ITEM Index="47" Name="" />
-    <DI_ITEM Index="48" Name="DI_MFC1_Pressure" Device="" Addr="w23.00" />
-    <DI_ITEM Index="49" Name="DI_MFC2_Pressure" Device="" Addr="w23.01" />
-    <DI_ITEM Index="50" Name="DI_MFC3_Pressure" Device="" Addr="w23.02" />
-    <DI_ITEM Index="51" Name="DI_MFC4_Pressure" Device="" Addr="w23.03" />
-    <DI_ITEM Index="52" Name="DI_MFC5_Pressure" Device="" Addr="w23.04" />
-    <DI_ITEM Index="53" Name="DI_N2_Pressure" Device="" Addr="w23.05"  />
-    <!--<DI_ITEM Index="54" Name="DI_Process_pressure_Alarm" Addr="w23.06" />-->
-    <!--<DI_ITEM Index="55" Name="DI_Chamber_pressure_Alarm" Addr="w23.07" />-->
-    <!--<DI_ITEM Index="56" Name="DI_Foreline_pressure_Alarm" Addr="w23.08" />-->
+    <DI_ITEM Index="48" Name="DI_MFC1_Pressure_Switch" Device="" Addr="w23.00" />
+    <DI_ITEM Index="49" Name="DI_MFC2_Pressure_Switch" Device="" Addr="w23.01" />
+    <DI_ITEM Index="50" Name="DI_MFC3_Pressure_Switch" Device="" Addr="w23.02" />
+    <DI_ITEM Index="51" Name="DI_MFC4_Pressure_Switch" Device="" Addr="w23.03" />
+    <DI_ITEM Index="52" Name="DI_MFC5_Pressure_Switch" Device="" Addr="w23.04" />
+    <DI_ITEM Index="53" Name="DI_N2_Pressure_Switch" Device="" Addr="w23.05"  />
+    <!--<DI_ITEM Index="54" Name="DI_Process_Pressure_Guage_Alarm" Addr="w23.06" />-->
+    <!--<DI_ITEM Index="55" Name="DI_Chamber_Pressure_Guage_Alarm" Addr="w23.07" />-->
+    <!--<DI_ITEM Index="56" Name="DI_Foreline_Pressure_Guage_Alarm" Addr="w23.08" />-->
     <DI_ITEM Index="57" Name="" />
     <DI_ITEM Index="58" Name="" />
     <DI_ITEM Index="59" Name="" />
@@ -163,12 +163,12 @@
     <DI_ITEM Index="159" Name="" />
   </Dig_In>
   <Dig_Out>
-    <DO_ITEM Index="0" Name="DO_Soft_Pumping_Valve" Device="" Addr="w0.00" />
-    <DO_ITEM Index="1" Name="DO_Fast_Pumping_Valve" Device="" Addr="w0.01" />
+    <DO_ITEM Index="0" Name="DO_EV2_Soft_Pumping_Valve" Device="" Addr="w0.00" />
+    <DO_ITEM Index="1" Name="DO_EV3_Fast_Pumping_Valve" Device="" Addr="w0.01" />
     <DO_ITEM Index="2" Name="" />
     <DO_ITEM Index="3" Name="" />
-    <DO_ITEM Index="4" Name="DO_Slit_Door_Open" Device="" Addr="w0.04" />
-    <DO_ITEM Index="5" Name="DO_Slit_Door_Close" Device="" Addr="w0.05" Note="Interlock-HW" />
+    <DO_ITEM Index="4" Name="DO_EV4_Slit_Door_Open" Device="" Addr="w0.04" />
+    <DO_ITEM Index="5" Name="DO_EV4_Slit_Door_Close" Device="" Addr="w0.05" Note="Interlock-HW" />
     <DO_ITEM Index="6" Name="DO_Lift_Pin_Up" Device="" Addr="w0.06" />
     <DO_ITEM Index="7" Name="DO_Lift_Pin_Down" Device="" Addr="w0.07" />
     <DO_ITEM Index="8" Name="DO_Guide_Pin_Small_Lifter_Up" Device="" Addr="w0.08" />
@@ -177,18 +177,18 @@
     <DO_ITEM Index="11" Name="DO_Guide_Pin_Medium_Lifter_Down" Device="" Addr="w0.11" />
     <DO_ITEM Index="12" Name="" />
     <DO_ITEM Index="13" Name="" />
-    <DO_ITEM Index="14" Name="DO_MFC1_Valve" Device="" Addr="w0.14" />
-    <DO_ITEM Index="15" Name="DO_MFC2_Valve" Device="" Addr="w0.15" />
-    <DO_ITEM Index="16" Name="DO_MFC3_Valve" Device="" Addr="w1.00" />
-    <DO_ITEM Index="17" Name="DO_MFC4_Valve" Device="" Addr="w1.01" />
-    <DO_ITEM Index="18" Name="DO_MFC5_Valve" Device="" Addr="w1.02" />
+    <DO_ITEM Index="14" Name="DO_EV8_MFC1_Valve" Device="" Addr="w0.14" />
+    <DO_ITEM Index="15" Name="DO_EV9_MFC2_Valve" Device="" Addr="w0.15" />
+    <DO_ITEM Index="16" Name="DO_EV10_MFC3_Valve" Device="" Addr="w1.00" />
+    <DO_ITEM Index="17" Name="DO_EV11_MFC4_Valve" Device="" Addr="w1.01" />
+    <DO_ITEM Index="18" Name="DO_EV12_MFC5_Valve" Device="" Addr="w1.02" />
     <DO_ITEM Index="19" Name="" />
     <DO_ITEM Index="20" Name="" />
     <DO_ITEM Index="21" Name="" />
     <DO_ITEM Index="22" Name="" />
-    <DO_ITEM Index="23" Name="DO_Chamber_purge_valve" Device="" Addr="w1.07" />
-    <DO_ITEM Index="24" Name="DO_Chamber_vent_valve" Device="" Addr="w1.08" />
-    <DO_ITEM Index="25" Name="DO_Process_gas_final_valve" Device="" Addr="w1.09" />
+    <DO_ITEM Index="23" Name="DO_EV6_Chamber_Purge_Valve" Device="" Addr="w1.07" />
+    <DO_ITEM Index="24" Name="DO_EV7_Chamber_Vent_Valve" Device="" Addr="w1.08" />
+    <DO_ITEM Index="25" Name="DO_EV1_Process_Gas_Final_Valve" Device="" Addr="w1.09" />
     <DO_ITEM Index="26" Name="DO_EV5_Water_Valve" Device="" Addr="W1.10"/>
     <DO_ITEM Index="27" Name="" />
     <DO_ITEM Index="28" Name="" />

VirgoSimulator/Instances/SimulatorSystem.cs

@@ -54,28 +54,28 @@ namespace VirgoSimulator.Instances
         {
             // chamber
             IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
-            IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
+            IO.DI[$"{mod}.DI_PM_ATM_Switch"].Value = true;
             IO.DI[$"{mod}.DI_CDA_Pressure_Switch_Out_1"].Value = true;
             //IO.DI[$"{mod}.DI_CDA_Pressure_Switch_Out_2"].Value = true;
-            IO.DI[$"{mod}.DI_SourceFan1"].Value = true;
+            IO.DI[$"{mod}.DI_Source_Fans_Running"].Value = true;
 
             IO.DI[$"{mod}.DI_CTRL_Box_Fans_Running"].Value = true;
 
-            IO.DI[$"{mod}.DI_Cooling_Water_Flow_SW"].Value = true;
+            IO.DI[$"{mod}.DI_Cooling_Water_Flow_Switch"].Value = true;
             IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
             IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
-            IO.DI[$"{mod}.DI_Water_Leak"].Value = true;
+            IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
             IO.DI[$"{mod}.DI_ARM_Not_Extend_to_PM"].Value = true;
-            IO.DI[$"{mod}.DI_MFC1_Pressure"].Value = true;
-            IO.DI[$"{mod}.DI_MFC2_Pressure"].Value = true;
-            IO.DI[$"{mod}.DI_MFC3_Pressure"].Value = true;
-            IO.DI[$"{mod}.DI_MFC4_Pressure"].Value = true;
-            IO.DI[$"{mod}.DI_MFC5_Pressure"].Value = true;
+            IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
+            IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
+            IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
+            IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
+            IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
             IO.DI[$"{mod}.DI_EFEM_Side_Panel_Closed"].Value = true;
             IO.DI[$"{mod}.DI_Generator_Hardware_Interlock"].Value = true;
             IO.DI[$"{mod}.DI_ACR_Smoke_Monitoring"].Value = true;
             IO.DI[$"{mod}.DI_ACR_Power_On"].Value = true;
-            IO.DI[$"{mod}.DI_N2_Pressure"].Value = true;
+            IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
             // slit door
             IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = false;
             IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = true;
@@ -84,7 +84,7 @@ namespace VirgoSimulator.Instances
             IO.DI[$"{mod}.DI_Lift_Pin_Up"].Value = false;
             IO.DI[$"{mod}.DI_Lift_Pin_Down"].Value = true;
             //
-            //IO.DI[$"{mod}.DI_LE_OT_SW_Alarm"].Value = false;
+            //IO.DI[$"{mod}.DI_LE_OT_Switch_Alarm"].Value = false;
             IO.DI[$"{mod}.DI_GB_Door_Interlock"].Value = false;
 
             IO.DI[$"{mod}.DI_SRF_Water_Flow_Switch"].Value = true;
@@ -170,14 +170,14 @@ namespace VirgoSimulator.Instances
         void MonitorSlitDoor(ModuleName mod)
         {
             // slit door open
-            if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
+            if (IO.DO[$"{mod}.DO_EV4_Slit_Door_Open"].Value)
             {
                 IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = true;
                 IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = false;
             }
 
             // slit door close
-            if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
+            if (IO.DO[$"{mod}.DO_EV4_Slit_Door_Close"].Value)
             {
                 IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = false;
                 IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = true;
@@ -346,8 +346,8 @@ namespace VirgoSimulator.Instances
             //float process_pressure = GetAiValue($"{mod}.AI_Process_pressure");
 
             // soft pump & fast pump
-            DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
-            DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
+            DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_EV3_Fast_Pumping_Valve"];
+            DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_EV2_Soft_Pumping_Valve"];
 
             if (fast_pump_vlv.Value || soft_pump_vlv.Value)
             {
@@ -409,8 +409,8 @@ namespace VirgoSimulator.Instances
             }
 
             // fast vent & purge
-            DOAccessor vent_vlv = IO.DO[$"{mod}.DO_Chamber_vent_valve"];
-            DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
+            DOAccessor vent_vlv = IO.DO[$"{mod}.DO_EV7_Chamber_Vent_Valve"];
+            DOAccessor purge_vlv = IO.DO[$"{mod}.DO_EV6_Chamber_Purge_Valve"];
 
             if (vent_vlv.Value || purge_vlv.Value)
             {
@@ -520,10 +520,10 @@ namespace VirgoSimulator.Instances
             //float chamber_pressure2 = GetMockChamberPressure(mod);
 
             // ATM switch
-            IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
+            IO.DI[$"{mod}.DI_PM_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
 
             // VAC switch
-            IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
+            IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
 
             // Throttle valve