|
|
@@ -86,9 +86,9 @@
|
|
|
<config default="0" name="FlipReturnWaferOption" nameView="Flip Option while return wafer" description="FlipOption，0=Not Flip, 1=FaceUp, 2=FaceDown, 3=AlwaysReverse" max="3" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
<config default="false" name="EnableResetError" nameView="Enable Reset EFEM Error by Click Reset Button" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
|
|
|
- <configs name="EfemRobot" nameView="EfemRobot" visible="false">
|
|
|
- <config default="true" name="UpperBladeEnable" nameView="UpperBladeEnable" description="Upper Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
- <config default="true" name="LowerBladeEnable" nameView="LowerBladeEnable" description="Lower Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <configs name="EfemRobot" nameView="EfemRobot">
|
|
|
+ <config default="true" name="UpperBladeEnable" nameView="UpperBladeEnable" description="Upper Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
|
|
|
+ <config default="true" name="LowerBladeEnable" nameView="LowerBladeEnable" description="Lower Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
|
|
|
</configs>
|
|
|
<configs name="Buffer" nameView="Buffer" visible="false">
|
|
|
<config default="2" name="SlotNumber" nameView="Slot number" description="slot number" max="60" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
|
