JetPlasma
/
Virgo_D_SLN


			
				
					
						
						
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							<?xml version="1.0" encoding="utf-16"?>
<SystemConfig xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <DataElements>

    <DataElement displayName="TV Position"  cn="蝶阀位置反馈值" en="" dbName="IO32.PMA.AI_Throttle_Valve_Real_Position" isPressureAxis="false"/>
    <DataElement displayName="TV Position SP"  cn="蝶阀位置设定值" en="" dbName="IO32.PMA.AO_Throttle_Valve_Position_Setpoint" isPressureAxis="false"/>
    <DataElement displayName="TV Pressure"  cn="蝶阀压力反馈值" en="" dbName="IO32.PMA.AI_Throttle_Valve_Real_Pressure" isPressureAxis="false"/>
    <DataElement displayName="TV Pressure SP"  cn="蝶阀压力设定值" en="" dbName="IO32.PMA.AO_Throttle_Valve_Pressure_Setpoint" isPressureAxis="false"/>

    <DataElement displayName="RF Power SP"  cn="射频功率设定值" en="" dbName="PMA.Rf.PowerSetPoint" isPressureAxis=""/>
    <DataElement displayName="RF Forward Power" cn="射频输出功率" en=""  dbName="PMA.Rf.ForwardPower" isPressureAxis=""/>
    <DataElement displayName="RF Reflect Power" cn="射频反射功率" en=""  dbName="PMA.Rf.ReflectPower" isPressureAxis=""/>
    <DataElement displayName="RF Pulsing Frequency SP" cn="射频频率设定值" en=""  dbName="PMA.Rf.Frequency" isPressureAxis=""/>

    <DataElement displayName="Gas1 MFC"  cn="Gas1 MFC流量" en="" dbName="PMA.IoMfc.MfcGas1.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas1 MFC SP"  cn="Gas1 MFC设定值" en="" dbName="PMA.IoMfc.MfcGas1.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas2 MFC" cn="Gas2 MFC流量" en=""  dbName="PMA.IoMfc.MfcGas2.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas2 MFC SP" cn="Gas2 MFC设定值" en=""  dbName="PMA.IoMfc.MfcGas2.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas3 MFC" cn="Gas3 MFC流量" en=""  dbName="PMA.IoMfc.MfcGas3.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas3 MFC SP" cn="Gas3 MFC设定值" en=""  dbName="PMA.IoMfc.MfcGas3.SetPoint" isPressureAxis=""/>

	<DataElement displayName="Gas4 MFC" cn="Gas4 MFC流量" en=""  dbName="PMA.IoMfc.MfcGas4.FeedBack" isPressureAxis=""/>
	<DataElement displayName="Gas4 MFC SP" cn="Gas4 MFC设定值" en=""  dbName="PMA.IoMfc.MfcGas4.SetPoint" isPressureAxis=""/>

  </DataElements>
</SystemConfig>