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Virgo_D_SLN
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Virgo_DSetup
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Virgo_DRT
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Config
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_sc.data

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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <root>
    3. 

  3.   <scdata name="System.IsSimulatorMode" value="True" />
    4. 

  4.   <scdata name="System.IsATMMode" value="False" />
    5. 

  5.   <scdata name="System.IsCycleMode" value="False" />
    6. 

  6.   <scdata name="System.CycleCount" value="3" />
    7. 

  7.   <scdata name="System.PMAIsInstalled" value="True" />
    8. 

  8.   <scdata name="System.PMBIsInstalled" value="False" />
    9. 

  9.   <scdata name="System.ATMCyclePMDelayTime" value="5" />
    10. 

  10.   <scdata name="System.MaxTemperatureToleranceTransferWafer" value="25" />
    11. 

  11.   <scdata name="System.MaxTemperatureToleranceToTarget" value="1" />
    12. 

  12.   <scdata name="System.BuzzerBlinkingTime" value="3000" />
    13. 

  13.   <scdata name="System.SmallWafer" value="3" />
    14. 

  14.   <scdata name="System.MidWafer" value="4" />
    15. 

  15.   <scdata name="System.BigWafer" value="6" />
    16. 

  16.   <scdata name="System.DisplayLogoName" value="JetPlasma" />
    17. 

  17.   <scdata name="Scheduler.GroupWaferBySequence" value="True" />
    18. 

  18.   <scdata name="Scheduler.IsRunInParallelMode" value="True" />
    19. 

  19.   <scdata name="PMA.DryPump.MFG" value="1" />
    20. 

  20.   <scdata name="PMA.DryPump.CommunicationType" value="1" />
    21. 

  21.   <scdata name="PMA.DryPump.Port" value="COM58" />
    22. 

  22.   <scdata name="PMA.DryPump.ChamberForelinePressureThreshold" value="1000" />
    23. 

  23.   <scdata name="PMA.DryPump.ChamberForelinePressureTimeout" value="20" />
    24. 

  24.   <scdata name="PMA.Rf.MFG" value="1" />
    25. 

  25.   <scdata name="PMA.Rf.model" value="1" />
    26. 

  26.   <scdata name="PMA.Rf.CommunicationType" value="1" />
    27. 

  27.   <scdata name="PMA.Rf.Port" value="COM31" />
    28. 

  28.   <scdata name="PMA.Rf.PowerAlarmRange" value="1" />
    29. 

  29.   <scdata name="PMA.Rf.PowerAlarmTime" value="1" />
    30. 

  30.   <scdata name="PMA.Rf.ReflectPowerAlarmRange" value="400" />
    31. 

  31.   <scdata name="PMA.Rf.ReflectPowerAlarmTime" value="5" />
    32. 

  32.   <scdata name="PMA.Rf.PowerRange" value="3000" />
    33. 

  33.   <scdata name="PMA.Rf.Coefficient" value="1" />
    34. 

  34.   <scdata name="PMA.Rf.EnablePulsingFunction" value="False" />
    35. 

  35.   <scdata name="PMA.Rf.EnableReflectPower" value="True" />
    36. 

  36.   <scdata name="PMA.Rf.EnableVoltageCurrent" value="False" />
    37. 

  37.   <scdata name="PMA.Rf.PowerRegulationFactor" value="1" />
    38. 

  38.   <scdata name="PMA.Rf.RfPowerAlarmRange" value="1000" />
    39. 

  39.   <scdata name="PMA.Rf.RfPowerAlarmTime" value="3000" />
    40. 

  40.   <scdata name="PMA.match.EnableMatch" value="False" />
    41. 

  41.   <scdata name="PMA.match.MFG" value="1" />
    42. 

  42.   <scdata name="PMA.match.CommunicationType" value="1" />
    43. 

  43.   <scdata name="PMA.match.Port" value="COM34" />
    44. 

  44.   <scdata name="PMA.match.MatchMode" value="1" />
    45. 

  45.   <scdata name="PMA.match.EnableC1C2Position" value="False" />
    46. 

  46.   <scdata name="PMA.match.MatchPositionC1" value="10" />
    47. 

  47.   <scdata name="PMA.match.MatchPositionC2" value="10" />
    48. 

  48.   <scdata name="PMA.MfcGas1.MfcEnableAlarm" value="True" />
    49. 

  49.   <scdata name="PMA.MfcGas1.MfcAlarmRange" value="10" />
    50. 

  50.   <scdata name="PMA.MfcGas1.MfcAlarmTime" value="10" />
    51. 

  51.   <scdata name="PMA.MfcGas1.GasName" value="O2" />
    52. 

  52.   <scdata name="PMA.MfcGas1.Enable" value="True" />
    53. 

  53.   <scdata name="PMA.MfcGas1.MfcN2Scale" value="100" />
    54. 

  54.   <scdata name="PMA.MfcGas1.MfcScaleFactor" value="1" />
    55. 

  55.   <scdata name="PMA.MfcGas1.DefaultSetPoint" value="100" />
    56. 

  56.   <scdata name="PMA.MfcGas1.FlowRegulationFactor" value="1" />
    57. 

  57.   <scdata name="PMA.MfcGas2.MfcEnableAlarm" value="True" />
    58. 

  58.   <scdata name="PMA.MfcGas2.MfcAlarmRange" value="10" />
    59. 

  59.   <scdata name="PMA.MfcGas2.MfcAlarmTime" value="10" />
    60. 

  60.   <scdata name="PMA.MfcGas2.GasName" value="N2" />
    61. 

  61.   <scdata name="PMA.MfcGas2.Enable" value="True" />
    62. 

  62.   <scdata name="PMA.MfcGas2.MfcN2Scale" value="100" />
    63. 

  63.   <scdata name="PMA.MfcGas2.MfcScaleFactor" value="1" />
    64. 

  64.   <scdata name="PMA.MfcGas2.DefaultSetPoint" value="100" />
    65. 

  65.   <scdata name="PMA.MfcGas2.FlowRegulationFactor" value="1" />
    66. 

  66.   <scdata name="PMA.MfcGas3.MfcEnableAlarm" value="True" />
    67. 

  67.   <scdata name="PMA.MfcGas3.MfcAlarmRange" value="10" />
    68. 

  68.   <scdata name="PMA.MfcGas3.MfcAlarmTime" value="10" />
    69. 

  69.   <scdata name="PMA.MfcGas3.GasName" value="AR" />
    70. 

  70.   <scdata name="PMA.MfcGas3.Enable" value="True" />
    71. 

  71.   <scdata name="PMA.MfcGas3.MfcN2Scale" value="100" />
    72. 

  72.   <scdata name="PMA.MfcGas3.MfcScaleFactor" value="1" />
    73. 

  73.   <scdata name="PMA.MfcGas3.DefaultSetPoint" value="100" />
    74. 

  74.   <scdata name="PMA.MfcGas3.FlowRegulationFactor" value="1" />
    75. 

  75.   <scdata name="PMA.MfcGas4.MfcEnableAlarm" value="True" />
    76. 

  76.   <scdata name="PMA.MfcGas4.MfcAlarmRange" value="10" />
    77. 

  77.   <scdata name="PMA.MfcGas4.MfcAlarmTime" value="10" />
    78. 

  78.   <scdata name="PMA.MfcGas4.GasName" value="Gas4" />
    79. 

  79.   <scdata name="PMA.MfcGas4.Enable" value="True" />
    80. 

  80.   <scdata name="PMA.MfcGas4.MfcN2Scale" value="100" />
    81. 

  81.   <scdata name="PMA.MfcGas4.MfcScaleFactor" value="1" />
    82. 

  82.   <scdata name="PMA.MfcGas4.DefaultSetPoint" value="100" />
    83. 

  83.   <scdata name="PMA.MfcGas4.FlowRegulationFactor" value="1" />
    84. 

  84.   <scdata name="PMA.Pump.LeakRate" value="30" />
    85. 

  85.   <scdata name="PMA.Pump.LeakCheckPumpingTime" value="180" />
    86. 

  86.   <scdata name="PMA.Pump.LeakCheckWaitTime" value="180" />
    87. 

  87.   <scdata name="PMA.Pump.PumpBasePressure" value="150" />
    88. 

  88.   <scdata name="PMA.Pump.PumpTimeLimit" value="120" />
    89. 

  89.   <scdata name="PMA.Pump.PumpValveDelay" value="5" />
    90. 

  90.   <scdata name="PMA.Pump.LoadLockPumpBasePressure" value="150" />
    91. 

  91.   <scdata name="PMA.Pump.LoadLockPumpTimeLimit" value="120" />
    92. 

  92.   <scdata name="PMA.Purge.PurgeCycleCount" value="3" />
    93. 

  93.   <scdata name="PMA.Purge.PurgeVentPressure" value="700000" />
    94. 

  94.   <scdata name="PMA.Purge.PurgePumpPressure" value="10" />
    95. 

  95.   <scdata name="PMA.Purge.PurgeVentTimeLimit" value="60" />
    96. 

  96.   <scdata name="PMA.Purge.PurgePumpTimeLimit" value="60" />
    97. 

  97.   <scdata name="PMA.Purge.PurgeVentStableTime" value="10" />
    98. 

  98.   <scdata name="PMA.Purge.PurgePumpStableTime" value="10" />
    99. 

  99.   <scdata name="PMA.HeaterChamber.TempOffsetPoint_1" value="0" />
    100. 

  100.   <scdata name="PMA.HeaterChamber.OffsetValue_1" value="0" />
    101. 

  101.   <scdata name="PMA.HeaterChamber.TempOffsetPoint_2" value="0" />
    102. 

  102.   <scdata name="PMA.HeaterChamber.OffsetValue_2" value="0" />
    103. 

  103.   <scdata name="PMA.HeaterChamber.TempOffsetPoint_3" value="0" />
    104. 

  104.   <scdata name="PMA.HeaterChamber.OffsetValue_3" value="0" />
    105. 

  105.   <scdata name="PMA.HeaterChamber.TempOffsetPoint_4" value="0" />
    106. 

  106.   <scdata name="PMA.HeaterChamber.OffsetValue_4" value="0" />
    107. 

  107.   <scdata name="PMA.HeaterChamber.TempOffsetPoint_5" value="0" />
    108. 

  108.   <scdata name="PMA.HeaterChamber.OffsetValue_5" value="0" />
    109. 

  109.   <scdata name="PMA.HeaterChamber.TempOffsetPoint_6" value="0" />
    110. 

  110.   <scdata name="PMA.HeaterChamber.OffsetValue_6" value="0" />
    111. 

  111.   <scdata name="PMA.HeaterChamber.TempOffsetPoint_7" value="0" />
    112. 

  112.   <scdata name="PMA.HeaterChamber.OffsetValue_7" value="0" />
    113. 

  113.   <scdata name="PMA.HeaterChamber.TempOffsetPoint_8" value="0" />
    114. 

  114.   <scdata name="PMA.HeaterChamber.OffsetValue_8" value="0" />
    115. 

  115.   <scdata name="PMA.HeaterChamber.TempOffsetPoint_9" value="0" />
    116. 

  116.   <scdata name="PMA.HeaterChamber.OffsetValue_9" value="0" />
    117. 

  117.   <scdata name="PMA.PrepareTransferTimeout" value="120" />
    118. 

  118.   <scdata name="PMA.OpenGasValveTimeout" value="1" />
    119. 

  119.   <scdata name="PMA.TimeLimitOfCloseGasValve" value="1" />
    120. 

  120.   <scdata name="PMA.OpenCloseSlitValveTimeout" value="1" />
    121. 

  121.   <scdata name="PMA.VentTime" value="180" />
    122. 

  122.   <scdata name="PMA.GasCount" value="4" />
    123. 

  123.   <scdata name="PMA.GasFlowPressureAlarmRange" value="100" />
    124. 

  124.   <scdata name="PMA.GasFlowPressureAlarmTime" value="60" />
    125. 

  125.   <scdata name="PMA.EnableThrottleValve" value="True" />
    126. 

  126.   <scdata name="PMA.ChamberHeaterSetPointLimit" value="150" />
    127. 

  127.   <scdata name="PMA.ForeLineHeaterSetPointLimit" value="140" />
    128. 

  128.   <scdata name="PMA.CheckSubstrateTempTimeout" value="120" />
    129. 

  129.   <scdata name="PMA.CheckATMTimeout" value="90" />
    130. 

  130.   <scdata name="PMA.VentTimeDelay" value="1" />
    131. 

  131.   <scdata name="PMA.ScrubberIsInstalled" value="True" />
    132. 

  132.   <scdata name="FA.ConnectionMode" value="Passive" />
    133. 

  133.   <scdata name="FA.LocalIpAddress" value="127.0.0.1" />
    134. 

  134.   <scdata name="FA.LocalPortNumber" value="5021" />
    135. 

  135.   <scdata name="FA.RemoteIpAddress" value="127.0.0.1" />
    136. 

  136.   <scdata name="FA.RemotePortNumber" value="5020" />
    137. 

  137.   <scdata name="FA.T3Timeout" value="45" />
    138. 

  138.   <scdata name="FA.T5Timeout" value="10" />
    139. 

  139.   <scdata name="FA.T6Timeout" value="5" />
    140. 

  140.   <scdata name="FA.T7Timeout" value="10" />
    141. 

  141.   <scdata name="FA.T8Timeout" value="5" />
    142. 

  142.   <scdata name="FA.EnableSpooling" value="False" />
    143. 

  143.   <scdata name="FA.LinkTestInterval" value="30" />
    144. 

  144.   <scdata name="FA.DefaultCommunicationState" value="Enabled" />
    145. 

  145.   <scdata name="FA.DefaultControlState" value="Online" />
    146. 

  146.   <scdata name="FA.DefaultControlSubState" value="Local" />
    147. 

  147.   <scdata name="FA.DeviceId" value="0" />
    148. 

  148. </root>
    149.