Virgo_D_SLN/Virgo_DRT/Devices/JetPM.cs

using System;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using MECF.Framework.Common.Device.Bases;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using Virgo_DCommon;
using Virgo_DRT.Devices.IODevices;
using Virgo_DRT.Module;
using Virgo_DRT.Modules;

namespace Virgo_DRT.Devices
{
    enum ValveType
    {
        PROCESS,
        FAST_PUMP,
        SOFT_PUMP,
        FAST_VENT,
        PURGE,
        Mfc1,
        Mfc2,
        Mfc3,
        Mfc4,
        Mfc5
    }

    class JetPM : PM
    {
        // ----------------------------Fields--------------------------
        //
        private readonly IoLid _Lid;
        //private readonly IoCylinder        _LidLocker;
        private readonly IoSensor _ATM_sw;
        private readonly IoSensor _VAC_sw;
        private readonly IoSensor _WLK_sw;
        private readonly IoSensor _CDAPressure;
        //private readonly IoSensor            _ArmNotExtend;
        private readonly IoSensor _RFG_Interlock;
        private readonly IoSensor _FactoryScrubberSensor;
        private readonly IoPressureControl _pressureController;
        private readonly IoHeater _SubstrateTC;
        private readonly IoHeater _ForelineTC;
        private readonly IoValve _SoftPumpValve;
        private readonly IoValve _FastPumpValve;
        private readonly IoValve _ProcessValve;
        private readonly IoValve _PurgeValve;
        private readonly IoValve _FastVentValve;
        private readonly IoValve _Mfc1Valve;
        private readonly IoValve _Mfc2Valve;
        private readonly IoValve _Mfc3Valve;
        private readonly IoValve _Mfc4Valve;
        private readonly IoValve _Mfc5Valve;
        private readonly IoValve _WaterValve;
        //private readonly IoValve           _N2SupplyValve;
        //private readonly IoCylinder          _slitDoor;
        private readonly IoCylinder _LiftPin;
        private readonly IoCylinder _PinInch3;        // 3'
        private readonly IoCylinder _PinInch4;        // 4'
        private readonly RfPowerBase _Generator;
        private readonly RfMatchBase _Match;
        private readonly PumpBase _MainPump;
        private readonly IoGasStick[] _gasLines;
        private readonly IoSignalTower _SignalTower;
        private readonly IoPlcDateTime _plcDateTime;
        private bool _isFactoryScrubberSysInstalled;

        private readonly R_TRIG _trigScrubberSysAlarm = new R_TRIG();


        // --------------------------Properties------------------------
        //
        public new ModuleName Module { get; }

        // 门的状态
        public bool IsSlitDoorClosed => true;
        //public bool IsSlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback;
        //public bool IsArmNotExtend => _ArmNotExtend.Value;

        // 盖子的状态
        public bool IsLidClosed => _Lid.OFFFeedback;

        // 盖子的锁
        //public bool IsLidLocked => !_LidLocker.ONSetPoint && _LidLocker.OFFSetPoint;

        public MovementPosition LiftPinPosition
        {
            get
            {
                MovementPosition pos = MovementPosition.Unknown;
                if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback)
                {
                    pos = MovementPosition.Up;
                }
                else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback)
                {
                    pos = MovementPosition.Down;
                }
                return pos;
            }
        }

        public MovementPosition Inch3Position
        {
            get
            {
                MovementPosition res = MovementPosition.Unknown;
                if (_PinInch3.ONFeedback && !_PinInch3.OFFFeedback)
                {
                    res = MovementPosition.Up;
                }
                else if (_PinInch3.OFFFeedback && !_PinInch3.ONFeedback)
                {
                    res = MovementPosition.Down;
                }
                return res;
            }
        }

        public MovementPosition Inch4Position
        {
            get
            {
                MovementPosition res = MovementPosition.Unknown;
                if (_PinInch4.ONFeedback && !_PinInch4.OFFFeedback)
                {
                    res = MovementPosition.Up;
                }
                else if (_PinInch4.OFFFeedback && !_PinInch4.ONFeedback)
                {
                    res = MovementPosition.Down;
                }
                return res;
            }
        }

        public DateTime PlcDateTime
        {
            get { return _plcDateTime.CurrentDateTime; }
        }

        public override bool IsError
        {
            get { return _MainPump.IsError || _Generator.IsError; }

        }
        public override bool IsIdle { get; }

        // 腔体压力
        public bool IsPressureToleranceEnabled
        {
            get => _pressureController.EnableTolerance;
            set => _pressureController.EnableTolerance = value;
        }

        public override double ChamberPressure => _pressureController.ProcessGauge.Value;
        public override double ChamberPressurePressure => _pressureController.PressureGauge.Value;
        public double ForelinePressure => _pressureController.ForelineGauge.Value;
        public PressureCtrlMode PressureMode => _pressureController.ThrottleValve.PressureMode;
        public double TargetPressure => _pressureController.TargetPressure;

        // 压力信号
        public bool IsATM => _ATM_sw.Value;
        public bool IsVAC => _VAC_sw.Value;
        public bool IsWLK => _WLK_sw.Value;
        public bool IsRFGInterlockOn => _RFG_Interlock.Value;

        // 温度
        public float SubstrateTempSP => _SubstrateTC.ControlTcSetPoint;
        public float SubstrateTempFB => _SubstrateTC.ControlTcFeedback;

        // Pump 状态
        public bool IsPumpRunning => _MainPump.IsRunning;
        public bool IsFastPumpOpened => _FastPumpValve.Status;
        public bool IsSoftPumpOpened => _SoftPumpValve.Status;

        public bool IsMfc1ValveOpened => _Mfc1Valve.Status;
        public bool IsMfc2ValveOpened => _Mfc2Valve.Status;
        public bool IsMfc3ValveOpened => _Mfc3Valve.Status;
        public bool IsMfc4ValveOpened => _Mfc4Valve.Status;
        public bool IsMfc5ValveOpened => _Mfc5Valve.Status;

        public bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning;

        public bool IsCDA_OK => _CDAPressure.Value;

        // 蝶阀位置
        public float TVPosition => _pressureController.ThrottleValve.PositionFeedback;

        // 腔体压力.end

        // 射频
        public float ForwardPower => _Generator.ForwardPower;
        public bool IsGeneratorON => _Generator.IsPowerOn;
        public float GeneratorSetpoint => _Generator.PowerSetPoint;

        // 流气
        public double TotalGasSetpoint
        {
            get
            {
                double sum = 0;
                foreach (var gas in _gasLines)
                {
                    sum += gas.FlowSP;
                }
                return sum;
            }
        }

        public bool HasGasOutOfRange
        {
            get
            {
                foreach (var gas in _gasLines)
                {
                    if (!gas.IsOutOfRange)
                        return false;
                }
                return true;
            }
        }
        public bool CheckFactoryScrubberSysAlarm => _isFactoryScrubberSysInstalled && _FactoryScrubberSensor != null && _FactoryScrubberSensor.Value;


        // --------------------------Constructor-----------------------
        //
        public JetPM(ModuleName mod) : base(mod.ToString())
        {
            Module = mod;

            var gasCount = SC.GetValue<int>($"{mod}.GasCount");
            _gasLines = new IoGasStick[gasCount];
            _isFactoryScrubberSysInstalled = SC.ContainsItem($"{Module}.ScrubberIsInstalled") ? SC.GetValue<bool>($"{Module}.ScrubberIsInstalled") : false;
            for (int index = 0; index < gasCount; index++)
            {
                _gasLines[index] = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStick{index + 1}");
            }

            _Lid                    = DEVICE.GetDevice<IoLid>($"{Module}.{Virgo_DDevice.Lid}");
            //_LidLocker            = DEVICE.GetDevice<IoCylinder>($"{Module}.{Virgo_DDevice.LidLocker}");
            _ATM_sw                 = DEVICE.GetDevice<IoSensor>($"{Module}.SensorATMSwitch");
            _VAC_sw                 = DEVICE.GetDevice<IoSensor>($"{Module}.SensorVacSwitch");
            _WLK_sw                 = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterLeakOk");
            _CDAPressure            = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
            _SignalTower            = DEVICE.GetDevice<IoSignalTower>($"{Module}.SignalTower");
            //_ArmNotExtend           = DEVICE.GetDevice<IoSensor>($"{Module}.SensorArmNotExtend");
            _RFG_Interlock          = DEVICE.GetDevice<IoSensor>($"{Module}.GeneratorInterlock");
            _pressureController     = DEVICE.GetDevice<IoPressureControl>($"{Module}.{Virgo_DDevice.PressureControl}");
            _SubstrateTC            = DEVICE.GetDevice<IoHeater>($"{Module}.HeaterChamber");
            _ForelineTC             = DEVICE.GetDevice<IoHeater>($"{Module}.ForelineHeater");
            _SoftPumpValve          = DEVICE.GetDevice<IoValve>($"{Module}.{Virgo_DDevice.ValveSoftPumping}");
            _FastPumpValve          = DEVICE.GetDevice<IoValve>($"{Module}.{Virgo_DDevice.ValveFastPumping}");
            _ProcessValve           = DEVICE.GetDevice<IoValve>($"{Module}.{Virgo_DDevice.ValveProcess}");
            _FastVentValve          = DEVICE.GetDevice<IoValve>($"{Module}.{Virgo_DDevice.ValveFastVent}");
            _PurgeValve             = DEVICE.GetDevice<IoValve>($"{Module}.{Virgo_DDevice.ValveChamberPurge}");
            _PurgeValve             = DEVICE.GetDevice<IoValve>($"{Module}.{Virgo_DDevice.ValveChamberPurge}");
            _Mfc1Valve              = DEVICE.GetDevice<IoValve>($"{Module}.{Virgo_DDevice.ValveMfc1}");
            _Mfc2Valve              = DEVICE.GetDevice<IoValve>($"{Module}.{Virgo_DDevice.ValveMfc2}");
            _Mfc3Valve              = DEVICE.GetDevice<IoValve>($"{Module}.{Virgo_DDevice.ValveMfc3}");
            _Mfc4Valve              = DEVICE.GetDevice<IoValve>($"{Module}.{Virgo_DDevice.ValveMfc4}");
            //_Mfc5Valve              = DEVICE.GetDevice<IoValve>($"{Module}.{Virgo_DDevice.ValveMfc5}");
            //_slitDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{Virgo_DDevice.SlitDoor}");
            _LiftPin                = DEVICE.GetDevice<IoCylinder>($"{Module}.{Virgo_DDevice.LiftPin}");
            _PinInch3               = DEVICE.GetDevice<IoCylinder>($"{Module}.{Virgo_DDevice.Inch3Pin}");
            _PinInch4               = DEVICE.GetDevice<IoCylinder>($"{Module}.{Virgo_DDevice.Inch4Pin}");
            _Generator              = DEVICE.GetDevice<IoRf>($"{Module}.{Virgo_DDevice.Rf}");
            _MainPump               = DEVICE.GetDevice<PumpBase>($"{Module}.{Virgo_DDevice.MainPump}");
            _plcDateTime            = DEVICE.GetDevice<IoPlcDateTime>($"{Module}.{Virgo_DDevice.PlcDateTime}");
            _FactoryScrubberSensor  = DEVICE.GetDevice<IoSensor>($"{Module}.FactoryScrubberSysNormal");

            // RS223 AdTec Generator
            if (SC.GetValue<int>($"{mod}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{mod}.Rf.MFG") == (int)GeneratorMFG.AdTec)
            {
                _Generator = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{Virgo_DDevice.Rf}");
            }

            // RS232 AdTec match
            if (SC.GetValue<int>($"{mod}.match.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{mod}.match.MFG") == (int)MatchMFG.AdTec)
            {
                _Match = DEVICE.GetDevice<AdTecMatch>($"{Module}.{Virgo_DDevice.Match}");
            }

            // RS232 Dry pump, SKY
            if (SC.GetValue<int>($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
            {
                if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY)
                {
                    _MainPump = DEVICE.GetDevice<SkyPump>($"{Module}.{Virgo_DDevice.MainPump}");
                }
                else if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
                {
                    _MainPump = DEVICE.GetDevice<EdwardsPump>($"{Module}.{Virgo_DDevice.MainPump}");
                }
            }

            System.Diagnostics.Debug.Assert(null != _Generator);
            System.Diagnostics.Debug.Assert(null != _MainPump);

            WaferManager.Instance.SubscribeLocation(Module, 1);
        }

        public override bool Initialize()
        {
            base.Initialize();
            DATA.Subscribe($"{Name}.IoTemperatureCtrl.TemperatureControl.SubstrateTemperature", () => SubstrateTempFB);
            DATA.Subscribe($"{Module}.WaferSize", () => WaferManager.Instance.GetWafer(Module, 0).Size.ToString());
            return true;
        }

        // -----------------------------Method-------------------------
        //
        public override void Home()
        {
            // 与yp讨论过，PM 初始化不需要

            SetLiftPin(MovementPosition.Down, out _);
            //SetSlitDoor(false, out _);
            //SetGuidePin3Inch(MovementPosition.Down);
            //SetGuidePin4Inch(MovementPosition.Down);
            TryClosePumpAndPostAlarm();
        }
        private void TryClosePumpAndPostAlarm()
        {
            if (CheckFactoryScrubberSysAlarm)
            {
                if (IsFastPumpOpened) OpenValve(ValveType.FAST_PUMP, false);
                if (IsSoftPumpOpened) OpenValve(ValveType.SOFT_PUMP, false);
                EV.PostAlarmLog(Module.ToString(), $"{Module} {Name} Factory Scrubber System is alarm ");
            }
        }

        public void SetSlitDoor(bool open, out string reason)
        {
            reason = string.Empty;

            //// [XIAHUAN]: 只在关门的时候检查arm not extend
            //if (!open && !IsArmNotExtend)
            //{
            //    EV.PostAlarmLog(Module.ToString(), "Arm Not Extend 信号不满足");
            //    return;
            //}
            //_slitDoor.SetCylinder(open, out reason);
        }

        public void BuzzerBlinking(double time)
        {
            if (_SignalTower == null) return;
            _SignalTower.BuzzerBlinking(time);
        }

        public void SwitchOnBuzzerAndRed()
        {
            _SignalTower.SwitchOnBuzzerAndRed("", null);
        }

        public override bool CheckWaterLeak()
        {
            return _WLK_sw.Value;
        }

        public override bool CheckAtm()
        {
            return _ATM_sw.Value && ChamberPressure > 700000;
        }

        public override bool CheckVacuum()
        {
            return _VAC_sw.Value && ChamberPressure < 100;
        }

        public bool CheckSlitDoorOpen()
        {
            return true;
            //return _slitDoor.State == CylinderState.Open;
        }

        public bool CheckSlitDoorClose()
        {
            return true;
            //return _slitDoor.State == CylinderState.Close;
        }

        public bool CheckLiftUp()
        {
            return _LiftPin.State == CylinderState.Open;
        }

        public bool CheckLiftDown()
        {
            return _LiftPin.State == CylinderState.Close;
        }

        public void StartPump(bool on)
        {
            //_pressureController.StartPump(on);
            _MainPump?.SetPumpOnOff(on);
        }

        public void OpenValve(ValveType vlvType, bool on)
        {
            switch (vlvType)
            {
            case ValveType.PROCESS:
                _ProcessValve.TurnValve(on, out _);
                break;
            case ValveType.FAST_PUMP:
                _FastPumpValve.TurnValve(on, out _);
                break;
            case ValveType.SOFT_PUMP:
                _SoftPumpValve.TurnValve(on, out _);
                break;
            case ValveType.FAST_VENT:
                _FastVentValve.TurnValve(on, out _);
                break;
            case ValveType.PURGE:
                _PurgeValve.TurnValve(on, out _);
                break;
                case ValveType.Mfc1:
                    _Mfc1Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc2:
                    _Mfc2Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc3:
                    _Mfc3Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc4:
                    _Mfc4Valve.TurnValve(on, out _);
                    break;
                //case ValveType.Mfc5:
                //    _Mfc5Valve.TurnValve(on, out _);
                //    break;
                default:
                    throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}");
            }
        }

        public void CheckPressureStability() { }

        public override void Monitor()
        {
            foreach (var gas in _gasLines)
            {
                gas.Monitor();
            }
            _trigScrubberSysAlarm.CLK = CheckFactoryScrubberSysAlarm;
            if (_trigScrubberSysAlarm.Q)
            {
                TryClosePumpAndPostAlarm();
            }
        }

        public void CloseValves()
        {
            _SoftPumpValve.TurnValve(false, out _);
            _FastPumpValve.TurnValve(false, out _);

            _ProcessValve.TurnValve(false, out _);
            _PurgeValve.TurnValve(false, out _);

            _FastVentValve.TurnValve(false, out _);
            _PurgeValve.TurnValve(false, out _);

            _Mfc1Valve.TurnValve(false, out _);
            _Mfc2Valve.TurnValve(false, out _);
            _Mfc3Valve.TurnValve(false, out _);
            _Mfc4Valve.TurnValve(false, out _);
            //_Mfc5Valve.TurnValve(false, out _);

            foreach (var stick in _gasLines)
            {
                stick.Stop();
            }
        }

        public bool FlowGas(int gasNum, double val)
        {
            if (_gasLines.Length <= gasNum)
                return false;

            _gasLines[gasNum].Flow(val);
            return true;
        }

        public void StopAllGases()
        {
            foreach (var line in _gasLines)
            {
                line.Stop();
            }
        }

        public bool SetLiftPin(MovementPosition dirt, out string reason)
        {
            reason = string.Empty;

            switch (dirt)
            {
            case MovementPosition.Down:
                return _LiftPin.SetCylinder(false, out reason);
            case MovementPosition.Up:
                return _LiftPin.SetCylinder(true, out reason);
            case MovementPosition.Left:
            case MovementPosition.Right:
            case MovementPosition.Middle:
                throw new ArgumentException("Movement argument error");
            }

            return true;
        }

        public void SetGuidePin3Inch(MovementPosition dirt)
        {
            switch (dirt)
            {
            case MovementPosition.Down:
                _PinInch3.SetCylinder(false, out _);
                break;
            case MovementPosition.Up:
                _PinInch3.SetCylinder(true, out _);
                break;
            default:
                throw new ArgumentException("Movement argument error");
            }
        }

        public void SetGuidePin4Inch(MovementPosition dirt)
        {
            switch (dirt)
            {
            case MovementPosition.Down:
                _PinInch4.SetCylinder(false, out _);
                break;
            case MovementPosition.Up:
                _PinInch4.SetCylinder(true, out _);
                break;
            default:
                throw new ArgumentException("Movement argument error");
            }
        }

        public void SetGeneratorCommunicationMode(int mode)
        {
            _Generator?.SetCommunicationMode(mode);
        }

        public bool GeneratorPowerOn(bool on)
        {
            if (_Generator == null) return false;

            if (on && !IsRFGInterlockOn)
            {
                EV.PostAlarmLog(Module.ToString(), "射频电源 Interlock条件不满足");
                return false;
            }

            return _Generator.SetPowerOnOff(on, out _);
        }

        public bool GeneratorSetpower(float val)
        {
            if (_Generator == null) return false;

            _Generator.SetPower((ushort)val);
            return true;
        }

        public bool SetMatchPosition(float c1, float c2)
        {
            if (_Match == null) return false;
            string reason = string.Empty;
            _Match.SetMatchPosition(c1, c2, out reason);
            return true;
        }

        public void FullOpenTV()
        {
            _pressureController.FullOpenThrottleValve();
        }


        public void HeatSubstrate(double val)
        {
            _SubstrateTC?.RampTemp((float)val);
            _SubstrateTC?.TurnOnOff(true);
        }

        public void HeatForeline(double val)
        {
            _ForelineTC?.RampTemp((float)val);
        }

        public override bool CheckEnableTransfer(EnumTransferType type)
        {
            if (type == EnumTransferType.Pick)
            {
                //return _slitDoor.State == CylinderState.Open && _LiftPin.State == CylinderState.Open;
            }

            if (type == EnumTransferType.Place)
            {
                //return _slitDoor.State == CylinderState.Open && _LiftPin.State == CylinderState.Close;
            }

            return false;
        }

        public override void TransferHandoff(EnumTransferType type)
        {
            switch (type)
            {
            case EnumTransferType.Pick:
                SetLiftPin(MovementPosition.Up, out _);
                break;
            case EnumTransferType.Place:
                SetLiftPin(MovementPosition.Down, out _);
                break;
            case EnumTransferType.Extend:
                break;
            case EnumTransferType.Retract:
                break;
            default:
                break;
            }
        }

        public override void Reset()
        {

        }
    }

    /// <summary>
    /// PM Action
    /// </summary>
    abstract class PmActionBase : ActionBase
    {
        protected internal JetPM _chamber;

        protected PmActionBase(ModuleName mod, JetPM pm) : base(mod)
        {
            _chamber = pm;
        }
    }

    class PinAction : PmActionBase
    {
        public MovementPosition Pos { get; }
        public bool IsWaferTransfered { get; }
        public PMEntity PmEntity { get; set; }

        public PinAction(ModuleName mod, JetPM pm, MovementPosition pos, bool isTransferWafer) : base(mod, pm)
        {
            this.Pos = pos;
            IsWaferTransfered = isTransferWafer;
        }

        public override void Execute()
        {
            if (Module == ModuleName.PMA)
                PmEntity = Singleton<RouteManager>.Instance.PMA;
            else if (Module == ModuleName.PMB)
                PmEntity = Singleton<RouteManager>.Instance.PMB;

            if (PmEntity != null)
            {
                PmEntity.PostMsg(PMEntity.MSG.MoveLiftPin, Pos, ID);
            }
        }

        public override void OnPostWork(string data = null)
        {
            if (IsWaferTransfered)
            {
                if (Pos == MovementPosition.Up)
                {
                    WaferManager.Instance.WaferMoved(ModuleName.EfemRobot, 0, Module, 0);
                }
                else
                {
                    WaferManager.Instance.WaferMoved(Module, 0, ModuleName.EfemRobot, 0);
                }
            }
        }
    }
}