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JetPlasma
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Virgo_D_SLN
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Virgo_D_SLN
/
Virgo_DRT
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Config
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System.sccfg

System.sccfg 36 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <root system="Virgo_D">
    3. 

  3.   <configs name="System">
    4. 

  4.     <config default="false" name="IsSimulatorMode" description="仿真模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
    5. 

  5.     <config default="false" name="IsATMMode" description="大气压调试模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
    6. 

  6.     <config default="false" name="IsCycleMode" description="循环跑片模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
    7. 

  7.     <config default="3" name="CycleCount" description="CycleCount" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
    8. 

  8.     <config default="true" name="PMAIsInstalled" description="Enable PMA" max="" min="" paramter="" tag="" unit="" type="Bool" />
    9. 

  9.     <config default="false" name="PMBIsInstalled" description="Enable PMB" max="" min="" paramter="" tag="" unit="" type="Bool" />
    10. 

  10.     <config default="5" name="ATMCyclePMDelayTime" description="ATMCyclePMDelayTime" max="9999" min="1" paramter="" tag="" unit="s" type="Integer" />
    11. 

  11.     <config default="25" name="MaxTemperatureToleranceTransferWafer" description="MaxTemperatureToleranceTransferWafer" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
    12. 

  12.     <config default="1" name="MaxTemperatureToleranceToTarget" description="MaxTemperatureToleranceToTarget" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
    13. 

  13.     <config default="3000" name="BuzzerBlinkingTime" description="BuzzerBlinkingTime" max="60000" min="1" paramter="" tag="" unit="s" type="Double" />
    14. 

  14.     <config default="3" name="SmallWafer" nameView="Small Wafer" description="小晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    15. 

  15.     <config default="4" name="MidWafer" nameView="Mid Wafer" description="中晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    16. 

  16.     <config default="6" name="BigWafer" nameView="Big Wafer" description="大晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    17. 

  17.     <config default="JetPlasma" name="DisplayLogoName" description="Logo name" max="" min="" paramter="" tag="" unit="" type="String" visible="false" />
    18. 

  18.   </configs>
    19. 

  19. 

  20.   <!--EFEM--><!--
    21. 

  21.   <configs name="EFEM">
    22. 

  22.     <config default="30" name="HomeTimeout" description="home time out" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    23. 

  23.     <config default="127.0.0.1:13000" name="IPAddress" description="EFEM IP,default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
    24. 

  24.   </configs>-->
    25. 

  25. 

  26.   <!--Router-->
    27. 

  27.   <configs name="Scheduler">
    28. 

  28.     <config default="true" name="GroupWaferBySequence" description="GroupWaferBySequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    29. 

  29.     <config default="true" name="IsRunInParallelMode" description="并行模式1对1，串行模式按顺序" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    30. 

  30.   </configs>
    31. 

  31. 

  32.   <!--PMA-->
    33. 

  33.   <configs name="PMA">
    34. 

  34.     <config default="120" name="PrepareTransferTimeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    35. 

  35.     <config default="1" name="OpenGasValveTimeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    36. 

  36.     <config default="1" name="TimeLimitOfCloseGasValve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    37. 

  37.     <config default="1" name="OpenCloseSlitValveTimeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    38. 

  38.     <config default="180" name="VentTime" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    39. 

  39.     <config default="3" name="GasCount" description="Gas stick count" max="4" min="0" paramter="" tag="" unit="" type="Integer" />
    40. 

  40.     <config default="100" name="GasFlowPressureAlarmRange" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" />
    41. 

  41.     <config default="60" name="GasFlowPressureAlarmTime" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    42. 

  42.     <config default="true" name="EnableThrottleValve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    43. 

  43.     <config default="150" name="ChamberHeaterSetPointLimit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    44. 

  44.     <config default="140" name="ForeLineHeaterSetPointLimit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    45. 

  45.     <config default="120" name="CheckSubstrateTempTimeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    46. 

  46.     <config default="90" name="CheckATMTimeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    47. 

  47.     <config default="1" name="VentTimeDelay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    48. 

  48.     <config default="false" name="ScrubberIsInstalled" nameView="Is Scrubber Installed"  description="" max="10" min="0" paramter="" tag="" unit="" type="Bool"/>
    49. 

  49. 

  50. 

  51.     <configs name="DryPump">
    52. 

  52.       <config default="1" name="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    53. 

  53.       <config default="1" name="CommunicationType" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    54. 

  54.       <config default="COM21" name="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    55. 

  55.       <config default="1000" name="ChamberForelinePressureThreshold" description="Chamber Foreline Pressure Threshold" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    56. 

  56.       <config default="20" name="ChamberForelinePressureTimeout" description="Chamber Foreline Pressure Timeout" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    57. 

  57.     </configs>
    58. 

  58.     <configs name="Rf">
    59. 

  59.       <config default="1" name="MFG" description="厂商, 1:AdTec; 2:MKS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    60. 

  60.       <config default="1" name="model" description="型号, 1:AdTec-TX20, 2:AdTec-TX30" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    61. 

  61.       <config default="1" name="CommunicationType" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    62. 

  62.       <config default="COM22" name="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    63. 

  63.       <config default="500" name="PowerAlarmRange" description="Power Alarm Range" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    64. 

  64.       <config default="10" name="PowerAlarmTime" description="Power Alarm Time" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    65. 

  65.       <config default="1" name="ReflectPowerAlarmRange" description="Reflect Power Alarm Range" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    66. 

  66.       <config default="1" name="ReflectPowerAlarmTime" description="Reflect Power Alarm Time" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    67. 

  67.       <config default="3000" name="PowerRange" description="Power Range" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    68. 

  68.       <config default="1" name="Coefficient" description="Coefficient" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    69. 

  69.       <config default="false" name="EnablePulsingFunction" description="Enable Pulsing Function" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    70. 

  70.       <config default="false" name="EnableReflectPower" description="Enable Reflect Power" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    71. 

  71.       <config default="false" name="EnableVoltageCurrent" description="Enable Voltage Current" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    72. 

  72.       <config default="1" name="PowerRegulationFactor" description="Power Regulation Factor" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    73. 

  73.       <config default="1000" name="RfPowerAlarmRange" description="Rf Power Alarm Range" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    74. 

  74.       <config default="3000" name="RfPowerAlarmTime" description="Rf Power Alarm Time" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    75. 

  75.     </configs>
    76. 

  76.     <configs name="match">
    77. 

  77.       <config default="false" name="EnableMatch" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    78. 

  78.       <config default="1" name="MFG" description="厂商" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    79. 

  79.       <config default="1" name="CommunicationType" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    80. 

  80.       <config default="COM23" name="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    81. 

  81.       <config default="1" name="MatchMode" description="Match Mode" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    82. 

  82.       <config default="false" name="EnableC1C2Position" description="Enable C1 C2 Position" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    83. 

  83.       <config default="10" name="MatchPositionC1" description="Match Position C1" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    84. 

  84.       <config default="10" name="MatchPositionC2" description="Match Position C2" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    85. 

  85.     </configs>
    86. 

  86.     <configs name="MfcGas1">
    87. 

  87.       <config default="true" name="MfcEnableAlarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    88. 

  88.       <config default="10" name="MfcAlarmRange" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    89. 

  89.       <config default="10" name="MfcAlarmTime" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    90. 

  90.       <config default="O2" name="GasName" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    91. 

  91.       <config default="true" name="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    92. 

  92.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    93. 

  93.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    94. 

  94.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    95. 

  95.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    96. 

  96.     </configs>
    97. 

  97.     <configs name="MfcGas2">
    98. 

  98.       <config default="true" name="MfcEnableAlarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    99. 

  99.       <config default="10" name="MfcAlarmRange" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    100. 

  100.       <config default="10" name="MfcAlarmTime" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    101. 

  101.       <config default="N2" name="GasName" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    102. 

  102.       <config default="true" name="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    103. 

  103.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    104. 

  104.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    105. 

  105.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    106. 

  106.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    107. 

  107.     </configs>
    108. 

  108.     <configs name="MfcGas3">
    109. 

  109.       <config default="true" name="MfcEnableAlarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    110. 

  110.       <config default="10" name="MfcAlarmRange" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    111. 

  111.       <config default="10" name="MfcAlarmTime" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    112. 

  112.       <config default="AR" name="GasName" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    113. 

  113.       <config default="true" name="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    114. 

  114.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    115. 

  115.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    116. 

  116.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    117. 

  117.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    118. 

  118.     </configs>
    119. 

  119.     <configs name="MfcGas4">
    120. 

  120.       <config default="true" name="MfcEnableAlarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    121. 

  121.       <config default="10" name="MfcAlarmRange" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    122. 

  122.       <config default="10" name="MfcAlarmTime" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    123. 

  123.       <config default="Gas4" name="GasName" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    124. 

  124.       <config default="true" name="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    125. 

  125.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    126. 

  126.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    127. 

  127.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    128. 

  128.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    129. 

  129.     </configs>
    130. 

  130. 	  <!--<configs name="MfcGas5">
    131. 

  131. 		  <config default="true" name="MfcEnableAlarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    132. 

  132. 		  <config default="10" name="MfcAlarmRange" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    133. 

  133. 		  <config default="10" name="MfcAlarmTime" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    134. 

  134. 		  <config default="Gas4" name="GasName" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    135. 

  135. 		  <config default="true" name="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    136. 

  136. 		  <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    137. 

  137. 		  <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    138. 

  138. 		  <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    139. 

  139. 		  <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    140. 

  140. 	  </configs>-->
    141. 

  141.     <configs name="Pump">
    142. 

  142.       <config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    143. 

  143.       <config default="180" name="LeakCheckPumpingTime" description="Leak Check Pumping Time" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    144. 

  144.       <config default="180" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    145. 

  145.       <config default="150" name="PumpBasePressure" description="PM Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    146. 

  146.       <config default="120" name="PumpTimeLimit" description="PM Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    147. 

  147.       <config default="5" name="PumpValveDelay" description="PM Pump Valve Delay" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    148. 

  148.       <config default="150" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    149. 

  149.       <config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    150. 

  150.     </configs>
    151. 

  151.     <configs name="Purge">
    152. 

  152.       <config default="3" name="PurgeCycleCount" description="Purge Cycle Count" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
    153. 

  153.       <config default="700000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    154. 

  154.       <config default="10" name="PurgePumpPressure" description="Purge Pump Pressure" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    155. 

  155.       <config default="60" name="PurgeVentTimeLimit" description="Purge Vent Time Limit" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    156. 

  156.       <config default="60" name="PurgePumpTimeLimit" description="Purge Pump Time Limit" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    157. 

  157.       <config default="10" name="PurgeVentStableTime" description="Purge Vent Stable Time" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    158. 

  158.       <config default="10" name="PurgePumpStableTime" description="Purge Pump Stable Time" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    159. 

  159.     </configs>
    160. 

  160.     <configs name="HeaterChamber" nameView="Heater Chamber" >
    161. 

  161.       <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    162. 

  162.       <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    163. 

  163.       <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    164. 

  164.       <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    165. 

  165.       <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    166. 

  166.       <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    167. 

  167.       <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    168. 

  168.       <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    169. 

  169.       <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    170. 

  170.       <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    171. 

  171.       <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    172. 

  172.       <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    173. 

  173.       <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    174. 

  174.       <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    175. 

  175.       <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    176. 

  176.       <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    177. 

  177.       <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    178. 

  178.       <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    179. 

  179.     </configs>
    180. 

  180.   </configs>
    181. 

  181. 

  182.   <!--PMB--><!--
    183. 

  183.   <configs name="PMB">
    184. 

  184.     <config default="120" name="PrepareTransferTimeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    185. 

  185.     <config default="1" name="OpenGasValveTimeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    186. 

  186.     <config default="1" name="TimeLimitOfCloseGasValve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    187. 

  187.     <config default="1" name="OpenCloseSlitValveTimeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    188. 

  188.     <config default="180" name="VentTime" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    189. 

  189.     <config default="3" name="GasCount" description="Gas stick count" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
    190. 

  190.     <config default="100" name="GasFlowPressureAlarmRange" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" />
    191. 

  191.     <config default="60" name="GasFlowPressureAlarmTime" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    192. 

  192.     <config default="1" name="EnableThrottleValve" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    193. 

  193.     <config default="150" name="ChamberHeaterSetPointLimit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    194. 

  194.     <config default="140" name="ForeLineHeaterSetPointLimit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    195. 

  195.     <config default="120" name="CheckSubstrateTempTimeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    196. 

  196.     <config default="90" name="CheckATMTimeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    197. 

  197.     <config default="1" name="VentTimeDelay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    198. 

  198. 

  199.     <configs name="DryPump">
    200. 

  200.       <config default="1" name="MFG" description="厂商, 1:AdTec; 2:MKS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    201. 

  201.       <config default="0" name="CommunicationType" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    202. 

  202.       <config default="COM23" name="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    203. 

  203.       <config default="1000" name="ChamberForelinePressureThreshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    204. 

  204.       <config default="20" name="ChamberForelinePressureTimeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    205. 

  205.     </configs>
    206. 

  206.     <configs name="Rf">
    207. 

  207.       <config default="1" name="MFG" description="厂商, 1:AdTec; 2:MKS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    208. 

  208.       <config default="1" name="model" description="型号, 1:AdTec-TX20, 2:AdTec-TX30" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    209. 

  209.       <config default="0" name="CommunicationType" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    210. 

  210.       <config default="COM24" name="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    211. 

  211.       <config default="500" name="PowerAlarmRange" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    212. 

  212.       <config default="10" name="PowerAlarmTime" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    213. 

  213.       <config default="1" name="ReflectPowerAlarmRange" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    214. 

  214.       <config default="1" name="ReflectPowerAlarmTime" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    215. 

  215.       <config default="3000" name="PowerRange" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    216. 

  216.       <config default="1" name="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    217. 

  217.       <config default="0" name="EnablePulsingFunction" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    218. 

  218.       <config default="0" name="EnableReflectPower" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    219. 

  219.       <config default="false" name="EnableVoltageCurrent" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    220. 

  220.       <config default="1" name="PowerRegulationFactor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    221. 

  221.       <config default="1000" name="RfPowerAlarmRange" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    222. 

  222.       <config default="3000" name="RfPowerAlarmTime" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    223. 

  223.     </configs>
    224. 

  224.     <configs name="match">
    225. 

  225.       <config default="false" name="EnableMatch" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    226. 

  226.       <config default="1" name="MFG" description="厂商" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    227. 

  227.       <config default="0" name="CommunicationType" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    228. 

  228.       <config default="COM25" name="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    229. 

  229.       <config default="1" name="MatchMode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    230. 

  230.       <config default="false" name="EnableC1C2Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    231. 

  231.       <config default="10" name="MatchPositionC1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    232. 

  232.       <config default="10" name="MatchPositionC2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    233. 

  233.     </configs>
    234. 

  234.     <configs name="MfcGas1">
    235. 

  235.       <config default="true" name="MfcEnableAlarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    236. 

  236.       <config default="10" name="MfcAlarmRange" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    237. 

  237.       <config default="10" name="MfcAlarmTime" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    238. 

  238.       <config default="O2" name="GasName" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    239. 

  239.       <config default="true" name="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    240. 

  240.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    241. 

  241.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    242. 

  242.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    243. 

  243.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    244. 

  244.     </configs>
    245. 

  245.     <configs name="MfcGas2">
    246. 

  246.       <config default="true" name="MfcEnableAlarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    247. 

  247.       <config default="10" name="MfcAlarmRange" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    248. 

  248.       <config default="10" name="MfcAlarmTime" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    249. 

  249.       <config default="N2" name="GasName" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    250. 

  250.       <config default="true" name="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    251. 

  251.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    252. 

  252.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    253. 

  253.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    254. 

  254.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    255. 

  255.     </configs>
    256. 

  256.     <configs name="MfcGas3">
    257. 

  257.       <config default="true" name="MfcEnableAlarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    258. 

  258.       <config default="10" name="MfcAlarmRange" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    259. 

  259.       <config default="10" name="MfcAlarmTime" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    260. 

  260.       <config default="AR" name="GasName" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    261. 

  261.       <config default="true" name="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    262. 

  262.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    263. 

  263.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    264. 

  264.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    265. 

  265.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    266. 

  266.     </configs>
    267. 

  267.     <configs name="MfcGas4">
    268. 

  268.       <config default="true" name="MfcEnableAlarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    269. 

  269.       <config default="10" name="MfcAlarmRange" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    270. 

  270.       <config default="10" name="MfcAlarmTime" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    271. 

  271.       <config default="Gas4" name="GasName" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    272. 

  272.       <config default="true" name="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    273. 

  273.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    274. 

  274.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    275. 

  275.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    276. 

  276.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    277. 

  277.     </configs>
    278. 

  278.     <configs name="Pump">
    279. 

  279.       <config default="30" name="PumpLowerLimitPressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    280. 

  280.       <config default="50" name="PumpUpperLimitPressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    281. 

  281.       <config default="30" name="LeakRate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    282. 

  282.       <config default="80" name="PressureTrip1" description="" max="760" min="0" paramter="" tag="" unit="torr" type="Integer" />
    283. 

  283.       <config default="180" name="LeakCheckPumpTimeLimit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    284. 

  284.       <config default="180" name="LeakCheckTimeLimit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    285. 

  285.       <config default="150" name="PumpBasePressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    286. 

  286.       <config default="120" name="PumpTimeLimit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    287. 

  287.       <config default="5" name="PumpValveDelay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    288. 

  288.     </configs>
    289. 

  289.     <configs name="Purge">
    290. 

  290.       <config default="3" name="PurgeCycleCount" description="" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
    291. 

  291.       <config default="700000" name="PurgeVentPressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    292. 

  292.       <config default="10" name="PurgePumpPressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    293. 

  293.       <config default="60" name="PurgeVentTimeLimit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    294. 

  294.       <config default="60" name="PurgePumpTimeLimit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    295. 

  295.       <config default="10" name="PurgeVentStableTime" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    296. 

  296.       <config default="10" name="PurgePumpStableTime" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    297. 

  297.     </configs>
    298. 

  298.     <configs name="HeaterChamber">
    299. 

  299.       <config default="0" name="HeaterOffset25" description="30&lt;=设定值&lt;50" max="20" min="0" paramter="" tag="" unit="degree" type="Integer" />
    300. 

  300.       <config default="0" name="HeaterOffset100" description="50&lt;=设定值&lt;100" max="20" min="0" paramter="" tag="" unit="degree" type="Integer" />
    301. 

  301.       <config default="0" name="HeaterOffset200" description="100&lt;=设定值&lt;150" max="20" min="0" paramter="" tag="" unit="degree" type="Integer" />
    302. 

  302.     </configs>
    303. 

  303.   </configs>-->
    304. 

  304. 

  305.   <!--FA-->
    306. 

  306.   <configs name="FA">
    307. 

  307.     <config default="Passive" name="ConnectionMode" description="Passive  Active" max="0" min="0" paramter="" tag="" unit="" type="String" />
    308. 

  308.     <config default="127.0.0.1" name="LocalIpAddress" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    309. 

  309.     <config default="5021" name="LocalPortNumber" description="LocalPortNumber" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    310. 

  310.     <config default="127.0.0.1" name="RemoteIpAddress" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    311. 

  311.     <config default="5020" name="RemotePortNumber" description=" " max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    312. 

  312.     <config default="45" name="T3Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    313. 

  313.     <config default="10" name="T5Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    314. 

  314.     <config default="5" name="T6Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    315. 

  315.     <config default="10" name="T7Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    316. 

  316.     <config default="5" name="T8Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    317. 

  317.     <config default="false" name="EnableSpooling" description="EnableSpooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    318. 

  318.     <config default="30" name="LinkTestInterval" description="LinkTestInterval" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    319. 

  319.     <config default="Enabled" name="DefaultCommunicationState" description="Enabled /Disabled" max="0" min="0" paramter="" tag="" unit="" type="String" />
    320. 

  320.     <config default="Online" name="DefaultControlState" description="Online / Offline" max="0" min="0" paramter="" tag="" unit="" type="String" />
    321. 

  321.     <config default="Local" name="DefaultControlSubState" description="Local / Remote" max="0" min="0" paramter="" tag="" unit="" type="String" />
    322. 

  322.     <config default="0" name="DeviceId" description="DeviceId" max="0" min="0" paramter="" tag="" unit="" type="String" />
    323. 

  323.   </configs>
    324. 

  324. </root>
    325.