Virgo_D_SLN/Virgo_DRT/Config/DeviceModelVirgo_D.xml

<?xml version="1.0" encoding="utf-16"?>
<DeviceModelDefine type="Virgo_D" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
  <IoValves>
    <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="SV10" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="SV11" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="SV12" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
	  <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="SV13" unit="" isNc="true"
		  isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
	  <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="SV14" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveChamberPurge" display="Purge valve" schematicId="SV8"
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Chamber_purge_valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveProcess" display="Process gas final valve" schematicId="SV1"
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Process_gas_final_valve"
             diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveSoftPumping" display="Soft pumping valve" schematicId="SV2"
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
             diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveFastPumping" display="Fast pumping valve" schematicId="SV3"
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve"
             diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveFastVent" display="Fast vent valve" schematicId="SV9"
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Chamber_vent_valve"
             diCloseSensor="" diOpenSensor="" />
  </IoValves>

  <IoMfcs assembly="Virgo_DRT" classType="Virgo_DRT.Devices.IODevices.IoMfc">
    <IoMfc id="MfcGas1" display="O2" schematicId="MFC1" unit="sccm"
           aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC1_Pressure"
           scGasName="Gas1Name"
           scEnable="Gas1Enable"
           scN2Scale="Gas1MfcN2Scale"
           scScaleFactor="Gas1MfcScaleFactor"
           scAlarmRange="Gas1MfcAlarmRange"
           scEnableAlarm="Gas1MfcEnableAlarm"
           scAlarmTime="Gas1MfcAlarmTime"
           scFlowRegulationFactor="Gas1MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
    <IoMfc id="MfcGas2" display="AR" schematicId="MFC2" unit="sccm"
           aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC2_Pressure"
           scGasName="Gas2Name"
           scEnable="Gas2Enable"
           scN2Scale="Gas2MfcN2Scale"
           scScaleFactor="Gas2MfcScaleFactor"
           scAlarmRange="Gas2MfcAlarmRange"
           scEnableAlarm="Gas2MfcEnableAlarm"
           scAlarmTime="Gas2MfcAlarmTime"
           scFlowRegulationFactor="Gas2MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
    <IoMfc id="MfcGas3" display="N2" schematicId="MFC3" unit="sccm"
           aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC3_Pressure"
           scGasName="Gas3Name"
           scEnable="Gas3Enable"
           scN2Scale="Gas3MfcN2Scale"
           scScaleFactor="Gas3MfcScaleFactor"
           scAlarmRange="Gas3MfcAlarmRange"
           scEnableAlarm="Gas3MfcEnableAlarm"
           scAlarmTime="Gas3MfcAlarmTime"
           scFlowRegulationFactor="Gas3MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
	  <IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
			aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
			diPressureAlarm="DI_MFC4_Pressure"
			scGasName="Gas4Name"
			scEnable="Gas4Enable"
			scN2Scale="Gas4MfcN2Scale"
			scScaleFactor="Gas4MfcScaleFactor"
			scAlarmRange="Gas4MfcAlarmRange"
			scEnableAlarm="Gas4MfcEnableAlarm"
			scAlarmTime="Gas4MfcAlarmTime"
			scFlowRegulationFactor="Gas4MfcFlowRegulationFactor"
			scDefaultSetPoint="" />
	  <!--<IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
		  aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
		  diPressureAlarm="DI_MFC5_Pressure"
		  scGasName="Gas5Name"
		  scEnable="Gas5Enable"
		  scN2Scale="Gas5MfcN2Scale"
		  scScaleFactor="Gas5MfcScaleFactor"
		  scAlarmRange="Gas5MfcAlarmRange"
		  scEnableAlarm="Gas5MfcEnableAlarm"
		  scAlarmTime="Gas5MfcAlarmTime"
		  scFlowRegulationFactor="Gas5MfcFlowRegulationFactor"
		  scDefaultSetPoint="" />-->
  </IoMfcs>

  <IoGasSticks assembly="Virgo_DRT" classType="Virgo_DRT.Devices.IoGasStick">
    <IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" />
    <IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" />
    <IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" />
    <IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" />
	<!--<IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />-->
  </IoGasSticks>

  <IoSignalTowers assembly="Virgo_DRT" classType="Virgo_DRT.Devices.IoSignalTower">
    <IoSignalTower id="SignalTower" display=""  schematicId="" unit="" doRed="DO_Red_Light" doYellow="DO_Yellow_Light" doGreen="DO_Green_Light" doBuzzer="DO_Buzzer"/>
  </IoSignalTowers>
  
  <IoSensors>
    <IoSensor id="SensorATMSwitch" display="ATM Switch"  schematicId="" unit="" di="DI_PM_ATM_SW" isLowAsNormal="" textOutTrigValue="true"
              infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorVacSwitch" display="VAC Switch"  schematicId="" unit="" di="DI_PM_VAC_SW" isLowAsNormal="" textOutTrigValue="true"
              infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorWaterFlowOk" display="Water Flow OK"  schematicId="" unit="" di="DI_Cooling_Water_Flow_SW" isLowAsNormal="" textOutTrigValue="false"
              infoText="" warningText="" alarmText="sensor water flow abnormal" />
    <IoSensor id="SensorWaterLeakOk" display="Water Leak Ok"  schematicId="" unit="" di="DI_Water_Leak" isLowAsNormal="" textOutTrigValue="false"
              infoText="" warningText="" alarmText="Sensor water leak" />
    <IoSensor id="N2PressureOk" display="N2 Pressure OK"  schematicId="" unit="" di="DI_N2_Pressure" isLowAsNormal="" textOutTrigValue="false"
              infoText="" warningText="" alarmText="N2 Pressure Alarm" />
    <IoSensor id="SensorCDAPressureOk" display="CDA pressure OK"  schematicId="" unit="" di="DI_CDA_Pressure" isLowAsNormal="" textOutTrigValue="false"
              infoText="" warningText="" alarmText="Sensor CDA pressure abnormal" />
    
    <IoSensor id="TRANSFORMER_FAN_ALARM" display="TRANSFORMER FAN ALARM"  schematicId="" unit="" di="DI_TRANSFORMER_FAN_ALARM" isLowAsNormal="" textOutTrigValue="false"
             infoText="" warningText="" alarmText="TRANSFORMER FAN Alarm" />
    <IoSensor id="SourceFan1" display="Source Over temperature"  schematicId="" unit="" di="DI_SourceFan1" isLowAsNormal="" textOutTrigValue="false"
              infoText="Sensor source OT switch" warningText="" alarmText="" />
    <IoSensor id="SourceFan2" display="LID over temperature"  schematicId="" unit="" di="DI_SourceFan2" isLowAsNormal="" textOutTrigValue="false"
              infoText="LID OT Switch" warningText="" alarmText="" />
    <IoSensor id="GeneratorInterlock" display="RFG hardware interlock" di="DI_Generator_Hardware_Interlock" isLowAsNormal="" infoText="Generator interlock" warningText="" alarmText="" />
    <IoSensor id="FactoryScrubberSysNormal" display="Factory Scrubber Sys Normal" di="DI_Factory_Scrubber_SYS_Normal" isLowAsNormal="" textOutTrigValue="true"  infoText="" warningText="" alarmText="" />
  </IoSensors>

  <IoPumps assembly="Virgo_DRT" classType="Virgo_DRT.Devices.IoPump" IsEnabled = "False">
    <IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
            diBreakerState=""
            diRunning=""
            diStart=""
            diStop=""
            diAlarm="DI_Pump_Alarm"
            diWarning="DI_Pump_Warning"
            diPumpTempAlarm=""
            diN2Alarm="DI_Pump_N2_Purge_Alarm"
            diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
            diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"

            doStart="DO_Pump_Start"
            doStop="DO_Pump_Stop"
            doWaterFlowAlarm=""
            doN2PressureAlarm=""

            aiWaterFlow=""
            aiN2Pressure=""
            aoN2PressureAlarmMaxValue=""
            aoN2PressureAlarmMinValue=""
            aoWaterFlowAlarmMaxValue=""
            aoWaterFlowAlarmMinValue=""

            scEnableDryPump="EnableDryPump"
            scEnableWaterFlow="PumpEnableWaterFlow"
            scWaterFlowMinValue="PumpWaterFlowMinValue"
            scWaterFlowMaxValue="PumpWaterFlowMaxValue"
            scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
            scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
            scEnableN2Pressure="PumpEnableN2Pressure"
            scN2PressureMinValue="PumpN2PressureMinValue"
            scN2PressureMaxValue="PumpN2PressureMaxValue"
            scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
            scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
  </IoPumps>

  <IoPressureMeters assembly="Virgo_DRT" classType="Virgo_DRT.Devices.IODevices.IoPressureMeter">
    <IoPressureMeter id="ProcessGauge" display="process Pressure" schematicId="" unit="mTorr"
                     aiValue="AI_Process_pressure" diGaugeFail="" scPrecision="" />
    <IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
                     aiValue="AI_Chamber_pressure"
                     diGaugeFail=""
                     scPrecision="ChamberPressureGaugePrecision" />
    <IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
                     aiValue="AI_Foreline_pressure" diGaugeFail="" scPrecision="" />
  </IoPressureMeters>

  <IoThrottleValves assembly="Virgo_DRT" classType="Virgo_DRT.Devices.IoThrottleValve">
    <IoThrottleValve  id="ThrottleValve" display="" schematicId="" unit=""
                      aiPositionFeedback="AI_Throttle_Valve_Real_Position"
                      aiPressureFeedback="AI_Throttle_Valve_Real_Pressure"
                      aiState=""
                      aoPositionSetPoint="AO_Throttle_Valve_Position_Setpoint"
                      aoPressureSetPoint="AO_Throttle_Valve_Pressure_Setpoint"
                      aoPressureMode="AO_Throttle_Valve_Work_Mode" />
  </IoThrottleValves>

  <IoPressureControls assembly="Virgo_DRT" classType="Virgo_DRT.Devices.IoPressureControl">
    <IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
                       diLogicProcessGasFlowing=""
                       scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
                       scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
                       scIsIndependentControl="IsIndependentControl"
                       scIsBoostPumpInstalled="EnableBoosterPump"
                       scTvInstalled="EnableThrottleValve"
                       boost="" tv="ThrottleValve" drypump="MainPump"
                       pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" />
  </IoPressureControls>

  <IoRfs assembly="Virgo_DRT" classType="Virgo_DRT.Devices.IoRf" IsEnabled = "False">
    <IoRf  id="Rf"
            display="RF Generator"
            schematicId=""
            unit=""
            doOnOff="DO_Generator_Power_ON"
            diOnOffFeedback=""
            diInterlock="DI_Generator_Hardware_Interlock"
            diOverTemp =""
            aiCurrent=""
            aiVoltage=""
            diBreakerState=""
            diIArc=""
            diOffline=""
            diVArc=""
            doWaterFlowAlarm=""
            doWaterFlowWarning=""

            aoMatchMode=""
            aoMatchPositionC1=""
            aoMatchPositionC2=""
            aoWorkMode=""
            aoFrequency=""
            aoDuty=""
            aoPower=""
            aoCoefficient=""
            aiWaterFlow=""
            aiForwardPower=""
            aiReflectPower=""
            aiMatchMode =""
            aiMatchPositionC1=""
            aiMatchPositionC2=""

            scMatchMode="MatchMode"
            scMatchPositionC1="MatchPositionC1"
            scMatchPositionC2="MatchPositionC2"
            scPowerAlarmRange="RfPowerAlarmRange"
            scPowerAlarmTime="RfPowerAlarmTime"
            scReflectPowerAlarmRange="RfReflectPowerAlarmRange"
            scReflectPowerAlarmTime="RfReflectPowerAlarmTime"
            scPowerRange="PowerRange"
            scCoefficient="Coefficient"
            scEnablePulsingFunction="EnablePulsingFunction"
            scEnableC1C2Position="EnableC1C2Position"
            scEnableReflectPower="EnableReflectPower"
            scEnableVoltageCurrent="EnableVoltageCurrent"
            scPowerRegulationFactor="PowerRegulationFactor" />
  </IoRfs>

  <IoHeaters assembly="Virgo_DRT" classType="Virgo_DRT.Devices.IoHeater">
    <IoHeater id="HeaterChamber" display="Chamber Heater" schematicId="VCHTR" unit="℃"
           doPowerOn="DO_Substrate_Heater_On"
           diDeviation="DI_Substrate_TC_Deviation_out_of_range"
           diPowerOnFeedback="DI_Substrate_Heater_On_FB"
           diControlTcBroken="DI_Substrate_Control_TC_Broken_Alarm"
           diMonitorTcBroken="DI_Substrate_Monitor_TC_Broken_Alarm"
           aoSetPoint="AO_Substrate_Temperature_Setpoint"
           aoSetPointLimit="AO_Substrate_Temp_Limit_Setpoint"
           aiFeedback="AI_Substrate_Control_TC_Temp"
           aiMonitor="AI_Substrate_Monitor_TC_Temp"
           scSetPointLimit="ChamberHeaterSetPointLimit" />
    <IoHeater id="ForelineHeater" display="Foreline Heater" schematicId="" unit="℃"
         doPowerOn="DO_Forline_Heater_On"
         diDeviation="DI_Foreline_TC_Deviation_out_of_range"
         diPowerOnFeedback="DI_Foreline_Heater_On_FB"
         diControlTcBroken="DI_Foreline_Control_TC_Broken_Alarm"
         diMonitorTcBroken="DI_Foreline_Monitor_TC_Broken_Alarm"
         aoSetPoint="AO_Foreline_Temperature_Setpoint"
         aoSetPointLimit="AO_Foreline_Temp_Limit_Setpoint"
         aiFeedback="AI_Foreline_Control_TC_Temp"
         aiMonitor="AI_Foreline_Monitor_TC_Temp"
         scSetPointLimit="ForeLineHeaterSetPointLimit" />
  </IoHeaters>

  <IoHeartbeats assembly="Virgo_DRT" classType=" Virgo_DRT.Devices.IODevices.IoHeartbeat">
    <IoHeartbeat  id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
  </IoHeartbeats>

  <IoResets>
    <IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
  </IoResets>

  <IoStatisticss>
    <IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
                  diMonitorSignal=""
                  scLastPMTime="RfOnTimeLastPMTime"
                  scTimeFromLastPM="RfOnTimeFromLastPM"
                  scTimeTotal="RfOnTimeTotal"
                  scEnableAlarm="RfOnTimeEnableAlarm"
                  scPMInterval="RfOnTimePMInterval" />

    <IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
                  diMonitorSignal="DI_Pump_Running"
                  scLastPMTime="PumpOnTimeLastPMTime"
                  scTimeFromLastPM="PumpOnTimeFromLastPM"
                  scTimeTotal="PumpOnTimeTotal"
                  scEnableAlarm="PumpOnTimeEnableAlarm"
                  scPMInterval="PumpOnTimePMInterval" />
  </IoStatisticss>

  <IoPlcDateTimes>
    <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
                  aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
  </IoPlcDateTimes>

  <IoCylinders assembly="Virgo_DRT" classType="Virgo_DRT.Devices.IoCylinder">
    <IoCylinder id="LiftPin" display="Wafer lifter" schematicId="" unit="" doMotorRelay=""
                doON="DO_Lift_Pin_Up" doOFF="DO_Lift_Pin_Down" diON="DI_Lift_Pin_Up" diOFF="DI_Lift_Pin_Down" />
    
    <IoCylinder id="Inch3Pin" display="Small Pin" schematicId="" unit=""
                doON="DO_Guide_Pin_Small_Lifter_Up" doOFF="DO_Guide_Pin_Small_Lifter_Down"
                diON="DI_Guide_Pin_Small_Lifter_Up_Pos" diOFF="DI_Guide_Pin_Small_Lifter_Down_Pos" />

    <IoCylinder id="Inch4Pin" display="Medium Pin" schematicId="" unit=""
                doON="DO_Guide_Pin_Medium_Lifter_Up" doOFF="DO_Guide_Pin_Medium_Lifter_Down"
                diON="DI_Guide_Pin_Medium_Lifter_Up_Pos" diOFF="DI_Guide_Pin_Medium_Lifter_Down_Pos" />
  </IoCylinders>

  <IoLids assembly="Virgo_DRT" classType=" Virgo_DRT.Devices.IODevices.IoLid">
    <IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_Lid_Closed" />
  </IoLids>
</DeviceModelDefine>