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Virgo_D_SLN
/
Virgo_DRT
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Config
/
ClusterGemModel.xml

ClusterGemModel.xml 17 KB
永久連結 文件歷史 原始文件

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  1. <?xml version="1.0" encoding="UTF-8"?>
    2. 

  2. <Equipment xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema" persistence="false" schemaVersion="1.0.3" productInfo="SecsToHost.Net Compatible">
    3. 

  3.   <License licenseId="" licensePath="" />
    4. 

  4.   <Nameable id="Cluster" description="DIClean" locator="" alias="DIClean" make="DIClean" model="DIClean" softwareRev="1.0" />
    5. 

  5.   <GemConnection protocol="Hsms" defaultCommunicationState="Enabled" defaultControlState="Online" defaultOnlineSubState="Local" deviceId="0" multipleOpen="false" maxOpenTransactions="3">
    6. 

  6.     <HSMS connectionMode="Passive" linktestInterval="30" localIPAddress="127.0.0.1" localPortNumber="5021" remoteIPAddress="127.0.0.1" remotePortNumber="5020" T3Timeout="45" T5Timeout="10" T6Timeout="5" T7Timeout="10" T8Timeout="5" />
    7. 

  7.     <RS232 commPort="1" baudRate="9600" retry="3" t1="1" t2="10" t3="30" t4="10" />
    8. 

  8.   </GemConnection>
    9. 

  9.   <SecsItemFormats ackc5="Binary" ackc7="Binary" ackc7a="U1" ackc10="Binary" alid="U4" alcd="Binary" altx="Ascii" aled="Binary" attrid="Ascii" ccode="U2" ceid="U4" cpname="Ascii" dataid="U4" dsper="Ascii" errw7="Ascii" loc="Binary" mdln="Ascii" mid="Ascii" objid="Ascii" objspec="Ascii" objtype="Ascii" ppbody="Binary" ppid="Ascii" rcmd="Ascii" repgsz="U4" rptid="U4" seqnum="U2" softrev="Ascii" text="Ascii" tid="Binary" totsmp="U4" trid="U4" svid="U4" ecid="U4" ddid="U4" errcode="U1" opid="U1" length="U4" cmda="U1" ecmin="U4" ecmax="U4" ecdef="Ascii" idtyp="Binary" fnloc="U2" ffrot="U2" orloc="Binary" rpsel="U1" dutms="Ascii" xdies="U4" ydies="U4" rowct="U4" colct="U4" nulbc_binlt_bcequ="U1" prdct="U1" praxi="Binary" smpln="U4" mlcl="U8" refp="I2" />
    10. 

  10.   <Logger logLevel="Info" rolloverSize="10000000" maxBytes="100000" messageLengthLimit="1048576" />
    11. 

  11.   <Clock timeFormat="yymmddhhmmss" />
    12. 

  12.   <RemoteCommand allowLocalMode="false">
    13. 

  13.     <S2F21>
    14. 

  14.       <S2F21Command name="100" logicalName="START" description=" " />
    15. 

  15.       <S2F21Command name="101" logicalName="PAUSE" description=" " />
    16. 

  16.       <S2F21Command name="102" logicalName="STOP" description=" " />
    17. 

  17.       <S2F21Command name="103" logicalName="PP-SELECT" description=" " />
    18. 

  18.       <S2F21Command name="104" logicalName="RESUME" description=" " />
    19. 

  19.       <S2F21Command name="105" logicalName="ABORT" description=" " />
    20. 

  20.     </S2F21>
    21. 

  21.     <S2F41>
    22. 

  22.       <S2F41Command name="ReadCarrierID" logicalName="ReadCarrierID" description=" " />
    23. 

  23.     </S2F41>
    24. 

  24.     <S2F49>
    25. 

  25.       <S2F49Command name="GOREMOTE" logicalName="GOREMOTE" description="">
    26. 

  26.       </S2F49Command>
    27. 

  27.       <S2F49Command name="PP-SELECT" logicalName="PP-SELECT" description=" ">
    28. 

  28.       </S2F49Command>
    29. 

  29.       <S2F49Command name="START" logicalName="START" description=" ">
    30. 

  30.       </S2F49Command>
    31. 

  31.       <S2F49Command name="STOP" logicalName="STOP" description=" ">
    32. 

  32.       </S2F49Command>
    33. 

  33.       <S2F49Command name="ABORT" logicalName="ABORT" description=" ">
    34. 

  34.       </S2F49Command>
    35. 

  35.       <S2F49Command name="PAUSE" logicalName="PAUSE" description=" ">
    36. 

  36.       </S2F49Command>
    37. 

  37.       <S2F49Command name="RESUME" logicalName="RESUME" description=" ">
    38. 

  38.       </S2F49Command>
    39. 

  39.     </S2F49>
    40. 

  40.   </RemoteCommand>
    41. 

  41.   <StatusVariables>
    42. 

  42.     <SVID id="1" valueType="List" logicalName="AlarmsEnabled" value="" eventTrigger="" units="" description=" " isArray="false" />
    43. 

  43.     <SVID id="2" valueType="List" logicalName="AlarmsSet" value="" eventTrigger="" description=" " isArray="false" />
    44. 

  44.     <SVID id="3" valueType="Ascii" logicalName="Clock" value="" eventTrigger="" description=" " isArray="false" />
    45. 

  45.     <SVID id="4" valueType="U4" logicalName="ControlState" value="1" eventTrigger="" description=" " isArray="false" />
    46. 

  46.     <SVID id="5" valueType="List" logicalName="EventsEnabled" value="" eventTrigger="" description=" " isArray="false" />
    47. 

  47.     <SVID id="6" valueType="Ascii" logicalName="PPExecName" value="PPExecName" eventTrigger="" description=" " isArray="false" />
    48. 

  48.     <SVID id="7" valueType="U1" logicalName="PreviousProcessState" value="0" eventTrigger="" description=" " isArray="false" />
    49. 

  49.     <SVID id="8" valueType="U1" logicalName="ProcessState" value="0" eventTrigger="" description=" " isArray="false" />
    50. 

  50.     <SVID id="9" valueType="U4" logicalName="SpoolCountActual" eventTrigger="" description=" " isArray="false" />
    51. 

  51.     <SVID id="10" valueType="U4" logicalName="SpoolCountTotal" eventTrigger="" description=" " isArray="false" />
    52. 

  52.     <SVID id="11" valueType="Ascii" logicalName="SpoolFullTime" eventTrigger="" description=" " isArray="false" />
    53. 

  53.     <SVID id="12" valueType="Ascii" logicalName="SpoolStartTime" eventTrigger="" description=" " isArray="false" />
    54. 

  54.     <SVID id="13" valueType="Ascii" logicalName="SpoolState" value="1" eventTrigger="" description=" " isArray="false" />
    55. 

  55.     <SVID id="14" valueType="Ascii" logicalName="SpoolSubstate" value="0" eventTrigger="" description=" " isArray="false">
    56. 

  56.     </SVID>
    57. 

  57.     <SVID id="1001" valueType="Ascii" logicalName="CarrierPort1State" value="" units="" description=" " eventTrigger=" " />
    58. 

  58.     <SVID id="1002" valueType="Ascii" logicalName="CarrierPort2State" value="" units="" description=" " eventTrigger=" " />
    59. 

  59.     <SVID id="1003" valueType="Ascii" logicalName="CarrierPort3State" value="" units="" description=" " eventTrigger=" " />
    60. 

  60.     <SVID id="1004" valueType="Ascii" logicalName="CarrierPort4State" value="" units="" description=" " eventTrigger=" " />
    61. 

  61.     <SVID id="1005" valueType="Ascii" logicalName="CarrierPort5State" value="" units="" description=" " eventTrigger=" " />
    62. 

  62.     <SVID id="1006" valueType="Ascii" logicalName="CarrierPort6State" value="" units="" description=" " eventTrigger=" " />
    63. 

  63.     <SVID id="1007" valueType="Ascii" logicalName="CarrierPort7State" value="" units="" description=" " eventTrigger=" " />
    64. 

  64.     <SVID id="1008" valueType="Ascii" logicalName="CarrierPort8State" value="" units="" description=" " eventTrigger=" " />
    65. 

  65.     <SVID id="1009" valueType="Ascii" logicalName="CarrierPort1CurrentSlotMap" value="" units="" description=" " eventTrigger=" " />
    66. 

  66.     <SVID id="1010" valueType="Ascii" logicalName="CarrierPort2CurrentSlotMap" value="" units="" description=" " eventTrigger=" " />
    67. 

  67.     <SVID id="1011" valueType="Ascii" logicalName="CarrierPort3CurrentSlotMap" value="" units="" description=" " eventTrigger=" " />
    68. 

  68.     <SVID id="1012" valueType="Ascii" logicalName="CarrierPort4CurrentSlotMap" value="" units="" description=" " eventTrigger=" " />
    69. 

  69.     <SVID id="1013" valueType="Ascii" logicalName="CarrierPort5CurrentSlotMap" value="" units="" description=" " eventTrigger=" " />
    70. 

  70.     <SVID id="1014" valueType="Ascii" logicalName="CarrierPort6CurrentSlotMap" value="" units="" description=" " eventTrigger=" " />
    71. 

  71.     <SVID id="1015" valueType="Ascii" logicalName="CarrierPort7CurrentSlotMap" value="" units="" description=" " eventTrigger=" " />
    72. 

  72.     <SVID id="1016" valueType="Ascii" logicalName="CarrierPort8CurrentSlotMap" value="" units="" description=" " eventTrigger=" " />
    73. 

  73.     <SVID id="1017" valueType="List" logicalName="CarrierPort1CurrentWaferId" value="" units="" description=" " eventTrigger=" " />
    74. 

  74.     <SVID id="1018" valueType="List" logicalName="CarrierPort2CurrentWaferId" value="" units="" description=" " eventTrigger=" " />
    75. 

  75.     <SVID id="1019" valueType="List" logicalName="CarrierPort3CurrentWaferId" value="" units="" description=" " eventTrigger=" " />
    76. 

  76.     <SVID id="1020" valueType="List" logicalName="CarrierPort4CurrentWaferId" value="" units="" description=" " eventTrigger=" " />
    77. 

  77.     <SVID id="1021" valueType="List" logicalName="CarrierPort5CurrentWaferId" value="" units="" description=" " eventTrigger=" " />
    78. 

  78.     <SVID id="1022" valueType="List" logicalName="CarrierPort6CurrentWaferId" value="" units="" description=" " eventTrigger=" " />
    79. 

  79.     <SVID id="1023" valueType="List" logicalName="CarrierPort7CurrentWaferId" value="" units="" description=" " eventTrigger=" " />
    80. 

  80.     <SVID id="1024" valueType="List" logicalName="CarrierPort8CurrentWaferId" value="" units="" description=" " eventTrigger=" " />
    81. 

  81.     <SVID id="1025" valueType="List" logicalName="PortCategory" value="" units="" description=" " eventTrigger=" " />
    82. 

  82.   </StatusVariables>
    83. 

  83.   <EquipmentConstants suppressECMinMaxType="false">
    84. 

  84.     <ECID id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="2" units="" description="" eventTrigger=" " isArray="false" />
    85. 

  85.     <ECID id="2001" valueType="U4" logicalName="MaxSpoolTransmit" value="100" min="0" max="100" units="" description="" eventTrigger=" " isArray="false" />
    86. 

  86.     <ECID id="2003" valueType="Boolean" logicalName="OverWriteSpool" value="FALSE" min="0" max="0" units="" description="" eventTrigger=" " isArray="false" />
    87. 

  87.     <ECID id="2005" valueType="U4" logicalName="MaxSpoolCapacity" value="100" min="0" max="100" units="" description="" eventTrigger=" " isArray="false" />
    88. 

  88.     <ECID id="2006" valueType="Boolean" logicalName="SpoolEnabled" value="FALSE" min="0" max="0" units="" description="" eventTrigger=" " isArray="false" />
    89. 

  89.     <ECID id="2007" valueType="U1" logicalName="TimeFormat" value="0" min="0" max="1" units="" description="" eventTrigger=" " isArray="false" />
    90. 

  90.     <ECID id="2008" valueType="I1" logicalName="PortUsage01" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    91. 

  91.     <ECID id="2009" valueType="I1" logicalName="PortUsage02" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    92. 

  92.     <ECID id="2010" valueType="I1" logicalName="PortUsage03" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    93. 

  93.     <ECID id="2011" valueType="I1" logicalName="PortUsage04" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    94. 

  94.     <ECID id="2012" valueType="I1" logicalName="PortUsage05" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    95. 

  95.     <ECID id="2013" valueType="I1" logicalName="PortUsage06" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    96. 

  96.     <ECID id="2014" valueType="I1" logicalName="PortUsage07" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    97. 

  97.     <ECID id="2015" valueType="I1" logicalName="PortUsage08" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    98. 

  98.     <ECID id="2016" valueType="I1" logicalName="EnableAutoCarrierIDReadAfterCarrierArrived" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    99. 

  99.     <ECID id="2017" valueType="I1" logicalName="EnableAutoUndockAferProcessComplete" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    100. 

  100.     <ECID id="2018" valueType="I1" logicalName="ReadWaferIDAlignerAngle" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    101. 

  101.     <ECID id="2019" valueType="I1" logicalName="RobotSpeed" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    102. 

  102.     <ECID id="2020" valueType="I1" logicalName="Blade1Enable" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    103. 

  103.     <ECID id="2021" valueType="I1" logicalName="Blade2Enable" value="" min="0" max="0" units="" description=" " eventTrigger=" " />
    104. 

  104.   </EquipmentConstants>
    105. 

  105.   <DataVariables>
    106. 

  106.     <DVID id="3001" valueType="U4" logicalName="EventLimit" value="0" eventTrigger="" description=" " isArray="false" />
    107. 

  107.     <DVID id="3002" valueType="U4" logicalName="LimitVariable" value="0" eventTrigger="" description=" " isArray="false" />
    108. 

  108.     <DVID id="3003" valueType="Ascii" logicalName="PPChangeName" value="" eventTrigger="" description=" " isArray="false" />
    109. 

  109.     <DVID id="3004" valueType="U2" logicalName="PPChangeStatus" value="1" eventTrigger="" description=" " isArray="false" />
    110. 

  110.     <DVID id="3005" valueType="Binary" logicalName="TransitionType" value="0" eventTrigger="" description=" " isArray="false" />
    111. 

  111.     <DVID id="3006" valueType="U4" logicalName="AlarmID" eventTrigger="" description=" " isArray="false" />
    112. 

  112.     <DVID id="3007" valueType="U4" logicalName="ECChangedID" value="" eventTrigger="" description=" " isArray="false" />
    113. 

  113.     <DVID id="3008" valueType="Ascii" logicalName="DVID_NEW" value="" description=" " eventTrigger=" " />
    114. 

  114.   </DataVariables>
    115. 

  115.   <DataCollections useAnnotatedEvent="false">
    116. 

  116.     <RPTIDs>
    117. 

  117.       <RPTID id="1" logicalName="ControlReport">
    118. 

  118.         <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
    119. 

  119.         <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
    120. 

  120.       </RPTID>
    121. 

  121.       <RPTID id="2" logicalName="ProcessingReport">
    122. 

  122.         <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
    123. 

  123.         <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
    124. 

  124.       </RPTID>
    125. 

  125.       <RPTID id="4" logicalName="ProcessingStateChangedReport">
    126. 

  126.         <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
    127. 

  127.         <ReportVariable id="8" varType="StatusVariable" logicalName="ProcessState" />
    128. 

  128.         <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
    129. 

  129.       </RPTID>
    130. 

  130.       <RPTID id="5" logicalName="ECChangedReport">
    131. 

  131.         <ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
    132. 

  132.       </RPTID>
    133. 

  133.       <RPTID id="6" logicalName="PPChangedReport">
    134. 

  134.         <ReportVariable id="3003" varType="DataVariable" logicalName="PPChangeName" />
    135. 

  135.         <ReportVariable id="3004" varType="DataVariable" logicalName="PPChangeStatus" />
    136. 

  136.       </RPTID>
    137. 

  137.       <RPTID id="7" logicalName="PPSelectedReport">
    138. 

  138.         <ReportVariable id="6" varType="StatusVariable" logicalName="PPExecName" />
    139. 

  139.       </RPTID>
    140. 

  140.       <RPTID id="8" logicalName="AlarmEventReport">
    141. 

  141.         <ReportVariable id="3006" varType="DataVariable" logicalName="AlarmID" />
    142. 

  142.         <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
    143. 

  143.         <ReportVariable id="2" varType="StatusVariable" logicalName="AlarmsSet" />
    144. 

  144.       </RPTID>
    145. 

  145.     </RPTIDs>
    146. 

  146.     <CEIDs>
    147. 

  147.       <CEID id="1" logicalName="EquipmentOFFLINE" description=" " enabled="false">
    148. 

  148.         <RPTID id="1" logicalName="ControlReport" />
    149. 

  149.       </CEID>
    150. 

  150.       <CEID id="2" logicalName="ControlStateLOCAL" description=" " enabled="false">
    151. 

  151.         <RPTID id="1" logicalName="ControlReport" />
    152. 

  152.       </CEID>
    153. 

  153.       <CEID id="3" logicalName="ControlStateREMOTE" description=" " enabled="false">
    154. 

  154.         <RPTID id="1" logicalName="ControlReport" />
    155. 

  155.       </CEID>
    156. 

  156.       <CEID id="4" logicalName="ProcessingStarted" description=" " enabled="false">
    157. 

  157.         <RPTID id="2" logicalName="ProcessingReport" />
    158. 

  158.       </CEID>
    159. 

  159.       <CEID id="5" logicalName="ProcessingCompleted" description=" " enabled="false">
    160. 

  160.         <RPTID id="2" logicalName="ProcessingReport" />
    161. 

  161.       </CEID>
    162. 

  162.       <CEID id="6" logicalName="ProcessingStopped" description=" " enabled="false">
    163. 

  163.         <RPTID id="2" logicalName="ProcessingReport" />
    164. 

  164.       </CEID>
    165. 

  165.       <CEID id="7" logicalName="ProcessingStateChanged" description=" " enabled="false">
    166. 

  166.         <RPTID id="4" logicalName="ProcessingStateChangedReport" />
    167. 

  167.       </CEID>
    168. 

  168.       <CEID id="8" logicalName="EquipmentConstantChanged" description=" " enabled="false">
    169. 

  169.         <RPTID id="5" logicalName="ECChangedReport" />
    170. 

  170.       </CEID>
    171. 

  171.       <CEID id="9" logicalName="ProcessProgramChanged" description=" " enabled="false">
    172. 

  172.         <RPTID id="6" logicalName="PPChangedReport" />
    173. 

  173.       </CEID>
    174. 

  174.       <CEID id="10" logicalName="ProcessProgramSelected" description=" " enabled="false">
    175. 

  175.         <RPTID id="7" logicalName="PPSelectedReport" />
    176. 

  176.       </CEID>
    177. 

  177.       <CEID id="11" logicalName="SpoolingActivated" description=" " enabled="false" />
    178. 

  178.       <CEID id="12" logicalName="SpoolingDeactivated" description=" " enabled="false" />
    179. 

  179.       <CEID id="13" logicalName="SpoolingFailed" description=" " enabled="false" />
    180. 

  180.       <CEID id="14" logicalName="CarrierArrived" enabled="false" description=" " />
    181. 

  181.       <CEID id="15" logicalName="CarrierIdRead" enabled="false" description=" " />
    182. 

  182.       <CEID id="16" logicalName="CarrierIdReadFailed" enabled="false" description=" " />
    183. 

  183.       <CEID id="17" logicalName="SlotMapAvailable" enabled="false" description=" " />
    184. 

  184.       <CEID id="18" logicalName="WaferLeftPosition" enabled="false" description=" " />
    185. 

  185.       <CEID id="19" logicalName="WaferArrivePosition" enabled="false" description=" " />
    186. 

  186.       <CEID id="20" logicalName="WaferAlignStart" enabled="false" description=" " />
    187. 

  187.       <CEID id="21" logicalName="WaferAlignEnd" enabled="false" description=" " />
    188. 

  188.       <CEID id="22" logicalName="WaferLMRead" enabled="false" description=" " />
    189. 

  189.       <CEID id="23" logicalName="CarrierComplete" enabled="false" description=" " />
    190. 

  190.       <CEID id="24" logicalName="CarrierUnloaded" enabled="false" description=" " />
    191. 

  191.       <CEID id="25" logicalName="CarrierRemoved" enabled="false" description=" " />
    192. 

  192.       <CEID id="26" logicalName="LotProcessEnd" enabled="false" description=" " />
    193. 

  193.       <CEID id="100001" logicalName="__SYSTEM__100001__ALARMSET" description="Alarm Set: RobotError" enabled="false">
    194. 

  194.         <RPTID id="8" logicalName="AlarmEventReport" />
    195. 

  195.       </CEID>
    196. 

  196.       <CEID id="200001" logicalName="__SYSTEM__200001__ALARMCLEAR" description="Alarm Clear: RobotError" enabled="false">
    197. 

  197.         <RPTID id="8" logicalName="AlarmEventReport" />
    198. 

  198.       </CEID>
    199. 

  199.     </CEIDs>
    200. 

  200.   </DataCollections>
    201. 

  201.   <Alarms>
    202. 

  202.     <ALID id="2" logicalName="RobotError" description="" category="EquipmentStatusWarning" enabled="false" eventSet="100001" eventClear="200001" />
    203. 

  203.   </Alarms>
    204. 

  204. </Equipment>
    205.