Virgo_DDevice.cs 3.6 KB

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  1. namespace Virgo_DCommon
  2. {
  3. public enum Virgo_DDevice
  4. {
  5. ValveMfc1,
  6. ValveMfc2,
  7. ValveMfc3,
  8. ValveMfc4,
  9. ValveMfc5,
  10. ValveChamberPurge,
  11. ValveProcess,
  12. ValveSoftPumping,
  13. ValveFastPumping,
  14. ValveFastVent,
  15. ValveN2Supply,
  16. MfcGas1,
  17. MfcGas2,
  18. MfcGas3,
  19. MfcGas4,
  20. MfcGas5,
  21. GasStick1,
  22. GasStick2,
  23. GasStick3,
  24. TemperatureControl,
  25. ChamberLid,
  26. ATM_SW,
  27. VAC_SW,
  28. WaterFlow_SW,
  29. N2_Pressure,
  30. ProcessGauge,
  31. PressureGauge,
  32. ForelineGauge,
  33. MainPump,
  34. Rf,
  35. Match,
  36. PressureControl,
  37. ThrottleValve,
  38. HeaterChamber,
  39. ForelineHeater,
  40. Heartbeat,
  41. ResetPlcSignal,
  42. LiftPin,
  43. SlitDoor,
  44. Inch3Pin,
  45. Inch4Pin,
  46. StatisticsRfOnTime,
  47. StatisticsPumpOnTime,
  48. PlcDateTime,
  49. Lid,
  50. LidLocker,
  51. SignalTowerRedLight,
  52. SignalTowerYellowLight,
  53. SignalTowerGreenLight,
  54. SignalTowerBuzzer
  55. }
  56. public enum StateData
  57. {
  58. RecipeProcessTime,
  59. RecipeStepNo,
  60. RecipeStepMode,
  61. RecipeName,
  62. RecipeBaseName,
  63. RecipeStepTimeElapsed,
  64. RecipeStepTimeSetPoint,
  65. RecipeStepRfTimeSetPoint,
  66. RecipeStepElectrodeTemp,
  67. RfTimeElapsed,
  68. PumpTime,
  69. PMState,
  70. TMState,
  71. IsAutoMode,
  72. IsPmOnline,
  73. IsTmOnline,
  74. PMJobState,
  75. TMJobState,
  76. PmPlatformState,
  77. JobState,
  78. JobTmRecipe,
  79. JobPmRecipe,
  80. JobStartTime,
  81. JobStopTime,
  82. JobProcessCount,
  83. IsPumpingOkForProcess,
  84. IsCoolingOkForProcess,
  85. IsGasFlowingOkForProcess,
  86. IsRfPowering,
  87. TotalCycle,
  88. ProcessStatus,
  89. AlarmEvent,
  90. LeakCheckElapseTime,
  91. DataLogName,
  92. LotName,
  93. CurrentMagazineType,
  94. SchedulerRecipe,
  95. SchedulerState,
  96. SchedulerLoadStationInSubstrate,
  97. SchedulerRailInSubstrate,
  98. SchedulerPmSubstrate,
  99. SchedulerRailOutSubstrate,
  100. SchedulerLoadStationOutSubstrate,
  101. }
  102. public enum RtOperation
  103. {
  104. DeviceOperation,
  105. LockLid,
  106. UnlockLid,
  107. StartPump,
  108. Pump,
  109. StopPump,
  110. GasFlow,
  111. StopGasFlow,
  112. Cooling,
  113. StopCooling,
  114. /// <summary>
  115. ///
  116. /// 0:Step mode
  117. /// 1:Power on time
  118. /// 2:Electrode temperature
  119. /// 3:Electrode Critical temperature
  120. /// </summary>
  121. RfPower,
  122. Vent,
  123. Purge,
  124. Abort,
  125. Heat,
  126. SetConfig,
  127. SetHardwareConfig,
  128. RunRecipe,
  129. SkipCurrentStep,
  130. ResumeRecipe,
  131. AbortRecipe,
  132. Reset,
  133. LeakCheck,
  134. DeleteLeakCheck,
  135. SwitchOffBuzzer,
  136. // Lift pin & Guide pin
  137. MoveLiftPin,
  138. MoveGuidePin,
  139. StartAutoRun,
  140. StopAutoRun,
  141. PauseAutoRun,
  142. ResumeAutoRun,
  143. InitAll,
  144. AckError,
  145. TmRun,
  146. TmStop,
  147. PmAuto,
  148. PmManual,
  149. PmOnline,
  150. PmOffline,
  151. JobAuto,
  152. JobManual,
  153. JobRun,
  154. JobStop,
  155. JobAbort,
  156. JobPmLoadRecipe,
  157. JobTmLoadRecipe,
  158. JobTmRun,
  159. JobTmStop,
  160. JobPmOnline,
  161. JobPmOffline,
  162. JobPmProcessDone,
  163. JobTmRecovered,
  164. }
  165. public enum MovementPosition
  166. {
  167. Unknown, Down, Up, Left, Right, Middle
  168. }
  169. }