Virgo_B_shaoxing/VirgoUI/Models/PMs/PmOverviewView.xaml

<UserControl x:Class="VirgoUI.Client.Models.PMs.PmOverviewView"
             xmlns="http://schemas.microsoft.com/winfx/2006/xaml/presentation"
             xmlns:x="http://schemas.microsoft.com/winfx/2006/xaml"
             xmlns:mc="http://schemas.openxmlformats.org/markup-compatibility/2006" 
             xmlns:d="http://schemas.microsoft.com/expression/blend/2008" 
             xmlns:i="http://schemas.microsoft.com/expression/2010/interactivity"
             xmlns:ctrl="http://OpenSEMI.Ctrlib.com/presentation"
             xmlns:cal="http://www.caliburn.org"
             xmlns:deviceControl="clr-namespace:Aitex.Core.UI.DeviceControl;assembly=MECF.Framework.UI.Core"
             xmlns:control="clr-namespace:Aitex.Core.UI.Control;assembly=MECF.Framework.UI.Core"
             xmlns:parts="clr-namespace:VirgoUI.Controls.Parts"
             xmlns:pMs="clr-namespace:VirgoUI.Client.Models.PMs"
             xmlns:converters="clr-namespace:Aitex.Core.UI.Converters;assembly=MECF.Framework.UI.Core"
             mc:Ignorable="d" 
             d:DesignHeight="800" d:DesignWidth="1530">
    <UserControl.Resources>
        <converters:bool2VisibilityConverter x:Key="bool2VisibilityConvert"/>

        <Storyboard x:Key="SlitValve_Open">
            <DoubleAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Height)" >
                <EasingDoubleKeyFrame KeyTime="0" Value="75"/>
                <EasingDoubleKeyFrame KeyTime="0:0:0.5" Value="55"/>
            </DoubleAnimationUsingKeyFrames>
        </Storyboard>
        <Storyboard x:Key="SlitValve_Close">
            <DoubleAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Height)" >
                <EasingDoubleKeyFrame KeyTime="0" Value="55"/>
                <EasingDoubleKeyFrame KeyTime="0:0:0.5" Value="75"/>
            </DoubleAnimationUsingKeyFrames>
        </Storyboard>

        <Style TargetType="{x:Type Rectangle}" x:Key="SlitValve_Animation" >
            <Style.Triggers>
                <DataTrigger Binding="{Binding IsSlitValveOpen}" Value="true">
                    <DataTrigger.EnterActions>
                        <BeginStoryboard Storyboard="{StaticResource SlitValve_Open}"/>
                    </DataTrigger.EnterActions>
                    <DataTrigger.ExitActions>
                        <BeginStoryboard Storyboard="{StaticResource SlitValve_Close}"/>
                    </DataTrigger.ExitActions>
                </DataTrigger>
            </Style.Triggers>
        </Style>

        <DataTemplate x:Key="Default">
            <Grid>
                <Grid.ColumnDefinitions>
                    <ColumnDefinition Width="125"></ColumnDefinition>
                    <ColumnDefinition></ColumnDefinition>
                </Grid.ColumnDefinitions>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,0"  Grid.Row="0" Padding="0">
                    <TextBlock Text="{Binding Feedback}" TextAlignment="Center" Width="90" Margin="0"></TextBlock>
                </Border>
                <TextBlock Text="{Binding Setpoint}" Grid.Column="1" TextAlignment="Center" Width="90">
                    <TextBlock.Style>
                        <Style>
                            <Setter Property="TextBlock.Visibility" Value="Collapsed" ></Setter>
                            <Style.Triggers>
                                <DataTrigger Binding="{Binding SetpointEnabled}" Value="False">
                                    <Setter Property="TextBlock.Visibility" Value="Visible" ></Setter>
                                </DataTrigger>
                            </Style.Triggers>
                        </Style>
                    </TextBlock.Style>
                </TextBlock>
                <ctrl:TextBoxEx Text="{Binding Setpoint, UpdateSourceTrigger=PropertyChanged}" TextSaved="{Binding SetpointSaved, Mode=TwoWay, UpdateSourceTrigger=PropertyChanged}" Grid.Column="1" Width="90">
                    <!--<i:Interaction.Triggers>
                        <i:EventTrigger EventName="KeyDown">
                            <cal:ActionMessage MethodName="SetParameter">
                                <cal:Parameter Value="$eventargs" />
                                <cal:Parameter Value="{Binding }" />
                            </cal:ActionMessage>
                        </i:EventTrigger>
                    </i:Interaction.Triggers>-->
                    <TextBox.Style>
                        <Style>
                            <Setter Property="TextBox.Visibility" Value="Collapsed" ></Setter>
                            <Style.Triggers>
                                <DataTrigger Binding="{Binding SetpointEnabled}" Value="True">
                                    <Setter Property="TextBox.Visibility" Value="Visible" ></Setter>
                                </DataTrigger>
                            </Style.Triggers>
                        </Style>
                    </TextBox.Style>
                </ctrl:TextBoxEx>
            </Grid>
        </DataTemplate>
        <DataTemplate x:Key="Share">
            <TextBlock Text="{Binding Feedback}" Width="250" TextAlignment="Center"></TextBlock>
        </DataTemplate>
        <DataTemplate x:Key="DropdownList">
            <Grid>
                <Grid.ColumnDefinitions>
                    <ColumnDefinition Width="125"></ColumnDefinition>
                    <ColumnDefinition></ColumnDefinition>
                </Grid.ColumnDefinitions>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,0"  Grid.Row="0" Padding="0">
                    <TextBlock Text="{Binding Feedback}" TextAlignment="Center" Width="90" Margin="0"></TextBlock>
                </Border>

                <ComboBox ItemsSource="{Binding Selections}"  SelectedValue="{Binding Setpoint, UpdateSourceTrigger=PropertyChanged}" Grid.Column="1" Width="120"></ComboBox>
            </Grid>
        </DataTemplate>

        <DataTemplate x:Key="ListBoxDataTemp">
            <Canvas Width="60" Height="200">
                <Grid Width="60">
                    <Grid.RowDefinitions>
                        <RowDefinition Height="20"/>
                        <RowDefinition Height="20"/>
                    </Grid.RowDefinitions>
                    <!--<TextBlock Text="{Binding Display}" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" HorizontalAlignment="Center" VerticalAlignment="Center"/>-->
                    <TextBlock Grid.Row="1" Text="{Binding MfcData.DisplayName}" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" VerticalAlignment="Center" HorizontalAlignment="Center"/>
                </Grid>

                <ctrl:Gasline Orientation="Vertical" Height="160" Canvas.Left="27" Canvas.Top="40"/>
                <ctrl:GaslineJoint JointType="UP" Canvas.Left="27" Canvas.Top="200"/>

                <control:FlowPipeV2 Width="200"  Height="8" FlowOrientation="Vertical"  IsFlowing="{Binding ValveData.Feedback}"  Canvas.Left="35" Canvas.Top="41" />
                <control:FlowPipeV2 Width="50"  Height="8" FlowOrientation="Vertical"  IsFlowing="{Binding ValveData.Feedback}"  Canvas.Left="35" Canvas.Top="100" />

                <deviceControl:AITGasValve Canvas.Left="14" Canvas.Top="130" ValveOpenOrientation="Vertical" DeviceData="{Binding ValveData}" EnableServiceControl="True" IsAutoMode="{Binding RelativeSource={RelativeSource FindAncestor,AncestorType={x:Type UserControl}},Path= DataContext.IsAutoMode}" />
                <control:MfcControl Canvas.Left="10" Canvas.Top="90"  DeviceData="{Binding MfcData}" IsAutoMode="{Binding RelativeSource={RelativeSource FindAncestor,AncestorType={x:Type UserControl}},Path= DataContext.IsAutoMode}" />
            </Canvas>
        </DataTemplate>
        <pMs:PMTemplateSelector x:Key="SPSelector" DefaultTemplate="{StaticResource Default}" ShareTemplate="{StaticResource Share}" DropDownListTemplate="{StaticResource DropdownList}" />
    </UserControl.Resources>
    <Grid>
        <Grid.ColumnDefinitions>
            <ColumnDefinition />
            <ColumnDefinition Width="Auto"/>
            <ColumnDefinition Width="Auto"/>
        </Grid.ColumnDefinitions>
        <Canvas Grid.Column="0" Width="800" Height="800" HorizontalAlignment="Center" VerticalAlignment="Center" Margin="0 0 20 0" >
            <!--Lid 盖子，其实没有Lid开关控制信号，盖子上有把锁， 和温度有interlock-->
            <!--<Grid  Width="220"    HorizontalAlignment="Center" VerticalAlignment="Top" Canvas.Left="425" Canvas.Top="10">
                <Grid.RowDefinitions>
                    <RowDefinition Height="24"/>
                    <RowDefinition Height="40"/>
                    <RowDefinition />
                </Grid.RowDefinitions>
                <Border  BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Grid.Column="0" Padding="5,1">
                    <TextBlock Text="Lid Control" TextWrapping="Wrap" TextAlignment="Center" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                </Border>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.ColumnSpan="2" Padding="5,1">
                    <StackPanel  Orientation="Horizontal" HorizontalAlignment="Center" >
                        <Button Content="Open Lid" IsEnabled="{Binding EnableOpenLid}" Width="90" Height="25" Margin="0">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="OpenLid"></cal:ActionMessage>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                        <Button Content="Close Lid" IsEnabled="{Binding EnableCloseLid}" Width="90" Height="25" Margin="5">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="CloseLid"></cal:ActionMessage>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                    </StackPanel>
                </Border>
            </Grid>-->

            <!--DI switch signals-->
            <Grid Canvas.Left="45" Canvas.Top="90">
                <Grid.ColumnDefinitions>
                    <ColumnDefinition Width="100"/>
                    <ColumnDefinition Width="105"/>
                    <ColumnDefinition Width="100"/>
                    <ColumnDefinition Width="105"/>
                </Grid.ColumnDefinitions>
                <Grid.RowDefinitions>
                    <RowDefinition Height="25"/>
                    <RowDefinition Height="25"/>
                    <RowDefinition Height="25"/>
                    <RowDefinition Height="25"/>
                </Grid.RowDefinitions>
                <!--chamber status-->
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1">
                    <TextBlock Text="腔体状态" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                </Border>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="0" Grid.Column="1" Padding="5,1">
                    <TextBlock Text="{Binding Path=ChamberStatus}" Background="{Binding ChamberStatusBkColor}" TextAlignment="Center" VerticalAlignment="Center"/>
                </Border>

                <!--SensorWaterFlowOk-->
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="1" Padding="5,1">
                    <TextBlock Text="水流量信号" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                </Border>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.Column="1" Padding="5,1">
                    <deviceControl:AITSensor IsInterlockMode="True" DeviceData="{Binding SensorWaterFlowOk}"   />
                </Border>

                <!--SensorCDAPressureOk-->
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="2" Padding="5,1">
                    <TextBlock Text="CDA" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                </Border>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="2" Grid.Column="1" Padding="5,1">
                    <deviceControl:AITSensor  IsInterlockMode="True" DeviceData="{Binding SensorCDAPressureOk}" />
                </Border>

                <!--SourceFan1-->
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="3" Padding="5,1">
                    <TextBlock Text="电感风扇 1&amp;2" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                </Border>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="3" Grid.Column="1" Padding="5,1">
                    <StackPanel Orientation="Horizontal" HorizontalAlignment="Center">
                        <deviceControl:AITSensor IsInterlockMode="True" DeviceData="{Binding SourceFan1}" />
                        <deviceControl:AITSensor IsInterlockMode="True" DeviceData="{Binding SourceFan2}" Margin="5,0,0,0" />

                    </StackPanel>
                </Border>

                <!--SensorWaterLeakOk-->
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Grid.Column="2" Padding="5,1">
                    <TextBlock Text="漏水信号" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                </Border>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="0" Grid.Column="3" Padding="5,1">
                    <deviceControl:AITSensor  IsInterlockMode="True" DeviceData="{Binding SensorWaterLeakOk}" />
                </Border>

                <!--SensorArmNotExtend-->
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="2" Grid.Column="2"  Padding="5,1">
                    <TextBlock Text="手臂不在腔体内" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                </Border>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="2" Grid.Column="3" Padding="5,1">
                    <deviceControl:AITSensor  IsInterlockMode="True" DeviceData="{Binding SensorArmNotExtend}" />
                </Border>

                <!--ATM Switch-->
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="3" Grid.Column="2" Padding="5,1">
                    <TextBlock Text="大气压" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                </Border>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="3" Grid.Column="3" Padding="5,1">
                    <deviceControl:AITSensor GreenColor="True"   DeviceData="{Binding SensorATMSwitch}" />
                </Border>

                <!--VAC switch-->
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="1" Grid.Column="2" Padding="5,1">
                    <TextBlock Text="真空" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                </Border>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.Column="3" Padding="5,1">
                    <deviceControl:AITSensor GreenColor="True" DeviceData="{Binding SensorVacSwitch}" />
                </Border>
            </Grid>

            <Canvas Canvas.Left="121" Canvas.Top="280" >
                <!-- Fast vent valve-->
                <TextBlock Text="Vent" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="212" Canvas.Top="-87"/>
                <TextBlock Text="Purge" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="252" Canvas.Top="-60"/>
                <ctrl:Gasline Orientation="Vertical" Height="166" Canvas.Left="220" Canvas.Top="-66"  />
                <control:FlowPipeV2 Width="168" Height="7"  IsFlowing="{Binding FastVentVlv.Feedback}" Canvas.Left="228" Canvas.Top="-66" >
                    <control:FlowPipeV2.RenderTransform>
                        <RotateTransform Angle="90"></RotateTransform>
                    </control:FlowPipeV2.RenderTransform>
                </control:FlowPipeV2>
                <deviceControl:AITGasValve Canvas.Left="208" Canvas.Top="-19" ValveOpenOrientation="Vertical" DeviceData="{Binding FastVentVlv}" EnableServiceControl="{Binding enableServiceControl}" IsAutoMode="{Binding IsAutoMode}"/>
                <ctrl:Gasline Orientation="Vertical" Height="73" Canvas.Left="265" Canvas.Top="-41"   />
                <ctrl:Gasline Orientation="Horizontal"   Canvas.Left="227" Canvas.Top="-41" Width="38"    />
                <ctrl:Gasline Orientation="Horizontal"   Canvas.Left="227" Canvas.Top="27" Width="38"    />
                <ctrl:GaslineJoint JointType="RIGHT"  Canvas.Left="220" Canvas.Top="27" />
                <ctrl:GaslineJoint JointType="RIGHT_BOTTOM"  Canvas.Left="265" Canvas.Top="27" />
                <ctrl:GaslineJoint JointType="RIGHT_TOP"  Canvas.Left="265" Canvas.Top="-41" />
                <ctrl:GaslineJoint JointType="RIGHT"  Canvas.Left="220" Canvas.Top="-41" />
                <control:FlowPipeV2 Width="38"  Height="8"  IsFlowing="{Binding SoftVentVlv.Feedback}"  Visibility="{Binding Path=SoftVentVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="227" Canvas.Top="-41" />
                <control:FlowPipeV2 Width="29"  Height="8"  IsFlowing="{Binding SoftVentVlv.Feedback}"  Visibility="{Binding Path=SoftVentVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="210" Canvas.Top="-55" RenderTransformOrigin="0.5,0.5" >
                    <control:FlowPipeV2.RenderTransform>
                        <TransformGroup>
                            <ScaleTransform/>
                            <SkewTransform/>
                            <RotateTransform Angle="90"/>
                            <TranslateTransform/>
                        </TransformGroup>
                    </control:FlowPipeV2.RenderTransform>
                </control:FlowPipeV2>
                <control:FlowPipeV2 Width="77"  Height="8"  IsFlowing="{Binding SoftVentVlv.Feedback}"  Visibility="{Binding Path=SoftVentVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="231" Canvas.Top="-7" RenderTransformOrigin="0.5,0.5" >
                    <control:FlowPipeV2.RenderTransform>
                        <TransformGroup>
                            <ScaleTransform/>
                            <SkewTransform/>
                            <RotateTransform Angle="90"/>
                            <TranslateTransform/>
                        </TransformGroup>
                    </control:FlowPipeV2.RenderTransform>
                </control:FlowPipeV2>
                <control:FlowPipeV2 Width="62"  Height="8"  IsFlowing="{Binding SoftVentVlv.Feedback}"  Visibility="{Binding Path=SoftVentVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="194" Canvas.Top="56" RenderTransformOrigin="0.5,0.5" >
                    <control:FlowPipeV2.RenderTransform>
                        <TransformGroup>
                            <ScaleTransform/>
                            <SkewTransform/>
                            <RotateTransform Angle="90"/>
                            <TranslateTransform/>
                        </TransformGroup>
                    </control:FlowPipeV2.RenderTransform>
                </control:FlowPipeV2>
                <control:FlowPipeV2 Width="38"  Height="8"  IsFlowing="{Binding SoftVentVlv.Feedback}"  Visibility="{Binding Path=SoftVentVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="227" Canvas.Top="27" RenderTransformOrigin="0.5,0.5" >
                    <control:FlowPipeV2.RenderTransform>
                        <TransformGroup>
                            <ScaleTransform/>
                            <SkewTransform/>
                            <RotateTransform Angle="180"/>
                            <TranslateTransform/>
                        </TransformGroup>
                    </control:FlowPipeV2.RenderTransform>
                </control:FlowPipeV2>
                <deviceControl:AITGasValve Canvas.Left="253" Canvas.Top="-18" ValveOpenOrientation="Vertical" DeviceData="{Binding SoftVentVlv}" EnableServiceControl="{Binding enableServiceControl}" IsAutoMode="{Binding IsAutoMode}"/>
            </Canvas>
            <ctrl:Gasline Width="430" Canvas.Left="15" Canvas.Top="376"  />

            <!--<control:FlowPipeV2 Width="170"  Height="8"  IsFlowing="{Binding GP1Valve.Feedback}"   Canvas.Left="50" Canvas.Top="292" RenderTransformOrigin="0.5,0.5" >
                <control:FlowPipeV2.RenderTransform>
                    <TransformGroup>
                        <ScaleTransform/>
                        <SkewTransform/>
                        <RotateTransform Angle="90"/>
                        <TranslateTransform/>
                    </TransformGroup>
                </control:FlowPipeV2.RenderTransform>
            </control:FlowPipeV2>
            <control:FlowPipeV2 Width="170"  Height="8"  IsFlowing="{Binding GP2Valve.Feedback}"  Canvas.Left="112" Canvas.Top="296" RenderTransformOrigin="0.5,0.5" >
                <control:FlowPipeV2.RenderTransform>
                    <TransformGroup>
                        <ScaleTransform/>
                        <SkewTransform/>
                        <RotateTransform Angle="90"/>
                        <TranslateTransform/>
                    </TransformGroup>
                </control:FlowPipeV2.RenderTransform>
            </control:FlowPipeV2>
            <control:FlowPipeV2 Width="170"  Height="8"  IsFlowing="{Binding GP3Valve.Feedback}"   Canvas.Left="180" Canvas.Top="295" RenderTransformOrigin="0.5,0.5" >
                <control:FlowPipeV2.RenderTransform>
                    <TransformGroup>
                        <ScaleTransform/>
                        <SkewTransform/>
                        <RotateTransform Angle="90"/>
                        <TranslateTransform/>
                    </TransformGroup>
                </control:FlowPipeV2.RenderTransform>
            </control:FlowPipeV2>-->

            <ItemsControl Canvas.Left="-15" Canvas.Top="176" Width="300" Height="200" ItemsSource="{Binding Gaslines}"
                          ItemTemplate="{StaticResource ListBoxDataTemp}" Focusable="False"  HorizontalAlignment="Left" VerticalAlignment="Top"  >
                <ItemsControl.ItemsPanel>
                    <ItemsPanelTemplate >
                        <VirtualizingStackPanel Orientation="Horizontal"/>
                    </ItemsPanelTemplate>
                </ItemsControl.ItemsPanel>
            </ItemsControl>
            <control:FlowPipeV2 Width="430" Height="8" Canvas.Left="15" Canvas.Top="376"  >
                <control:FlowPipeV2.IsFlowing>
                    <MultiBinding>
                        <MultiBinding.Converter>
                            <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
                        </MultiBinding.Converter>
                        <MultiBinding.Bindings>
                            <Binding Path="ProcessVlv.Feedback"></Binding>
                            <Binding Path="GP1Valve.Feedback"></Binding>
                        </MultiBinding.Bindings>
                    </MultiBinding>
                </control:FlowPipeV2.IsFlowing>
            </control:FlowPipeV2>
            <control:FlowPipeV2 Width="365" Height="8" Canvas.Left="80" Canvas.Top="376"  >
                <control:FlowPipeV2.IsFlowing>
                    <MultiBinding>
                        <MultiBinding.Converter>
                            <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
                        </MultiBinding.Converter>
                        <MultiBinding.Bindings>
                            <Binding Path="ProcessVlv.Feedback"></Binding>
                            <Binding Path="GP2Valve.Feedback"></Binding>
                        </MultiBinding.Bindings>
                    </MultiBinding>
                </control:FlowPipeV2.IsFlowing>
            </control:FlowPipeV2>
            <control:FlowPipeV2 Width="305" Height="8" Canvas.Left="140" Canvas.Top="376"  >
                <control:FlowPipeV2.IsFlowing>
                    <MultiBinding>
                        <MultiBinding.Converter>
                            <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
                        </MultiBinding.Converter>
                        <MultiBinding.Bindings>
                            <Binding Path="ProcessVlv.Feedback"></Binding>
                            <Binding Path="GP3Valve.Feedback"></Binding>
                        </MultiBinding.Bindings>
                    </MultiBinding>
                </control:FlowPipeV2.IsFlowing>
            </control:FlowPipeV2>
            <control:FlowPipeV2 Width="252" Height="8" Canvas.Left="193" Canvas.Top="376"  >
                <control:FlowPipeV2.IsFlowing>
                    <MultiBinding>
                        <MultiBinding.Converter>
                            <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
                        </MultiBinding.Converter>
                        <MultiBinding.Bindings>
                            <Binding Path="ProcessVlv.Feedback"></Binding>
                            <Binding Path="GP4Valve.Feedback"></Binding>
                        </MultiBinding.Bindings>
                    </MultiBinding>
                </control:FlowPipeV2.IsFlowing>
            </control:FlowPipeV2>

            <control:FlowPipeV2 Width="187" Height="8" Canvas.Left="258" Canvas.Top="376"  >
                <control:FlowPipeV2.IsFlowing>
                    <MultiBinding>
                        <MultiBinding.Converter>
                            <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
                        </MultiBinding.Converter>
                        <MultiBinding.Bindings>
                            <Binding Path="ProcessVlv.Feedback"></Binding>
                            <Binding Path="GP5Valve.Feedback"></Binding>
                        </MultiBinding.Bindings>
                    </MultiBinding>
                </control:FlowPipeV2.IsFlowing>
            </control:FlowPipeV2>

            <control:FlowPipeV2 Width="105" Height="8" Canvas.Left="341" Canvas.Top="376"  >
                <control:FlowPipeV2.IsFlowing>
                    <MultiBinding>
                        <MultiBinding.Converter>
                            <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
                        </MultiBinding.Converter>
                        <MultiBinding.Bindings>
                            <Binding Path="ProcessVlv.Feedback"></Binding>
                            <Binding Path="FastVentVlv.Feedback"></Binding>
                            <Binding Path="SoftVentVlv.Feedback"></Binding>
                        </MultiBinding.Bindings>
                    </MultiBinding>
                </control:FlowPipeV2.IsFlowing>
            </control:FlowPipeV2>
            <!--<TextBlock Canvas.Left="62" Canvas.Top="198" Text="N2"></TextBlock>-->
            <!--<ctrl:Gasline Orientation="Vertical" Height="166" Canvas.Left="66" Canvas.Top="218"  />-->
            <ctrl:GaslineJoint JointType="LEFT_BOTTOM"  Canvas.Left="12" Canvas.Top="376" />
            <!--<ctrl:Gasline  Height="8"  Width="5" Canvas.Left="135" Canvas.Top="396" />-->
            <!--<deviceControl:AITGasValve Canvas.Left="53" Canvas.Top="302" ValveOpenOrientation="Vertical" DeviceData="{Binding N2PurgeValveData}" EnableServiceControl="True" />-->

            <deviceControl:AITGasValve Canvas.Left="405" Canvas.Top="365" ValveOpenOrientation="Horizontal" DeviceData="{Binding ProcessVlv}" EnableServiceControl="{Binding enableServiceControl}" IsAutoMode="{Binding IsAutoMode}"/>

            <!--chamber-->
            <Canvas Height="550" Width="350" Canvas.Left="445" Canvas.Top="171">

                <TextBlock Text="偏压匹配器" Canvas.Left="284" Canvas.Top="109" Visibility="{Binding Path=IsBiasMatchVisible, Converter={StaticResource bool2VisibilityConvert}}"/>
                <deviceControl:AITSensor Canvas.Left="264" Canvas.Top="109"  GreenColor="True" LightOnValue="{Binding IsBiasMatchPowerOn}" Visibility="{Binding Path=IsBiasMatchVisible, Converter={StaticResource bool2VisibilityConvert}}"/>
                <TextBlock Text="偏压射频" Canvas.Left="284" Canvas.Top="129" Visibility="{Binding Path=IsBiasRfVisible, Converter={StaticResource bool2VisibilityConvert}}"/>
                <deviceControl:AITSensor Canvas.Left="264" Canvas.Top="129"  GreenColor="True" LightOnValue="{Binding IsBiasRfPowerOn}" Visibility="{Binding Path=IsBiasRfVisible, Converter={StaticResource bool2VisibilityConvert}}"/>
                <deviceControl:AITRfGenerator DeviceData="{Binding RfBias}" Canvas.Left="250" Canvas.Top="144"  IsAutoMode="{Binding IsAutoMode}" Visibility="{Binding Path=IsBiasRfVisible, Converter={StaticResource bool2VisibilityConvert}}"></deviceControl:AITRfGenerator>

                <TextBlock Text="源射频" Canvas.Left="280" Canvas.Top="29" />
                <deviceControl:AITSensor Canvas.Left="260" Canvas.Top="29"  GreenColor="True" LightOnValue="{Binding IsRfPowerOn}" />
                <deviceControl:AITRfGenerator DeviceData="{Binding Rf}" Canvas.Left="250" Canvas.Top="44"  IsAutoMode="{Binding IsAutoMode}"></deviceControl:AITRfGenerator>

                <!--wall temperature-->
                <Canvas Visibility="{Binding WallHeaterVisibility}">
                    <TextBlock Text="Wall 温度" Canvas.Left="269" Canvas.Top="179" />
                    <deviceControl:AITHeaterControl DeviceData="{Binding WallHeater}" Width="80" Canvas.Left="256" Canvas.Top="194" IsAutoMode="{Binding IsAutoMode}"/>
                </Canvas>

                <!--substrate heater temperature-->
                <TextBlock Text="底座温度" Canvas.Left="272" Canvas.Top="227" Visibility="{Binding Path=IsHeaterVisibility, Converter={StaticResource bool2VisibilityConvert}}"/>
                <TextBlock Text="水冷温度" Canvas.Left="272" Canvas.Top="227" Visibility="{Binding Path=IsChillerVisibility, Converter={StaticResource bool2VisibilityConvert}}"/>
                <deviceControl:AITChillerControl DeviceData="{Binding ChillerData}" Canvas.Left="256" Canvas.Top="242" Width="80" IsAutoMode="{Binding IsAutoMode}" IsEnabled="{Binding IsChillerEnable}" Visibility="{Binding Path=IsChillerVisibility, Converter={StaticResource bool2VisibilityConvert}}"/>
                <deviceControl:AITHeaterControl DeviceData="{Binding HeaterChamber}" Canvas.Left="256" Canvas.Top="242" Width="80" IsAutoMode="{Binding IsAutoMode}" IsEnabled="{Binding IsHeaterEnable}" Visibility="{Binding Path=IsHeaterVisibility, Converter={StaticResource bool2VisibilityConvert}}"/>




                <!--grid heater temperature-->
                <Canvas Visibility="{Binding GridHeaterVisibility}">
                    <TextBlock Text="Grid温度" Canvas.Left="0" Canvas.Top="25" />
                    <deviceControl:AITHeaterControl DeviceData="{Binding GridHeater}" Width="80" Canvas.Left="-15" Canvas.Top="40" IsAutoMode="{Binding IsAutoMode}"/>
                </Canvas>


                <!--Foreline teamperature-->
                <TextBlock Text="前端温度" Canvas.Left="150" Canvas.Top="444" />
                <deviceControl:AITHeaterControl DeviceData="{Binding ForelineHeater}" Canvas.Left="148" Canvas.Top="460" IsAutoMode="{Binding IsAutoMode}"/>

                <ctrl:Gasline Orientation="Vertical" Height="20" Width="10" Canvas.Left="20" Canvas.Top="240"/>
                <ctrl:Gasline Orientation="Horizontal" Height="8" Canvas.Left="-102" Canvas.Top="250" Width="123"/>
                <ctrl:GaslineJoint JointType="LEFT" Width="10" Height="10"  Canvas.Left="20" Canvas.Top="249" />
                <!--<ctrl:Gasline Orientation="Horizontal" Height="10" Canvas.Left="-105" Canvas.Top="288" Width="133"/>-->
                <!--<ctrl:GaslineJoint JointType="RIGHT_BOTTOM" Width="10" Height="10"  Canvas.Left="20" Canvas.Top="288" />-->
                <!--<deviceControl:AITPressureMeter DeviceData="{Binding PressureGauge}"  Height="30"  Width="100" Canvas.Left="-112" Canvas.Top="276" />-->
                <deviceControl:AITPressureMeter DeviceData="{Binding ProcessGauge}"  Height="30"  Width="100" Canvas.Left="-112" Canvas.Top="240" />
                <TextBlock Text="工艺压力" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="-170" Canvas.Top="248"/>
                <!--<TextBlock Text="腔体压力" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="-170" Canvas.Top="283"/>-->

                <ctrl:Gasline Orientation="Vertical" Height="268" Canvas.Left="208" Canvas.Top="240"/>
                <!--<control:FlowPipeV2 Width="274"  Height="7"  IsFlowing="{Binding FastPumpVlv.Feedback}"  Visibility="{Binding Path=FastPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="216" Canvas.Top="238" >
                    <control:FlowPipeV2.RenderTransform>
                        <TransformGroup>
                            <ScaleTransform/>
                            <SkewTransform/>
                            <RotateTransform Angle="90"/>
                            <TranslateTransform/>
                        </TransformGroup>
                    </control:FlowPipeV2.RenderTransform>
                </control:FlowPipeV2>-->

                <control:FlowPipeV2 Width="275"  Height="8"  IsFlowing="{Binding FastPumpVlv.Feedback}"  Visibility="{Binding Path=FastPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="74" Canvas.Top="370" RenderTransformOrigin="0.5,0.5" >
                    <control:FlowPipeV2.RenderTransform>
                        <TransformGroup>
                            <ScaleTransform/>
                            <SkewTransform/>
                            <RotateTransform Angle="90"/>
                            <TranslateTransform/>
                        </TransformGroup>
                    </control:FlowPipeV2.RenderTransform>
                </control:FlowPipeV2>
                <deviceControl:AITGasValve Canvas.Left="196" Canvas.Top="360" ValveOpenOrientation="Vertical" DeviceData="{Binding FastPumpVlv}" EnableServiceControl="{Binding enableServiceControl}" IsAutoMode="{Binding IsAutoMode}"/>
                <TextBlock Text="快抽" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="166" Canvas.Top="370"/>
                <TextBlock Text="慢抽" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="276" Canvas.Top="370"/>
                <Canvas Canvas.Left="-12" Canvas.Top="341" >
                    <ctrl:Gasline Orientation="Vertical" Height="143" Canvas.Left="266" Canvas.Top="-69"   />
                    <ctrl:Gasline Orientation="Horizontal"   Canvas.Left="228" Width="38" Canvas.Top="-77"    />
                    <ctrl:Gasline Orientation="Horizontal"   Canvas.Left="228" Canvas.Top="66" Width="38"    />
                    <!--<ctrl:GaslineJoint JointType="RIGHT"  Canvas.Left="220" Canvas.Top="27" />-->
                    <ctrl:GaslineJoint JointType="RIGHT_BOTTOM"  Canvas.Left="266" Canvas.Top="66" />
                    <ctrl:GaslineJoint JointType="RIGHT_TOP"  Canvas.Left="266" Canvas.Top="-77" />
                    <!--<ctrl:GaslineJoint JointType="RIGHT"  Canvas.Left="220" Canvas.Top="-41" />-->
                    <control:FlowPipeV2 Width="39"  Height="8"  IsFlowing="{Binding SoftPumpVlv.Feedback}"  Visibility="{Binding Path=SoftPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="228" Canvas.Top="-77" />
                    <control:FlowPipeV2 Width="30"  Height="8"  IsFlowing="{Binding SoftPumpVlv.Feedback}"  Visibility="{Binding Path=SoftPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="209" Canvas.Top="-89" RenderTransformOrigin="0.5,0.5" >
                        <control:FlowPipeV2.RenderTransform>
                            <TransformGroup>
                                <ScaleTransform/>
                                <SkewTransform/>
                                <RotateTransform Angle="90"/>
                                <TranslateTransform/>
                            </TransformGroup>
                        </control:FlowPipeV2.RenderTransform>
                    </control:FlowPipeV2>
                    <control:FlowPipeV2 Width="142"  Height="8"  IsFlowing="{Binding SoftPumpVlv.Feedback}"  Visibility="{Binding Path=SoftPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="199" Canvas.Top="-9" RenderTransformOrigin="0.5,0.5" >
                        <control:FlowPipeV2.RenderTransform>
                            <TransformGroup>
                                <ScaleTransform/>
                                <SkewTransform/>
                                <RotateTransform Angle="90"/>
                                <TranslateTransform/>
                            </TransformGroup>
                        </control:FlowPipeV2.RenderTransform>
                    </control:FlowPipeV2>
                    <control:FlowPipeV2 Width="96"  Height="6"  IsFlowing="{Binding SoftPumpVlv.Feedback}"  Visibility="{Binding Path=SoftPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="176" Canvas.Top="112" RenderTransformOrigin="0.5,0.5" >
                        <control:FlowPipeV2.RenderTransform>
                            <TransformGroup>
                                <ScaleTransform/>
                                <SkewTransform/>
                                <RotateTransform Angle="90"/>
                                <TranslateTransform/>
                            </TransformGroup>
                        </control:FlowPipeV2.RenderTransform>
                    </control:FlowPipeV2>
                    <control:FlowPipeV2 Width="38"  Height="8"  IsFlowing="{Binding SoftPumpVlv.Feedback}"  Visibility="{Binding Path=SoftPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}"    Canvas.Left="227" Canvas.Top="66" RenderTransformOrigin="0.5,0.5" >
                        <control:FlowPipeV2.RenderTransform>
                            <TransformGroup>
                                <ScaleTransform/>
                                <SkewTransform/>
                                <RotateTransform Angle="180"/>
                                <TranslateTransform/>
                            </TransformGroup>
                        </control:FlowPipeV2.RenderTransform>
                    </control:FlowPipeV2>
                    <deviceControl:AITGasValve Canvas.Left="254" Canvas.Top="20" ValveOpenOrientation="Vertical" DeviceData="{Binding SoftPumpVlv}" EnableServiceControl="{Binding enableServiceControl}" IsAutoMode="{Binding IsAutoMode}"/>
                </Canvas>

                <ctrl:Gasline Orientation="Horizontal"   Canvas.Left="216" Canvas.Top="468" Width="46"    />
                <ctrl:GaslineJoint JointType="RIGHT"  Canvas.Left="208" Canvas.Top="468" />
                <TextBlock Text="前端压力" Canvas.Left="277" Canvas.Top="440" />
                <deviceControl:AITPressureMeter DeviceData="{Binding ForelineGauge}"  Height="30"  Width="100" Canvas.Left="227" Canvas.Top="456" />
                <deviceControl:AITPump Canvas.Top="500" DeviceData="{Binding MainPumpData}" EnableControl="{Binding enableServiceControl}" IsShowSensor="False" Canvas.Left="4" IsAutoMode="{Binding IsAutoMode}"/>
                <deviceControl:AITThrottleValve Canvas.Top="288" DeviceData="{Binding Tv}" Canvas.Left="192" IsAutoMode="{Binding IsAutoMode}"></deviceControl:AITThrottleValve>

                <Grid Visibility="{Binding EPDVisibility}" Canvas.Left="-245" Canvas.Top="288">
                    <Grid.ColumnDefinitions>
                        <ColumnDefinition Width="120"/>
                        <ColumnDefinition Width="50" />
                        <ColumnDefinition Width="120" />
                    </Grid.ColumnDefinitions>
                    <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1" Height="24">
                        <TextBlock Text="EPD Status" TextWrapping="Wrap"  Foreground="{DynamicResource FG_Black}" FontSize="14" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
                    </Border>
                    <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1"  Grid.Row="0" Grid.Column="1" Padding="5,1">
                        <deviceControl:AITSensor Margin="5,0,5,0" GreenColor="True" LightOnValue="{Binding IsEPDConnected}" />
                    </Border>
                    <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1"  Grid.Row="0" Grid.Column="2" Padding="5,1">
                        <TextBlock Text="{Binding EPDStatus}" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="15" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
                    </Border>
                </Grid>


                <!--slit valve-->
                <Grid Width="280" HorizontalAlignment="Center" VerticalAlignment="Top" Canvas.Left="-245" Canvas.Top="330">
                    <Grid.RowDefinitions>
                        <RowDefinition Height="24"/>
                        <RowDefinition Height="30"/>
                        <RowDefinition />
                    </Grid.RowDefinitions>
                    <Border  BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Grid.Column="0" Padding="5,1">
                        <TextBlock Text="传送门" TextWrapping="Wrap" TextAlignment="Center" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="黑体" VerticalAlignment="Center"/>
                    </Border>
                    <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.ColumnSpan="2" Padding="5,1">
                        <StackPanel  Orientation="Horizontal" HorizontalAlignment="Center">
                            <deviceControl:AITSensor Margin="5,0,5,0" GreenColor="True" LightOnValue="{Binding IsSlitValveOpen}" />
                            <Button Content="Open" IsEnabled="{Binding EnableOpenSlitValve}" Width="100" Height="25" Margin="0">
                                <i:Interaction.Triggers>
                                    <i:EventTrigger EventName="Click">
                                        <cal:ActionMessage MethodName="OpenSlitValve"></cal:ActionMessage>
                                    </i:EventTrigger>
                                </i:Interaction.Triggers>
                            </Button>
                            <deviceControl:AITSensor Margin="15,0,5,0" GreenColor="True" LightOnValue="{Binding IsSlitValveClose}" />
                            <Button Content="Close" IsEnabled="{Binding EnableCloseSlitValve}" Width="100" Height="25" Margin="0">
                                <i:Interaction.Triggers>
                                    <i:EventTrigger EventName="Click">
                                        <cal:ActionMessage MethodName="CloseSlitValve"/>
                                    </i:EventTrigger>
                                </i:Interaction.Triggers>
                            </Button>
                        </StackPanel>
                    </Border>
                </Grid>

                <!--chamber-->
                <Grid Width="240" Height="190" Canvas.Top="80">
                    <Grid.RowDefinitions>
                        <RowDefinition Height="160"/>
                        <RowDefinition />
                    </Grid.RowDefinitions>
                    <Path Data="M0.5,0.5 L33.5,0.5 33.5,17.5 206.5,17.5 206.5,0.5 239.5,0.5 239.5,149.5 0.5,149.5 z" Stroke="#FF747474" Margin="0,10,0,0">
                        <Path.Fill>
                            <LinearGradientBrush EndPoint="1,1" StartPoint="0,0">
                                <GradientStop Color="#FF8F8F8F" Offset="0"/>
                                <GradientStop Color="#FF9B9B9B" Offset="1"/>
                                <GradientStop Color="#FEF1ECEC" Offset="0.15"/>
                                <GradientStop Color="#FEC0C0C0" Offset="0.38"/>
                                <GradientStop Color="#FEB4B4B4" Offset="0.5"/>
                                <GradientStop Color="#FEE5E5E5" Offset="0.7"/>
                                <GradientStop Color="#FFBABABA" Offset="0.85"/>
                                <GradientStop Color="#FFE5E5E5" Offset="0.9"/>
                            </LinearGradientBrush>
                        </Path.Fill>
                    </Path>
                    <Rectangle Stroke="#FF747474" Margin="8,18">
                        <Rectangle.Fill>
                            <LinearGradientBrush EndPoint="0.243,1" StartPoint="0.757,0">
                                <GradientStop Color="#FFE0DEDE" Offset="0"/>
                                <GradientStop Color="#FFE2E2E2" Offset="1"/>
                                <GradientStop Color="#FEFFFFFF" Offset="0.55"/>
                                <GradientStop Color="#FFEFEFEF" Offset="0.75"/>
                            </LinearGradientBrush>
                        </Rectangle.Fill>
                    </Rectangle>
                    <Rectangle x:Name="BG_Status" Margin="9,19" Visibility="{Binding BiasRfPowerOnChamberVisibility}">
                        <Rectangle.Style>
                            <Style>
                                <Setter Property="Rectangle.Fill" Value="{DynamicResource Chamber_BD}"/>
                                <Style.Triggers>
                                    <DataTrigger Binding="{Binding ShowTitle,RelativeSource={RelativeSource FindAncestor, AncestorType={x:Type UserControl}}}" Value="False">
                                        <Setter Property="Rectangle.Fill" Value="#FFFF9292"/>
                                    </DataTrigger>
                                </Style.Triggers>
                            </Style>
                        </Rectangle.Style>
                    </Rectangle>
                    <ctrl:Slot ViewType="Front" HorizontalAlignment="Center" VerticalAlignment="Top" Margin="0,4,0,0">
                    </ctrl:Slot>
                    <Rectangle Stroke="#FF747474" Height="11" VerticalAlignment="Bottom" Margin="12,0,12,8">
                        <Rectangle.Fill>
                            <LinearGradientBrush EndPoint="0.243,1" StartPoint="0.757,0">
                                <GradientStop Color="#FFE0DEDE" Offset="0"/>
                                <GradientStop Color="#FFE2E2E2" Offset="1"/>
                                <GradientStop Color="#FEFFFFFF" Offset="0.55"/>
                                <GradientStop Color="#FFEFEFEF" Offset="0.75"/>
                            </LinearGradientBrush>
                        </Rectangle.Fill>
                    </Rectangle>
                    <Grid x:Name="Cover" Width="180" Height="18" HorizontalAlignment="Left" VerticalAlignment="Top" Margin="30,2,0,0" RenderTransformOrigin="1,0.4444">
                        <Grid.RenderTransform>
                            <TransformGroup>
                                <ScaleTransform/>
                                <SkewTransform/>
                                <RotateTransform/>
                                <TranslateTransform/>
                            </TransformGroup>
                        </Grid.RenderTransform>
                        <Grid.Resources>
                            <Storyboard x:Key="CoverOpen">
                                <DoubleAnimationUsingKeyFrames Storyboard.TargetProperty="(UIElement.RenderTransform).(TransformGroup.Children)[2].(RotateTransform.Angle)">
                                    <EasingDoubleKeyFrame KeyTime="0" Value="0"/>
                                    <EasingDoubleKeyFrame KeyTime="0:0:0.5" Value="45"/>
                                </DoubleAnimationUsingKeyFrames>
                            </Storyboard>
                            <Storyboard x:Key="CoverClose">
                                <DoubleAnimationUsingKeyFrames Storyboard.TargetProperty="(UIElement.RenderTransform).(TransformGroup.Children)[2].(RotateTransform.Angle)">
                                    <EasingDoubleKeyFrame KeyTime="0" Value="45"/>
                                    <EasingDoubleKeyFrame KeyTime="0:0:0.5" Value="0"/>
                                </DoubleAnimationUsingKeyFrames>
                            </Storyboard>
                        </Grid.Resources>
                        <Grid.Style>
                            <Style>
                                <Style.Triggers>
                                    <DataTrigger Binding="{Binding IsLidOpen}" Value="true">
                                        <DataTrigger.EnterActions>
                                            <BeginStoryboard Storyboard="{StaticResource CoverOpen}"/>
                                        </DataTrigger.EnterActions>
                                        <DataTrigger.ExitActions>
                                            <BeginStoryboard Storyboard="{StaticResource CoverClose}"/>
                                        </DataTrigger.ExitActions>
                                    </DataTrigger>
                                </Style.Triggers>
                            </Style>
                        </Grid.Style>
                        <Rectangle Grid.Row="0" HorizontalAlignment="Center" VerticalAlignment="Bottom" Fill="{DynamicResource Lid_BG}" Stroke="{DynamicResource Lid_BD}" Width="172" Height="12"/>
                        <Rectangle Grid.Row="0" HorizontalAlignment="Center" VerticalAlignment="Top" Fill="{DynamicResource Lid_BG}" Stroke="{DynamicResource Lid_BD}" Width="180" Height="8"/>
                        <Line X1="35" Y1="-80" X2="120" Y2="-90" Stroke="#B87333" StrokeThickness="5"/>
                        <Line X1="35" Y1="-60" X2="145" Y2="-70" Stroke="#B87333" StrokeThickness="5"/>
                        <Line X1="35" Y1="-40" X2="145" Y2="-50" Stroke="#B87333" StrokeThickness="5"/>
                        <Line X1="35" Y1="-20" X2="145" Y2="-30" Stroke="#B87333" StrokeThickness="5"/>
                        <Rectangle  Stroke="DimGray" Fill="WhiteSmoke"  Margin="130,-101,42,0" Width="8" VerticalAlignment="Top" Height="102" />
                        <Rectangle  Stroke="DimGray" Fill="WhiteSmoke" Margin="42,-101,130,0" Width="8" VerticalAlignment="Top" Height="102" />
                        <Rectangle  Fill="DimGray" Margin="42,-108,42,0" VerticalAlignment="Top" Height="8" />
                        <Rectangle  Fill="White" Margin="50,-101,50,0" Width="80" Height="118" />
                        <Rectangle  x:Name="BG_Status1" Fill="{DynamicResource Chamber_BD}" Margin="50,-101,50,0" Width="80" Height="118" Visibility="{Binding RfPowerOnChamberVisibility}" />
                        <Rectangle  Stroke="#FF000000" Width="80" Height="10" Margin="0,8,0,0" StrokeThickness="1" StrokeDashArray="4 2" SnapsToDevicePixels="True"/>
                        <Rectangle  Stroke="#FF000000" Width="80" Height="9" Margin="0,-10,0,0" StrokeThickness="1" StrokeDashArray="4 2" SnapsToDevicePixels="True"/>
                        <Line X1="35" Y1="-40" X2="145" Y2="-30" Stroke="#B87333" StrokeThickness="5"/>
                        <Line X1="35" Y1="-60" X2="145" Y2="-50" Stroke="#B87333" StrokeThickness="5"/>
                        <Line X1="35" Y1="-80" X2="145" Y2="-70" Stroke="#B87333" StrokeThickness="5"/>
                    </Grid>
                    <Grid Grid.RowSpan="2" Width="160" Height="167" VerticalAlignment="Bottom" Margin="0,0,0,2">
                        <Rectangle Height="12" Stroke="Gray" VerticalAlignment="Top" Width="150" Margin="0,98,0,0">
                            <Rectangle.Fill>
                                <LinearGradientBrush EndPoint="0.5,1" StartPoint="0.5,0">
                                    <GradientStop Color="#FFABABAB" Offset="0"/>
                                    <GradientStop Color="#FFDADADA" Offset="1"/>
                                </LinearGradientBrush>
                            </Rectangle.Fill>
                        </Rectangle>
                        <Rectangle Height="12" Margin="0,109,0,0" Stroke="Gray" VerticalAlignment="Top" Width="160">
                            <Rectangle.Fill>
                                <LinearGradientBrush EndPoint="0.5,1" StartPoint="0.5,0">
                                    <GradientStop Color="#FFABABAB" Offset="0"/>
                                    <GradientStop Color="#FFDADADA" Offset="1"/>
                                </LinearGradientBrush>
                            </Rectangle.Fill>
                        </Rectangle>

                        <!--4寸 guide pin-->
                        <Grid x:Name="Bottom_LiftPin" Height="75" VerticalAlignment="Bottom" Margin="0,0,0,0" Visibility="{Binding Path=IsMidPinVisible, Converter={StaticResource bool2VisibilityConvert}}">
                            <Grid.Resources>
                                <Storyboard x:Key="BottomPinUp">
                                    <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
                                        <EasingThicknessKeyFrame KeyTime="0" Value="0,0,0,0"/>
                                        <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,15"/>
                                    </ThicknessAnimationUsingKeyFrames>
                                </Storyboard>
                                <Storyboard x:Key="BottomPinDown">
                                    <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
                                        <EasingThicknessKeyFrame KeyTime="0" Value="0,0,0,15"/>
                                        <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,0"/>
                                    </ThicknessAnimationUsingKeyFrames>
                                </Storyboard>
                            </Grid.Resources>
                            <Grid.Style>
                                <Style>
                                    <Style.Triggers>
                                        <DataTrigger  Binding="{Binding IsLowerPinUp}" Value="true">
                                            <DataTrigger.EnterActions>
                                                <BeginStoryboard Storyboard="{StaticResource BottomPinUp}"/>
                                            </DataTrigger.EnterActions>
                                            <DataTrigger.ExitActions>
                                                <BeginStoryboard Storyboard="{StaticResource BottomPinDown}"/>
                                            </DataTrigger.ExitActions>
                                        </DataTrigger>
                                    </Style.Triggers>
                                </Style>
                            </Grid.Style>
                            <Rectangle HorizontalAlignment="Left" Fill="{DynamicResource Lid_BG1}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="10,6,0,4"/>
                            <Rectangle HorizontalAlignment="Right" Fill="{DynamicResource Lid_BG1}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="0,6,10,4"/>
                            <Rectangle Stroke="{DynamicResource Lid_BD}" Fill="{DynamicResource Lid_BG1}" StrokeThickness="1" VerticalAlignment="Bottom" Height="8" Margin="5,0"/>
                        </Grid>

                        <!--3寸 guide pin-->
                        <Grid x:Name="Middle_LiftPin" Width="120" Height="63" VerticalAlignment="Bottom" Margin="0,0,0,12" Visibility="{Binding Path=IsSmallPinVisible, Converter={StaticResource bool2VisibilityConvert}}">
                            <Grid.Resources>
                                <Storyboard x:Key="MidPinUp">
                                    <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
                                        <EasingThicknessKeyFrame KeyTime="0" Value="0,0,0,12"/>
                                        <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,27"/>
                                    </ThicknessAnimationUsingKeyFrames>
                                </Storyboard>
                                <Storyboard x:Key="MidPinDown">
                                    <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
                                        <EasingThicknessKeyFrame KeyTime="0" Value="0,0,0,27"/>
                                        <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,12"/>
                                    </ThicknessAnimationUsingKeyFrames>
                                </Storyboard>
                            </Grid.Resources>
                            <Grid.Style>
                                <Style>
                                    <Style.Triggers>
                                        <DataTrigger Binding="{Binding IsUpperPinUp}" Value="true">
                                            <DataTrigger.EnterActions>
                                                <BeginStoryboard Storyboard="{StaticResource MidPinUp}"/>
                                            </DataTrigger.EnterActions>
                                            <DataTrigger.ExitActions>
                                                <BeginStoryboard Storyboard="{StaticResource MidPinDown}"/>
                                            </DataTrigger.ExitActions>
                                        </DataTrigger>
                                    </Style.Triggers>
                                </Style>
                            </Grid.Style>
                            <Rectangle HorizontalAlignment="Left" Fill="{DynamicResource Lid_BG2}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="10,6,0,4"/>
                            <Rectangle HorizontalAlignment="Right" Fill="{DynamicResource Lid_BG2}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="0,6,10,4"/>
                            <Rectangle Stroke="{DynamicResource Lid_BD}" Fill="{DynamicResource Lid_BG2}" StrokeThickness="1" VerticalAlignment="Bottom" Height="8" Margin="5,0"/>

                            <!--<parts:Wafer WaferStyle="Rect" WaferItem="{Binding PMWafer}" Station ="{Binding Station}" Slot="0"  Width="130" VerticalAlignment="Top" >
                                <parts:Wafer.Style>
                                    <Style>
                                        <Setter Property="parts:Wafer.Visibility" Value="Collapsed"/>
                                        <Style.Triggers>
                                            <DataTrigger Binding="{Binding PMWaferType}" Value="Wafer8">
                                                <Setter Property="parts:Wafer.Visibility" Value="Visible"/>
                                            </DataTrigger>
                                        </Style.Triggers>
                                    </Style>
                                </parts:Wafer.Style>
                            </parts:Wafer>-->
                        </Grid>

                        <!--lift pin-->
                        <Grid x:Name="Top_LiftPin" Height="51" VerticalAlignment="Bottom" Margin="0,0,0,28" Visibility="{Binding Path=IsLiftPinVisible, Converter={StaticResource bool2VisibilityConvert}}">
                            <Grid.Resources>
                                <Storyboard x:Key="TopPinUp">
                                    <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
                                        <EasingThicknessKeyFrame KeyTime="0" Value="0,0,0,28"/>
                                        <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,54"/>
                                    </ThicknessAnimationUsingKeyFrames>
                                </Storyboard>
                                <Storyboard x:Key="TopPinDown">
                                    <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
                                        <EasingThicknessKeyFrame KeyTime="0" Value="0,0,0,54"/>
                                        <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,28"/>
                                    </ThicknessAnimationUsingKeyFrames>
                                </Storyboard>
                            </Grid.Resources>
                            <Grid.Style>
                                <Style>
                                    <Style.Triggers>
                                        <DataTrigger Binding="{Binding IsLiftPinUp}" Value="true">
                                            <DataTrigger.EnterActions>
                                                <BeginStoryboard Storyboard="{StaticResource TopPinUp}"/>
                                            </DataTrigger.EnterActions>
                                            <DataTrigger.ExitActions>
                                                <BeginStoryboard Storyboard="{StaticResource TopPinDown}"/>
                                            </DataTrigger.ExitActions>
                                        </DataTrigger>
                                    </Style.Triggers>
                                </Style>
                            </Grid.Style>
                            <Rectangle HorizontalAlignment="Left" Fill="{DynamicResource Lid_BG3}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="48,10,0,4"/>
                            <Rectangle HorizontalAlignment="Right" Fill="{DynamicResource Lid_BG3}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="0,10,48,4"/>
                            <Rectangle Stroke="{DynamicResource Lid_BD}" Fill="{DynamicResource Lid_BG3}" StrokeThickness="1" VerticalAlignment="Bottom" Height="8" Margin="5,0" Width="64" />
                            <Rectangle Fill="{DynamicResource idleWafer}" HorizontalAlignment="Center" Margin="-100,0"  Width="{Binding WaferLength}" Height="10" VerticalAlignment="Top"/>
                            <TextBlock Text="{Binding WaferSize}" HorizontalAlignment="Center" TextAlignment="Center" Margin="-100,0"  Width="{Binding WaferLength}" Height="15" VerticalAlignment="Top"></TextBlock>


                        </Grid>

                        <!--左边slit door-->
                        <Grid x:Name="Slit_valve" Margin="-41,-10,191,29" >
                            <Rectangle x:Name="SlitValve_Top" Style="{StaticResource SlitValve_Animation}" Fill="DimGray" Width="8" VerticalAlignment="Top" Height="75"   />
                            <Rectangle x:Name="SlitValve_Bottom" Style="{StaticResource SlitValve_Animation}" Fill="DimGray" Width="8" VerticalAlignment="Bottom" Height="75" />
                        </Grid>

                        <!--slit door右边-->
                        <Grid Margin="190,-10,-40,29" >
                            <Rectangle  Fill="DimGray" Width="8" VerticalAlignment="Top" Height="75" />
                            <Rectangle  Fill="DimGray" Width="8" VerticalAlignment="Bottom" Height="75" />
                        </Grid>
                    </Grid>
                </Grid>
            </Canvas>

            <!--lift pin / guide pin control grid-->
            <Grid Width="280"  Grid.ColumnSpan="3" HorizontalAlignment="Center" VerticalAlignment="Top" Canvas.Left="200" Canvas.Top="600">
                <Grid.RowDefinitions>
                    <RowDefinition Height="24"/>
                    <RowDefinition Height="32"/>
                    <RowDefinition Height="{Binding SmallPinHeight}"/>
                    <RowDefinition Height="{Binding MediumPinHeight}"/>
                    <RowDefinition />
                </Grid.RowDefinitions>
                <Grid.ColumnDefinitions>
                    <ColumnDefinition Width="80"/>
                    <ColumnDefinition />
                </Grid.ColumnDefinitions>
                <Border Grid.ColumnSpan="2" BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Grid.Column="0" Padding="5,1">
                    <TextBlock Text="Pin" TextWrapping="Wrap" TextAlignment="Center" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                </Border>

                <!--lift pin button-->
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.ColumnSpan="2" Padding="5,1">
                    <StackPanel  Orientation="Horizontal" HorizontalAlignment="Center" >
                        <!--lift pin up-->
                        <deviceControl:AITSensor Margin="5,0,5,0" GreenColor="True" LightOnValue="{Binding IsLiftPinUp}" />
                        <Button Content="Lift Pin Up" IsEnabled="{Binding EnableLiftPinUp}" Width="100" Height="25" Margin="0">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="MoveLiftPinUp"></cal:ActionMessage>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>

                        <!--lift pin down-->
                        <deviceControl:AITSensor Margin="15,0,5,0" GreenColor="True" LightOnValue="{Binding IsLiftPinDown}" />
                        <Button Content="Lift Pin Down" IsEnabled="{Binding EnableLiftPinDown}" Width="100" Height="25" Margin="0">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="MoveLiftPinDown"></cal:ActionMessage>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                    </StackPanel>
                </Border>

                <!--3' guide pin button-->
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="2" Grid.ColumnSpan="2" Padding="5,1">
                    <StackPanel  Orientation="Horizontal" HorizontalAlignment="Center" >
                        <deviceControl:AITSensor Margin="5,0,5,0" GreenColor="True" LightOnValue="{Binding IsUpperPinUp}"></deviceControl:AITSensor>
                        <Button Content="{Binding SmallPinUpText}" IsEnabled="{Binding EnableUpperPinUp}" Width="100" Height="25" Margin="0">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="MovePin3Up"></cal:ActionMessage>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                        <deviceControl:AITSensor Margin="15,0,5,0" GreenColor="True" LightOnValue="{Binding IsUpperPinDown}"></deviceControl:AITSensor>
                        <Button Content="{Binding SmallPinDownText}" IsEnabled="{Binding EnableUpperPinDown}" Width="100" Height="25" Margin="0">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="MovePin3Down"></cal:ActionMessage>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                    </StackPanel>
                </Border>

                <!--4' guide pin button-->
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="3" Grid.ColumnSpan="2" Padding="5,1">
                    <StackPanel  Orientation="Horizontal" HorizontalAlignment="Center" >
                        <deviceControl:AITSensor Margin="5,0,5,0" GreenColor="True" LightOnValue="{Binding IsLowerPinUp}"></deviceControl:AITSensor>
                        <Button Content="{Binding MediumPinUpText}" IsEnabled="{Binding EnableLowerPinUp}" Width="100" Height="25" Margin="0">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="MovePin4Up"></cal:ActionMessage>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                        <deviceControl:AITSensor Margin="15,0,5,0" GreenColor="True" LightOnValue="{Binding IsLowerPinDown}"></deviceControl:AITSensor>
                        <Button Content="{Binding MediumPinDownText}" IsEnabled="{Binding EnableLowerPinDown}"  Width="100" Height="25" Margin="0">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="MovePin4Down"></cal:ActionMessage>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                    </StackPanel>
                </Border>
            </Grid>
        </Canvas>

        <!--参数 Grid 那一列-->
        <Grid Grid.Column="1">
            <Grid.RowDefinitions>
                <RowDefinition Height="110"></RowDefinition>
                <RowDefinition Height="600"></RowDefinition>
            </Grid.RowDefinitions>

            <!--选择recipe，开始recipe-->
            <Grid Grid.Row="0" VerticalAlignment="Top" Margin="0,10,0,0">
                <Grid.RowDefinitions>
                    <RowDefinition Height="35"/>
                    <RowDefinition Height="Auto"/>
                    <RowDefinition Height="35"/>
                </Grid.RowDefinitions>
                <Grid Grid.Row="0">
                    <Grid.ColumnDefinitions>
                        <ColumnDefinition Width="140"/>
                        <ColumnDefinition />
                    </Grid.ColumnDefinitions>
                    <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,1,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="1" Padding="5,1">
                        <Button Content="选择工艺" IsEnabled="{Binding IsEnableSelectRecipe}" Width="120" Height="25">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="SelectRecipe"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                    </Border>
                    <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.Column="1" Padding="5,1">
                        <TextBlock Text="{Binding SelectedRecipeName}" VerticalAlignment="Center" />
                    </Border>
                </Grid>
                <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.Column="1" Padding="5,1">
                    <StackPanel Orientation="Horizontal" Grid.Row="1" HorizontalAlignment="Center" VerticalAlignment="Center" Margin="0,5">
                        <Button Content="开始" IsEnabled="{Binding IsEnableStartRecipe}" Width="80" Height="25">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="Start"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                        <Button Content="下一步" IsEnabled="{Binding IsEnableNextStep}" Width="80" Height="25" Margin="30,0">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="NextStep"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                        <Button Content="停止" IsEnabled="{Binding IsEnableStopRecipe}" Width="80" Height="25">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="Stop"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                    </StackPanel>

                </Border>
                <Grid Grid.Row="2" Margin="0,0,0,10" Visibility="Hidden">
                    <Grid.ColumnDefinitions>
                        <ColumnDefinition Width="120"/>
                        <ColumnDefinition />
                    </Grid.ColumnDefinitions>
                    <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1" Height="24">
                        <TextBlock Text="Status" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" HorizontalAlignment="Left" VerticalAlignment="Center"/>
                    </Border>
                    <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="0" Grid.Column="1" Padding="5,1" Height="24">
                        <TextBlock Text="Status" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" HorizontalAlignment="Left" VerticalAlignment="Center"/>
                    </Border>
                </Grid>
            </Grid>

            <!--recipe 参数列表-->
            <DataGrid Grid.Row="1" AlternationCount="2" HorizontalAlignment="Left" CanUserAddRows="False" 
                      AutoGenerateColumns="False" RowHeaderWidth="0" CanUserResizeColumns="False" FontSize="14"
                      VirtualizingPanel.IsVirtualizing="True" VirtualizingPanel.VirtualizationMode="Recycling"
                      ItemsSource="{Binding PMParameters}" Margin="0,5,0,0" Width="452">
                <DataGrid.Columns>
                    <!--参数名字-->
                    <DataGridTemplateColumn Header="参数" Width="200">
                        <DataGridTemplateColumn.CellTemplate>
                            <DataTemplate>
                                <TextBlock Text="{Binding Display}" Margin="5,0" FontFamily="Arial" FontSize="14"
                                           Foreground="{DynamicResource FG_Black}" HorizontalAlignment="Left" VerticalAlignment="Center" >
                                </TextBlock>
                            </DataTemplate>
                        </DataGridTemplateColumn.CellTemplate>
                    </DataGridTemplateColumn>

                    <!--参数 Setpoint & Feedback-->
                    <DataGridTemplateColumn Header="Parameter" Width="250" CellTemplateSelector="{StaticResource SPSelector}">
                        <DataGridTemplateColumn.HeaderTemplate>
                            <DataTemplate>
                                <Grid>
                                    <Grid.ColumnDefinitions>
                                        <ColumnDefinition Width="125"></ColumnDefinition>
                                        <ColumnDefinition Width="125"></ColumnDefinition>
                                    </Grid.ColumnDefinitions>
                                    <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,0"  Grid.Row="0" Padding="0">
                                        <TextBlock Text="反馈值" HorizontalAlignment="Center" VerticalAlignment="Center" FontSize="14" />
                                    </Border>
                                    <TextBlock Text="设定值" Grid.Column="1" HorizontalAlignment="Center" VerticalAlignment="Center" FontSize="14" />
                                </Grid>
                            </DataTemplate>
                        </DataGridTemplateColumn.HeaderTemplate>
                    </DataGridTemplateColumn>
                </DataGrid.Columns>
            </DataGrid>
        </Grid>

        <Grid Grid.Column="2" Grid.RowSpan="2" Margin="10,0,0,0">
            <Grid.RowDefinitions>
                <RowDefinition Height="30"/>
                <RowDefinition Height="Auto"/>
                <RowDefinition Height="30"/>
                <RowDefinition Height="Auto"/>
                <RowDefinition Height="Auto"/>
                <RowDefinition />
            </Grid.RowDefinitions>
            <Border Grid.Row="0" BorderBrush="{DynamicResource Table_BD}" CornerRadius="5,5,0,0" BorderThickness="1" Background="{DynamicResource Table_BG_FirstTitle}" Padding="5,1">
                <StackPanel Orientation="Horizontal" HorizontalAlignment="Left" VerticalAlignment="Center">
                    <Path Data="M0,0 L5,0 5,5 z" Fill="White" HorizontalAlignment="Left" Grid.Row="1" RenderTransformOrigin="0.5,0.5" Stretch="Fill" Width="5" Height="5">
                        <Path.RenderTransform>
                            <TransformGroup>
                                <ScaleTransform/>
                                <SkewTransform/>
                                <RotateTransform Angle="45"/>
                                <TranslateTransform/>
                            </TransformGroup>
                        </Path.RenderTransform>
                    </Path>
                    <TextBlock Margin="5,0,0,0" Text="Working Mode" FontFamily="Arial" FontSize="14" Foreground="{DynamicResource FG_White}" HorizontalAlignment="Left" VerticalAlignment="Center"/>
                </StackPanel>
            </Border>
            <Border Grid.Row="1" BorderBrush="{DynamicResource Table_BD}" Background="{DynamicResource Table_BG_Content}" BorderThickness="1,0,1,1" Padding="5,1">
                <StackPanel Orientation="Vertical">
                    <StackPanel Orientation="Horizontal" HorizontalAlignment="Center">
                        <Button Width="80" Height="25" Margin="10,0" Content="初始化">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="SetInit"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                        <Button Width="80" Height="25" Margin="10,0" Content="终止">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="AbortPM"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                    </StackPanel>
                    <Grid Margin="5,5,5,0">
                        <Grid.ColumnDefinitions>
                            <ColumnDefinition Width="120"/>
                            <ColumnDefinition />
                        </Grid.ColumnDefinitions>
                        <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1" Height="24">
                            <TextBlock Text="Operation Mode" TextWrapping="Wrap"  Foreground="{DynamicResource FG_Black}" FontSize="14" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
                        </Border>
                        <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="0" Grid.Column="1" Padding="5,1">
                            <TextBlock Text="{Binding PmOperationMode}" TextWrapping="Wrap"  Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
                        </Border>
                    </Grid>
                    <StackPanel Margin="0,5,0,10" Orientation="Horizontal" HorizontalAlignment="Center">
                        <Button Width="80" Height="25" Margin="10,0" Content="手动" IsEnabled="{Binding IsManualButtonEnabled}" >
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="SetManual"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                        <Button Width="80" Height="25" Margin="10,0" Content="自动" IsEnabled="{Binding IsAutoButtonEnabled}">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="SetAuto"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                    </StackPanel>

                    <Grid Margin="5,5,5,0">
                        <Grid.ColumnDefinitions>
                            <ColumnDefinition Width="120"/>
                            <ColumnDefinition />
                        </Grid.ColumnDefinitions>
                        <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1" Height="24">
                            <TextBlock Text="Offline" TextWrapping="Wrap"  Foreground="{DynamicResource FG_Black}" FontSize="14" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
                        </Border>
                        <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{Binding PMOnlineColor}" Grid.Row="0" Grid.Column="1" Padding="5,1">
                            <TextBlock Text="Online" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="15" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
                        </Border>
                    </Grid>

                    <StackPanel Margin="0,5,0,10" Orientation="Horizontal" HorizontalAlignment="Center">
                        <Button Width="80" Height="25" Margin="10,0" Content="离线" IsEnabled="{Binding IsOfflineButtonEnabled}">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="SetOffline"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                        <Button Width="80" Height="25" Margin="10,0" Content="在线" IsEnabled="{Binding IsOnlineButtonEnabled}" >
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="SetOnline"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                    </StackPanel>
                </StackPanel>
            </Border>
            <Border Grid.Row="2" BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_FirstTitle}" Padding="5,1">
                <StackPanel Orientation="Horizontal" HorizontalAlignment="Left" VerticalAlignment="Center">
                    <Path Data="M0,0 L5,0 5,5 z" Fill="White" HorizontalAlignment="Left" Grid.Row="1" RenderTransformOrigin="0.5,0.5" Stretch="Fill" Width="5" Height="5">
                        <Path.RenderTransform>
                            <TransformGroup>
                                <ScaleTransform/>
                                <SkewTransform/>
                                <RotateTransform Angle="45"/>
                                <TranslateTransform/>
                            </TransformGroup>
                        </Path.RenderTransform>
                    </Path>
                    <TextBlock Margin="5,0,0,0" Text="Manual Operation" FontFamily="Arial" FontSize="14" Foreground="{DynamicResource FG_White}" HorizontalAlignment="Left" VerticalAlignment="Center"/>
                </StackPanel>
            </Border>
            <Border Grid.Row="3" BorderBrush="{DynamicResource Table_BD}" Background="{DynamicResource Table_BG_Content}" BorderThickness="1,0,1,1" Padding="5,1">
                <StackPanel HorizontalAlignment="Center" VerticalAlignment="Top" Margin="5,10">
                    <Grid>
                        <Grid.ColumnDefinitions>
                            <ColumnDefinition Width="140"/>
                            <ColumnDefinition Width="100"/>
                        </Grid.ColumnDefinitions>
                        <Grid.RowDefinitions>
                            <RowDefinition Height="24"/>
                            <RowDefinition Height="24"/>
                            <RowDefinition Height="24"/>
                        </Grid.RowDefinitions>
                        <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1">
                            <TextBlock Text="腔体底压 (mTorr)" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                        </Border>
                        <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="0" Grid.Column="1" Padding="5,1">
                            <ctrl:TextBoxEx Text="{Binding Path=BasePressureSetPoint}" TextSaved="{Binding BasePressureSetPointSaved, Mode=TwoWay, UpdateSourceTrigger=PropertyChanged}"   EditBoxMode="UnSignDecimal" VerticalAlignment="Center"/>
                        </Border>
                        <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="1" Padding="5,1">
                            <TextBlock Text="最大抽气时间 (s)" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                        </Border>
                        <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.Column="1" Padding="5,1">
                            <ctrl:TextBoxEx Text="{Binding Path=PumpLimitSetPoint}" TextSaved="{Binding PumpLimitSetPointSaved, Mode=TwoWay, UpdateSourceTrigger=PropertyChanged}" EditBoxMode="UnSignInteger"  VerticalAlignment="Center"/>
                        </Border>
                        <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="2" Padding="5,1">
                            <TextBlock Text="抽气时间 (s)" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
                        </Border>
                        <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="2" Grid.Column="1" Padding="5,1">
                            <TextBlock Text="{Binding Path=PumpTime}" VerticalAlignment="Center"/>
                        </Border>
                    </Grid>
                    <Grid>
                        <Grid.ColumnDefinitions>
                            <ColumnDefinition Width="*"/>
                            <ColumnDefinition Width="*"/>
                        </Grid.ColumnDefinitions>
                        <Grid.RowDefinitions>
                            <RowDefinition Height="50"/>
                        </Grid.RowDefinitions>
                        <Button Content="抽真空" Width="80" Height="25" Margin="0,10,0,0" IsEnabled="{Binding Path=IsManualMode}" Grid.Column="1" 
                            Background="{Binding Path=PumpButtonBackground}">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="DoPump"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                        <Button Content="启动泵" Width="85" Height="25" Margin="0,10,0,0" IsEnabled="{Binding Path=IsManualMode}" Grid.Column="0" 
                            Background="{Binding Path=PumpButtonBackground}">
                            <i:Interaction.Triggers>
                                <i:EventTrigger EventName="Click">
                                    <cal:ActionMessage MethodName="DoStartPump"/>
                                </i:EventTrigger>
                            </i:Interaction.Triggers>
                        </Button>
                    </Grid>
                </StackPanel>
            </Border>
            <Border Grid.Row="4" BorderBrush="{DynamicResource Table_BD}" Background="{DynamicResource Table_BG_Content}" BorderThickness="1,0,1,1" Padding="5,1">
                <StackPanel Margin="0,10">
                    <!--流气-->
                    <Button Content="流气" Width="80" Height="25" Margin="0 0 0 10" IsEnabled="{Binding Path=IsManualMode}">
                        <i:Interaction.Triggers>
                            <i:EventTrigger EventName="Click">
                                <cal:ActionMessage MethodName="Gas"/>
                            </i:EventTrigger>
                        </i:Interaction.Triggers>
                    </Button>
                    <!--源射频-->
                    <Button Content="射频" Width="80" Height="25" Margin="0 0 0 10" IsEnabled="{Binding Path=IsRFEnabled}">
                        <i:Interaction.Triggers>
                            <i:EventTrigger EventName="Click">
                                <cal:ActionMessage MethodName="RF"/>
                            </i:EventTrigger>
                        </i:Interaction.Triggers>
                    </Button>
                    <!--加热基座-->
                    <Button Content="{Binding HeaterButtonContent}" Width="80" Height="0" Margin="0 0 0 0" IsEnabled="{Binding Path=IsHeaterButtonEnable}">
                        <i:Interaction.Triggers>
                            <i:EventTrigger EventName="Click">
                                <cal:ActionMessage MethodName="Heat"/>
                            </i:EventTrigger>
                        </i:Interaction.Triggers>
                    </Button>
                    <!--抽气-->
                    <Button Content="吹扫" Width="80" Height="25" Margin="0 0 0 10" IsEnabled="{Binding Path=IsManualMode}">
                        <i:Interaction.Triggers>
                            <i:EventTrigger EventName="Click">
                                <cal:ActionMessage MethodName="Purge"/>
                            </i:EventTrigger>
                        </i:Interaction.Triggers>
                    </Button>

                    <Button Content="检测漏率" Width="80" Height="0" Margin="0 0 0 0" IsEnabled="{Binding Path=IsManualMode}">
                        <i:Interaction.Triggers>
                            <i:EventTrigger EventName="Click">
                                <cal:ActionMessage MethodName="LeakCheck"/>
                            </i:EventTrigger>
                        </i:Interaction.Triggers>
                    </Button>
                </StackPanel>
            </Border>
            <Border Grid.Row="5" BorderBrush="{DynamicResource Table_BD}" CornerRadius="0,0,5,5" Background="{DynamicResource Table_BG_Content}" BorderThickness="1,0,1,1" Padding="5,1">
                <Button Content="充气" Width="80" Height="25" Margin="0,10" VerticalAlignment="Top" IsEnabled="{Binding Path=IsManualMode}">
                    <i:Interaction.Triggers>
                        <i:EventTrigger EventName="Click">
                            <cal:ActionMessage MethodName="Vent"/>
                        </i:EventTrigger>
                    </i:Interaction.Triggers>
                </Button>
            </Border>
        </Grid>
    </Grid>
</UserControl>