SimulatorSystem.cs 29 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using VirgoSimulator.Devices;
  10. namespace VirgoSimulator.Instances
  11. {
  12. public class SimulatorSystem : Singleton<SimulatorSystem>
  13. {
  14. private PeriodicJob _thread;
  15. private Random _rd = new Random();
  16. private RD_TRIG _trigATM = new RD_TRIG();
  17. private RD_TRIG _trigVAC = new RD_TRIG();
  18. private readonly float ATM_THRESHOLD = 750000;
  19. private readonly float ATM_PRESSURE = 760000;
  20. private readonly uint VAC_SW_PRESSURE = 9500;
  21. private readonly uint PROCESS_GAUGE = 10000;
  22. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  23. public SimulatorSystem()
  24. {
  25. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  26. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  27. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  28. // TODO
  29. }
  30. ~SimulatorSystem()
  31. {
  32. _thread?.Stop();
  33. }
  34. public void Initialize()
  35. {
  36. SetDefaultValue(ModuleName.PMA);
  37. SetDefaultValue(ModuleName.PMB);
  38. Singleton<DataManager>.Instance.Initialize(false);
  39. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  40. }
  41. private void SetDefaultValue(ModuleName mod)
  42. {
  43. // chamber
  44. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  45. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  46. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  47. IO.DI[$"{mod}.DI_SourceFan1"].Value = true;
  48. IO.DI[$"{mod}.DI_SourceFan2"].Value = true;
  49. IO.DI[$"{mod}.DI_Cooling_Water_Flow_SW"].Value = true;
  50. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  51. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  52. IO.DI[$"{mod}.DI_Water_Leak"].Value = true;
  53. IO.DI[$"{mod}.DI_ARM_Not_Extend_to_PM"].Value = true;
  54. IO.DI[$"{mod}.DI_MFC1_Pressure"].Value = true;
  55. IO.DI[$"{mod}.DI_MFC2_Pressure"].Value = true;
  56. IO.DI[$"{mod}.DI_MFC3_Pressure"].Value = true;
  57. IO.DI[$"{mod}.DI_MFC4_Pressure"].Value = true;
  58. IO.DI[$"{mod}.DI_MFC5_Pressure"].Value = true;
  59. IO.DI[$"{mod}.DI_EFEM_Side_Panel_Closed"].Value = true;
  60. IO.DI[$"{mod}.DI_Generator_Hardware_Interlock"].Value = true;
  61. IO.DI[$"{mod}.DI_N2_Pressure"].Value = true;
  62. // slit door
  63. IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = false;
  64. IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = true;
  65. // lift pin
  66. IO.DI[$"{mod}.DI_Lift_Pin_Up"].Value = false;
  67. IO.DI[$"{mod}.DI_Lift_Pin_Down"].Value = true;
  68. //
  69. IO.DI[$"{mod}.DI_LE_OT_SW_Alarm"].Value = false;
  70. IO.DI[$"{mod}.DI_GB_Door_SW_Alarm"].Value = false;
  71. IO.DI[$"{mod}.DI_GB_Pressure_SW_Alarm"].Value = false;
  72. //Guide pin
  73. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = false;
  74. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = true;
  75. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = false;
  76. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = true;
  77. // pressure
  78. SetAiValue($"{mod}.AI_Foreline_pressure", 5000);
  79. SetAiValue($"{mod}.AI_Chamber_pressure", ATM_PRESSURE);
  80. SetAiValue($"{mod}.AI_Process_pressure", PROCESS_GAUGE);
  81. //SetAiValue($"{mod}.AI_Throttle_Valve_State", 1);
  82. IO.AI[$"{mod}.AI_Throttle_Valve_State"].Value = 1;
  83. IO.AI[$"{mod}.AI_Throttle_Valve_Real_Position"].Value = 10;
  84. // Temperature
  85. SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", 28);
  86. SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", 27);
  87. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  88. SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", 27);
  89. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  90. if (mod == ModuleName.PMA)
  91. {
  92. SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  93. }
  94. else if (mod == ModuleName.PMB)
  95. {
  96. SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  97. }
  98. // Datetime
  99. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  100. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  101. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  102. }
  103. private bool OnMonitor()
  104. {
  105. try
  106. {
  107. // PMA
  108. MonitorSlitDoor(ModuleName.PMA);
  109. MonitorPin(ModuleName.PMA);
  110. MonitorPressure(ModuleName.PMA);
  111. MonitorTemperature(ModuleName.PMA);
  112. MonitorGas(ModuleName.PMA);
  113. MonitorRF(ModuleName.PMA);
  114. ChangeTime(ModuleName.PMA);
  115. // PMB
  116. MonitorSlitDoor(ModuleName.PMB);
  117. MonitorPin(ModuleName.PMB);
  118. MonitorPressure(ModuleName.PMB);
  119. MonitorTemperature(ModuleName.PMB);
  120. MonitorGas(ModuleName.PMB);
  121. MonitorRF(ModuleName.PMB);
  122. ChangeTime(ModuleName.PMB);
  123. }
  124. catch (Exception e)
  125. {
  126. LOG.Write(e);
  127. }
  128. return true;
  129. }
  130. private void ChangeTime(ModuleName mod)
  131. {
  132. // Heartbeat with PLC
  133. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  134. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  135. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  136. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  137. }
  138. void MonitorSlitDoor(ModuleName mod)
  139. {
  140. // slit door open
  141. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  142. {
  143. IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = true;
  144. IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = false;
  145. }
  146. // slit door close
  147. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  148. {
  149. IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = false;
  150. IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = true;
  151. }
  152. }
  153. void MonitorPin(ModuleName mod)
  154. {
  155. // lift pin up
  156. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  157. {
  158. IO.DI[$"{mod}.DI_Lift_Pin_Up"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  159. IO.DI[$"{mod}.DI_Lift_Pin_Down"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  160. }
  161. // upper guide pin up
  162. if (IO.DO[$"{mod}.DO_Guide_Pin_Small_Lifter_Up"].Value)
  163. {
  164. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = true;
  165. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = false;
  166. }
  167. // upper guide pin down
  168. if (IO.DO[$"{mod}.DO_Guide_Pin_Small_Lifter_Down"].Value)
  169. {
  170. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = false;
  171. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = true;
  172. }
  173. // lower guide pin up
  174. if (IO.DO[$"{mod}.DO_Guide_Pin_Medium_Lifter_Up"].Value)
  175. {
  176. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = true;
  177. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = false;
  178. }
  179. // lower guide pin down
  180. if (IO.DO[$"{mod}.DO_Guide_Pin_Medium_Lifter_Down"].Value)
  181. {
  182. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = false;
  183. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = true;
  184. }
  185. }
  186. void MonitorPressure(ModuleName mod)
  187. {
  188. // pressure
  189. string sAI_Foreline = "AI_Foreline_pressure";
  190. // Foreline
  191. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  192. {
  193. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  194. }
  195. else
  196. {
  197. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  198. }
  199. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  200. string sAI_ChamberPressure = "AI_Chamber_pressure";
  201. string sAI_ProcessPressure = "AI_Process_pressure";
  202. //float chamber_pressure = GetMockChamberPressure(mod);
  203. //float process_pressure = GetAiValue($"{mod}.AI_Process_pressure");
  204. // soft pump & fast pump
  205. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  206. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  207. if (fast_pump_vlv.Value || soft_pump_vlv.Value)
  208. {
  209. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  210. {
  211. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  212. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  213. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  214. {
  215. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  216. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  217. }
  218. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  219. {
  220. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  221. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  222. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  223. }
  224. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  225. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  226. }
  227. else if (fast_pump_vlv.Value)
  228. {
  229. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  230. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  231. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  232. {
  233. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  234. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  235. }
  236. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  237. {
  238. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  239. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  240. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  241. }
  242. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  243. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  244. }
  245. else if (soft_pump_vlv.Value)
  246. {
  247. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  248. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  249. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  250. {
  251. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  252. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  253. }
  254. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  255. {
  256. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  257. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  258. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  259. }
  260. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  261. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  262. }
  263. }
  264. // fast vent & purge
  265. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_Chamber_vent_valve"];
  266. DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  267. if (vent_vlv.Value || purge_vlv.Value)
  268. {
  269. if (vent_vlv.Value && purge_vlv.Value)
  270. {
  271. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  272. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  273. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  274. {
  275. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  276. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  277. }
  278. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  279. {
  280. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  281. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  282. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  283. }
  284. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  285. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  286. }
  287. else if (vent_vlv.Value)
  288. {
  289. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  290. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  291. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  292. {
  293. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  294. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  295. }
  296. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  297. {
  298. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  299. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  300. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  301. }
  302. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  303. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  304. }
  305. else if (purge_vlv.Value)
  306. {
  307. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  308. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  309. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  310. {
  311. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  312. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  313. }
  314. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  315. {
  316. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  317. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 3100);
  318. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 3100);
  319. }
  320. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(15000, 20000));
  321. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(100, 120));
  322. }
  323. }
  324. // 压力值越界,复位
  325. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  326. if (chamber_pressure1 > ATM_PRESSURE)
  327. {
  328. SetAiValue($"{mod}.AI_Chamber_pressure", ATM_PRESSURE);
  329. }
  330. else if (chamber_pressure1 < 20)
  331. {
  332. SetAiValue($"{mod}.AI_Chamber_pressure", 20);
  333. }
  334. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  335. if (process_pressure1 > PROCESS_GAUGE)
  336. {
  337. SetAiValue($"{mod}.AI_Process_pressure", PROCESS_GAUGE);
  338. }
  339. else if (process_pressure1 < 20)
  340. {
  341. SetAiValue($"{mod}.AI_Process_pressure", 20);
  342. }
  343. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  344. if (foreline_pressure > 10000)
  345. {
  346. SetAiValue($"{mod}.AI_Foreline_pressure", 10000);
  347. }
  348. else if (foreline_pressure < 150)
  349. {
  350. SetAiValue($"{mod}.AI_Foreline_pressure", 150);
  351. }
  352. // 模拟压力计漂移
  353. //int p1 = (int)GetMockChamberPressure(mod);
  354. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  355. //SetAiValue($"{mod}.AI_Chamber_pressure", new_p1);
  356. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_pressure");
  357. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  358. //SetAiValue($"{mod}.AI_Foreline_pressure", new_p2);
  359. //int p3 = (int)GetAiValue($"{mod}.AI_Process_pressure");
  360. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  361. //SetAiValue($"{mod}.AI_Process_pressure", new_p3);
  362. // 根据当前压力值设定信号
  363. //float chamber_pressure2 = GetMockChamberPressure(mod);
  364. // ATM switch
  365. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  366. // VAC switch
  367. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  368. // Throttle valve
  369. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  370. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  371. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  372. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  373. // 压力值
  374. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  375. {
  376. short increase = (short)_rd.Next(20, 30);
  377. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  378. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  379. {
  380. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  381. }
  382. }
  383. else
  384. {
  385. short increase = (short)_rd.Next(20, 30);
  386. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  387. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  388. {
  389. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  390. }
  391. }
  392. // 位置值
  393. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  394. {
  395. short increase = (short)_rd.Next(20, 30);
  396. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  397. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  398. {
  399. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  400. }
  401. }
  402. else
  403. {
  404. short increase = (short)_rd.Next(20, 30);
  405. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  406. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  407. {
  408. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  409. }
  410. }
  411. }
  412. //float GetMockChamberPressure(ModuleName mod)
  413. //{
  414. // return GetAiValue($"{mod}.AI_Chamber_pressure");
  415. //}
  416. //void SetMockChamberPressure(ModuleName mod, float val)
  417. //{
  418. // SetAiValue($"{mod}.AI_Chamber_pressure", val);
  419. //}
  420. void SetAiValue(string name, float value)
  421. {
  422. byte[] flow = BitConverter.GetBytes(value);
  423. short high1 = BitConverter.ToInt16(flow, 0);
  424. short low1 = BitConverter.ToInt16(flow, 2);
  425. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  426. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  427. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  428. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  429. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  430. }
  431. float GetAiValue(string name)
  432. {
  433. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  434. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  435. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  436. return flow;
  437. }
  438. float GetAoValue(string name)
  439. {
  440. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  441. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  442. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  443. return flow;
  444. }
  445. void MonitorTemperature(ModuleName mod)
  446. {
  447. IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  448. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  449. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  450. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  451. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  452. // 底座
  453. if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  454. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  455. {
  456. SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  457. SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  458. }
  459. else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  460. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  461. {
  462. SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  463. SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  464. }
  465. // Foreline
  466. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  467. GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  468. {
  469. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") + _rd.Next(1, 2));
  470. SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp") + _rd.Next(1, 2));
  471. }
  472. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  473. GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  474. {
  475. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") - _rd.Next(1, 2));
  476. SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp") - _rd.Next(1, 2));
  477. }
  478. // Wall
  479. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  480. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  481. {
  482. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  483. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  484. }
  485. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  486. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  487. {
  488. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  489. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  490. }
  491. }
  492. void MonitorGas(ModuleName mod)
  493. {
  494. // gas
  495. this.SimulateMFC(ModuleName.PMA, 1);
  496. this.SimulateMFC(ModuleName.PMA, 2);
  497. this.SimulateMFC(ModuleName.PMA, 3);
  498. this.SimulateMFC(ModuleName.PMA, 4);
  499. this.SimulateMFC(ModuleName.PMA, 5);
  500. this.SimulateMFC(ModuleName.PMB, 1);
  501. this.SimulateMFC(ModuleName.PMB, 2);
  502. this.SimulateMFC(ModuleName.PMB, 3);
  503. this.SimulateMFC(ModuleName.PMB, 4);
  504. this.SimulateMFC(ModuleName.PMB, 5);
  505. }
  506. private void SimulateMFC(ModuleName mod, byte gasNum)
  507. {
  508. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  509. if (gasNum == 3)
  510. {
  511. sp = Math.Max(0, sp - 1500);
  512. }
  513. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  514. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  515. }
  516. void MonitorRF(ModuleName mod)
  517. {
  518. // RF generator
  519. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  520. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  521. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  522. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  523. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  524. }
  525. public void Terminate()
  526. {
  527. _thread.Stop();
  528. }
  529. }
  530. }