ManualTransfer.cs 14 KB

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  1. using System.Collections.Generic;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Routine;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.RT.Event;
  6. using MECF.Framework.Common.Equipment;
  7. using VirgoRT.Scheduler;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Schedulers;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using VirgoRT.Modules.PMs;
  12. using VirgoRT.Modules.Schedulers;
  13. namespace VirgoRT.Modules
  14. {
  15. internal interface IManualTransferRoutine : IRoutine
  16. {
  17. }
  18. public class MoveItemEx : MoveItem
  19. {
  20. public int CoolingTime { get; set; }
  21. public MoveItemEx(ModuleName sourceModule, int sourceSlot, ModuleName destinationModule, int destinationSlot, int coolingTime, Hand blade)
  22. : base(sourceModule, sourceSlot, destinationModule, destinationSlot, blade)
  23. {
  24. CoolingTime = coolingTime;
  25. }
  26. }
  27. public class ManualTransfer : TransferModule
  28. {
  29. private Queue<IRoutine> _moveTaskQueue = new Queue<IRoutine>();
  30. private IRoutine _activeTask;
  31. public Result Start(object[] objs)
  32. {
  33. _moveTaskQueue.Clear();
  34. ModuleName source = (ModuleName)objs[0];
  35. int ss = (int)objs[1];
  36. ModuleName target = (ModuleName)objs[2];
  37. int ds = (int)objs[3];
  38. bool autoAlign = (bool)objs[4];
  39. int alignAngle = (int)objs[5];
  40. bool autoCooling = (bool)objs[6];
  41. int coolingTime = (int)objs[7];
  42. if (!WaferManager.Instance.CheckWafer(source, ss, WaferStatus.Normal))
  43. {
  44. EV.PostWarningLog("System", $"source {source} slot {ss+1} no normal wafer");
  45. return Result.FAIL;
  46. }
  47. if (!WaferManager.Instance.CheckNoWafer(target, ds))
  48. {
  49. EV.PostWarningLog("System", "destination has wafer");
  50. return Result.FAIL;
  51. }
  52. if (source!=ModuleName.EfemRobot && WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  53. {
  54. EV.PostWarningLog("System", "robot has wafer");
  55. return Result.FAIL;
  56. }
  57. Hand blade = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) ? Hand.Blade1 : Hand.Blade2;
  58. if (source == ModuleName.EfemRobot)
  59. blade = ss == 0 ? Hand.Blade1 : Hand.Blade2;
  60. else if (target == ModuleName.EfemRobot)
  61. blade = ds == 0 ? Hand.Blade1 : Hand.Blade2;
  62. if (autoAlign && !ModuleHelper.IsAligner(source) && !ModuleHelper.IsAligner(target) )
  63. {
  64. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  65. {
  66. EV.PostWarningLog("System", "Can not transfer, aligner has wafer, can not auto align");
  67. return Result.FAIL;
  68. }
  69. ModuleName aligner = WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0)
  70. ? ModuleName.Aligner2
  71. : ModuleName.Aligner1;
  72. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, aligner, 0, 1, blade)));
  73. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(aligner, 0, target, ds, 0, blade)));
  74. }
  75. else if(autoCooling && !ModuleHelper.IsCooling(source) && !ModuleHelper.IsCooling(target))
  76. {
  77. if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  78. {
  79. EV.PostWarningLog("System", "Can not transfer, cooling has wafer, can not auto cooling");
  80. return Result.FAIL;
  81. }
  82. ModuleName cooling = WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0)
  83. ? ModuleName.Cooling2
  84. : ModuleName.Cooling1;
  85. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, cooling, 0, coolingTime, blade)));
  86. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(cooling, 0, target, ds, 0, blade)));
  87. }
  88. else
  89. {
  90. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, target, ds, coolingTime, blade)));
  91. }
  92. _activeTask = _moveTaskQueue.Dequeue();
  93. return _activeTask.Start();
  94. }
  95. public Result Monitor(object[] objs)
  96. {
  97. System.Diagnostics.Debug.Assert(_activeTask != null, "mover should not be null, call start first");
  98. Result ret = _activeTask.Monitor();
  99. if (ret == Result.FAIL)
  100. return ret;
  101. if (ret == Result.DONE)
  102. {
  103. if (_moveTaskQueue.Count > 0)
  104. {
  105. _activeTask = _moveTaskQueue.Dequeue();
  106. return _activeTask.Start();
  107. }
  108. return Result.DONE;
  109. }
  110. return Result.RUN;
  111. }
  112. public void Clear()
  113. {
  114. _moveTaskQueue.Clear();
  115. _activeTask = null;
  116. }
  117. }
  118. public class EfemRobotMover : TransferModule, IRoutine
  119. {
  120. private MoveItemEx _moveTask;
  121. private SchedulerModule _source;
  122. private SchedulerModule _destination;
  123. public EfemRobotMover(MoveItemEx moveTask)
  124. {
  125. _moveTask = moveTask;
  126. }
  127. public Result Start()
  128. {
  129. _source = GetModule(_moveTask.SourceModule.ToString());
  130. _destination = GetModule(_moveTask.DestinationModule.ToString());
  131. System.Diagnostics.Debug.Assert(_source != null, $"{_moveTask.SourceModule} not valid");
  132. System.Diagnostics.Debug.Assert(_destination != null, $"{_moveTask.DestinationModule} not valid");
  133. if(!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))
  134. {
  135. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} slot {_moveTask.SourceSlot + 1} has not wafer");
  136. return Result.FAIL;
  137. }
  138. if (WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))
  139. {
  140. EV.PostWarningLog("System", $"Failed transfer, destination {_moveTask.DestinationModule} slot {_moveTask.DestinationSlot + 1} has wafer");
  141. return Result.FAIL;
  142. }
  143. if (!_source.IsAvailable)
  144. {
  145. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");
  146. return Result.FAIL;
  147. }
  148. if (ModuleHelper.IsLoadPort(_source.Module))
  149. {
  150. if (!(_source as SchedulerLoadPort).CheckReadyTransfer())
  151. {
  152. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");
  153. return Result.FAIL;
  154. }
  155. }
  156. if (!_destination.IsAvailable)
  157. {
  158. EV.PostWarningLog("System", $"Failed transfer, Destination {_moveTask.DestinationModule} not ready");
  159. return Result.FAIL;
  160. }
  161. if (ModuleHelper.IsLoadPort(_destination.Module))
  162. {
  163. if (!(_destination as SchedulerLoadPort).CheckReadyTransfer())
  164. {
  165. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.DestinationModule} not ready");
  166. return Result.FAIL;
  167. }
  168. }
  169. if (!_efemRobot.IsAvailable)
  170. {
  171. EV.PostWarningLog("System", $"Failed transfer, EFEM Robot not ready");
  172. return Result.FAIL;
  173. }
  174. if (ModuleHelper.IsAligner(_source.Module) || ModuleHelper.IsCooling(_source.Module))
  175. _source.Cooling(_moveTask.CoolingTime);
  176. if (ModuleHelper.IsAligner(_destination.Module) || ModuleHelper.IsCooling(_destination.Module))
  177. _destination.Cooling(_moveTask.CoolingTime);
  178. if (_moveTask.SourceModule == ModuleName.EfemRobot)
  179. {
  180. _moveTask.RobotHand = (Hand)_moveTask.SourceSlot;
  181. }else if (_moveTask.DestinationModule == ModuleName.EfemRobot)
  182. {
  183. _moveTask.RobotHand = (Hand)_moveTask.DestinationSlot;
  184. }
  185. return Result.RUN;
  186. }
  187. public Result Start(params object[] objs)
  188. {
  189. return this.Start();
  190. }
  191. public Result Monitor()
  192. {
  193. if (_source.IsError || _destination.IsError || _efemRobot.IsError)
  194. return Result.FAIL;
  195. if (!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot) &&
  196. WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot) &&
  197. _efemRobot.IsAvailable)
  198. {
  199. if (_source.IsWaitTransfer(ModuleName.EfemRobot))
  200. {
  201. _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  202. //_source.StopWaitTransfer(ModuleName.EfemRobot);
  203. }
  204. if (_destination.IsWaitTransfer(ModuleName.EfemRobot))
  205. {
  206. _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  207. //_destination.StopWaitTransfer(ModuleName.EfemRobot);
  208. }
  209. if (_source.IsAvailable && _destination.IsAvailable)
  210. {
  211. if (_moveTask.CoolingTime > 0 && ModuleHelper.IsCooling(_moveTask.DestinationModule))
  212. {
  213. _destination.Cooling(_moveTask.CoolingTime);
  214. _moveTask.CoolingTime = 0;
  215. return Result.RUN;
  216. }
  217. return Result.DONE;
  218. }
  219. return Result.RUN;
  220. }
  221. if (!_efemRobot.IsAvailable)
  222. return Result.RUN;
  223. //pick
  224. if (_moveTask.SourceModule != ModuleName.EfemRobot)
  225. {
  226. if (WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))
  227. {
  228. if (!_source.IsAvailable)
  229. return Result.RUN;
  230. if (!_source.IsReadyForPick(ModuleName.EfemRobot, _moveTask.SourceSlot, _moveTask.RobotHand))
  231. {
  232. if (!_source.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, _moveTask.SourceSlot))
  233. return Result.FAIL;
  234. }
  235. if (!_source.IsAvailable)
  236. return Result.RUN;
  237. if (!WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))
  238. {
  239. if (!_efemRobot.Pick(_moveTask.SourceModule, _moveTask.SourceSlot, _moveTask.RobotHand))
  240. {
  241. return Result.FAIL;
  242. }
  243. _source.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  244. }
  245. if (!_efemRobot.IsAvailable)
  246. return Result.RUN;
  247. }
  248. else
  249. {
  250. if (!_efemRobot.IsAvailable)
  251. return Result.RUN;
  252. if (_source.IsWaitTransfer(ModuleName.EfemRobot))
  253. {
  254. _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  255. }
  256. }
  257. }
  258. //place
  259. if (_moveTask.DestinationModule != ModuleName.EfemRobot)
  260. {
  261. if (!_destination.IsAvailable)
  262. return Result.RUN;
  263. if (!WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))
  264. {
  265. if (!_destination.IsReadyForPlace(ModuleName.EfemRobot, _moveTask.DestinationSlot, _moveTask.RobotHand))
  266. {
  267. if (!_destination.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place,
  268. _moveTask.DestinationSlot))
  269. return Result.FAIL;
  270. }
  271. if (!_destination.IsAvailable)
  272. return Result.RUN;
  273. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))
  274. {
  275. if (!_efemRobot.Place(_moveTask.DestinationModule, _moveTask.DestinationSlot, _moveTask.RobotHand))
  276. return Result.FAIL;
  277. _destination.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  278. }
  279. if (!_efemRobot.IsAvailable)
  280. return Result.RUN;
  281. }
  282. else
  283. {
  284. if (!_efemRobot.IsAvailable)
  285. return Result.RUN;
  286. if (_destination.IsWaitTransfer(ModuleName.EfemRobot))
  287. {
  288. _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  289. //_destination.StopWaitTransfer(ModuleName.EfemRobot);
  290. }
  291. }
  292. }
  293. return Result.RUN;
  294. }
  295. public void Abort()
  296. {
  297. Clear();
  298. }
  299. public void Clear()
  300. {
  301. _efemRobot.ResetTask();
  302. _source?.ResetTask();
  303. _destination?.ResetTask();
  304. }
  305. }
  306. }