SchedulerPM.cs 20 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using VirgoRT.Module;
  17. using VirgoRT.Modules;
  18. using MECF.Framework.Common.Equipment;
  19. using MECF.Framework.Common.Schedulers;
  20. using MECF.Framework.Common.SubstrateTrackings;
  21. using VirgoRT.Devices;
  22. namespace VirgoRT.Scheduler
  23. {
  24. public class SchedulerPM : SchedulerModule
  25. {
  26. public override bool IsAvailable
  27. {
  28. get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() && !(_waitCompletejobClean || _waitPreJobClean); }
  29. }
  30. public override bool IsOnline
  31. {
  32. get { return _entity != null && _entity.IsOnline; }
  33. }
  34. public override bool IsError
  35. {
  36. get { return _entity.IsError; }
  37. }
  38. public bool IsIdle
  39. {
  40. get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() ; }
  41. }
  42. public TaskType Task => _task;
  43. private PMEntity _entity = null;
  44. private ModuleName _taskRobot;
  45. private EnumTransferType _taskTransferType;
  46. private Hand _taskBlade;
  47. private int _taskSlot;
  48. private int _entityTaskToken = (int)FSM_MSG.NONE;
  49. private DeviceTimer _timerProcess = new DeviceTimer();
  50. private JetPM _pm;
  51. private float _paramTemp;
  52. public float Temperature
  53. {
  54. get
  55. {
  56. if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
  57. {
  58. return _pm.CoolantOutletTempFB;
  59. }
  60. return _pm.SubstrateTempFB;
  61. }
  62. }
  63. public RD_TRIG IdlePurgeTrig { get; set; }
  64. public Stopwatch IdlePurgeTimer { get; set; }
  65. public int IdlePurgeTime { get; set; }
  66. public int IdlePurgeNextRunTime { get; set; }
  67. public RD_TRIG IdleCleanTrig { get; set; }
  68. public Stopwatch IdleCleanTimer { get; set; }
  69. public int IdleCleanTime { get; set; }
  70. public int IdleCleanNextRunTime { get; set; }
  71. private bool _waitPreJobClean;
  72. private bool _waitCompletejobClean;
  73. private R_TRIG _trigIdleCleanFailed = new R_TRIG();
  74. private R_TRIG _trigIdlePurgeFailed = new R_TRIG();
  75. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  76. {
  77. switch (chamber)
  78. {
  79. case ModuleName.PMA:
  80. _entity = Singleton<RouteManager>.Instance.PMA;
  81. break;
  82. case ModuleName.PMB:
  83. _entity = Singleton<RouteManager>.Instance.PMB;
  84. break;
  85. }
  86. _pm = DEVICE.GetDevice<JetPM>(Module.ToString());
  87. IdlePurgeTrig = new RD_TRIG();
  88. IdlePurgeTimer = new Stopwatch();
  89. IdleCleanTrig = new RD_TRIG();
  90. IdleCleanTimer = new Stopwatch();
  91. }
  92. public void InitClean()
  93. {
  94. DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  95. DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  96. }
  97. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  98. {
  99. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  100. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  101. }
  102. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  103. {
  104. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  105. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  106. }
  107. public bool IsTemperatureReady(float temp)
  108. {
  109. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  110. }
  111. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  112. {
  113. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  114. _taskTransferType == type;
  115. }
  116. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  117. {
  118. _task = TaskType.PrepareTransfer;
  119. _taskRobot = robot;
  120. _taskSlot = slot;
  121. _taskTransferType = type;
  122. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  123. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  124. return _entityTaskToken != (int)FSM_MSG.NONE;
  125. }
  126. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  127. {
  128. _task = TaskType.PrepareTransfer;
  129. _taskRobot = robot;
  130. _taskSlot = slot;
  131. _taskBlade = blade;
  132. _taskTransferType = type;
  133. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  134. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  135. return _entityTaskToken != (int)FSM_MSG.NONE;
  136. }
  137. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  138. {
  139. _task = TaskType.PrepareTransfer;
  140. _taskRobot = robot;
  141. _taskSlot = slot;
  142. _taskBlade = blade;
  143. _taskTransferType = type;
  144. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  145. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  146. return _entityTaskToken != (int)FSM_MSG.NONE;
  147. }
  148. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  149. {
  150. StopWaitTransfer(robot);
  151. _task = TaskType.PostTransfer;
  152. _taskRobot = robot;
  153. _taskSlot = slot;
  154. _taskTransferType = type;
  155. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  156. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  157. return _entityTaskToken != (int)FSM_MSG.NONE;
  158. }
  159. public override bool PostTransfer(ModuleName robot)
  160. {
  161. StopWaitTransfer(robot);
  162. _task = TaskType.PostTransfer;
  163. _taskRobot = robot;
  164. _taskSlot = _inTransferSlot;
  165. _taskTransferType = _inTransferType;
  166. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  167. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  168. return _entityTaskToken != (int)FSM_MSG.NONE;
  169. }
  170. public override bool Process(string recipeName, bool isCleanRecipe, bool withWafer, WaferInfo wafer)
  171. {
  172. _task = TaskType.Process;
  173. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  174. if (SC.GetValue<bool>("System.IsATMMode"))
  175. {
  176. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  177. _timerProcess.Start(time * 1000);
  178. EV.PostInfoLog("Scheduler", $"System run in ATM mode, process skipped, delay {time} seconds");
  179. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  180. return true;
  181. }
  182. else
  183. {
  184. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, withWafer);
  185. return _entityTaskToken != (int)FSM_MSG.NONE;
  186. }
  187. }
  188. public override bool Preheating(float temperature)
  189. {
  190. _task = TaskType.Heating;
  191. _paramTemp = temperature;
  192. _entityTaskToken = _entity.InvokePreHeat(temperature);
  193. LogTaskStart(_task, $"preheat to {temperature}");
  194. return _entityTaskToken != (int)FSM_MSG.NONE;
  195. }
  196. public bool CheckTaskDone()
  197. {
  198. bool ret = false;
  199. switch (_task)
  200. {
  201. case TaskType.None:
  202. ret = true;
  203. break;
  204. case TaskType.PrepareTransfer:
  205. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType, _taskSlot, _taskBlade);
  206. break;
  207. case TaskType.PostTransfer:
  208. ret = _entity.CheckAcked(_entityTaskToken);
  209. break;
  210. case TaskType.Heating:
  211. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  212. break;
  213. case TaskType.Process:
  214. case TaskType.IdlePurgeProcess:
  215. case TaskType.IdleCleanProcess:
  216. case TaskType.PreJobProcess:
  217. case TaskType.CompleteJobProcess:
  218. if (SC.GetValue<bool>("System.IsATMMode"))
  219. {
  220. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  221. if (ret)
  222. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  223. }
  224. else
  225. {
  226. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsProcessed();
  227. }
  228. break;
  229. }
  230. if (ret && _task != TaskType.None)
  231. {
  232. LogTaskDone(_task, "");
  233. _task = TaskType.None;
  234. }
  235. return ret;
  236. }
  237. public bool Monitor()
  238. {
  239. return true;
  240. }
  241. public void SetPMAuto()
  242. {
  243. _entity.SetAuto();
  244. }
  245. public bool IdlePurgeProcess(string recipeName)
  246. {
  247. _task = TaskType.IdlePurgeProcess;
  248. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  249. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  250. return _entityTaskToken != (int)FSM_MSG.NONE;
  251. }
  252. public bool IdleCleanProcess(string recipeName)
  253. {
  254. _task = TaskType.IdleCleanProcess;
  255. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  256. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  257. return _entityTaskToken != (int)FSM_MSG.NONE;
  258. }
  259. public void PreJobClean()
  260. {
  261. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  262. var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  263. var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  264. _waitPreJobClean = enableJobClean && enablePreJobClean;
  265. }
  266. public bool PreJobProcess(string recipeName)
  267. {
  268. _task = TaskType.PreJobProcess;
  269. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  270. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  271. return _entityTaskToken != (int)FSM_MSG.NONE;
  272. }
  273. public void CompleteJobClean()
  274. {
  275. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  276. var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  277. var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  278. _waitCompletejobClean = enableJobClean && enableCompleteJobClean;
  279. }
  280. public bool CompleteJobProcess(string recipeName)
  281. {
  282. _task = TaskType.CompleteJobProcess;
  283. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  284. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  285. return _entityTaskToken != (int)FSM_MSG.NONE;
  286. }
  287. #region clean task
  288. internal void ResetIdlePurgeTime()
  289. {
  290. IdlePurgeTimer.Restart();
  291. }
  292. internal void ResetIdleCleanTime()
  293. {
  294. IdleCleanTimer.Restart();
  295. }
  296. public bool ResetClean(bool resetPurge, bool resetClean, bool jobClean)
  297. {
  298. if (resetPurge)
  299. {
  300. IdlePurgeTrig.RST = true;
  301. IdlePurgeTimer.Stop();
  302. IdlePurgeTime = 0;
  303. }
  304. if (resetClean)
  305. {
  306. IdleCleanTrig.RST = true;
  307. IdleCleanTimer.Stop();
  308. IdleCleanTime = 0;
  309. }
  310. if (jobClean)
  311. {
  312. _waitPreJobClean = false;
  313. _waitCompletejobClean = false;
  314. }
  315. return true;
  316. }
  317. public void MonitorCleanTasks()
  318. {
  319. var hasWafer = WaferManager.Instance.CheckHasWafer(Module, 0);
  320. var enablePurge = false;//SC.GetValue<bool>($"{Module}.IdlePurge.IsEnabled");
  321. var enableClean = SC.GetValue<bool>($"{Module}.IdleClean.IsEnabled");
  322. #region Idle Purge
  323. IdlePurgeTrig.CLK = (IsIdle || _task != TaskType.IdlePurgeProcess) && enablePurge && !hasWafer;
  324. if (IdlePurgeTrig.R)
  325. {
  326. LOG.Write($"{Module} idle purge start calc elapse time");
  327. IdlePurgeTimer.Restart();
  328. }
  329. if (IdlePurgeTrig.T)
  330. {
  331. LOG.Write($"{Module} idle purge stopped calc elapse time");
  332. ResetClean(true, false, false);
  333. }
  334. if (IdlePurgeTimer.IsRunning)
  335. {
  336. IdlePurgeTime = (int)IdlePurgeTimer.ElapsedMilliseconds / 1000;
  337. int idlePurgeTimeSetPoint = SC.GetValue<int>($"{Module}.IdlePurge.IdlePurgeTime");
  338. var nextRunTime = idlePurgeTimeSetPoint - IdlePurgeTime;
  339. if (nextRunTime < 0)
  340. nextRunTime = 0;
  341. if (enablePurge)
  342. {
  343. if (nextRunTime <= 0 && IsAvailable)
  344. {
  345. var recipe = SC.GetStringValue($"{Module}.IdlePurge.IdlePurgeRecipe");
  346. if (string.IsNullOrEmpty(recipe))
  347. {
  348. _trigIdlePurgeFailed.CLK = true;
  349. LOG.Write($"{Module} Idle purge can not run, recipe is empty");
  350. ResetClean(true, false, false);
  351. }
  352. else if (hasWafer)
  353. {
  354. _trigIdlePurgeFailed.CLK = true;
  355. LOG.Write($"{Module} Idle purge can not run, has wafer");
  356. ResetClean(true, false, false);
  357. }
  358. else
  359. {
  360. _trigIdlePurgeFailed.CLK = false;
  361. LOG.Write($"{Module} Start run idle purge recipe {recipe}");
  362. IdlePurgeProcess("ALD\\Process\\" + recipe);
  363. }
  364. if (_trigIdlePurgeFailed.Q)
  365. {
  366. EV.PostWarningLog(Module.ToString(), "Can not run idle purge recipe");
  367. }
  368. }
  369. }
  370. else
  371. {
  372. nextRunTime = 0;
  373. }
  374. IdlePurgeNextRunTime = nextRunTime;
  375. }
  376. else
  377. {
  378. IdlePurgeNextRunTime = 0;
  379. }
  380. #endregion
  381. #region Idle Clean
  382. IdleCleanTrig.CLK = (IsIdle || _task != TaskType.IdleCleanProcess) && enableClean && !hasWafer;
  383. if (IdleCleanTrig.R)
  384. {
  385. LOG.Write($"{Module} idle clean start calc elapse time");
  386. IdleCleanTimer.Restart();
  387. }
  388. if (IdleCleanTrig.T)
  389. {
  390. LOG.Write($"{Module} idle clean stopped calc elapse time");
  391. ResetClean(false, true, false);
  392. }
  393. if (IdleCleanTimer.IsRunning)
  394. {
  395. IdleCleanTime = (int)IdleCleanTimer.ElapsedMilliseconds / 1000;
  396. int idleCleanTimeSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  397. var nextRunTime = idleCleanTimeSetPoint - IdleCleanTime;
  398. if (nextRunTime < 0)
  399. nextRunTime = 0;
  400. if (enableClean)
  401. {
  402. if (nextRunTime <= 0 && IsAvailable)
  403. {
  404. var recipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  405. if (string.IsNullOrEmpty(recipe))
  406. {
  407. _trigIdleCleanFailed.CLK = true;
  408. LOG.Write($"{Module} Idle clean can not run, recipe is empty");
  409. ResetClean(false, true, false);
  410. }
  411. else if (hasWafer)
  412. {
  413. _trigIdleCleanFailed.CLK = true;
  414. LOG.Write($"{Module} Idle clean can not run, has wafer");
  415. ResetClean(false, true, false);
  416. }
  417. else
  418. {
  419. _trigIdleCleanFailed.CLK = false;
  420. LOG.Write($"{Module} Start run idle Clean recipe {recipe}");
  421. IdleCleanProcess($"{Module}\\" + recipe);
  422. }
  423. if (_trigIdleCleanFailed.Q)
  424. {
  425. EV.PostWarningLog(Module.ToString(), "Can not run idle clean recipe");
  426. }
  427. }
  428. }
  429. else
  430. {
  431. nextRunTime = 0;
  432. }
  433. IdleCleanNextRunTime = nextRunTime;
  434. }
  435. else
  436. {
  437. IdleCleanNextRunTime = 0;
  438. }
  439. #endregion
  440. #region PreJob Clean
  441. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  442. var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  443. var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  444. if (enableJobClean && enableCompleteJobClean && _waitCompletejobClean && IsIdle)
  445. {
  446. var recipe = SC.GetStringValue($"{Module}.JobClean.CompleteJobCleanRecipe");
  447. if (string.IsNullOrEmpty(recipe))
  448. {
  449. EV.PostWarningLog(Module.ToString(), "complete job clean can not run, recipe is empty");
  450. }
  451. else if (hasWafer)
  452. {
  453. EV.PostWarningLog(Module.ToString(), "complete job clean can not run, has wafer");
  454. }
  455. else
  456. {
  457. EV.PostInfoLog(Module.ToString(), $"Start run complete job clean recipe {recipe}");
  458. CompleteJobProcess($"{Module}\\" + recipe);
  459. }
  460. _waitCompletejobClean = false;
  461. }
  462. if (enableJobClean && enablePreJobClean && _waitPreJobClean && IsIdle)
  463. {
  464. var recipe = SC.GetStringValue($"{Module}.JobClean.PreJobCleanRecipe");
  465. if (string.IsNullOrEmpty(recipe))
  466. {
  467. EV.PostWarningLog(Module.ToString(), "pre job clean can not run, recipe is empty");
  468. }
  469. else if (hasWafer)
  470. {
  471. EV.PostWarningLog(Module.ToString(), "pre job clean can not run, has wafer");
  472. }
  473. else
  474. {
  475. EV.PostInfoLog(Module.ToString(), $"Start run pre job clean recipe {recipe}");
  476. PreJobProcess($"{Module}\\" + recipe);
  477. }
  478. _waitPreJobClean = false;
  479. }
  480. #endregion
  481. }
  482. #endregion
  483. }
  484. }