Virgo_B_V82XS/VirgoRT/Devices/EFEM/EfemDevice.cs

using Aitex.Core.Common;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
using System;
using System.Collections;
using System.Collections.Generic;
using System.Diagnostics;
using System.Linq;
using System.Threading;
using System.Xml;
using VirgoCommon;
using VirgoRT.Devices;
using VirgoRT.Devices.YASKAWA;
using VirgoRT.HostWrapper;
using VirgoRT.Modules;

namespace VirgoRT.Device
{
    class EfemCommunicationBase
    {
        protected readonly AsyncSocket _socket = new AsyncSocket("");

        protected EfemCommunicationBase(string sIP)
        {
            string ip_address = sIP;
            if (SC.GetValue<bool>("System.IsSimulatorMode"))
            {
                ip_address = "127.0.0.1:13001";
            }
            _socket.Connect(ip_address);
            _socket.OnDataChanged += Hardware_OnDataChanged;
            _socket.OnErrorHappened += Hardware_OnErrorHappened;

            //if (!_socket.IsConnected)
            //{
            //    EV.PostAlarmLog(ModuleName.EFEM.ToString(), "Cannot connect to EFEM");
            //}
        }

        private void Hardware_OnDataChanged(string message)
        {
            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.RecHwMsg, message);
        }

        private void Hardware_OnErrorHappened(ErrorEventArgs args)
        {
        }

        public virtual void SendTo(string str) { }

        public virtual void SendTo(IEfemMessage yas_msg) { }
    }

    class EfemBase : BaseDevice, IDevice
    {
        // Fields
        //
        protected volatile LinkedList<ActionBase> _actions = new LinkedList<ActionBase>();
        protected EfemCommunicationBase _comm;
        protected IMessageHandler _msgHandler;

        public virtual ILoadport this[ModuleName mod]
        {
            get { throw new ApplicationException(); }
        }

        // Properties
        //
        public new ModuleName Module { get; set; }
        public OnlineFlag OnlineFlag { get; set; }
        public bool CommunicationConnected { get; protected set; }
        public DeviceState Status { get; set; }

        public bool HasActions
        {
            get
            {
                lock (_lockerAction)
                {
                    return _actions.Any(x => x.Status == ActionStatus.Pending);
                }

            }
        }

        public EfemCommunicationBase Comm => _comm;
        public IMessageHandler MsgHandler => _msgHandler;

        protected object _lockerAction = new object();


        public string GripStateBlade1
        {
            get;
            set;
        }

        public string GripStateBlade2
        {
            get;
            set;
        }

        protected EfemBase(XmlElement xmlNode = null)
        {
        }

        public bool Initialize()
        {
            return true;
        }

        public void Monitor()
        {
            throw new NotImplementedException();
        }

        public void Terminate()
        {
            throw new NotImplementedException();
        }

        public void Reset()
        {
            throw new NotImplementedException();
        }

        // Methods
        //
        public void ExecuteAction()
        {
            lock (_lockerAction)
            {
                if (!_actions.Any())
                {
                    LOG.Write("No Action in the EFEM Queue");

                    return;
                }
                if (_actions.All(x => x.Status != ActionStatus.Pending))
                {
                    LOG.Write("NO pending Action in EFEM Queue");
                    //System.Diagnostics.Trace.Assert(false);
                    return;
                }

                var nextAction = _actions.First(a => a.Status == ActionStatus.Pending);

                if (nextAction != null)
                {
                    LOG.Write($"found pending action ： efem action [{nextAction.GetType().Name}] [{nextAction.ID}] 开始执行");

                    nextAction.Execute();
                }
            }

        }

        public void ClearActions()
        {
            lock (_lockerAction)
            {
                _actions?.Clear();

                LOG.Write($"clear all efem action");
            }

        }

        public void AddAction(ActionBase cmd)
        {
            lock (_lockerAction)
            {
                _actions.AddLast(cmd);

                LOG.Write($"efem action [{cmd.GetType().Name}] [{cmd.ID}] add to queue");

                if (cmd.IsBackground)
                {
                    LOG.Write($"background， efem action [{cmd.GetType().Name}]  [{cmd.ID}] 开始执行");
                    cmd.Execute();
                }

                if (cmd is LedAction)
                {
                    Thread.Sleep(50);
                }
            }
        }

        public void UpdateStatus(ushort Id, ActionStatus st)
        {
            lock (_lockerAction)
            {
                var cur = _actions.First(x => x.ID == Id);
                if (null == cur)
                {
                    LOG.Write($"NO {Id} action in the queue");
                    return;
                }

                cur.Status = st;
                if (st == ActionStatus.Completed)
                {
                    cur.OnPostWork();
                    _actions.Remove(cur);

                    LOG.Write($"efem action [{cur.GetType().Name}] [{cur.ID}] removed from queue");

                }
            }



        }

        public virtual void ReceiveMessage(string sRec) { throw new NotImplementedException(); }

        public void SetOnline(bool online)
        {
            this.OnlineFlag = online ? OnlineFlag.Online : OnlineFlag.Offline;
        }

        public virtual void SetOnline(ModuleName mod, bool online) { }

        public virtual void SetBusy(ModuleName mod, bool online) { }
    }
}

namespace VirgoRT.Device.YASKAWA
{
    sealed class MessageHandler : IMessageHandler
    {
        // Fields
        //
        private readonly IList<EfemMessage> _msgQueue = new List<EfemMessage>();
        private readonly EfemBase _efem;

        // Properties
        //
        public bool IsCompleted
        {
            get
            {
                if (_msgQueue.Count <= 0) return false;
                return EfemMessage.MsgHead.INF == _msgQueue[_msgQueue.Count - 1].Head;
            }
        }

        public event EventHandler<EfemActionArgs> CommandUpdated;
        public event EventHandler<EfemEventArgs> EventUpdated;
        public event EventHandler<EfemErrorArgs> ErrorOccurred;

        // Constructor
        //
        public MessageHandler(EfemBase device)
        {
            _efem = device;
        }

        public void Send(IEfemMessage msg)
        {
            _efem.Comm.SendTo(msg);

            _msgQueue.Add(msg as EfemMessage);
        }

        public void ReceiveMessage(string sRec)
        {
            string[] msgs = sRec.Split('\r');

            foreach (var msg in msgs)
            {
                if (string.IsNullOrWhiteSpace(msg)) continue;

                EfemMessage rec_msg = msg.ToMessage();

                switch (rec_msg.Head)
                {
                    case EfemMessage.MsgHead.ACK:

                        _msgQueue.Add(rec_msg);

                        OnCommandUpdated(new EfemActionArgs
                        {
                            Module = rec_msg.Port,
                            CommandType = rec_msg.Operation,
                            Status = ActionStatus.RecACK
                        });
                        break;

                    case EfemMessage.MsgHead.INF:
                        OnCommandUpdated(new EfemActionArgs
                        {
                            Module = rec_msg.Port,
                            CommandType = rec_msg.Operation,
                            Status = ActionStatus.RecINF
                        });

                        // 收到INF之后发送ACK确认
                        string strACK = rec_msg.RawString.Replace("INF", "ACK");

                        _efem.Comm.SendTo(strACK);

                        EfemMessage ack_msg = strACK.ToMessage();
                        ack_msg.Direct = MsgDirection.To;
                        _msgQueue.Add(ack_msg);

                        OnCommandUpdated(new EfemActionArgs
                        {
                            Module = rec_msg.Port,
                            CommandType = rec_msg.Operation,
                            Status = ActionStatus.Completed,
                            Data = rec_msg.Data.Count > 0 ? rec_msg.Data.First() : string.Empty
                        });
                        break;

                    case EfemMessage.MsgHead.EVT:
                        OnEventUpdated(new EfemEventArgs
                        {
                            EvtStr = rec_msg.ToParamString(),
                            Module = rec_msg.Port,
                            CommandType = rec_msg.Operation,
                            DataList = rec_msg.Data
                        });
                        break;

                    case EfemMessage.MsgHead.NAK:
                        OnErrorOccurred(new EfemErrorArgs
                        {
                            Factor = rec_msg.Factor,
                            Description = Constant.FactorString.ContainsKey(rec_msg.Factor) ? Constant.FactorString[rec_msg.Factor] : rec_msg.Factor,
                        });
                        break;

                    case EfemMessage.MsgHead.CAN:
                        OnErrorOccurred(new EfemErrorArgs
                        {
                            Factor = rec_msg.Factor,
                            Description = Constant.FactorString.ContainsKey(rec_msg.Factor) ? Constant.FactorString[rec_msg.Factor] : rec_msg.Factor,
                            Message = rec_msg.Data[0]
                        });
                        break;

                    case EfemMessage.MsgHead.ABS:
                        OnErrorOccurred(new EfemErrorArgs
                        {
                            Factor = rec_msg.Factor,
                            Description = $"{rec_msg.Data[0]}, {rec_msg.Data[1]}"
                        });
                        break;
                }
            }
        }

        private void OnCommandUpdated(EfemActionArgs args)
        {
            CommandUpdated?.Invoke(this, args);
        }

        private void OnEventUpdated(EfemEventArgs args)
        {
            EventUpdated?.Invoke(this, args);
        }

        private void OnErrorOccurred(EfemErrorArgs args)
        {
            ErrorOccurred?.Invoke(this, args);
        }
    }

    sealed class EfemComm : EfemCommunicationBase
    {
        public EfemComm() : base(SC.GetStringValue("EFEM.IPAddress"))
        {
        }

        public override void SendTo(string str) { _socket.Write(str + '\r'); }

        public override void SendTo(IEfemMessage msg)
        {
            if (msg is EfemMessage yas_msg)
            {
                //string str = EfemParser.Instance.TranslateBack(yas_msg);
                string str = yas_msg.ToString();
                if (string.IsNullOrEmpty(str))
                    throw new ApplicationException("Yaskawa message translation error");

                yas_msg.RawString = str;

                SendTo(str);
            }
        }
    }

    /// <summary>
    /// EFEM object class
    /// </summary>
    sealed class Efem : EfemBase, IEfem
    {
        //---------------------------------Fields----------------------------------------
        // 
        private readonly JetPM[] _pm = new JetPM[2];
        private readonly Loadport[] _LPMs = new Loadport[2];
        private readonly SignalTower _signalT = new SignalTower();
        //private readonly CoolingStage[] _aligner = new CoolingStage[2];
        private string _robotMoveAction;
        private LidState _CassetteDoor;
        private LidState _SideDoor;
        private RD_TRIG _bSysVacPressure1 = new RD_TRIG();              //Bit[0] System vacuum source pressure 1
        private RD_TRIG _bIonizerCompressedAir = new RD_TRIG();         //Bit[1] Ionizer compressed air
        private RD_TRIG _bSysCompressedAirPressure = new RD_TRIG();     //Bit[2] System compressed air pressure 1
        private RD_TRIG _bFlowGaugeSensor = new RD_TRIG();              //Bit[4] Flow gauge sensor
        private RD_TRIG _bLeakageSensor = new RD_TRIG();                //Bit[5] Leakage sensor
        private RD_TRIG _bDiffPressureSensorSetting1 = new RD_TRIG();   //Bit[8] Differential pressure sensor setting 1
        private RD_TRIG _bDiffPressureSensorSetting2 = new RD_TRIG();   //Bit[9] Differential pressure sensor setting 2
        private RD_TRIG _bIonizerAlarm = new RD_TRIG();                 //Bit[10] Ionizer alarm
        private RD_TRIG _bFFuAlarm = new RD_TRIG();
        private RD_TRIG _bAreaSensor = new RD_TRIG();
        private RD_TRIG _bModeSwitch = new RD_TRIG();
        private RD_TRIG _bCassetteDoorTrig = new RD_TRIG();
        private RD_TRIG _bSideDoorTrig = new RD_TRIG();

        public override ILoadport this[ModuleName mod]
        {
            get
            {
                if (!ModuleHelper.IsLoadPort(mod))
                    throw new ApplicationException($"{mod} is NOT Loadport");

                return _LPMs[mod - ModuleName.LP1];
            }
        }

        //---------------------------------Properties------------------------------------
        // 
        public LidState CassetteDoor
        {
            get => _CassetteDoor;
            set
            {
                _CassetteDoor = value;

                _bCassetteDoorTrig.CLK = _CassetteDoor == LidState.Close;
                if (_bCassetteDoorTrig.T)
                {
                    EV.Notify(CassetteDoorOpen);

                    EV.PostWarningLog(Module.ToString(), "Cassette door opened");
                }
                if (_bCassetteDoorTrig.R)
                {
                    EV.Notify(CassetteDoorClose);

                    EV.PostInfoLog(Module.ToString(), "Cassette door closed");
                }
            }
        }

        public LidState DoorSwitch
        {
            get => _SideDoor;
            set
            {
                _SideDoor = value;

                _bSideDoorTrig.CLK = _SideDoor == LidState.Close;
                if (_bSideDoorTrig.T)
                {
                    EV.PostAlarmLog(Module.ToString(), "EFEM Side door open");
                }
                if (_bSideDoorTrig.R)
                {
                    EV.PostInfoLog(Module.ToString(), "EFEM Side door close");
                }
            }
        }


        private string CassetteDoorOpen = "CassetteDoorOpen";
        private string CassetteDoorClose = "CassetteDoorClose";

        // Constructor
        //
        public Efem()
        {
            Module = ModuleName.EfemRobot;

            _pm[0] = DEVICE.GetDevice<JetPM>(ModuleName.PMA.ToString());
            _pm[1] = DEVICE.GetDevice<JetPM>(ModuleName.PMB.ToString());

            _comm = new EfemComm();

            _LPMs[0] = new Loadport(ModuleName.LP1, this);
            _LPMs[1] = new Loadport(ModuleName.LP2, this);

            _msgHandler = new MessageHandler(this);
            _msgHandler.CommandUpdated += MsgOnCommandUpdated;
            _msgHandler.EventUpdated += MsgOnEventUpdated;
            _msgHandler.ErrorOccurred += MsgOnErrorOccurred;

            CarrierManager.Instance.SubscribeLocation(ModuleName.LP1.ToString(), 1);
            CarrierManager.Instance.SubscribeLocation(ModuleName.LP2.ToString(), 1);

            WaferManager.Instance.SubscribeLocation(ModuleName.EfemRobot, 2);
            WaferManager.Instance.SubscribeLocation(ModuleName.Aligner1, 1);
            WaferManager.Instance.SubscribeLocation(ModuleName.Aligner2, 1);
            WaferManager.Instance.SubscribeLocation(ModuleName.Cooling1, 1);
            WaferManager.Instance.SubscribeLocation(ModuleName.Cooling2, 1);
            WaferManager.Instance.SubscribeLocation(ModuleName.LP1, 25);
            WaferManager.Instance.SubscribeLocation(ModuleName.LP2, 25);

            DATA.Subscribe("EfemRobot.RobotMoveAction", () => _robotMoveAction);
            DATA.Subscribe("LP1.WaferSize", () => _LPMs[0].WaferSize.ToString());
            DATA.Subscribe("LP1.CassetteState", () => _LPMs[0].HasCassette ? LoadportCassetteState.Normal : LoadportCassetteState.Absent);
            DATA.Subscribe("LP1.CassettePresent", () => _LPMs[0].HasCassette ? 1 : 0);
            DATA.Subscribe("LP1.SlotMap", () => _LPMs[0].SlotMap);
            DATA.Subscribe("LP1.IsWaferProtrude", () => _LPMs[0].Protrusion ? 1 : 0);
            DATA.Subscribe("LP1.JobDone", () =>
            {
                return _LPMs[0].JobDone;
            });

            DATA.Subscribe("LP1.NotifyJobDone", () =>
            {
                if (!_LPMs[0].JobDone || !_LPMs[0].HasCassette)
                    return false;

                if (SC.GetValue<int>("System.Job.BuzzerTimeWhenJobDone") >= 0
                    && _LPMs[0].TimerNotifyJobDone.ElapsedMilliseconds > SC.GetValue<int>("System.Job.BuzzerTimeWhenJobDone") * 1000)
                    return false;

                return _LPMs[0].JobDone;
            });

            DATA.Subscribe("LP2.WaferSize", () => _LPMs[1].WaferSize.ToString());
            DATA.Subscribe("LP2.CassetteState", () => _LPMs[1].HasCassette ? LoadportCassetteState.Normal : LoadportCassetteState.Absent);
            DATA.Subscribe("LP2.CassettePresent", () => _LPMs[1].HasCassette ? 1 : 0);
            DATA.Subscribe("LP2.SlotMap", () => _LPMs[1].SlotMap);
            DATA.Subscribe("LP2.IsWaferProtrude", () => _LPMs[1].Protrusion ? 1 : 0);
            DATA.Subscribe("LP2.JobDone", () =>
            {
                return _LPMs[1].JobDone;
            });
            DATA.Subscribe("LP2.NotifyJobDone", () =>
            {
                if (!_LPMs[1].JobDone || !_LPMs[1].HasCassette)
                    return false;

                if (SC.GetValue<int>("System.Job.BuzzerTimeWhenJobDone") >= 0
                    && _LPMs[1].TimerNotifyJobDone.ElapsedMilliseconds > SC.GetValue<int>("System.Job.BuzzerTimeWhenJobDone") * 1000)
                    return false;

                return _LPMs[1].JobDone;
            });

            DATA.Subscribe("Aligner1.WaferSize", () => WaferManager.Instance.GetWafer(ModuleName.Aligner1, 0).Size.ToString());
            DATA.Subscribe("Aligner2.WaferSize", () => WaferManager.Instance.GetWafer(ModuleName.Aligner2, 0).Size.ToString());
            DATA.Subscribe("Cooling1.WaferSize", () => WaferManager.Instance.GetWafer(ModuleName.Cooling1, 0).Size.ToString());
            DATA.Subscribe("Cooling2.WaferSize", () => WaferManager.Instance.GetWafer(ModuleName.Cooling2, 0).Size.ToString());
            DATA.Subscribe("EfemRobot.WaferSize", () => WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 0).Size.ToString());
            DATA.Subscribe("EFEM.CassetteDoor", () => CassetteDoor);

            DATA.Subscribe("EfemRobot.GripStateBlade1", () => GripStateBlade1);
            DATA.Subscribe("EfemRobot.GripStateBlade2", () => GripStateBlade2);


            GripStateBlade1 = "Unknown";
            GripStateBlade2 = "Unknown";

            _bCassetteDoorTrig.CLK = true;
            _bSideDoorTrig.CLK = true;

            EV.Subscribe(new EventItem("Event", CassetteDoorOpen, "Cassette Door Open"));
            EV.Subscribe(new EventItem("Event", CassetteDoorClose, "Cassette Door Close"));
        }

        // Methods
        //
        public bool HomeAll()
        {
            AddAction(new HomeAllAction(this, ModuleName.EFEM));
            AddAction(new OrgshAction(this, ModuleName.EFEM));
            return true;
        }

        public bool Home(ModuleName mod)
        {
            AddAction(new HomeModuleAction(this, mod));

            return true;
        }

        public bool ClearError()
        {
            AddAction(new ClearErrorAction(this));
            return true;
        }

        public void AbortRobot()
        {
            AddAction(new AbortAction(this));
        }

        public bool Pick(MoveParam mp)
        {
            if (!WaferManager.Instance.CheckWafer(mp.SrcModule, mp.SrcSlot, WaferStatus.Normal))
            {
                EV.PostAlarmLog("System", $"{mp.SrcModule} slot {mp.SrcSlot + 1} wafer is not normal");
                return false;
            }

            if (ModuleHelper.IsPm(mp.SrcModule))
            {
                JetPM pM = GetPM(mp.SrcModule);

                if (pM.IsSlitDoorClosed)
                {
                    EV.PostAlarmLog(pM.Module.ToString(), "Slit 门必须打开");
                    return false;
                }

                AddAction(new PinAction(mp.SrcModule, pM, MovementPosition.Up, false, mp.Arm, true));
                AddAction(new ExtendAction(this, new ExtendParam { Module = mp.SrcModule, Arm = mp.Arm, Pos = ExtendPos.GB }));

                _robotMoveAction = string.Format($"{mp.SrcModule}.Picking");
                AddAction(new PinAction(mp.SrcModule, pM, MovementPosition.Down, true, mp.Arm, true));
                AddAction(new ExtendAction(this, new ExtendParam { Module = mp.SrcModule, Arm = mp.Arm, Pos = ExtendPos.G4 }));
            }
            else
            {
                _robotMoveAction = string.Format($"{mp.SrcModule}.Picking");
                AddAction(new PickAction(this, mp));
            }

            return true;
        }

        public bool Place(MoveParam mp)
        {
            if (ModuleHelper.IsPm(mp.DestModule))
            {
                JetPM pM = GetPM(mp.DestModule);

                if (pM.IsSlitDoorClosed)
                {
                    EV.PostAlarmLog(pM.Module.ToString(), "Slit 门必须打开");
                    return false;
                }

                AddAction(new ExtendAction(this, new ExtendParam { Module = mp.DestModule, Arm = mp.Arm, Pos = ExtendPos.PB }));
                _robotMoveAction = string.Format($"{mp.DestModule}.Placing");
                AddAction(new PinAction(mp.DestModule, pM, MovementPosition.Up, true, mp.Arm, false));
                AddAction(new ExtendAction(this, new ExtendParam { Module = mp.DestModule, Arm = mp.Arm, Pos = ExtendPos.P4 }));
                AddAction(new PinAction(mp.DestModule, pM, MovementPosition.Down, false, mp.Arm, false));
            }
            else
            {
                _robotMoveAction = string.Format($"{mp.DestModule}.Placing");
                AddAction(new PlaceAction(this, mp));
            }

            return true;
        }


        public void PickAndPlace(MoveParam pickParam, MoveParam placeParam)
        {
            if (!WaferManager.Instance.CheckWafer(pickParam.SrcModule, pickParam.SrcSlot, WaferStatus.Normal))
            {
                EV.PostAlarmLog("System", $"{pickParam.SrcModule} slot {pickParam.SrcSlot + 1} wafer is not normal");
                return;
            }

            if (ModuleHelper.IsPm(pickParam.SrcModule))
            {
                JetPM pM = GetPM(pickParam.SrcModule);

                if (pM.IsSlitDoorClosed)
                {
                    EV.PostAlarmLog(pM.Module.ToString(), "Slit 门必须打开");
                    return;
                }

                AddAction(new PinAction(pickParam.SrcModule, pM, MovementPosition.Up, false, pickParam.Arm, true));
                AddAction(new ExtendAction(this, new ExtendParam { Module = pickParam.SrcModule, Arm = pickParam.Arm, Pos = ExtendPos.GB }));

                _robotMoveAction = string.Format($"{pickParam.SrcModule}.Picking");
                AddAction(new PinAction(pickParam.SrcModule, pM, MovementPosition.Down, true, pickParam.Arm, true));
                AddAction(new ExtendAction(this, new ExtendParam { Module = pickParam.SrcModule, Arm = pickParam.Arm, Pos = ExtendPos.G4 }));


                AddAction(new ExtendAction(this, new ExtendParam { Module = placeParam.DestModule, Arm = placeParam.Arm, Pos = ExtendPos.PB }));
                _robotMoveAction = string.Format($"{placeParam.DestModule}.Placing");
                AddAction(new PinAction(placeParam.DestModule, pM, MovementPosition.Up, true, placeParam.Arm,false));
                AddAction(new ExtendAction(this, new ExtendParam { Module = placeParam.DestModule, Arm = placeParam.Arm, Pos = ExtendPos.P4 }));
                AddAction(new PinAction(placeParam.DestModule, pM, MovementPosition.Down, false, placeParam.Arm, false));
            }
            else
            {
                _robotMoveAction = string.Format($"{pickParam.SrcModule}.Picking");
                AddAction(new PickAction(this, pickParam));

                _robotMoveAction = string.Format($"{placeParam.DestModule}.Placing");
                AddAction(new PlaceAction(this, placeParam));
            }
        }

        public bool Extend(ExtendParam ep)
        {
            AddAction(new ExtendAction(this, ep));

            return true;
        }

        public void Goto(MoveParam ep)
        {
            //_robotMoveAction = string.Format($"{ep.SrcModule}.Goto");
            AddAction(new GotoAction(this, ep));
        }

        public bool Retract(ExtendParam ep)
        {
            AddAction(new ExtendAction(this, ep));
            return true;
        }

        public bool Map(ModuleName mod)
        {
            if (_LPMs[mod - ModuleName.LP1].Protrusion)
            {
                EV.PostAlarmLog(mod.ToString(), $"{mod} wafer protrusion, can not do Map");
                return false;
            }

            _LPMs[mod - ModuleName.LP1].Map();
            return true;
        }

        public bool Grip(Hand blade, bool isGrip)
        {
            AddAction(new GripAction(this, blade, isGrip));

            return true;
        }

        public bool SetPinUp(ModuleName mod)
        {
            AddAction(new LiftAction(this, mod));
            return true;
        }

        public bool Align(ModuleName mod, float delayTime, WaferSize size)
        {
            AddAction(new AlignAction(this, mod, size));
            return true;
        }

        public bool SetLamp(LightType light, LightStatus status)
        {
            AddAction(new LedAction(this, light, status));
            return true;
        }

        public void TurnOffBuzzer()
        {
            AddAction(new LedAction(this, LightType.BUZZER1, LightStatus.OFF));
        }

        //public void SwitchOnBuzzerAndRed()
        //{
        //    AddAction(new LedAction(this, LightType.RED, LightStatus.ON));
        //    AddAction(new LedAction(this, LightType.YELLOW, LightStatus.OFF));
        //    AddAction(new LedAction(this, LightType.GREEN, LightStatus.OFF));
        //    AddAction(new LedAction(this, LightType.BUZZER1, LightStatus.ON));
        //}

        public override void ReceiveMessage(string sRec)
        {
            _msgHandler.ReceiveMessage(sRec);
        }

        public override void SetOnline(ModuleName mod, bool online)
        {
            this[mod].SetOnline(online);
        }

        public override void SetBusy(ModuleName mod, bool busy)
        {
            this[mod].Status = DeviceState.Busy;
        }

        //--------------------------------Constructor------------------------------------
        // 
        private JetPM GetPM(ModuleName mod)
        {
            if (!ModuleHelper.IsPm(mod))
                throw new ArgumentException("Module argument error");

            return _pm[mod - ModuleName.PMA];
        }

        //----------------------------------Private Method-------------------------------
        // 
        private void MsgOnEventUpdated(object sender, EventArgs e)
        {
            if (!(e is EfemEventArgs))
                return;

            EfemEventArgs eArg = e as EfemEventArgs;

            switch (eArg.CommandType)
            {
                case EfemOperation.SigStatus:
                    // EVT:SIGSTAT/Parameter/DATA1/DATA2;
                    string sParam = eArg.DataList[0];           // "SYSTEM" or "Pn"

                    // DATA1 & DATA2
                    int nData1 = Convert.ToInt32(eArg.DataList[1], 16);
                    int nData2 = Convert.ToInt32(eArg.DataList[2], 16);

                    BitArray baData1 = new BitArray(new int[] { nData1 });
                    BitArray baData2 = new BitArray(new int[] { nData2 });

                    if (0 == string.Compare(sParam, Constant.SYS, true))
                    {
                        // EVT:SIGSTAT/System/00000000/00000004;
                        // DATA1
                        _bSysVacPressure1.CLK = baData1[0]; // bit 0
                        _bIonizerCompressedAir.CLK = baData1[1]; // bit 1
                        _bSysCompressedAirPressure.CLK = baData1[2];  // bit 2
                        _bFlowGaugeSensor.CLK = baData1[4];  // bit 4
                        _bLeakageSensor.CLK = baData1[5];  // bit 5
                        this.DoorSwitch = baData1[6] ? LidState.Close : LidState.Open; // bit 6
                        //bDrivePower                    = baData1[7];  // bit 7
                        _bDiffPressureSensorSetting1.CLK = baData1[8];  // bit 8
                        _bDiffPressureSensorSetting2.CLK = baData1[9];  // bit 9
                        _bIonizerAlarm.CLK = baData1[10];  // bit 10
                        _bFFuAlarm.CLK = baData1[11];  // bit 11
                        _bAreaSensor.CLK = baData1[12];  // bit 12
                        _bModeSwitch.CLK = baData1[13];  // bit 13
                        this.CassetteDoor = baData1[15] ? LidState.Close : LidState.Open;  // bit 15

                        // Post warning and alarm
                        if (!baData1[0])   // Bit[0] ON=Normal, OFF=Abnormal
                        {
                            EV.PostAlarmLog(Module.ToString(), "EFEM System vacuum source pressure low");
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
                        }
                        if (!baData1[1])   // Bit[1] ON=Normal, OFF=Abnormal
                        {
                            EV.PostAlarmLog(Module.ToString(), "EFEM Ionizer compressed air error");
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
                        }
                        if (!baData1[2])   // Bit[2] ON=Normal, OFF=Abnormal
                        {
                            EV.PostAlarmLog(Module.ToString(), "EFEM System compressed air pressure low");
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
                        }
                        if (!baData1[4])   // Bit[4] ON=Normal, OFF=Abnormal
                        {
                            EV.PostAlarmLog(Module.ToString(), "EFEM Flow gauge sensor error");
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
                        }
                        if (!baData1[5])   // Bit[5] ON=Normal, OFF=Abnormal
                        {
                            EV.PostAlarmLog(Module.ToString(), "EFEM Leakage alarm");
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
                        }
                        if (!baData1[10])   // Bit[10] ON=Normal, OFF=Abnormal
                        {
                            EV.PostAlarmLog(Module.ToString(), "EFEM Ionizer alarm");
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
                        }
                        if (!baData1[11])   // Bit[11] ON=Normal, OFF=Abnormal
                        {
                            EV.PostAlarmLog(Module.ToString(), "FFU alarm");
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
                        }
                        if (!baData1[13])   // Bit[13] ON=RUN, OFF=Maintain
                        {
                            EV.PostAlarmLog(Module.ToString(), "EFEM switch to Maintain mode, HomeAll to recover");
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.ToInit);
                        }
                        // DATA2
                        _signalT.ChangeLightStatus(LightType.RED, baData2[0] ? LightStatus.ON : baData2[5] ? LightStatus.BLINK : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.GREEN, baData2[1] ? LightStatus.ON : baData2[6] ? LightStatus.BLINK : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.YELLOW, baData2[2] ? LightStatus.ON : baData2[7] ? LightStatus.BLINK : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.BLUE, baData2[3] ? LightStatus.ON : baData2[8] ? LightStatus.BLINK : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.WHITE, baData2[4] ? LightStatus.ON : baData2[9] ? LightStatus.BLINK : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.BUZZER1, baData2[10] ? LightStatus.ON : LightStatus.OFF);

                        /* EFEM 程序中目前没有实现
                        _RobotErr.CLK = baData2[27]; // bit 27

                        bool bArmNotExtendLLA            = baData2[30]; // bit 30
                        bool bArmNotExtendLLB            = baData2[31]; // bit 31
                        */
                    } // system event
                    else
                    {
                        _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
                    } // FOUP EVENT
                    break;
                case EfemOperation.GetWaferInfo:
                    _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
                    break;
                default:
                    break;
            }
        }

        private void MsgOnCommandUpdated(object sender, EventArgs e)
        {
            EfemActionArgs arg = e as EfemActionArgs;
            if (arg == null) throw new ArgumentNullException("Argument is Null");

            if (arg.CommandType == EfemOperation.Ready)
            {
                this.CommunicationConnected = true;
                Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.CommReady);
                return;
            }

            EfemActionBase action = null;

            lock (_lockerAction)
            {
                foreach (var item in _actions)
                {
                    if (item is EfemActionBase a1)
                    {
                        if (a1.Type == arg.CommandType && item.Status != ActionStatus.Completed)
                        {
                            action = a1;
                            break;
                        }
                    }
                }

                if (action == null)
                {
                    //EV.PostAlarmLog(arg.Module.ToString(), $"NO activated {arg.CommandType} in the queue");
                    LOG.Write($"NO activated [{arg.ID}] [{arg.CommandType}] in the queue");
                    return;
                }

                // 更新 action 状态
                action.Status = arg.Status;

                if (arg.Status == ActionStatus.Completed)
                {
                    ModuleName mod = action.Module;

                    // Map 命令比较特别， module 是LPX但是用robot做mapping
                    if (mod == ModuleName.EFEM || mod == ModuleName.EfemRobot || ModuleHelper.IsAligner(mod) || ModuleHelper.IsCooling(mod) || arg.CommandType == EfemOperation.Map)
                    {
                        if (action.Type != EfemOperation.Light)
                        {
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.ActionDone, arg.CommandType);
                        }
                    }
                    else if (ModuleHelper.IsLoadPort(mod))
                    {
                        Singleton<RouteManager>.Instance.EFEM.NotifyLP(mod, LoadportEntity.MSG.ActionDone);
                    }

                    _robotMoveAction = string.Format($"System.None");

                    action.OnPostWork(arg.Data);

                    LOG.Write($"efem action [{action.GetType().Name}] [{action.ID}][{action.Type}] removed from queue");

                    _actions.Remove(action);
                }
            }

        }

        private void MsgOnErrorOccurred(object sender, EventArgs e)
        {
            if (e is EfemErrorArgs errArg)
            {
                this.Status = DeviceState.Error;

                lock (_lockerAction)
                {
                    if (this._actions.Count > 0)
                    {
                        LOG.Write($"error occur, remove {_actions.Last.Value.ID} from queue");

                        this._actions.RemoveLast();
                    }
                }

                EV.PostAlarmLog(Module.ToString(), $"{errArg.Description}, [{errArg.Message}], [{errArg.Factor}]");
            }
        }
    }

    /// <summary>
    /// Load port object class
    /// </summary>
    sealed class Loadport : ILoadport
    {
        private readonly EfemBase _efem;

        //---------------------------------Properties------------------------------------
        // 
        public OnlineFlag OnlineFlag { get; set; }
        public ModuleName Module { get; set; }
        public DeviceState Status { get; set; }
        public WaferSize WaferSize { get; set; }
        public WaferStatus[] WaferInfo { get; set; }
        public bool HasCassette { get; set; }
        public bool Protrusion { get; set; }
        public bool IsMapped { get; set; }
        public bool JobDone { get; set; }
        public Stopwatch TimerNotifyJobDone { get; set; }

        private string[] _slotMap = new string[25];
        public string SlotMap
        {
            get
            {
                for (int i = 0; i < 25; i++)
                {
                    _slotMap[i] = ((int)WaferManager.Instance.GetWafer(Module, i).Status).ToString();
                }
                return string.Join("", _slotMap);
            }
        }

        private string Port1CassetteArrive = "Port1CassetteArrive";
        private string Port1CassetteRemoved = "Port1CassetteRemoved";
        private string Port1MappingComplete = "Port1MappingComplete";
        private string Port1MappingFailed = "Port1MappingFailed";

        private string Port2CassetteArrive = "Port2CassetteArrive";
        private string Port2CassetteRemoved = "Port2CassetteRemoved";
        private string Port2MappingComplete = "Port2MappingComplete";
        private string Port2MappingFailed = "Port2MappingFailed";

        // Constructor
        //
        public Loadport(ModuleName mod, EfemBase efem)
        {
            Module = mod;
            _efem = efem;

            TimerNotifyJobDone = new Stopwatch();

            EV.Subscribe(new EventItem("Event", Port1CassetteArrive, "Port1CassetteArrive"));
            EV.Subscribe(new EventItem("Event", Port1CassetteRemoved, "Port1CassetteRemoved"));
            EV.Subscribe(new EventItem("Event", Port1MappingComplete, "Port1MappingComplete"));
            EV.Subscribe(new EventItem("Event", Port1MappingFailed, "Port1MappingFailed"));

            EV.Subscribe(new EventItem("Event", Port2CassetteArrive, "Port2CassetteArrive"));
            EV.Subscribe(new EventItem("Event", Port2CassetteRemoved, "Port2CassetteRemoved"));
            EV.Subscribe(new EventItem("Event", Port2MappingComplete, "Port2MappingComplete"));
            EV.Subscribe(new EventItem("Event", Port2MappingFailed, "Port2MappingFailed"));
        }

        // Methods
        //
        public void Home()
        {
            _efem.AddAction(new HomeAllAction(_efem, Module));
        }

        public void NoteJobStart()
        {
            JobDone = false;
        }

        public void NoteJobComplete()
        {
            TimerNotifyJobDone.Restart();
            JobDone = true;
        }

        public void Map()
        {
            _efem.AddAction(new MapAction(_efem, Module));
        }

        public void HandleEvent(EfemEventArgs eArg)
        {
            switch (eArg.CommandType)
            {
                case EfemOperation.GetWaferInfo:
                    string sWaferInfo = eArg.DataList[0];
                    bool resultNormal = true;
                    for (byte index = 0; index < sWaferInfo.Length; index++)
                    {
                        int waferState = int.Parse(sWaferInfo.Substring(index, 1));

                        //合理的映射到内部支持的叠片/交叉片
                        if (waferState >= 7) waferState = 7;
                        else if (waferState >= 2) waferState = 3;

                        WaferStatus st = (WaferStatus)waferState;

                        WaferManager.Instance.UpdateWaferSize(this.Module, index, WaferSize);

                        if (st != WaferStatus.Empty)
                        {
                            WaferManager.Instance.CreateWafer(this.Module, index, st);

                            if (st == WaferStatus.Normal)
                            {
                                EV.PostInfoLog(this.Module.ToString(), $"Found Wafer on Slot {index + 1} {WaferSize}");
                            }
                            else
                            {
                                resultNormal = false;
                                EV.PostWarningLog(this.Module.ToString(), $"Found {st} Wafer on Slot {index + 1} {WaferSize}");
                            }
                        }
                    }
                    var dvidMap = new SerializableDictionary<string, string>();
                    dvidMap[DVIDName.SlotMap] = sWaferInfo;
                    dvidMap[DVIDName.PortID] = Module == ModuleName.LP1 ? "1" : "2";
                    if (resultNormal)
                    {
                        EV.Notify(Module == ModuleName.LP1 ? Port1MappingComplete : Port2MappingComplete, dvidMap);
                    }
                    else
                    {
                        EV.Notify(Module == ModuleName.LP1 ? Port1MappingFailed : Port2MappingFailed, dvidMap);
                    }
                    this.IsMapped = true;
                    break;

                case EfemOperation.SigStatus:
                    // EVT: SIGSTAT/P2/00000381/00000000;

                    string sParam = eArg.DataList[0];

                    ModuleName mod = sParam.ToModule();
                    if (!ModuleHelper.IsLoadPort(mod))
                        return;

                    // DATA1 & DATA2
                    int nData1 = Convert.ToInt32(eArg.DataList[1], 16);
                    int nData2 = Convert.ToInt32(eArg.DataList[2], 16);

                    BitArray baData1 = new BitArray(new int[] { nData1 });
                    BitArray baData2 = new BitArray(new int[] { nData2 });

                    // wafer size
                    this.WaferSize = !baData1[6] ? WaferSize.WS3 :
                                     !baData1[7] ? WaferSize.WS4 :
                                     !baData1[8] ? WaferSize.WS6 : WaferSize.WS0;

                    // placement & present
                    bool bPlacement = baData1[0]; // bit 0
                    bool bPresence = !baData1[1]; // bit 1
                    bool bArrived = bPlacement && bPresence;

                    if (HasCassette)
                    {
                        if (!bArrived)
                        {
                            this.HasCassette = false;
                            this.IsMapped = false;
                            EV.PostInfoLog(mod.ToString(), "Cassette removed");
                            OP.DoOperation("System.CassetteLeave");     //For unload light control off afer job done
                            CarrierManager.Instance.DeleteCarrier(Module.ToString());
                            WaferManager.Instance.DeleteWafer(this.Module, 0, 25);

                            SerializableDictionary<string, string> dvid = new SerializableDictionary<string, string>();
                            dvid["PortID"] = mod == ModuleName.LP1 ? "1" : "2";
                            EV.Notify(mod == ModuleName.LP1 ? Port1CassetteRemoved : Port2CassetteRemoved, dvid);
                            JobDone = false;
                        }
                    }
                    else
                    {
                        if (bArrived)
                        {
                            this.HasCassette = true;
                            CarrierManager.Instance.CreateCarrier(Module.ToString());
                            EV.PostInfoLog(mod.ToString(), $"Cassette {WaferSize} arrived");

                            var dvid1 = new SerializableDictionary<string, string>();
                            dvid1["PortID"] = mod == ModuleName.LP1 ? "1" : "2";
                            EV.Notify(mod == ModuleName.LP1 ? Port1CassetteArrive : Port2CassetteArrive, dvid1);

                            JobDone = false;
                        }
                    }

                    this.Protrusion = !baData1[9];
                    if (Protrusion)
                    {
                        EV.PostAlarmLog(Module.ToString(), "发现 wafer 突出");
                        Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
                    }

                    // DATA2, loadport上面的LED 灯， 暂时不需要用到
                    break;
                default:
                    break;
            }
        }

        public void SetOnline(bool online)
        {
            OnlineFlag = online ? OnlineFlag.Online : OnlineFlag.Offline;
        }
    }

    sealed class SignalTower
    {
        // Fields
        //
        private readonly Dictionary<LightType, LightStatus> _lights = new Dictionary<LightType, LightStatus>(5);

        public SignalTower()
        {
            _lights.Add(LightType.RED, LightStatus.OFF);
            _lights.Add(LightType.YELLOW, LightStatus.OFF);
            _lights.Add(LightType.BLUE, LightStatus.OFF);
            _lights.Add(LightType.GREEN, LightStatus.OFF);
            _lights.Add(LightType.WHITE, LightStatus.OFF);
            _lights.Add(LightType.BUZZER1, LightStatus.OFF);

            DATA.Subscribe($"{ModuleName.EFEM}.SignalTower", () =>
            {
                return new AITSignalTowerData
                {
                    IsGreenLightOn = _lights[LightType.GREEN] == LightStatus.ON,
                    IsRedLightOn = _lights[LightType.RED] == LightStatus.ON,
                    IsYellowLightOn = _lights[LightType.YELLOW] == LightStatus.ON,
                    IsWhiteLightOn = _lights[LightType.WHITE] == LightStatus.ON,
                    IsBlueLightOn = _lights[LightType.BLUE] == LightStatus.ON,
                    IsBuzzerOn = _lights[LightType.BUZZER1] == LightStatus.ON,
                };
            });
        }

        // Methods
        //
        public void ChangeLightStatus(LightType light, LightStatus st)
        {
            if (!_lights.ContainsKey(light))
                throw new ApplicationException($"NO {light} configured");

            _lights[light] = st;
        }
    }
}