首頁 探索 說明
註冊 登入
JetPlasma
/
Triton_160
關註 2
讚好 0
複刻 0
Files 問題管理 0 合併請求 0 Wiki
分支: master
分支列表 標籤列表
Triton_160
/
Triton160UI
/
bin
/
Debug
/
Logs
/
appLog20241226.txt

appLog20241226.txt 70 KB
永久連結 文件歷史 原始文件

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586 
  1. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-26 08:57:58.474 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    2. 

  2. [Save Log Job] 2024-12-26 08:57:59.394 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    3. 

  3. [Save Log Job] 2024-12-26 08:58:02.114 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    4. 

  4. [Save Log Job] 2024-12-26 08:58:16.594 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    5. 

  5. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-26 09:43:33.483 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    6. 

  6. [Save Log Job] 2024-12-26 09:43:33.486 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    7. 

  7. [Save Log Job] 2024-12-26 09:43:34.784 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    8. 

  8. [Save Log Job] 2024-12-26 09:43:34.913 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    9. 

  9. [Save Log Job] 2024-12-26 09:43:38.331 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    10. 

  10. [Save Log Job] 2024-12-26 09:43:44.874 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    11. 

  11. [Save Log Job] 2024-12-26 09:43:53.419 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    12. 

  12. [Save Log Job] 2024-12-26 09:43:53.420 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    13. 

  13. [Save Log Job] 2024-12-26 09:43:53.420 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    14. 

  14. [Save Log Job] 2024-12-26 09:43:56.539 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    15. 

  15. [Save Log Job] 2024-12-26 09:43:56.640 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    16. 

  16. [Save Log Job] 2024-12-26 09:43:56.640 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    17. 

  17. [Save Log Job] 2024-12-26 09:43:56.640 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    18. 

  18. [Save Log Job] 2024-12-26 09:43:56.640 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    19. 

  19. [Save Log Job] 2024-12-26 09:43:56.641 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    20. 

  20. [Save Log Job] 2024-12-26 09:43:56.641 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    21. 

  21. [Save Log Job] 2024-12-26 09:43:56.641 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    22. 

  22. [Save Log Job] 2024-12-26 09:43:56.740 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    23. 

  23. [Save Log Job] 2024-12-26 09:43:58.756 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    24. 

  24. [Save Log Job] 2024-12-26 09:43:58.957 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    25. 

  25. [Save Log Job] 2024-12-26 09:44:16.793 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    26. 

  26. [Save Log Job] 2024-12-26 09:50:01.367 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    27. 

  27. [Save Log Job] 2024-12-26 09:50:02.334 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    28. 

  28. [Save Log Job] 2024-12-26 09:50:02.435 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    29. 

  29. [Save Log Job] 2024-12-26 09:50:12.695 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    30. 

  30. [Save Log Job] 2024-12-26 09:50:21.850 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    31. 

  31. [Save Log Job] 2024-12-26 09:50:21.850 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    32. 

  32. [Save Log Job] 2024-12-26 09:50:21.850 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    33. 

  33. [Save Log Job] 2024-12-26 09:50:21.851 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    34. 

  34. [Save Log Job] 2024-12-26 09:50:21.851 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    35. 

  35. [Save Log Job] 2024-12-26 09:50:21.851 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    36. 

  36. [Save Log Job] 2024-12-26 09:50:21.852 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    37. 

  37. [Save Log Job] 2024-12-26 09:50:21.951 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    38. 

  38. [Save Log Job] 2024-12-26 09:50:21.951 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    39. 

  39. [Save Log Job] 2024-12-26 09:50:21.951 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    40. 

  40. [Save Log Job] 2024-12-26 09:50:41.588 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    41. 

  41. [Save Log Job] 2024-12-26 09:50:41.589 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.3 minitues。
    42. 

  42. [Save Log Job] 2024-12-26 09:50:41.589 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    43. 

  43. [Save Log Job] 2024-12-26 09:50:41.590 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241226095021-CACB
    44. 

  44. [Save Log Job] 2024-12-26 09:50:41.590 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241226095021-CACB'
    45. 

  45. [Save Log Job] 2024-12-26 09:50:41.688 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241226095021-CACB' start run step 1：initial。
    46. 

  46. [Save Log Job] 2024-12-26 09:50:41.688 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    47. 

  47. [Save Log Job] 2024-12-26 09:50:41.688 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    48. 

  48. [Save Log Job] 2024-12-26 09:50:41.689 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    49. 

  49. [Save Log Job] 2024-12-26 09:50:41.690 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    50. 

  50. [Save Log Job] 2024-12-26 09:50:41.690 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    51. 

  51. [Save Log Job] 2024-12-26 09:50:41.690 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    52. 

  52. [Save Log Job] 2024-12-26 09:50:41.691 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    53. 

  53. [Save Log Job] 2024-12-26 09:50:41.691 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    54. 

  54. [Save Log Job] 2024-12-26 09:50:41.691 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    55. 

  55. [Save Log Job] 2024-12-26 09:50:41.692 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    56. 

  56. [Save Log Job] 2024-12-26 09:50:41.692 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    57. 

  57. [Save Log Job] 2024-12-26 09:50:41.692 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    58. 

  58. [Save Log Job] 2024-12-26 09:50:41.693 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    59. 

  59. [Save Log Job] 2024-12-26 09:50:41.693 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    60. 

  60. [Save Log Job] 2024-12-26 09:50:41.693 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    61. 

  61. [Save Log Job] 2024-12-26 09:50:41.693 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    62. 

  62. [Save Log Job] 2024-12-26 09:50:41.694 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    63. 

  63. [Save Log Job] 2024-12-26 09:50:41.694 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    64. 

  64. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-26 09:52:27.894 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    65. 

  65. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-26 09:53:24.321 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    66. 

  66. [Save Log Job] 2024-12-26 09:53:24.321 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    67. 

  67. [Save Log Job] 2024-12-26 09:53:25.702 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    68. 

  68. [Save Log Job] 2024-12-26 09:53:25.750 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    69. 

  69. [Save Log Job] 2024-12-26 09:53:29.570 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    70. 

  70. [Save Log Job] 2024-12-26 09:53:34.602 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    71. 

  71. [Save Log Job] 2024-12-26 09:53:47.575 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    72. 

  72. [Save Log Job] 2024-12-26 09:53:47.575 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    73. 

  73. [Save Log Job] 2024-12-26 09:53:47.575 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    74. 

  74. [Save Log Job] 2024-12-26 09:53:49.585 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    75. 

  75. [Save Log Job] 2024-12-26 09:53:49.686 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    76. 

  76. [Save Log Job] 2024-12-26 09:53:49.687 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    77. 

  77. [Save Log Job] 2024-12-26 09:53:49.687 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    78. 

  78. [Save Log Job] 2024-12-26 09:53:49.688 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    79. 

  79. [Save Log Job] 2024-12-26 09:53:49.688 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    80. 

  80. [Save Log Job] 2024-12-26 09:53:49.688 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    81. 

  81. [Save Log Job] 2024-12-26 09:53:49.688 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    82. 

  82. [Save Log Job] 2024-12-26 09:53:49.787 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    83. 

  83. [Save Log Job] 2024-12-26 09:53:50.190 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    84. 

  84. [Save Log Job] 2024-12-26 09:54:03.625 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    85. 

  85. [Save Log Job] 2024-12-26 09:55:00.819 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    86. 

  86. [Save Log Job] 2024-12-26 09:55:00.921 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    87. 

  87. [Save Log Job] 2024-12-26 09:55:01.021 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    88. 

  88. [Save Log Job] 2024-12-26 09:55:31.987 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    89. 

  89. [Save Log Job] 2024-12-26 09:55:31.987 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    90. 

  90. [Save Log Job] 2024-12-26 09:55:32.088 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    91. 

  91. [Save Log Job] 2024-12-26 09:55:32.088 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    92. 

  92. [Save Log Job] 2024-12-26 09:55:32.088 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    93. 

  93. [Save Log Job] 2024-12-26 09:55:32.088 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    94. 

  94. [Save Log Job] 2024-12-26 09:55:32.089 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    95. 

  95. [Save Log Job] 2024-12-26 09:55:32.188 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    96. 

  96. [Save Log Job] 2024-12-26 09:55:32.188 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    97. 

  97. [Save Log Job] 2024-12-26 09:55:34.203 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    98. 

  98. [Save Log Job] 2024-12-26 09:55:34.506 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    99. 

  99. [Save Log Job] 2024-12-26 09:55:46.482 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    100. 

  100. [Save Log Job] 2024-12-26 09:55:46.483 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。
    101. 

  101. [Save Log Job] 2024-12-26 09:55:46.483 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    102. 

  102. [Save Log Job] 2024-12-26 09:55:46.483 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241226095531-CACB
    103. 

  103. [Save Log Job] 2024-12-26 09:55:46.483 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241226095531-CACB'
    104. 

  104. [Save Log Job] 2024-12-26 09:55:46.583 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241226095531-CACB' start run step 1：initial。
    105. 

  105. [Save Log Job] 2024-12-26 09:55:46.583 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    106. 

  106. [Save Log Job] 2024-12-26 09:55:46.583 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    107. 

  107. [Save Log Job] 2024-12-26 09:55:46.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    108. 

  108. [Save Log Job] 2024-12-26 09:55:46.586 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    109. 

  109. [Save Log Job] 2024-12-26 09:55:46.586 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    110. 

  110. [Save Log Job] 2024-12-26 09:55:46.586 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    111. 

  111. [Save Log Job] 2024-12-26 09:55:46.586 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    112. 

  112. [Save Log Job] 2024-12-26 09:55:46.588 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    113. 

  113. [Save Log Job] 2024-12-26 09:55:46.588 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    114. 

  114. [Save Log Job] 2024-12-26 09:55:46.588 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    115. 

  115. [Save Log Job] 2024-12-26 09:55:46.588 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    116. 

  116. [Save Log Job] 2024-12-26 09:55:46.588 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    117. 

  117. [Save Log Job] 2024-12-26 09:55:46.593 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    118. 

  118. [Save Log Job] 2024-12-26 09:55:46.593 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    119. 

  119. [Save Log Job] 2024-12-26 09:55:46.593 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    120. 

  120. [Save Log Job] 2024-12-26 09:55:46.593 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    121. 

  121. [Save Log Job] 2024-12-26 09:55:46.593 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    122. 

  122. [Save Log Job] 2024-12-26 09:55:46.684 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    123. 

  123. [Save Log Job] 2024-12-26 09:55:57.105 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    124. 

  124. [Save Log Job] 2024-12-26 09:56:06.131 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    125. 

  125. [Save Log Job] 2024-12-26 09:56:06.132 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    126. 

  126. [Save Log Job] 2024-12-26 09:56:06.132 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    127. 

  127. [Save Log Job] 2024-12-26 09:56:06.133 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241226095531-CACB
    128. 

  128. Start time：2024/12/26 09:55:46
    129. 

  129. End time：2024/12/26 09:56:06
    130. 

  130. Total time：0:0:19
    131. 

  131. [Save Log Job] 2024-12-26 09:56:07.202 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    132. 

  132. [Save Log Job] 2024-12-26 09:56:07.202 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    133. 

  133. [Save Log Job] 2024-12-26 09:56:09.070 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    134. 

  134. [Save Log Job] 2024-12-26 09:56:09.070 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    135. 

  135. [Save Log Job] 2024-12-26 09:56:09.070 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    136. 

  136. [Save Log Job] 2024-12-26 09:56:09.070 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    137. 

  137. [Save Log Job] 2024-12-26 09:56:09.071 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    138. 

  138. [Save Log Job] 2024-12-26 09:56:17.226 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    139. 

  139. [Save Log Job] 2024-12-26 09:56:17.226 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    140. 

  140. [Save Log Job] 2024-12-26 09:56:17.326 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    141. 

  141. [Save Log Job] 2024-12-26 09:56:20.524 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    142. 

  142. [Save Log Job] 2024-12-26 09:56:20.625 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    143. 

  143. [Save Log Job] 2024-12-26 09:56:23.746 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    144. 

  144. [Save Log Job] 2024-12-26 09:56:25.764 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveOpen失败，原因：Valve keep closed 。
    145. 

  145. [Save Log Job] 2024-12-26 09:57:13.805 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    146. 

  146. [Save Log Job] 2024-12-26 09:57:20.004 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    147. 

  147. [Save Log Job] 2024-12-26 09:57:20.005 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
    148. 

  148. [Save Log Job] 2024-12-26 09:57:20.007 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    149. 

  149. [Save Log Job] 2024-12-26 09:57:20.237 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    150. 

  150. [Save Log Job] 2024-12-26 09:59:08.913 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    151. 

  151. [Save Log Job] 2024-12-26 09:59:08.913 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    152. 

  152. [Save Log Job] 2024-12-26 09:59:08.914 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    153. 

  153. [Save Log Job] 2024-12-26 09:59:08.915 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    154. 

  154. [Save Log Job] 2024-12-26 09:59:08.915 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    155. 

  155. [Save Log Job] 2024-12-26 09:59:08.915 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    156. 

  156. [Save Log Job] 2024-12-26 09:59:08.916 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    157. 

  157. [Save Log Job] 2024-12-26 09:59:08.916 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    158. 

  158. [Save Log Job] 2024-12-26 09:59:09.014 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    159. 

  159. [Save Log Job] 2024-12-26 09:59:11.025 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    160. 

  160. [Save Log Job] 2024-12-26 09:59:11.932 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    161. 

  161. [Save Log Job] 2024-12-26 09:59:51.988 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    162. 

  162. [Save Log Job] 2024-12-26 09:59:51.989 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    163. 

  163. [Save Log Job] 2024-12-26 09:59:51.989 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    164. 

  164. [Save Log Job] 2024-12-26 09:59:53.998 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    165. 

  165. [Save Log Job] 2024-12-26 09:59:58.426 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    166. 

  166. [Save Log Job] 2024-12-26 09:59:58.426 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    167. 

  167. [Save Log Job] 2024-12-26 09:59:58.426 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    168. 

  168. [Save Log Job] 2024-12-26 09:59:58.427 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    169. 

  169. [Save Log Job] 2024-12-26 09:59:58.427 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    170. 

  170. [Save Log Job] 2024-12-26 09:59:58.427 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    171. 

  171. [Save Log Job] 2024-12-26 09:59:58.427 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    172. 

  172. [Save Log Job] 2024-12-26 09:59:58.428 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    173. 

  173. [Save Log Job] 2024-12-26 09:59:58.526 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    174. 

  174. [Save Log Job] 2024-12-26 10:00:00.540 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    175. 

  175. [Save Log Job] 2024-12-26 10:00:01.849 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    176. 

  176. [Save Log Job] 2024-12-26 10:00:13.829 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    177. 

  177. [Save Log Job] 2024-12-26 10:00:13.829 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.3 minitues。
    178. 

  178. [Save Log Job] 2024-12-26 10:00:13.829 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    179. 

  179. [Save Log Job] 2024-12-26 10:00:13.830 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241226095958-CACB
    180. 

  180. [Save Log Job] 2024-12-26 10:00:13.831 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241226095958-CACB'
    181. 

  181. [Save Log Job] 2024-12-26 10:00:13.929 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241226095958-CACB' start run step 1：initial。
    182. 

  182. [Save Log Job] 2024-12-26 10:00:13.929 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    183. 

  183. [Save Log Job] 2024-12-26 10:00:13.930 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    184. 

  184. [Save Log Job] 2024-12-26 10:00:13.931 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    185. 

  185. [Save Log Job] 2024-12-26 10:00:13.931 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    186. 

  186. [Save Log Job] 2024-12-26 10:00:13.931 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    187. 

  187. [Save Log Job] 2024-12-26 10:00:13.932 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    188. 

  188. [Save Log Job] 2024-12-26 10:00:13.932 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    189. 

  189. [Save Log Job] 2024-12-26 10:00:13.932 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    190. 

  190. [Save Log Job] 2024-12-26 10:00:13.932 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    191. 

  191. [Save Log Job] 2024-12-26 10:00:13.933 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    192. 

  192. [Save Log Job] 2024-12-26 10:00:13.933 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    193. 

  193. [Save Log Job] 2024-12-26 10:00:13.935 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    194. 

  194. [Save Log Job] 2024-12-26 10:00:13.936 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    195. 

  195. [Save Log Job] 2024-12-26 10:00:13.936 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    196. 

  196. [Save Log Job] 2024-12-26 10:00:13.936 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    197. 

  197. [Save Log Job] 2024-12-26 10:00:13.936 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    198. 

  198. [Save Log Job] 2024-12-26 10:00:13.938 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    199. 

  199. [Save Log Job] 2024-12-26 10:00:13.938 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    200. 

  200. [Save Log Job] 2024-12-26 10:00:43.988 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241226095958-CACB' end step 1
    201. 

  201. [Save Log Job] 2024-12-26 10:00:44.089 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241226095958-CACB' start run step 2：initial。
    202. 

  202. [Save Log Job] 2024-12-26 10:00:44.089 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    203. 

  203. [Save Log Job] 2024-12-26 10:00:44.089 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    204. 

  204. [Save Log Job] 2024-12-26 10:00:44.090 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    205. 

  205. [Save Log Job] 2024-12-26 10:00:44.090 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    206. 

  206. [Save Log Job] 2024-12-26 10:00:44.092 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    207. 

  207. [Save Log Job] 2024-12-26 10:00:44.093 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    208. 

  208. [Save Log Job] 2024-12-26 10:00:44.093 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    209. 

  209. [Save Log Job] 2024-12-26 10:00:44.093 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    210. 

  210. [Save Log Job] 2024-12-26 10:00:44.093 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    211. 

  211. [Save Log Job] 2024-12-26 10:00:44.093 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    212. 

  212. [Save Log Job] 2024-12-26 10:00:44.093 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    213. 

  213. [Save Log Job] 2024-12-26 10:00:44.093 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    214. 

  214. [Save Log Job] 2024-12-26 10:00:44.095 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    215. 

  215. [Save Log Job] 2024-12-26 10:00:44.095 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    216. 

  216. [Save Log Job] 2024-12-26 10:00:44.096 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    217. 

  217. [Save Log Job] 2024-12-26 10:00:44.096 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    218. 

  218. [Save Log Job] 2024-12-26 10:00:44.096 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    219. 

  219. [Save Log Job] 2024-12-26 10:01:14.153 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241226095958-CACB' end step 2
    220. 

  220. [Save Log Job] 2024-12-26 10:01:14.154 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    221. 

  221. [Save Log Job] 2024-12-26 10:01:14.154 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241226095958-CACB
    222. 

  222. Start time：2024/12/26 10:00:13
    223. 

  223. End time：2024/12/26 10:01:14
    224. 

  224. Total time：0:1:0
    225. 

  225. [Save Log Job] 2024-12-26 10:01:14.154 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    226. 

  226. [Save Log Job] 2024-12-26 10:01:14.154 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    227. 

  227. [Save Log Job] 2024-12-26 10:01:16.168 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    228. 

  228. [Save Log Job] 2024-12-26 10:01:16.168 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    229. 

  229. [Save Log Job] 2024-12-26 10:01:16.168 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    230. 

  230. [Save Log Job] 2024-12-26 10:01:16.168 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    231. 

  231. [Save Log Job] 2024-12-26 10:01:16.169 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    232. 

  232. [Save Log Job] 2024-12-26 10:01:24.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    233. 

  233. [Save Log Job] 2024-12-26 10:01:24.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    234. 

  234. [Save Log Job] 2024-12-26 10:01:30.558 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    235. 

  235. [Save Log Job] 2024-12-26 10:01:30.658 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    236. 

  236. [Save Log Job] 2024-12-26 10:01:30.658 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    237. 

  237. [Save Log Job] 2024-12-26 10:01:33.776 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    238. 

  238. [Save Log Job] 2024-12-26 10:02:23.933 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    239. 

  239. [Save Log Job] 2024-12-26 10:02:25.844 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
    240. 

  240. [Save Log Job] 2024-12-26 10:02:28.065 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    241. 

  241. [Save Log Job] 2024-12-26 10:02:28.065 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    242. 

  242. [Save Log Job] 2024-12-26 10:02:28.065 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    243. 

  243. [Save Log Job] 2024-12-26 10:02:28.166 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    244. 

  244. [Save Log Job] 2024-12-26 10:03:53.610 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    245. 

  245. [Save Log Job] 2024-12-26 10:03:53.612 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    246. 

  246. [Save Log Job] 2024-12-26 10:03:53.612 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    247. 

  247. [Save Log Job] 2024-12-26 10:03:53.612 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    248. 

  248. [Save Log Job] 2024-12-26 10:03:53.615 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    249. 

  249. [Save Log Job] 2024-12-26 10:03:53.618 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    250. 

  250. [Save Log Job] 2024-12-26 10:03:53.618 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    251. 

  251. [Save Log Job] 2024-12-26 10:03:53.711 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    252. 

  252. [Save Log Job] 2024-12-26 10:03:53.812 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    253. 

  253. [Save Log Job] 2024-12-26 10:03:55.726 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    254. 

  254. [Save Log Job] 2024-12-26 10:03:56.134 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    255. 

  255. [Save Log Job] 2024-12-26 10:04:07.613 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    256. 

  256. [Save Log Job] 2024-12-26 10:04:07.613 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    257. 

  257. [Save Log Job] 2024-12-26 10:04:07.613 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    258. 

  258. [Save Log Job] 2024-12-26 10:04:09.624 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    259. 

  259. [Save Log Job] 2024-12-26 10:08:32.289 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    260. 

  260. [Save Log Job] 2024-12-26 10:08:32.391 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    261. 

  261. [Save Log Job] 2024-12-26 10:08:32.391 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    262. 

  262. [Save Log Job] 2024-12-26 10:08:32.391 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    263. 

  263. [Save Log Job] 2024-12-26 10:08:32.391 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    264. 

  264. [Save Log Job] 2024-12-26 10:08:32.391 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    265. 

  265. [Save Log Job] 2024-12-26 10:08:32.393 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    266. 

  266. [Save Log Job] 2024-12-26 10:08:32.492 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    267. 

  267. [Save Log Job] 2024-12-26 10:08:32.492 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    268. 

  268. [Save Log Job] 2024-12-26 10:08:34.505 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    269. 

  269. [Save Log Job] 2024-12-26 10:08:36.314 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    270. 

  270. [Save Log Job] 2024-12-26 10:08:40.044 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    271. 

  271. [Save Log Job] 2024-12-26 10:08:40.044 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    272. 

  272. [Save Log Job] 2024-12-26 10:08:40.140 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    273. 

  273. [Save Log Job] 2024-12-26 10:08:42.150 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    274. 

  274. [Save Log Job] 2024-12-26 10:32:27.371 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    275. 

  275. [Save Log Job] 2024-12-26 10:32:27.371 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    276. 

  276. [Save Log Job] 2024-12-26 10:32:27.371 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    277. 

  277. [Save Log Job] 2024-12-26 10:32:27.371 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    278. 

  278. [Save Log Job] 2024-12-26 10:32:27.371 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    279. 

  279. [Save Log Job] 2024-12-26 10:32:27.372 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    280. 

  280. [Save Log Job] 2024-12-26 10:32:27.372 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    281. 

  281. [Save Log Job] 2024-12-26 10:32:27.471 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    282. 

  282. [Save Log Job] 2024-12-26 10:32:27.471 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    283. 

  283. [Save Log Job] 2024-12-26 10:32:29.487 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    284. 

  284. [Save Log Job] 2024-12-26 10:32:31.701 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    285. 

  285. [Save Log Job] 2024-12-26 10:33:23.240 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    286. 

  286. [Save Log Job] 2024-12-26 10:36:15.541 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    287. 

  287. [Save Log Job] 2024-12-26 10:36:15.740 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    288. 

  288. [Save Log Job] 2024-12-26 10:36:21.071 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    289. 

  289. [Save Log Job] 2024-12-26 10:36:44.901 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    290. 

  290. [Save Log Job] 2024-12-26 10:36:44.901 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    291. 

  291. [Save Log Job] 2024-12-26 10:36:44.901 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    292. 

  292. [Save Log Job] 2024-12-26 10:36:44.901 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    293. 

  293. [Save Log Job] 2024-12-26 10:36:44.901 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    294. 

  294. [Save Log Job] 2024-12-26 10:36:44.901 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    295. 

  295. [Save Log Job] 2024-12-26 10:36:44.902 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    296. 

  296. [Save Log Job] 2024-12-26 10:36:45.100 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    297. 

  297. [Save Log Job] 2024-12-26 10:36:47.012 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    298. 

  298. [Save Log Job] 2024-12-26 10:36:47.315 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    299. 

  299. [Save Log Job] 2024-12-26 10:36:49.230 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    300. 

  300. [Save Log Job] 2024-12-26 10:36:51.041 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    301. 

  301. [Save Log Job] 2024-12-26 10:36:55.279 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    302. 

  302. [Save Log Job] 2024-12-26 10:36:55.279 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。
    303. 

  303. [Save Log Job] 2024-12-26 10:36:55.279 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    304. 

  304. [Save Log Job] 2024-12-26 10:36:55.280 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241226103644-CACB'
    305. 

  305. [Save Log Job] 2024-12-26 10:36:55.280 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241226103644-CACB
    306. 

  306. [Save Log Job] 2024-12-26 10:36:55.382 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    307. 

  307. [Save Log Job] 2024-12-26 10:36:55.382 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    308. 

  308. [Save Log Job] 2024-12-26 10:36:55.382 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    309. 

  309. [Save Log Job] 2024-12-26 10:36:55.382 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241226103644-CACB' start run step 1：initial。
    310. 

  310. [Save Log Job] 2024-12-26 10:36:55.382 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    311. 

  311. [Save Log Job] 2024-12-26 10:36:55.382 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    312. 

  312. [Save Log Job] 2024-12-26 10:36:55.383 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    313. 

  313. [Save Log Job] 2024-12-26 10:36:55.383 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    314. 

  314. [Save Log Job] 2024-12-26 10:36:55.383 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    315. 

  315. [Save Log Job] 2024-12-26 10:36:55.384 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    316. 

  316. [Save Log Job] 2024-12-26 10:36:55.384 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    317. 

  317. [Save Log Job] 2024-12-26 10:36:55.384 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    318. 

  318. [Save Log Job] 2024-12-26 10:36:55.384 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    319. 

  319. [Save Log Job] 2024-12-26 10:36:55.384 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    320. 

  320. [Save Log Job] 2024-12-26 10:36:55.384 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    321. 

  321. [Save Log Job] 2024-12-26 10:36:55.384 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    322. 

  322. [Save Log Job] 2024-12-26 10:36:55.385 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    323. 

  323. [Save Log Job] 2024-12-26 10:36:55.385 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    324. 

  324. [Save Log Job] 2024-12-26 10:36:55.385 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    325. 

  325. [Save Log Job] 2024-12-26 10:37:01.069 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    326. 

  326. [Save Log Job] 2024-12-26 10:37:01.074 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveOpen失败，原因：Valve keep closed 。
    327. 

  327. [Save Log Job] 2024-12-26 10:37:01.074 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    328. 

  328. [Save Log Job] 2024-12-26 10:37:01.167 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    329. 

  329. [Save Log Job] 2024-12-26 10:37:01.167 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    330. 

  330. [Save Log Job] 2024-12-26 10:37:01.168 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241226103644-CACB
    331. 

  331. Start time：2024/12/26 10:36:55
    332. 

  332. End time：2024/12/26 10:37:01
    333. 

  333. Total time：0:0:5
    334. 

  334. [Save Log Job] 2024-12-26 10:37:01.168 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    335. 

  335. [Save Log Job] 2024-12-26 10:37:01.168 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    336. 

  336. [Save Log Job] 2024-12-26 10:37:03.192 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    337. 

  337. [Save Log Job] 2024-12-26 10:37:03.192 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    338. 

  338. [Save Log Job] 2024-12-26 10:37:03.193 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    339. 

  339. [Save Log Job] 2024-12-26 10:37:03.193 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    340. 

  340. [Save Log Job] 2024-12-26 10:37:11.245 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    341. 

  341. [Save Log Job] 2024-12-26 10:37:11.345 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    342. 

  342. [Save Log Job] 2024-12-26 10:37:11.345 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    343. 

  343. [Save Log Job] 2024-12-26 10:37:11.447 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    344. 

  344. [Save Log Job] 2024-12-26 10:37:11.447 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    345. 

  345. [Save Log Job] 2024-12-26 10:37:14.562 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    346. 

  346. [Save Log Job] 2024-12-26 10:37:16.575 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveOpen失败，原因：Valve keep closed 。
    347. 

  347. [Save Log Job] 2024-12-26 10:38:04.603 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    348. 

  348. [Save Log Job] 2024-12-26 10:38:06.619 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
    349. 

  349. [Save Log Job] 2024-12-26 10:38:07.827 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.1 minitues
    350. 

  350. [Save Log Job] 2024-12-26 10:38:07.827 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    351. 

  351. [Save Log Job] 2024-12-26 10:38:07.827 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    352. 

  352. [Save Log Job] 2024-12-26 10:38:07.929 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    353. 

  353. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-26 10:40:05.383 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    354. 

  354. [Save Log Job] 2024-12-26 10:40:05.384 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    355. 

  355. [Save Log Job] 2024-12-26 10:40:07.031 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    356. 

  356. [Save Log Job] 2024-12-26 10:40:07.276 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    357. 

  357. [Save Log Job] 2024-12-26 10:40:10.597 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    358. 

  358. [Save Log Job] 2024-12-26 10:42:35.891 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    359. 

  359. [Save Log Job] 2024-12-26 10:43:24.358 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    360. 

  360. [Save Log Job] 2024-12-26 10:43:24.358 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    361. 

  361. [Save Log Job] 2024-12-26 10:43:24.358 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    362. 

  362. [Save Log Job] 2024-12-26 10:43:26.369 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    363. 

  363. [Save Log Job] 2024-12-26 10:43:26.369 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    364. 

  364. [Save Log Job] 2024-12-26 10:43:26.371 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    365. 

  365. [Save Log Job] 2024-12-26 10:43:26.470 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    366. 

  366. [Save Log Job] 2024-12-26 10:43:26.470 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    367. 

  367. [Save Log Job] 2024-12-26 10:43:26.470 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    368. 

  368. [Save Log Job] 2024-12-26 10:43:26.471 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    369. 

  369. [Save Log Job] 2024-12-26 10:43:26.472 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    370. 

  370. [Save Log Job] 2024-12-26 10:43:26.472 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    371. 

  371. [Save Log Job] 2024-12-26 10:43:27.879 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    372. 

  372. [Save Log Job] 2024-12-26 10:43:36.060 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    373. 

  373. [Save Log Job] 2024-12-26 10:43:36.359 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    374. 

  374. [Save Log Job] 2024-12-26 10:43:38.169 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    375. 

  375. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-26 10:53:24.810 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    376. 

  376. [Save Log Job] 2024-12-26 10:53:26.291 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    377. 

  377. [Save Log Job] 2024-12-26 10:53:26.326 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    378. 

  378. [Save Log Job] 2024-12-26 10:53:30.145 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    379. 

  379. [Save Log Job] 2024-12-26 10:53:32.965 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    380. 

  380. [Save Log Job] 2024-12-26 10:53:39.399 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    381. 

  381. [Save Log Job] 2024-12-26 10:53:39.399 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    382. 

  382. [Save Log Job] 2024-12-26 10:53:39.400 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    383. 

  383. [Save Log Job] 2024-12-26 10:53:41.510 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    384. 

  384. [Save Log Job] 2024-12-26 10:53:41.510 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    385. 

  385. [Save Log Job] 2024-12-26 10:53:41.617 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    386. 

  386. [Save Log Job] 2024-12-26 10:53:41.617 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    387. 

  387. [Save Log Job] 2024-12-26 10:53:41.618 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    388. 

  388. [Save Log Job] 2024-12-26 10:53:41.618 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    389. 

  389. [Save Log Job] 2024-12-26 10:53:41.618 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    390. 

  390. [Save Log Job] 2024-12-26 10:53:41.619 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    391. 

  391. [Save Log Job] 2024-12-26 10:53:41.716 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    392. 

  392. [Save Log Job] 2024-12-26 10:53:43.026 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    393. 

  393. [Save Log Job] 2024-12-26 10:53:48.658 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    394. 

  394. [Save Log Job] 2024-12-26 10:53:48.952 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    395. 

  395. [Save Log Job] 2024-12-26 10:53:50.662 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    396. 

  396. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-26 11:01:29.851 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    397. 

  397. [Save Log Job] 2024-12-26 11:01:29.852 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    398. 

  398. [Save Log Job] 2024-12-26 11:01:31.224 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    399. 

  399. [Save Log Job] 2024-12-26 11:01:31.269 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    400. 

  400. [Save Log Job] 2024-12-26 11:01:34.785 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    401. 

  401. [Save Log Job] 2024-12-26 11:01:41.643 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    402. 

  402. [Save Log Job] 2024-12-26 11:01:55.000 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    403. 

  403. [Save Log Job] 2024-12-26 11:01:55.002 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    404. 

  404. [Save Log Job] 2024-12-26 11:01:55.002 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    405. 

  405. [Save Log Job] 2024-12-26 11:01:57.211 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    406. 

  406. [Save Log Job] 2024-12-26 11:01:57.211 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    407. 

  407. [Save Log Job] 2024-12-26 11:01:57.312 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    408. 

  408. [Save Log Job] 2024-12-26 11:01:57.312 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    409. 

  409. [Save Log Job] 2024-12-26 11:01:57.312 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    410. 

  410. [Save Log Job] 2024-12-26 11:01:57.313 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    411. 

  411. [Save Log Job] 2024-12-26 11:01:57.313 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    412. 

  412. [Save Log Job] 2024-12-26 11:01:57.314 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    413. 

  413. [Save Log Job] 2024-12-26 11:01:57.412 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    414. 

  414. [Save Log Job] 2024-12-26 11:01:59.230 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    415. 

  415. [Save Log Job] 2024-12-26 11:02:04.494 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    416. 

  416. [Save Log Job] 2024-12-26 11:02:04.725 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    417. 

  417. [Save Log Job] 2024-12-26 11:02:31.984 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    418. 

  418. [Save Log Job] 2024-12-26 11:02:31.984 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    419. 

  419. [Save Log Job] 2024-12-26 11:02:32.085 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    420. 

  420. [Save Log Job] 2024-12-26 11:02:32.085 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    421. 

  421. [Save Log Job] 2024-12-26 11:02:32.085 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    422. 

  422. [Save Log Job] 2024-12-26 11:02:32.086 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    423. 

  423. [Save Log Job] 2024-12-26 11:02:32.086 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    424. 

  424. [Save Log Job] 2024-12-26 11:02:32.087 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    425. 

  425. [Save Log Job] 2024-12-26 11:02:32.185 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    426. 

  426. [Save Log Job] 2024-12-26 11:02:34.198 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    427. 

  427. [Save Log Job] 2024-12-26 11:02:36.211 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    428. 

  428. [Save Log Job] 2024-12-26 11:03:11.178 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    429. 

  429. [Save Log Job] 2024-12-26 11:03:11.178 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    430. 

  430. [Save Log Job] 2024-12-26 11:03:11.178 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    431. 

  431. [Save Log Job] 2024-12-26 11:03:11.179 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241226110231-CACB
    432. 

  432. [Save Log Job] 2024-12-26 11:03:11.179 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241226110231-CACB'
    433. 

  433. [Save Log Job] 2024-12-26 11:03:11.279 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241226110231-CACB' start run step 1：initial。
    434. 

  434. [Save Log Job] 2024-12-26 11:03:11.279 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    435. 

  435. [Save Log Job] 2024-12-26 11:03:11.279 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    436. 

  436. [Save Log Job] 2024-12-26 11:03:11.280 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    437. 

  437. [Save Log Job] 2024-12-26 11:03:11.280 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    438. 

  438. [Save Log Job] 2024-12-26 11:03:11.280 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    439. 

  439. [Save Log Job] 2024-12-26 11:03:11.280 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    440. 

  440. [Save Log Job] 2024-12-26 11:03:11.281 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    441. 

  441. [Save Log Job] 2024-12-26 11:03:11.281 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    442. 

  442. [Save Log Job] 2024-12-26 11:03:11.281 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    443. 

  443. [Save Log Job] 2024-12-26 11:03:11.282 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    444. 

  444. [Save Log Job] 2024-12-26 11:03:11.282 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    445. 

  445. [Save Log Job] 2024-12-26 11:03:11.283 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    446. 

  446. [Save Log Job] 2024-12-26 11:03:11.283 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    447. 

  447. [Save Log Job] 2024-12-26 11:03:11.283 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    448. 

  448. [Save Log Job] 2024-12-26 11:03:11.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    449. 

  449. [Save Log Job] 2024-12-26 11:03:11.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    450. 

  450. [Save Log Job] 2024-12-26 11:03:11.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    451. 

  451. [Save Log Job] 2024-12-26 11:03:11.285 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    452. 

  452. [Save Log Job] 2024-12-26 11:03:17.870 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    453. 

  453. [Save Log Job] 2024-12-26 11:03:17.970 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    454. 

  454. [Save Log Job] 2024-12-26 11:03:17.971 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    455. 

  455. [Save Log Job] 2024-12-26 11:03:17.971 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241226110231-CACB
    456. 

  456. Start time：2024/12/26 11:03:11
    457. 

  457. End time：2024/12/26 11:03:17
    458. 

  458. Total time：0:0:6
    459. 

  459. [Save Log Job] 2024-12-26 11:03:17.971 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    460. 

  460. [Save Log Job] 2024-12-26 11:03:17.972 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    461. 

  461. [Save Log Job] 2024-12-26 11:03:19.987 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    462. 

  462. [Save Log Job] 2024-12-26 11:03:19.987 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    463. 

  463. [Save Log Job] 2024-12-26 11:03:19.988 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    464. 

  464. [Save Log Job] 2024-12-26 11:03:19.988 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    465. 

  465. [Save Log Job] 2024-12-26 11:03:19.988 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    466. 

  466. [Save Log Job] 2024-12-26 11:03:19.989 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    467. 

  467. [Save Log Job] 2024-12-26 11:03:28.044 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    468. 

  468. [Save Log Job] 2024-12-26 11:03:28.145 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    469. 

  469. [Save Log Job] 2024-12-26 11:03:28.145 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    470. 

  470. [Save Log Job] 2024-12-26 11:03:28.246 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    471. 

  471. [Save Log Job] 2024-12-26 11:03:29.155 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    472. 

  472. [Save Log Job] 2024-12-26 11:03:32.282 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    473. 

  473. [Save Log Job] 2024-12-26 11:04:22.379 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    474. 

  474. [Save Log Job] 2024-12-26 11:04:23.188 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.1 minitues
    475. 

  475. [Save Log Job] 2024-12-26 11:04:23.188 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    476. 

  476. [Save Log Job] 2024-12-26 11:04:23.188 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    477. 

  477. [Save Log Job] 2024-12-26 11:04:23.386 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    478. 

  478. [Save Log Job] 2024-12-26 11:13:20.709 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
    479. 

  479. [Save Log Job] 2024-12-26 11:13:20.710 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    480. 

  480. [Save Log Job] 2024-12-26 11:13:20.710 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
    481. 

  481. [Save Log Job] 2024-12-26 11:13:25.538 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    482. 

  482. [Save Log Job] 2024-12-26 11:13:25.538 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
    483. 

  483. [Save Log Job] 2024-12-26 11:13:25.538 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
    484. 

  484. [Save Log Job] 2024-12-26 11:13:25.539 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 10)
    485. 

  485. [Save Log Job] 2024-12-26 11:13:25.539 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
    486. 

  486. [Save Log Job] 2024-12-26 11:13:25.637 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
    487. 

  487. [Save Log Job] 2024-12-26 11:13:25.638 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
    488. 

  488. [Save Log Job] 2024-12-26 11:13:25.638 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
    489. 

  489. [Save Log Job] 2024-12-26 11:13:25.640 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
    490. 

  490. [Save Log Job] 2024-12-26 11:13:25.641 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
    491. 

  491. [Save Log Job] 2024-12-26 11:13:25.641 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
    492. 

  492. [Save Log Job] 2024-12-26 11:13:25.740 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    493. 

  493. [Save Log Job] 2024-12-26 11:13:27.751 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    494. 

  494. [Save Log Job] 2024-12-26 11:13:28.052 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
    495. 

  495. [Save Log Job] 2024-12-26 11:13:34.903 LOG.INFO UiEvent.cs Line:51 Event() - Operation Abort()
    496. 

  496. [Save Log Job] 2024-12-26 11:13:34.903 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    497. 

  497. [Save Log Job] 2024-12-26 11:13:42.843 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    498. 

  498. [Save Log Job] 2024-12-26 11:13:42.843 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
    499. 

  499. [Save Log Job] 2024-12-26 11:13:42.843 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
    500. 

  500. [Save Log Job] 2024-12-26 11:13:42.843 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 10)
    501. 

  501. [Save Log Job] 2024-12-26 11:13:42.844 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
    502. 

  502. [Save Log Job] 2024-12-26 11:13:42.944 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
    503. 

  503. [Save Log Job] 2024-12-26 11:13:42.944 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
    504. 

  504. [Save Log Job] 2024-12-26 11:13:42.944 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
    505. 

  505. [Save Log Job] 2024-12-26 11:13:42.944 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
    506. 

  506. [Save Log Job] 2024-12-26 11:13:42.944 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
    507. 

  507. [Save Log Job] 2024-12-26 11:13:42.944 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    508. 

  508. [Save Log Job] 2024-12-26 11:13:43.044 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
    509. 

  509. [Save Log Job] 2024-12-26 11:13:43.546 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
    510. 

  510. [Save Log Job] 2024-12-26 11:13:53.517 LOG.INFO UiEvent.cs Line:51 Event() - Can not pump to base pressure 500 in 10 seconds。
    511. 

  511. [Save Log Job] 2024-12-26 11:13:53.617 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    512. 

  512. [Save Log Job] 2024-12-26 11:13:53.617 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Idle，can not do Abort。
    513. 

  513. [Save Log Job] 2024-12-26 11:13:53.617 LOG.INFO UiEvent.cs Line:51 Event() - Operation Abort()
    514. 

  514. [Save Log Job] 2024-12-26 11:14:02.665 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
    515. 

  515. [Save Log Job] 2024-12-26 11:14:02.768 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    516. 

  516. [Save Log Job] 2024-12-26 11:14:02.768 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    517. 

  517. [Save Log Job] 2024-12-26 11:14:02.768 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
    518. 

  518. [Save Log Job] 2024-12-26 11:14:02.870 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
    519. 

  519. [Save Log Job] 2024-12-26 11:14:04.892 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    520. 

  520. [Save Log Job] 2024-12-26 11:14:06.606 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.1 minitues。
    521. 

  521. [Save Log Job] 2024-12-26 11:14:06.607 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
    522. 

  522. [Save Log Job] 2024-12-26 11:14:06.607 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
    523. 

  523. [Save Log Job] 2024-12-26 11:14:06.607 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    524. 

  524. [Save Log Job] 2024-12-26 11:14:18.970 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
    525. 

  525. [Save Log Job] 2024-12-26 11:14:18.970 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
    526. 

  526. [Save Log Job] 2024-12-26 11:14:18.970 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    527. 

  527. [Save Log Job] 2024-12-26 11:14:18.970 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 10)
    528. 

  528. [Save Log Job] 2024-12-26 11:14:18.970 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
    529. 

  529. [Save Log Job] 2024-12-26 11:14:19.069 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    530. 

  530. [Save Log Job] 2024-12-26 11:14:19.069 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
    531. 

  531. [Save Log Job] 2024-12-26 11:14:19.069 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
    532. 

  532. [Save Log Job] 2024-12-26 11:14:19.069 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
    533. 

  533. [Save Log Job] 2024-12-26 11:14:19.069 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
    534. 

  534. [Save Log Job] 2024-12-26 11:14:19.069 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
    535. 

  535. [Save Log Job] 2024-12-26 11:14:19.169 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
    536. 

  536. [Save Log Job] 2024-12-26 11:14:21.185 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    537. 

  537. [Save Log Job] 2024-12-26 11:14:21.893 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
    538. 

  538. [Save Log Job] 2024-12-26 11:14:28.130 LOG.INFO UiEvent.cs Line:51 Event() - Operation Abort()
    539. 

  539. [Save Log Job] 2024-12-26 11:14:28.231 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    540. 

  540. [Save Log Job] 2024-12-26 11:14:45.615 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    541. 

  541. [Save Log Job] 2024-12-26 11:14:45.616 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
    542. 

  542. [Save Log Job] 2024-12-26 11:14:45.616 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
    543. 

  543. [Save Log Job] 2024-12-26 11:14:45.616 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 10)
    544. 

  544. [Save Log Job] 2024-12-26 11:14:45.617 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
    545. 

  545. [Save Log Job] 2024-12-26 11:14:45.617 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
    546. 

  546. [Save Log Job] 2024-12-26 11:14:45.617 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
    547. 

  547. [Save Log Job] 2024-12-26 11:14:45.617 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
    548. 

  548. [Save Log Job] 2024-12-26 11:14:45.617 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
    549. 

  549. [Save Log Job] 2024-12-26 11:14:45.618 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
    550. 

  550. [Save Log Job] 2024-12-26 11:14:45.716 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    551. 

  551. [Save Log Job] 2024-12-26 11:14:45.716 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
    552. 

  552. [Save Log Job] 2024-12-26 11:14:47.728 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    553. 

  553. [Save Log Job] 2024-12-26 11:14:48.735 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
    554. 

  554. [Save Log Job] 2024-12-26 11:14:53.774 LOG.INFO UiEvent.cs Line:51 Event() - Operation Abort()
    555. 

  555. [Save Log Job] 2024-12-26 11:14:53.875 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    556. 

  556. [Save Log Job] 2024-12-26 11:14:55.788 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    557. 

  557. [Save Log Job] 2024-12-26 11:15:28.552 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    558. 

  558. [Save Log Job] 2024-12-26 11:15:28.553 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
    559. 

  559. [Save Log Job] 2024-12-26 11:15:28.553 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
    560. 

  560. [Save Log Job] 2024-12-26 11:15:28.553 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 10)
    561. 

  561. [Save Log Job] 2024-12-26 11:15:28.553 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
    562. 

  562. [Save Log Job] 2024-12-26 11:15:28.556 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    563. 

  563. [Save Log Job] 2024-12-26 11:15:28.556 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
    564. 

  564. [Save Log Job] 2024-12-26 11:15:28.556 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
    565. 

  565. [Save Log Job] 2024-12-26 11:15:28.556 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
    566. 

  566. [Save Log Job] 2024-12-26 11:15:28.556 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
    567. 

  567. [Save Log Job] 2024-12-26 11:15:28.556 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
    568. 

  568. [Save Log Job] 2024-12-26 11:15:28.657 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
    569. 

  569. [Save Log Job] 2024-12-26 11:15:30.667 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    570. 

  570. [Save Log Job] 2024-12-26 11:15:31.066 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
    571. 

  571. [Save Log Job] 2024-12-26 11:15:31.368 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump below 500mTorr。
    572. 

  572. [Save Log Job] 2024-12-26 11:15:31.368 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump Finished in 0.0 minitues。
    573. 

  573. [Save Log Job] 2024-12-26 11:15:31.369 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Pump'.
    574. 

  574. [Save Log Job] 2024-12-26 11:15:31.369 LOG.INFO UiEvent.cs Line:51 Event() - Pump
    575. 

  575. [Save Log Job] 2024-12-26 11:15:31.570 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    576. 

  576. [Save Log Job] 2024-12-26 11:15:42.024 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
    577. 

  577. [Save Log Job] 2024-12-26 11:15:42.125 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    578. 

  578. [Save Log Job] 2024-12-26 11:15:42.125 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    579. 

  579. [Save Log Job] 2024-12-26 11:15:42.128 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
    580. 

  580. [Save Log Job] 2024-12-26 11:15:42.225 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
    581. 

  581. [Save Log Job] 2024-12-26 11:15:44.240 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    582. 

  582. [Save Log Job] 2024-12-26 11:15:46.457 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
    583. 

  583. [Save Log Job] 2024-12-26 11:15:46.457 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.1 minitues。
    584. 

  584. [Save Log Job] 2024-12-26 11:15:46.458 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
    585. 

  585. [Save Log Job] 2024-12-26 11:15:46.458 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    586. 

  586.