Triton_160/Triton160UI/bin/Debug/Logs/appLog20241216.txt

--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-16 09:14:28.970 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-16 09:14:28.973 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-16 09:14:30.399 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 09:14:36.151 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-16 09:14:36.151 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-16 09:14:43.612 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-16 10:29:07.764 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-16 10:29:07.765 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-16 10:29:09.154 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:29:09.506 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-16 10:29:12.725 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-16 10:29:26.307 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-16 10:29:53.667 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-16 10:29:53.668 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-16 10:29:53.668 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-16 10:30:23.595 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 1111111111/, , )
[Save Log Job] 2024-12-16 10:30:50.962 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-16 10:30:50.962 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:30:50.964 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:30:51.041 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-16 10:30:51.043 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-16 10:30:51.043 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-16 10:30:51.043 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-16 10:30:51.064 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-16 10:30:51.064 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-16 10:30:53.056 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-16 10:30:54.765 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-16 10:31:33.567 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-12-16 10:31:33.567 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。
[Save Log Job] 2024-12-16 10:31:33.568 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-12-16 10:31:33.568 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241216103048-CACB
[Save Log Job] 2024-12-16 10:31:33.568 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241216103048-CACB'
[Save Log Job] 2024-12-16 10:31:33.667 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103048-CACB' start run step 1：initial。
[Save Log Job] 2024-12-16 10:31:33.667 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-16 10:31:33.668 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-16 10:31:33.668 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-16 10:31:33.670 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-16 10:31:33.670 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-16 10:31:33.670 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-16 10:31:33.671 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-16 10:31:33.671 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-16 10:31:33.671 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-16 10:31:33.671 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-16 10:31:33.672 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-16 10:31:33.675 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-12-16 10:32:03.743 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103048-CACB' end step 1
[Save Log Job] 2024-12-16 10:32:03.743 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103048-CACB' start run step 2：initial。
[Save Log Job] 2024-12-16 10:32:03.744 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-16 10:32:03.744 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-16 10:32:03.744 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-16 10:32:03.745 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-16 10:32:03.745 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-16 10:32:03.745 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-16 10:32:03.746 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-16 10:32:03.746 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-12-16 10:32:03.746 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-16 10:32:03.747 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-16 10:32:03.747 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-16 10:32:03.747 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-16 10:32:03.748 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-16 10:32:03.748 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-16 10:32:03.748 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-16 10:32:03.749 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-16 10:32:03.749 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-12-16 10:32:09.427 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
[Save Log Job] 2024-12-16 10:32:09.428 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-12-16 10:32:09.510 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-12-16 10:32:09.510 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241216103048-CACB
Start time：2024/12/16 10:31:33
End time：2024/12/16 10:32:09
Total time：0:0:35
[Save Log Job] 2024-12-16 10:32:09.511 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-12-16 10:32:09.712 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:32:11.522 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:38:32.896 LOG.INFO UiEvent.cs Line:51 Event() - System Information
[Save Log Job] 2024-12-16 10:38:32.896 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  CACB  save completed
[Save Log Job] 2024-12-16 10:39:15.506 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:39:36.825 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 2222222222/, , )
[Save Log Job] 2024-12-16 10:39:38.103 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-16 10:39:38.103 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-16 10:39:38.103 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-16 10:39:38.105 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-16 10:39:38.105 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-16 10:39:38.105 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-16 10:39:38.204 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-12-16 10:39:38.204 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-16 10:39:38.225 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:39:38.225 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-16 10:39:38.303 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
[Save Log Job] 2024-12-16 10:39:38.303 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-12-16 10:39:38.303 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241216103938-CACB
[Save Log Job] 2024-12-16 10:39:38.303 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241216103938-CACB'
[Save Log Job] 2024-12-16 10:39:38.303 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103938-CACB' start run step 1：initial。
[Save Log Job] 2024-12-16 10:39:38.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-16 10:39:38.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-16 10:39:38.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-16 10:39:38.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-16 10:39:38.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-16 10:39:38.404 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-12-16 10:40:08.367 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103938-CACB' end step 1
[Save Log Job] 2024-12-16 10:40:08.468 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-16 10:40:08.468 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103938-CACB' start run step 2：initial。
[Save Log Job] 2024-12-16 10:40:08.468 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-16 10:40:08.468 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-16 10:40:08.471 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-16 10:40:08.471 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-16 10:40:38.527 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103938-CACB' end step 2
[Save Log Job] 2024-12-16 10:40:38.528 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-12-16 10:40:38.528 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241216103938-CACB
Start time：2024/12/16 10:39:38
End time：2024/12/16 10:40:38
Total time：0:1:0
[Save Log Job] 2024-12-16 10:40:38.528 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-12-16 10:40:38.630 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-12-16 10:40:40.540 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:40:40.540 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:40:48.702 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-12-16 10:40:48.702 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-12-16 10:40:55.647 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-12-16 10:40:55.747 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-12-16 10:40:57.761 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:40:59.170 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-12-16 10:41:02.297 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-12-16 10:41:52.364 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
[Save Log Job] 2024-12-16 10:43:02.998 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
[Save Log Job] 2024-12-16 10:43:03.012 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
[Save Log Job] 2024-12-16 10:43:03.034 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-12-16 10:43:03.034 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:43:54.568 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 333333333/, , )
[Save Log Job] 2024-12-16 10:43:54.668 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-16 10:43:54.668 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-16 10:43:54.670 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-16 10:43:54.670 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-16 10:43:54.670 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-16 10:43:54.671 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-16 10:43:54.768 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-16 10:43:54.768 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:43:56.779 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-16 10:43:58.391 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-16 10:44:44.432 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-16 10:44:44.532 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 33333333366/, , )
[Save Log Job] 2024-12-16 10:45:12.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-16 10:45:12.994 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-16 10:45:12.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-16 10:45:12.995 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-16 10:45:12.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-16 10:45:12.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-16 10:45:12.996 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:45:13.093 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-16 10:45:13.093 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-16 10:45:15.610 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-12-16 10:45:15.611 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
[Save Log Job] 2024-12-16 10:45:15.611 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-12-16 10:45:15.611 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241216104512-CACB
[Save Log Job] 2024-12-16 10:45:15.611 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241216104512-CACB'
[Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104512-CACB' start run step 1：initial。
[Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-16 10:45:15.713 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-16 10:45:15.713 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-16 10:45:15.713 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-16 10:45:15.714 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-16 10:45:15.714 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-16 10:45:15.714 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-16 10:45:15.714 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-16 10:45:15.715 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-16 10:45:15.715 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-16 10:45:15.715 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-16 10:45:15.715 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-16 10:45:15.716 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-12-16 10:45:45.771 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104512-CACB' end step 1
[Save Log Job] 2024-12-16 10:45:45.771 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104512-CACB' start run step 2：initial。
[Save Log Job] 2024-12-16 10:45:45.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-16 10:45:45.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-16 10:45:45.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-16 10:45:45.775 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-16 10:45:45.775 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-16 10:45:45.775 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-16 10:45:45.777 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-16 10:45:45.777 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-16 10:46:15.926 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104512-CACB' end step 2
[Save Log Job] 2024-12-16 10:46:15.926 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-12-16 10:46:15.926 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241216104512-CACB
Start time：2024/12/16 10:45:15
End time：2024/12/16 10:46:15
Total time：0:1:0
[Save Log Job] 2024-12-16 10:46:15.926 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-12-16 10:46:15.926 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-12-16 10:46:17.965 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:46:17.965 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:46:17.967 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:46:17.967 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:46:17.968 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:46:26.019 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-12-16 10:46:26.119 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-12-16 10:46:32.464 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-12-16 10:46:32.464 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-12-16 10:46:34.476 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:46:35.786 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-12-16 10:46:38.903 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-12-16 10:47:28.974 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
[Save Log Job] 2024-12-16 10:47:29.778 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
[Save Log Job] 2024-12-16 10:47:29.781 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
[Save Log Job] 2024-12-16 10:47:29.784 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-12-16 10:47:29.880 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:47:58.026 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 444444444444/, , )
[Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-16 10:47:58.127 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-16 10:47:58.129 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:48:00.137 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-16 10:48:00.339 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-16 10:48:46.739 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-12-16 10:48:46.839 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。
[Save Log Job] 2024-12-16 10:48:46.839 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-12-16 10:48:46.839 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241216104757-CACB
[Save Log Job] 2024-12-16 10:48:46.839 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241216104757-CACB'
[Save Log Job] 2024-12-16 10:48:46.839 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104757-CACB' start run step 1：initial。
[Save Log Job] 2024-12-16 10:48:46.840 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-16 10:48:46.843 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-16 10:48:46.843 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-16 10:48:46.867 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-16 10:48:46.940 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-12-16 10:49:16.903 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104757-CACB' end step 1
[Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104757-CACB' start run step 2：initial。
[Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-16 10:49:17.004 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-16 10:49:17.004 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-16 10:49:17.004 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-16 10:49:17.004 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-16 10:49:17.005 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-16 10:49:17.005 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-16 10:49:17.005 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-16 10:49:17.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-16 10:49:17.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-16 10:49:17.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-16 10:49:17.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-16 10:49:17.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-16 10:49:47.056 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104757-CACB' end step 2
[Save Log Job] 2024-12-16 10:49:47.056 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-12-16 10:49:47.056 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241216104757-CACB
Start time：2024/12/16 10:48:46
End time：2024/12/16 10:49:47
Total time：0:1:0
[Save Log Job] 2024-12-16 10:49:47.056 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-12-16 10:49:47.158 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-12-16 10:49:49.071 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:49:49.071 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:49:49.071 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:49:49.071 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:49:49.071 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:49:57.221 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-12-16 10:49:57.222 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-12-16 10:50:03.571 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-12-16 10:50:03.671 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-12-16 10:50:05.688 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:50:07.001 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-12-16 10:50:10.122 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-12-16 10:51:00.180 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
[Save Log Job] 2024-12-16 10:51:00.984 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
[Save Log Job] 2024-12-16 10:51:00.984 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
[Save Log Job] 2024-12-16 10:51:00.984 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-12-16 10:51:01.086 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 5555555555/666666666666/, , )
[Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-16 10:55:10.398 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-16 10:55:10.500 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 10:55:12.408 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-16 10:55:14.020 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-16 10:56:04.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-12-16 10:56:04.262 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-12-16 10:56:04.262 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241216105510-CACB
[Save Log Job] 2024-12-16 10:56:04.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
[Save Log Job] 2024-12-16 10:56:04.263 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241216105510-CACB'
[Save Log Job] 2024-12-16 10:56:04.362 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216105510-CACB' start run step 1：initial。
[Save Log Job] 2024-12-16 10:56:04.362 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-16 10:56:04.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-16 10:56:04.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-16 10:56:04.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-16 10:56:04.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-16 10:56:04.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-16 10:56:04.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-16 10:56:04.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-16 10:56:34.420 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216105510-CACB' end step 1
[Save Log Job] 2024-12-16 10:56:34.520 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216105510-CACB' start run step 2：initial。
[Save Log Job] 2024-12-16 10:56:34.522 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-16 10:56:34.522 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-16 10:56:34.523 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-16 10:56:34.523 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-16 10:56:34.524 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-16 10:56:34.524 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-16 10:56:34.524 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-16 10:56:34.524 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-16 10:56:34.525 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-16 10:56:34.525 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-16 10:56:34.525 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-16 10:56:34.525 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-16 10:56:34.525 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-16 10:56:34.526 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-16 10:56:34.526 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-16 10:56:34.526 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-16 10:56:34.526 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-16 10:57:04.574 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216105510-CACB' end step 2
[Save Log Job] 2024-12-16 10:57:04.574 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-12-16 10:57:04.576 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-12-16 10:57:04.576 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241216105510-CACB
Start time：2024/12/16 10:56:04
End time：2024/12/16 10:57:04
Total time：0:1:0
[Save Log Job] 2024-12-16 10:57:04.578 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-12-16 10:57:06.585 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:57:06.585 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:57:06.585 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:57:06.585 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:57:06.585 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:57:14.736 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-12-16 10:57:14.736 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-12-16 10:57:21.078 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-12-16 10:57:21.079 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-12-16 10:57:23.096 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-16 10:57:24.503 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-12-16 10:57:27.522 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-12-16 10:58:17.584 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
[Save Log Job] 2024-12-16 10:58:18.490 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
[Save Log Job] 2024-12-16 10:58:18.490 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
[Save Log Job] 2024-12-16 10:58:18.490 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-12-16 10:58:18.490 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-16 11:04:10.079 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-16 11:04:10.081 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-16 11:04:11.466 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 11:04:11.913 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-16 11:04:15.034 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-16 11:04:17.948 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-16 11:07:03.939 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 11:07:04.557 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-16 11:07:07.674 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-16 11:07:12.630 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-16 11:07:39.302 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-16 11:07:39.303 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-16 11:07:40.711 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-16 11:07:40.928 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-16 11:07:44.544 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-16 11:07:48.672 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Footer Log]-----------------------------------------