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Triton160UI
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appLog20241029.txt

appLog20241029.txt 49 KB
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  1. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-29 18:57:47.005 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    2. 

  2. [Save Log Job] 2024-10-29 18:57:47.007 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    3. 

  3. [Save Log Job] 2024-10-29 18:57:48.451 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    4. 

  4. [Save Log Job] 2024-10-29 18:57:49.751 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    5. 

  5. [Save Log Job] 2024-10-29 18:57:52.087 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。
    6. 

  6. [Save Log Job] 2024-10-29 18:58:00.828 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    7. 

  7. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-29 20:37:14.286 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    8. 

  8. [Save Log Job] 2024-10-29 20:37:14.286 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    9. 

  9. [Save Log Job] 2024-10-29 20:37:15.924 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    10. 

  10. [Save Log Job] 2024-10-29 20:37:16.351 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    11. 

  11. [Save Log Job] 2024-10-29 20:37:19.472 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。
    12. 

  12. [Save Log Job] 2024-10-29 20:37:24.733 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    13. 

  13. [Save Log Job] 2024-10-29 20:37:41.927 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    14. 

  14. [Save Log Job] 2024-10-29 20:37:41.928 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    15. 

  15. [Save Log Job] 2024-10-29 20:37:41.928 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    16. 

  16. [Save Log Job] 2024-10-29 20:37:51.781 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    17. 

  17. [Save Log Job] 2024-10-29 20:37:51.784 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    18. 

  18. [Save Log Job] 2024-10-29 20:37:51.881 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    19. 

  19. [Save Log Job] 2024-10-29 20:37:51.881 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    20. 

  20. [Save Log Job] 2024-10-29 20:37:51.882 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    21. 

  21. [Save Log Job] 2024-10-29 20:37:51.882 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    22. 

  22. [Save Log Job] 2024-10-29 20:37:51.883 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    23. 

  23. [Save Log Job] 2024-10-29 20:37:51.981 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    24. 

  24. [Save Log Job] 2024-10-29 20:37:51.982 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    25. 

  25. [Save Log Job] 2024-10-29 20:37:53.997 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    26. 

  26. [Save Log Job] 2024-10-29 20:37:55.607 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    27. 

  27. [Save Log Job] 2024-10-29 20:38:30.517 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    28. 

  28. [Save Log Job] 2024-10-29 20:38:30.517 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    29. 

  29. [Save Log Job] 2024-10-29 20:38:30.518 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    30. 

  30. [Save Log Job] 2024-10-29 20:38:30.617 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241029203751-123
    31. 

  31. [Save Log Job] 2024-10-29 20:38:30.618 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241029203751-123'
    32. 

  32. [Save Log Job] 2024-10-29 20:38:30.618 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029203751-123' start run step 1：initial。
    33. 

  33. [Save Log Job] 2024-10-29 20:38:30.619 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    34. 

  34. [Save Log Job] 2024-10-29 20:38:30.620 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    35. 

  35. [Save Log Job] 2024-10-29 20:38:30.621 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    36. 

  36. [Save Log Job] 2024-10-29 20:38:30.621 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    37. 

  37. [Save Log Job] 2024-10-29 20:38:30.622 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    38. 

  38. [Save Log Job] 2024-10-29 20:38:30.622 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    39. 

  39. [Save Log Job] 2024-10-29 20:38:30.623 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    40. 

  40. [Save Log Job] 2024-10-29 20:38:30.623 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    41. 

  41. [Save Log Job] 2024-10-29 20:38:30.624 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    42. 

  42. [Save Log Job] 2024-10-29 20:38:30.624 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    43. 

  43. [Save Log Job] 2024-10-29 20:38:30.625 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    44. 

  44. [Save Log Job] 2024-10-29 20:38:30.625 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    45. 

  45. [Save Log Job] 2024-10-29 20:38:30.626 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    46. 

  46. [Save Log Job] 2024-10-29 20:38:30.627 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    47. 

  47. [Save Log Job] 2024-10-29 20:38:30.627 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    48. 

  48. [Save Log Job] 2024-10-29 20:38:30.628 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    49. 

  49. [Save Log Job] 2024-10-29 20:38:30.628 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    50. 

  50. [Save Log Job] 2024-10-29 20:38:30.718 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    51. 

  51. [Save Log Job] 2024-10-29 20:39:00.684 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029203751-123' end step 1
    52. 

  52. [Save Log Job] 2024-10-29 20:39:00.685 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    53. 

  53. [Save Log Job] 2024-10-29 20:39:00.697 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241029203751-123
    54. 

  54. Start time：2024/10/29 20:38:30
    55. 

  55. End time：2024/10/29 20:39:00
    56. 

  56. Total time：0:0:30
    57. 

  57. [Save Log Job] 2024-10-29 20:39:00.698 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    58. 

  58. [Save Log Job] 2024-10-29 20:39:00.698 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    59. 

  59. [Save Log Job] 2024-10-29 20:39:02.699 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    60. 

  60. [Save Log Job] 2024-10-29 20:39:02.699 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    61. 

  61. [Save Log Job] 2024-10-29 20:39:02.700 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    62. 

  62. [Save Log Job] 2024-10-29 20:39:02.700 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    63. 

  63. [Save Log Job] 2024-10-29 20:39:02.701 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    64. 

  64. [Save Log Job] 2024-10-29 20:39:02.701 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    65. 

  65. [Save Log Job] 2024-10-29 20:39:10.768 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    66. 

  66. [Save Log Job] 2024-10-29 20:39:10.866 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    67. 

  67. [Save Log Job] 2024-10-29 20:39:16.812 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    68. 

  68. [Save Log Job] 2024-10-29 20:39:16.813 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    69. 

  69. [Save Log Job] 2024-10-29 20:39:18.829 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    70. 

  70. [Save Log Job] 2024-10-29 20:39:20.279 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    71. 

  71. [Save Log Job] 2024-10-29 20:39:23.302 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    72. 

  72. [Save Log Job] 2024-10-29 20:40:13.476 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    73. 

  73. [Save Log Job] 2024-10-29 20:40:17.420 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    74. 

  74. [Save Log Job] 2024-10-29 20:40:17.422 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    75. 

  75. [Save Log Job] 2024-10-29 20:40:23.183 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    76. 

  76. [Save Log Job] 2024-10-29 20:40:50.328 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    77. 

  77. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-29 20:43:41.193 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    78. 

  78. [Save Log Job] 2024-10-29 20:43:41.194 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    79. 

  79. [Save Log Job] 2024-10-29 20:43:42.729 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    80. 

  80. [Save Log Job] 2024-10-29 20:43:42.730 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    81. 

  81. [Save Log Job] 2024-10-29 20:43:46.184 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。
    82. 

  82. [Save Log Job] 2024-10-29 20:44:00.198 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    83. 

  83. [Save Log Job] 2024-10-29 20:44:10.314 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    84. 

  84. [Save Log Job] 2024-10-29 20:44:10.315 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    85. 

  85. [Save Log Job] 2024-10-29 20:44:10.315 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    86. 

  86. [Save Log Job] 2024-10-29 20:44:14.442 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    87. 

  87. [Save Log Job] 2024-10-29 20:44:14.444 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    88. 

  88. [Save Log Job] 2024-10-29 20:44:14.444 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    89. 

  89. [Save Log Job] 2024-10-29 20:44:14.444 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    90. 

  90. [Save Log Job] 2024-10-29 20:44:14.445 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    91. 

  91. [Save Log Job] 2024-10-29 20:44:14.445 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    92. 

  92. [Save Log Job] 2024-10-29 20:44:14.445 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    93. 

  93. [Save Log Job] 2024-10-29 20:44:14.540 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    94. 

  94. [Save Log Job] 2024-10-29 20:44:14.540 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    95. 

  95. [Save Log Job] 2024-10-29 20:44:16.552 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    96. 

  96. [Save Log Job] 2024-10-29 20:44:18.466 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    97. 

  97. [Save Log Job] 2024-10-29 20:44:57.377 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    98. 

  98. [Save Log Job] 2024-10-29 20:44:57.378 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    99. 

  99. [Save Log Job] 2024-10-29 20:44:57.379 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    100. 

  100. [Save Log Job] 2024-10-29 20:44:57.380 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241029204414-123
    101. 

  101. [Save Log Job] 2024-10-29 20:44:57.381 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241029204414-123'
    102. 

  102. [Save Log Job] 2024-10-29 20:44:57.477 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029204414-123' start run step 1：initial。
    103. 

  103. [Save Log Job] 2024-10-29 20:44:57.478 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    104. 

  104. [Save Log Job] 2024-10-29 20:44:57.478 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    105. 

  105. [Save Log Job] 2024-10-29 20:44:57.479 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    106. 

  106. [Save Log Job] 2024-10-29 20:44:57.480 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    107. 

  107. [Save Log Job] 2024-10-29 20:44:57.480 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    108. 

  108. [Save Log Job] 2024-10-29 20:44:57.481 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    109. 

  109. [Save Log Job] 2024-10-29 20:44:57.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    110. 

  110. [Save Log Job] 2024-10-29 20:44:57.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    111. 

  111. [Save Log Job] 2024-10-29 20:44:57.484 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    112. 

  112. [Save Log Job] 2024-10-29 20:44:57.484 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    113. 

  113. [Save Log Job] 2024-10-29 20:44:57.485 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    114. 

  114. [Save Log Job] 2024-10-29 20:44:57.485 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    115. 

  115. [Save Log Job] 2024-10-29 20:44:57.486 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    116. 

  116. [Save Log Job] 2024-10-29 20:44:57.486 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    117. 

  117. [Save Log Job] 2024-10-29 20:44:57.487 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    118. 

  118. [Save Log Job] 2024-10-29 20:44:57.487 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    119. 

  119. [Save Log Job] 2024-10-29 20:44:57.488 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    120. 

  120. [Save Log Job] 2024-10-29 20:44:57.489 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    121. 

  121. [Save Log Job] 2024-10-29 20:45:27.534 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029204414-123' end step 1
    122. 

  122. [Save Log Job] 2024-10-29 20:45:27.535 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    123. 

  123. [Save Log Job] 2024-10-29 20:45:27.535 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241029204414-123
    124. 

  124. Start time：2024/10/29 20:44:57
    125. 

  125. End time：2024/10/29 20:45:27
    126. 

  126. Total time：0:0:30
    127. 

  127. [Save Log Job] 2024-10-29 20:45:27.537 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    128. 

  128. [Save Log Job] 2024-10-29 20:45:27.636 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    129. 

  129. [Save Log Job] 2024-10-29 20:45:29.552 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    130. 

  130. [Save Log Job] 2024-10-29 20:45:29.553 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    131. 

  131. [Save Log Job] 2024-10-29 20:45:29.554 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    132. 

  132. [Save Log Job] 2024-10-29 20:45:29.554 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    133. 

  133. [Save Log Job] 2024-10-29 20:45:29.555 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    134. 

  134. [Save Log Job] 2024-10-29 20:45:29.555 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    135. 

  135. [Save Log Job] 2024-10-29 20:45:37.707 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    136. 

  136. [Save Log Job] 2024-10-29 20:45:37.808 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    137. 

  137. [Save Log Job] 2024-10-29 20:45:43.455 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    138. 

  138. [Save Log Job] 2024-10-29 20:45:43.554 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    139. 

  139. [Save Log Job] 2024-10-29 20:45:45.572 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    140. 

  140. [Save Log Job] 2024-10-29 20:45:46.992 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    141. 

  141. [Save Log Job] 2024-10-29 20:45:50.011 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    142. 

  142. [Save Log Job] 2024-10-29 20:46:40.178 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    143. 

  143. [Save Log Job] 2024-10-29 20:46:41.089 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    144. 

  144. [Save Log Job] 2024-10-29 20:46:41.089 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    145. 

  145. [Save Log Job] 2024-10-29 20:46:41.090 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    146. 

  146. [Save Log Job] 2024-10-29 20:46:41.289 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    147. 

  147. [Save Log Job] 2024-10-29 20:47:44.435 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    148. 

  148. [Save Log Job] 2024-10-29 20:47:44.436 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    149. 

  149. [Save Log Job] 2024-10-29 20:47:44.544 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    150. 

  150. [Save Log Job] 2024-10-29 20:47:44.545 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    151. 

  151. [Save Log Job] 2024-10-29 20:47:44.545 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    152. 

  152. [Save Log Job] 2024-10-29 20:47:44.545 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    153. 

  153. [Save Log Job] 2024-10-29 20:47:44.545 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    154. 

  154. [Save Log Job] 2024-10-29 20:47:44.545 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    155. 

  155. [Save Log Job] 2024-10-29 20:47:44.643 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    156. 

  156. [Save Log Job] 2024-10-29 20:47:46.173 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    157. 

  157. [Save Log Job] 2024-10-29 20:48:36.551 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    158. 

  158. [Save Log Job] 2024-10-29 20:48:36.653 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    159. 

  159. [Save Log Job] 2024-10-29 20:48:36.653 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    160. 

  160. [Save Log Job] 2024-10-29 20:48:36.653 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241029204744-123
    161. 

  161. [Save Log Job] 2024-10-29 20:48:36.654 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241029204744-123'
    162. 

  162. [Save Log Job] 2024-10-29 20:48:36.654 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029204744-123' start run step 1：initial。
    163. 

  163. [Save Log Job] 2024-10-29 20:48:36.655 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    164. 

  164. [Save Log Job] 2024-10-29 20:48:36.655 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    165. 

  165. [Save Log Job] 2024-10-29 20:48:36.656 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    166. 

  166. [Save Log Job] 2024-10-29 20:48:36.657 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    167. 

  167. [Save Log Job] 2024-10-29 20:48:36.657 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    168. 

  168. [Save Log Job] 2024-10-29 20:48:36.658 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    169. 

  169. [Save Log Job] 2024-10-29 20:48:36.658 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    170. 

  170. [Save Log Job] 2024-10-29 20:48:36.659 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    171. 

  171. [Save Log Job] 2024-10-29 20:48:36.659 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    172. 

  172. [Save Log Job] 2024-10-29 20:48:36.660 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    173. 

  173. [Save Log Job] 2024-10-29 20:48:36.660 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    174. 

  174. [Save Log Job] 2024-10-29 20:48:36.661 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    175. 

  175. [Save Log Job] 2024-10-29 20:48:36.662 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    176. 

  176. [Save Log Job] 2024-10-29 20:48:36.662 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    177. 

  177. [Save Log Job] 2024-10-29 20:48:36.663 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    178. 

  178. [Save Log Job] 2024-10-29 20:48:36.663 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    179. 

  179. [Save Log Job] 2024-10-29 20:48:36.664 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    180. 

  180. [Save Log Job] 2024-10-29 20:48:36.664 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    181. 

  181. [Save Log Job] 2024-10-29 20:49:06.724 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029204744-123' end step 1
    182. 

  182. [Save Log Job] 2024-10-29 20:49:06.728 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    183. 

  183. [Save Log Job] 2024-10-29 20:49:06.728 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    184. 

  184. [Save Log Job] 2024-10-29 20:49:06.728 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241029204744-123
    185. 

  185. Start time：2024/10/29 20:48:36
    186. 

  186. End time：2024/10/29 20:49:06
    187. 

  187. Total time：0:0:30
    188. 

  188. [Save Log Job] 2024-10-29 20:49:06.824 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    189. 

  189. [Save Log Job] 2024-10-29 20:49:08.733 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    190. 

  190. [Save Log Job] 2024-10-29 20:49:08.734 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    191. 

  191. [Save Log Job] 2024-10-29 20:49:08.735 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    192. 

  192. [Save Log Job] 2024-10-29 20:49:08.735 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    193. 

  193. [Save Log Job] 2024-10-29 20:49:08.736 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    194. 

  194. [Save Log Job] 2024-10-29 20:49:08.736 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    195. 

  195. [Save Log Job] 2024-10-29 20:49:16.896 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    196. 

  196. [Save Log Job] 2024-10-29 20:49:16.997 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    197. 

  197. [Save Log Job] 2024-10-29 20:49:22.839 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    198. 

  198. [Save Log Job] 2024-10-29 20:49:22.839 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    199. 

  199. [Save Log Job] 2024-10-29 20:49:24.854 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    200. 

  200. [Save Log Job] 2024-10-29 20:49:26.263 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    201. 

  201. [Save Log Job] 2024-10-29 20:49:29.299 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    202. 

  202. [Save Log Job] 2024-10-29 20:50:19.372 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    203. 

  203. [Save Log Job] 2024-10-29 20:50:24.585 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    204. 

  204. [Save Log Job] 2024-10-29 20:50:24.591 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    205. 

  205. [Save Log Job] 2024-10-29 20:50:24.592 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    206. 

  206. [Save Log Job] 2024-10-29 20:50:24.592 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    207. 

  207. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-29 20:54:59.597 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    208. 

  208. [Save Log Job] 2024-10-29 20:54:59.600 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    209. 

  209. [Save Log Job] 2024-10-29 20:55:01.169 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    210. 

  210. [Save Log Job] 2024-10-29 20:55:01.214 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    211. 

  211. [Save Log Job] 2024-10-29 20:55:04.837 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。
    212. 

  212. [Save Log Job] 2024-10-29 20:55:10.897 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    213. 

  213. [Save Log Job] 2024-10-29 20:55:15.326 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    214. 

  214. [Save Log Job] 2024-10-29 20:55:15.326 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    215. 

  215. [Save Log Job] 2024-10-29 20:55:15.327 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    216. 

  216. [Save Log Job] 2024-10-29 20:55:19.146 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    217. 

  217. [Save Log Job] 2024-10-29 20:55:19.147 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    218. 

  218. [Save Log Job] 2024-10-29 20:55:19.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    219. 

  219. [Save Log Job] 2024-10-29 20:55:19.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    220. 

  220. [Save Log Job] 2024-10-29 20:55:19.248 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    221. 

  221. [Save Log Job] 2024-10-29 20:55:19.248 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    222. 

  222. [Save Log Job] 2024-10-29 20:55:19.249 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    223. 

  223. [Save Log Job] 2024-10-29 20:55:19.249 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    224. 

  224. [Save Log Job] 2024-10-29 20:55:19.250 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    225. 

  225. [Save Log Job] 2024-10-29 20:55:21.260 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    226. 

  226. [Save Log Job] 2024-10-29 20:55:21.665 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    227. 

  227. [Save Log Job] 2024-10-29 20:55:56.654 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    228. 

  228. [Save Log Job] 2024-10-29 20:55:56.757 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    229. 

  229. [Save Log Job] 2024-10-29 20:55:56.757 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    230. 

  230. [Save Log Job] 2024-10-29 20:55:56.759 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241029205519-123
    231. 

  231. [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    232. 

  232. [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029205519-123' start run step 1：initial。
    233. 

  233. [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    234. 

  234. [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241029205519-123'
    235. 

  235. [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    236. 

  236. [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    237. 

  237. [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    238. 

  238. [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    239. 

  239. [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    240. 

  240. [Save Log Job] 2024-10-29 20:55:56.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    241. 

  241. [Save Log Job] 2024-10-29 20:55:56.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    242. 

  242. [Save Log Job] 2024-10-29 20:55:56.763 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    243. 

  243. [Save Log Job] 2024-10-29 20:55:56.763 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    244. 

  244. [Save Log Job] 2024-10-29 20:55:56.763 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    245. 

  245. [Save Log Job] 2024-10-29 20:55:56.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    246. 

  246. [Save Log Job] 2024-10-29 20:55:56.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    247. 

  247. [Save Log Job] 2024-10-29 20:55:56.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    248. 

  248. [Save Log Job] 2024-10-29 20:55:56.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    249. 

  249. [Save Log Job] 2024-10-29 20:55:56.766 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    250. 

  250. [Save Log Job] 2024-10-29 20:55:56.855 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    251. 

  251. [Save Log Job] 2024-10-29 20:56:26.828 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029205519-123' end step 1
    252. 

  252. [Save Log Job] 2024-10-29 20:56:26.928 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    253. 

  253. [Save Log Job] 2024-10-29 20:56:26.929 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241029205519-123
    254. 

  254. Start time：2024/10/29 20:55:56
    255. 

  255. End time：2024/10/29 20:56:26
    256. 

  256. Total time：0:0:30
    257. 

  257. [Save Log Job] 2024-10-29 20:56:26.930 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    258. 

  258. [Save Log Job] 2024-10-29 20:56:26.930 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    259. 

  259. [Save Log Job] 2024-10-29 20:56:28.943 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    260. 

  260. [Save Log Job] 2024-10-29 20:56:28.944 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    261. 

  261. [Save Log Job] 2024-10-29 20:56:28.945 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    262. 

  262. [Save Log Job] 2024-10-29 20:56:28.945 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    263. 

  263. [Save Log Job] 2024-10-29 20:56:28.946 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    264. 

  264. [Save Log Job] 2024-10-29 20:56:28.946 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    265. 

  265. [Save Log Job] 2024-10-29 20:56:37.026 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    266. 

  266. [Save Log Job] 2024-10-29 20:56:37.127 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    267. 

  267. [Save Log Job] 2024-10-29 20:56:42.878 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    268. 

  268. [Save Log Job] 2024-10-29 20:56:42.878 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    269. 

  269. [Save Log Job] 2024-10-29 20:56:44.887 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    270. 

  270. [Save Log Job] 2024-10-29 20:56:46.297 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    271. 

  271. [Save Log Job] 2024-10-29 20:56:49.424 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    272. 

  272. [Save Log Job] 2024-10-29 20:57:39.504 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    273. 

  273. [Save Log Job] 2024-10-29 20:57:40.408 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    274. 

  274. [Save Log Job] 2024-10-29 20:57:40.409 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    275. 

  275. [Save Log Job] 2024-10-29 20:57:40.412 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    276. 

  276. [Save Log Job] 2024-10-29 20:57:40.509 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    277. 

  277. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-29 21:27:33.150 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    278. 

  278. [Save Log Job] 2024-10-29 21:27:33.152 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    279. 

  279. [Save Log Job] 2024-10-29 21:27:34.591 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    280. 

  280. [Save Log Job] 2024-10-29 21:27:34.631 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    281. 

  281. [Save Log Job] 2024-10-29 21:27:38.258 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。
    282. 

  282. [Save Log Job] 2024-10-29 21:27:41.204 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    283. 

  283. [Save Log Job] 2024-10-29 21:27:47.907 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    284. 

  284. [Save Log Job] 2024-10-29 21:27:47.908 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    285. 

  285. [Save Log Job] 2024-10-29 21:27:47.908 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    286. 

  286. [Save Log Job] 2024-10-29 21:27:53.552 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    287. 

  287. [Save Log Job] 2024-10-29 21:27:53.553 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    288. 

  288. [Save Log Job] 2024-10-29 21:27:53.554 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    289. 

  289. [Save Log Job] 2024-10-29 21:27:53.555 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    290. 

  290. [Save Log Job] 2024-10-29 21:27:53.555 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    291. 

  291. [Save Log Job] 2024-10-29 21:27:58.825 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    292. 

  292. [Save Log Job] 2024-10-29 21:28:01.175 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    293. 

  293. [Save Log Job] 2024-10-29 21:28:01.175 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    294. 

  294. [Save Log Job] 2024-10-29 21:28:01.179 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    295. 

  295. [Save Log Job] 2024-10-29 21:28:01.307 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    296. 

  296. [Save Log Job] 2024-10-29 21:28:02.114 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    297. 

  297. [Save Log Job] 2024-10-29 21:28:40.937 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    298. 

  298. [Save Log Job] 2024-10-29 21:28:40.937 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    299. 

  299. [Save Log Job] 2024-10-29 21:28:40.938 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    300. 

  300. [Save Log Job] 2024-10-29 21:28:40.939 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241029212749-123
    301. 

  301. [Save Log Job] 2024-10-29 21:28:40.940 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241029212749-123'
    302. 

  302. [Save Log Job] 2024-10-29 21:28:41.037 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029212749-123' start run step 1：initial。
    303. 

  303. [Save Log Job] 2024-10-29 21:28:41.038 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    304. 

  304. [Save Log Job] 2024-10-29 21:28:41.038 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    305. 

  305. [Save Log Job] 2024-10-29 21:28:41.040 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    306. 

  306. [Save Log Job] 2024-10-29 21:28:41.041 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    307. 

  307. [Save Log Job] 2024-10-29 21:28:41.042 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    308. 

  308. [Save Log Job] 2024-10-29 21:28:41.043 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    309. 

  309. [Save Log Job] 2024-10-29 21:28:41.044 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    310. 

  310. [Save Log Job] 2024-10-29 21:28:41.045 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    311. 

  311. [Save Log Job] 2024-10-29 21:28:41.045 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    312. 

  312. [Save Log Job] 2024-10-29 21:28:41.048 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    313. 

  313. [Save Log Job] 2024-10-29 21:28:41.049 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    314. 

  314. [Save Log Job] 2024-10-29 21:28:41.050 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    315. 

  315. [Save Log Job] 2024-10-29 21:28:41.051 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    316. 

  316. [Save Log Job] 2024-10-29 21:28:41.051 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    317. 

  317. [Save Log Job] 2024-10-29 21:28:41.052 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    318. 

  318. [Save Log Job] 2024-10-29 21:28:41.053 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    319. 

  319. [Save Log Job] 2024-10-29 21:28:41.053 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    320. 

  320. [Save Log Job] 2024-10-29 21:28:41.054 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    321. 

  321. [Save Log Job] 2024-10-29 21:29:11.108 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029212749-123' end step 1
    322. 

  322. [Save Log Job] 2024-10-29 21:29:11.109 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    323. 

  323. [Save Log Job] 2024-10-29 21:29:11.109 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241029212749-123
    324. 

  324. Start time：2024/10/29 21:28:40
    325. 

  325. End time：2024/10/29 21:29:11
    326. 

  326. Total time：0:0:30
    327. 

  327. [Save Log Job] 2024-10-29 21:29:11.110 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    328. 

  328. [Save Log Job] 2024-10-29 21:29:11.110 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    329. 

  329. [Save Log Job] 2024-10-29 21:29:13.131 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    330. 

  330. [Save Log Job] 2024-10-29 21:29:13.131 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    331. 

  331. [Save Log Job] 2024-10-29 21:29:13.131 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    332. 

  332. [Save Log Job] 2024-10-29 21:29:13.132 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    333. 

  333. [Save Log Job] 2024-10-29 21:29:13.133 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    334. 

  334. [Save Log Job] 2024-10-29 21:29:13.133 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    335. 

  335. [Save Log Job] 2024-10-29 21:29:21.187 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    336. 

  336. [Save Log Job] 2024-10-29 21:29:21.283 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    337. 

  337. [Save Log Job] 2024-10-29 21:29:27.126 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    338. 

  338. [Save Log Job] 2024-10-29 21:29:27.228 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    339. 

  339. [Save Log Job] 2024-10-29 21:29:29.238 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    340. 

  340. [Save Log Job] 2024-10-29 21:29:30.547 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    341. 

  341. [Save Log Job] 2024-10-29 21:29:33.674 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    342. 

  342. [Save Log Job] 2024-10-29 21:30:23.755 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    343. 

  343. [Save Log Job] 2024-10-29 21:30:24.765 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    344. 

  344. [Save Log Job] 2024-10-29 21:30:24.765 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    345. 

  345. [Save Log Job] 2024-10-29 21:30:24.766 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    346. 

  346. [Save Log Job] 2024-10-29 21:30:24.865 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    347. 

  347. [Save Log Job] 2024-10-29 21:32:05.507 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    348. 

  348. [Save Log Job] 2024-10-29 21:32:05.508 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    349. 

  349. [Save Log Job] 2024-10-29 21:32:05.509 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    350. 

  350. [Save Log Job] 2024-10-29 21:32:05.608 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    351. 

  351. [Save Log Job] 2024-10-29 21:32:05.608 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    352. 

  352. [Save Log Job] 2024-10-29 21:32:05.609 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    353. 

  353. [Save Log Job] 2024-10-29 21:32:05.609 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    354. 

  354. [Save Log Job] 2024-10-29 21:32:05.610 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    355. 

  355. [Save Log Job] 2024-10-29 21:32:05.611 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    356. 

  356. [Save Log Job] 2024-10-29 21:32:07.720 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    357. 

  357. [Save Log Job] 2024-10-29 21:32:08.224 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    358. 

  358. [Save Log Job] 2024-10-29 21:33:02.452 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    359. 

  359. [Save Log Job] 2024-10-29 21:33:02.452 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    360. 

  360. [Save Log Job] 2024-10-29 21:33:02.453 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    361. 

  361. [Save Log Job] 2024-10-29 21:33:02.453 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241029213205-123
    362. 

  362. [Save Log Job] 2024-10-29 21:33:02.454 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241029213205-123'
    363. 

  363. [Save Log Job] 2024-10-29 21:33:02.553 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029213205-123' start run step 1：initial。
    364. 

  364. [Save Log Job] 2024-10-29 21:33:02.553 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    365. 

  365. [Save Log Job] 2024-10-29 21:33:02.553 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    366. 

  366. [Save Log Job] 2024-10-29 21:33:02.554 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    367. 

  367. [Save Log Job] 2024-10-29 21:33:02.554 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    368. 

  368. [Save Log Job] 2024-10-29 21:33:02.555 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    369. 

  369. [Save Log Job] 2024-10-29 21:33:02.556 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    370. 

  370. [Save Log Job] 2024-10-29 21:33:02.556 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    371. 

  371. [Save Log Job] 2024-10-29 21:33:02.557 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    372. 

  372. [Save Log Job] 2024-10-29 21:33:02.557 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    373. 

  373. [Save Log Job] 2024-10-29 21:33:02.558 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    374. 

  374. [Save Log Job] 2024-10-29 21:33:02.558 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    375. 

  375. [Save Log Job] 2024-10-29 21:33:02.559 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    376. 

  376. [Save Log Job] 2024-10-29 21:33:02.559 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    377. 

  377. [Save Log Job] 2024-10-29 21:33:02.560 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    378. 

  378. [Save Log Job] 2024-10-29 21:33:02.560 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    379. 

  379. [Save Log Job] 2024-10-29 21:33:02.561 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    380. 

  380. [Save Log Job] 2024-10-29 21:33:02.562 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    381. 

  381. [Save Log Job] 2024-10-29 21:33:02.562 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    382. 

  382. [Save Log Job] 2024-10-29 21:33:32.625 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241029213205-123' end step 1
    383. 

  383. [Save Log Job] 2024-10-29 21:33:32.625 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    384. 

  384. [Save Log Job] 2024-10-29 21:33:32.626 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241029213205-123
    385. 

  385. Start time：2024/10/29 21:33:02
    386. 

  386. End time：2024/10/29 21:33:32
    387. 

  387. Total time：0:0:30
    388. 

  388. [Save Log Job] 2024-10-29 21:33:32.626 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    389. 

  389. [Save Log Job] 2024-10-29 21:33:32.627 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    390. 

  390. [Save Log Job] 2024-10-29 21:33:34.633 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    391. 

  391. [Save Log Job] 2024-10-29 21:33:34.633 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    392. 

  392. [Save Log Job] 2024-10-29 21:33:34.634 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    393. 

  393. [Save Log Job] 2024-10-29 21:33:34.634 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    394. 

  394. [Save Log Job] 2024-10-29 21:33:34.637 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    395. 

  395. [Save Log Job] 2024-10-29 21:33:34.637 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    396. 

  396. [Save Log Job] 2024-10-29 21:33:42.695 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    397. 

  397. [Save Log Job] 2024-10-29 21:33:42.796 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    398. 

  398. [Save Log Job] 2024-10-29 21:33:48.558 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    399. 

  399. [Save Log Job] 2024-10-29 21:33:48.658 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    400. 

  400. [Save Log Job] 2024-10-29 21:33:50.685 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    401. 

  401. [Save Log Job] 2024-10-29 21:33:52.090 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    402. 

  402. [Save Log Job] 2024-10-29 21:33:55.210 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    403. 

  403. [Save Log Job] 2024-10-29 21:34:45.292 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    404. 

  404. [Save Log Job] 2024-10-29 21:34:46.098 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    405. 

  405.