Ana Sayfa Keşfet Yardım
Üye Ol Giriş Yap
JetPlasma
/
Triton_160
İzle 2
Yıldızla 0
Çatalla 0
Files Sorunlar 0 Değişiklik İstekleri 0 Wiki
Dal: master
Dallar Biçim İmleri
Triton_160
/
Triton160UI
/
bin
/
Debug
/
Logs
/
appLog20241017.txt

appLog20241017.txt 23 KB
Kalıcı Bağlantı Geçmiş Ham

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191 
  1. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:30:47.914 LOG.INFO UiEvent.cs Line:51 Event() - Software is expired. Can not login。
    2. 

  2. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:31:30.967 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    3. 

  3. [Save Log Job] 2024-10-17 13:31:30.967 LOG.INFO UiEvent.cs Line:51 Event() - 用户帐号'admin'已被创建。
    4. 

  4. [Save Log Job] 2024-10-17 13:31:34.777 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_Language, 2)
    5. 

  5. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:32:37.652 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    6. 

  6. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:33:39.243 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    7. 

  7. [Save Log Job] 2024-10-17 13:33:39.244 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    8. 

  8. [Save Log Job] 2024-10-17 13:33:45.620 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    9. 

  9. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:35:13.924 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    10. 

  10. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 13:35:42.237 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    11. 

  11. [Save Log Job] 2024-10-17 13:35:42.239 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    12. 

  12. [Save Log Job] 2024-10-17 13:35:52.059 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    13. 

  13. [Save Log Job] 2024-10-17 13:36:13.396 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 6 days, at 2024/10/24 0:00:00 。
    14. 

  14. [Save Log Job] 2024-10-17 13:36:17.311 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    15. 

  15. [Save Log Job] 2024-10-17 13:36:24.646 LOG.INFO UiEvent.cs Line:51 Event() - 菜单文件\\123保存成功
    16. 

  16. [Save Log Job] 2024-10-17 13:36:24.646 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    17. 

  17. [Save Log Job] 2024-10-17 13:36:40.617 LOG.INFO UiEvent.cs Line:51 Event() - 菜单文件123保存成功
    18. 

  18. [Save Log Job] 2024-10-17 13:36:40.617 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    19. 

  19. [Save Log Job] 2024-10-17 13:36:41.321 LOG.INFO UiEvent.cs Line:51 Event() - 菜单文件123保存成功
    20. 

  20. [Save Log Job] 2024-10-17 13:36:41.321 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    21. 

  21. [Save Log Job] 2024-10-17 13:36:49.755 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetAutoMode()
    22. 

  22. [Save Log Job] 2024-10-17 13:36:49.755 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    23. 

  23. [Save Log Job] 2024-10-17 13:36:49.756 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to 自动模式
    24. 

  24. [Save Log Job] 2024-10-17 13:36:51.161 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 RunRecipe(123, )
    25. 

  25. [Save Log Job] 2024-10-17 13:36:51.161 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    26. 

  26. [Save Log Job] 2024-10-17 13:36:51.261 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查门的状态。
    27. 

  27. [Save Log Job] 2024-10-17 13:36:51.261 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查腔体门是否关闭。
    28. 

  28. [Save Log Job] 2024-10-17 13:36:51.261 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查背板门是否关闭。
    29. 

  29. [Save Log Job] 2024-10-17 13:36:51.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查泵的状态。
    30. 

  30. [Save Log Job] 2024-10-17 13:36:51.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：关闭所有阀门。
    31. 

  31. [Save Log Job] 2024-10-17 13:36:51.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：打开抽气阀门。
    32. 

  32. [Save Log Job] 2024-10-17 13:36:51.361 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    33. 

  33. [Save Log Job] 2024-10-17 13:36:53.271 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    34. 

  34. [Save Log Job] 2024-10-17 13:36:54.077 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查腔体压力。
    35. 

  35. [Save Log Job] 2024-10-17 13:37:32.978 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：抽气到100毫托。
    36. 

  36. [Save Log Job] 2024-10-17 13:37:32.979 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess 操作完成，用时0.7分钟。
    37. 

  37. [Save Log Job] 2024-10-17 13:37:32.979 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    38. 

  38. [Save Log Job] 2024-10-17 13:37:32.980 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241017133651-123'
    39. 

  39. [Save Log Job] 2024-10-17 13:37:32.980 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241017133651-123
    40. 

  40. [Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241017133651-123' start run step 1：initial。
    41. 

  41. [Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    42. 

  42. [Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    43. 

  43. [Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    44. 

  44. [Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    45. 

  45. [Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    46. 

  46. [Save Log Job] 2024-10-17 13:37:33.079 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    47. 

  47. [Save Log Job] 2024-10-17 13:37:33.080 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    48. 

  48. [Save Log Job] 2024-10-17 13:37:33.080 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    49. 

  49. [Save Log Job] 2024-10-17 13:37:33.080 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    50. 

  50. [Save Log Job] 2024-10-17 13:37:33.081 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    51. 

  51. [Save Log Job] 2024-10-17 13:37:33.081 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    52. 

  52. [Save Log Job] 2024-10-17 13:37:33.082 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 100sccm。
    53. 

  53. [Save Log Job] 2024-10-17 13:37:33.082 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 100sccm。
    54. 

  54. [Save Log Job] 2024-10-17 13:37:33.084 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 0sccm。
    55. 

  55. [Save Log Job] 2024-10-17 13:37:33.085 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    56. 

  56. [Save Log Job] 2024-10-17 13:37:33.085 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    57. 

  57. [Save Log Job] 2024-10-17 13:37:33.085 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 0sccm。
    58. 

  58. [Save Log Job] 2024-10-17 13:37:33.085 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 0sccm。
    59. 

  59. [Save Log Job] 2024-10-17 13:38:03.135 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241017133651-123' end step 1
    60. 

  60. [Save Log Job] 2024-10-17 13:38:03.135 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    61. 

  61. [Save Log Job] 2024-10-17 13:38:03.137 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，菜单文件：20241017133651-123
    62. 

  62. 开始时间：2024/10/17 13:37:32
    63. 

  63. 结束时间：2024/10/17 13:38:03
    64. 

  64. 总时间：0:0:30
    65. 

  65. [Save Log Job] 2024-10-17 13:38:03.137 LOG.INFO UiEvent.cs Line:51 Event() - System 工艺运行结束
    66. 

  66. [Save Log Job] 2024-10-17 13:38:03.235 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 等待10秒钟
    67. 

  67. [Save Log Job] 2024-10-17 13:38:05.144 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    68. 

  68. [Save Log Job] 2024-10-17 13:38:05.144 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    69. 

  69. [Save Log Job] 2024-10-17 13:38:05.145 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    70. 

  70. [Save Log Job] 2024-10-17 13:38:13.282 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 关闭射频
    71. 

  71. [Save Log Job] 2024-10-17 13:38:13.383 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 停止流气
    72. 

  72. [Save Log Job] 2024-10-17 13:38:23.033 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 关闭所有阀门
    73. 

  73. [Save Log Job] 2024-10-17 13:38:23.035 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 开始吹扫, Loop 1
    74. 

  74. [Save Log Job] 2024-10-17 13:38:23.035 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 压力抽到100毫托
    75. 

  75. [Save Log Job] 2024-10-17 13:38:26.850 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 抽气等待10秒
    76. 

  76. [Save Log Job] 2024-10-17 13:38:28.763 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    77. 

  77. [Save Log Job] 2024-10-17 13:38:36.901 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 充气压力到700000毫托
    78. 

  78. [Save Log Job] 2024-10-17 13:40:37.023 LOG.INFO UiEvent.cs Line:51 Event() - System 工艺程序收尾处理错误：Can not purge to purge pressure 700000 in purge time 120。
    79. 

  79. [Save Log Job] 2024-10-17 13:40:37.024 LOG.INFO UiEvent.cs Line:51 Event() - System 工艺收尾失败
    80. 

  80. [Save Log Job] 2024-10-17 13:40:37.024 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    81. 

  81. [Save Log Job] 2024-10-17 13:40:37.124 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    82. 

  82. [Save Log Job] 2024-10-17 13:40:39.034 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber purge valveClose失败，原因：Valve keep open。
    83. 

  83. [Save Log Job] 2024-10-17 13:40:39.035 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    84. 

  84. [Save Log Job] 2024-10-17 14:15:08.517 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    85. 

  85. [Save Log Job] 2024-10-17 14:30:24.464 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_Language, 1)
    86. 

  86. [Save Log Job] 2024-10-17 14:30:56.795 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_Language, 2)
    87. 

  87. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-17 17:05:47.722 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    88. 

  88. [Save Log Job] 2024-10-17 17:05:47.723 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    89. 

  89. [Save Log Job] 2024-10-17 17:05:49.294 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    90. 

  90. [Save Log Job] 2024-10-17 17:05:52.858 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 6 days, at 2024/10/24 0:00:00 。
    91. 

  91. [Save Log Job] 2024-10-17 17:06:38.402 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    92. 

  92. [Save Log Job] 2024-10-17 17:07:08.096 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_Language, 1)
    93. 

  93. [Save Log Job] 2024-10-17 17:10:03.652 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  123  save completed
    94. 

  94. [Save Log Job] 2024-10-17 17:10:03.652 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    95. 

  95. [Save Log Job] 2024-10-17 17:11:29.822 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    96. 

  96. [Save Log Job] 2024-10-17 17:11:29.824 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    97. 

  97. [Save Log Job] 2024-10-17 17:11:29.824 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    98. 

  98. [Save Log Job] 2024-10-17 17:12:11.667 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    99. 

  99. [Save Log Job] 2024-10-17 17:12:11.768 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    100. 

  100. [Save Log Job] 2024-10-17 17:12:11.770 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    101. 

  101. [Save Log Job] 2024-10-17 17:12:11.771 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    102. 

  102. [Save Log Job] 2024-10-17 17:12:11.771 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    103. 

  103. [Save Log Job] 2024-10-17 17:12:11.772 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    104. 

  104. [Save Log Job] 2024-10-17 17:12:11.773 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    105. 

  105. [Save Log Job] 2024-10-17 17:12:11.870 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    106. 

  106. [Save Log Job] 2024-10-17 17:12:11.870 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    107. 

  107. [Save Log Job] 2024-10-17 17:12:13.877 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    108. 

  108. [Save Log Job] 2024-10-17 17:12:14.780 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    109. 

  109. [Save Log Job] 2024-10-17 17:13:20.395 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    110. 

  110. [Save Log Job] 2024-10-17 17:13:20.493 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 1.1 minitues。
    111. 

  111. [Save Log Job] 2024-10-17 17:13:20.494 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    112. 

  112. [Save Log Job] 2024-10-17 17:13:20.494 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241017171211-123
    113. 

  113. [Save Log Job] 2024-10-17 17:13:20.494 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241017171211-123'
    114. 

  114. [Save Log Job] 2024-10-17 17:13:20.594 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241017171211-123' start run step 1：initial。
    115. 

  115. [Save Log Job] 2024-10-17 17:13:20.594 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    116. 

  116. [Save Log Job] 2024-10-17 17:13:20.594 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    117. 

  117. [Save Log Job] 2024-10-17 17:13:20.596 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    118. 

  118. [Save Log Job] 2024-10-17 17:13:20.596 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    119. 

  119. [Save Log Job] 2024-10-17 17:13:20.596 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    120. 

  120. [Save Log Job] 2024-10-17 17:13:20.596 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    121. 

  121. [Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    122. 

  122. [Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    123. 

  123. [Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    124. 

  124. [Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    125. 

  125. [Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    126. 

  126. [Save Log Job] 2024-10-17 17:13:20.597 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 100sccm。
    127. 

  127. [Save Log Job] 2024-10-17 17:13:20.598 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    128. 

  128. [Save Log Job] 2024-10-17 17:13:20.598 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 0sccm。
    129. 

  129. [Save Log Job] 2024-10-17 17:13:20.598 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    130. 

  130. [Save Log Job] 2024-10-17 17:13:20.599 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 0sccm。
    131. 

  131. [Save Log Job] 2024-10-17 17:13:20.599 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 0sccm。
    132. 

  132. [Save Log Job] 2024-10-17 17:13:20.599 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    133. 

  133. [Save Log Job] 2024-10-17 17:13:50.676 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241017171211-123' end step 1
    134. 

  134. [Save Log Job] 2024-10-17 17:13:50.676 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    135. 

  135. [Save Log Job] 2024-10-17 17:13:50.676 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241017171211-123
    136. 

  136. Start time：2024/10/17 17:13:20
    137. 

  137. End time：2024/10/17 17:13:50
    138. 

  138. Total time：0:0:30
    139. 

  139. [Save Log Job] 2024-10-17 17:13:50.676 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    140. 

  140. [Save Log Job] 2024-10-17 17:13:50.678 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    141. 

  141. [Save Log Job] 2024-10-17 17:13:52.690 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    142. 

  142. [Save Log Job] 2024-10-17 17:13:52.690 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    143. 

  143. [Save Log Job] 2024-10-17 17:13:52.690 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    144. 

  144. [Save Log Job] 2024-10-17 17:14:00.738 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    145. 

  145. [Save Log Job] 2024-10-17 17:14:00.838 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    146. 

  146. [Save Log Job] 2024-10-17 17:14:10.481 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Start cycle purge, Loop 1
    147. 

  147. [Save Log Job] 2024-10-17 17:14:10.481 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    148. 

  148. [Save Log Job] 2024-10-17 17:14:10.481 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, pumping pressure to 100 mTor
    149. 

  149. [Save Log Job] 2024-10-17 17:14:25.857 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, pump delay 10 seconds
    150. 

  150. [Save Log Job] 2024-10-17 17:14:27.765 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    151. 

  151. [Save Log Job] 2024-10-17 17:14:35.905 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent pressure to 700000 mtor
    152. 

  152. [Save Log Job] 2024-10-17 17:15:56.026 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
    153. 

  153. [Save Log Job] 2024-10-17 17:15:56.026 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in PostProcess，can not do SetManualMode。
    154. 

  154. [Save Log Job] 2024-10-17 17:16:26.683 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    155. 

  155. [Save Log Job] 2024-10-17 17:16:26.683 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    156. 

  156. [Save Log Job] 2024-10-17 17:16:26.784 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    157. 

  157. [Save Log Job] 2024-10-17 17:16:32.499 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    158. 

  158. [Save Log Job] 2024-10-17 17:16:32.499 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
    159. 

  159. [Save Log Job] 2024-10-17 17:16:32.500 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
    160. 

  160. [Save Log Job] 2024-10-17 17:21:52.269 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    161. 

  161. [Save Log Job] 2024-10-17 17:21:52.269 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  123  save completed
    162. 

  162. [Save Log Job] 2024-10-17 17:26:09.461 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    163. 

  163. [Save Log Job] 2024-10-17 17:26:09.461 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    164. 

  164. [Save Log Job] 2024-10-17 17:26:09.461 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    165. 

  165. [Save Log Job] 2024-10-17 17:29:43.540 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
    166. 

  166. [Save Log Job] 2024-10-17 17:29:43.542 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
    167. 

  167. [Save Log Job] 2024-10-17 17:29:43.542 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    168. 

  168. [Save Log Job] 2024-10-17 17:30:05.701 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    169. 

  169. [Save Log Job] 2024-10-17 17:30:05.702 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
    170. 

  170. [Save Log Job] 2024-10-17 17:30:05.703 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 100)
    171. 

  171. [Save Log Job] 2024-10-17 17:30:05.704 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 120)
    172. 

  172. [Save Log Job] 2024-10-17 17:30:05.704 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
    173. 

  173. [Save Log Job] 2024-10-17 17:30:05.802 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    174. 

  174. [Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    175. 

  175. [Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Check door status。
    176. 

  176. [Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：check chamber door。
    177. 

  177. [Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：check backpanel door。
    178. 

  178. [Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Check pump status。
    179. 

  179. [Save Log Job] 2024-10-17 17:30:05.803 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Close all the valves。
    180. 

  180. [Save Log Job] 2024-10-17 17:30:05.902 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Open pumping valve。
    181. 

  181. [Save Log Job] 2024-10-17 17:30:06.404 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Wait chamber pressure until below 100。
    182. 

  182. [Save Log Job] 2024-10-17 17:30:10.829 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    183. 

  183. [Save Log Job] 2024-10-17 17:30:10.830 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 50)
    184. 

  184. [Save Log Job] 2024-10-17 17:30:10.830 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 50 mTorr。
    185. 

  185. [Save Log Job] 2024-10-17 17:30:10.830 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    186. 

  186. [Save Log Job] 2024-10-17 17:31:54.403 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Pump below 100mTorr。
    187. 

  187. [Save Log Job] 2024-10-17 17:31:54.503 LOG.INFO UiEvent.cs Line:51 Event() - System 抽气：Pump Finished in 1.8 minitues。
    188. 

  188. [Save Log Job] 2024-10-17 17:31:54.505 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Pump'.
    189. 

  189. [Save Log Job] 2024-10-17 17:31:54.505 LOG.INFO UiEvent.cs Line:51 Event() - Pump
    190. 

  190. [Save Log Job] 2024-10-17 17:31:54.605 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    191. 

  191. --------------------------------[Footer Log]----------------------------------------- 
    192.