JetPlasma
/
Triton_160


			
				
					
						
						
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							<?xml version="1.0" encoding="utf-16"?>
<SystemConfig xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <uiLayoutXmlFile value="UILayout.Hz.xml"/>
  <!--<uiLayoutXmlFile value="UILayout.xml"/>-->
  
  <!--<topViewLogoFile value="LogoJETP.png"/>-->

  <DataElements>

    <!--在Monitor页面 如下内容：
    Vapor MFC1/MFC2/MFC3, 
    Vapor1 Temp/ 
    Vapor 2 Temp/
    Vapor 3 Temp, 
    Gas Line Temp， 
    Pump Line Temp, 
    Chamber Wall Temp, 
    
    RF Power, 
    RF Reflect Power, 
    RF Pulsing Frequency    （若系统配置Configuration里选择了Pulsing RF时该选项显示，若系统配置Configuration里选择了CW RF，则不显示该项）, 
    RF Pulsing DC（若HW Configuration里选择了Pulsing RF时该选项显示，若HW Configuration里选择了CW RF，则不显示该项）
    
    Chamber Pressure, 
    Valve Position（若在HW Configuration选项中选择了有蝶阀，则该项显示）
    
    -->
    <DataElement displayName="Pressure" cn="腔体压力值" en="" dbName="System.IoPressureMeter.PressureMeterChamber.Feedback" isPressureAxis="true"/>

    <DataElement displayName="TV Position"  cn="蝶阀位置反馈值" en="" dbName="System.IoThrottleValve.ThrottleValve.TVPosition" isPressureAxis="false"/>
    <DataElement displayName="TV Position SP"  cn="蝶阀位置设定值" en="" dbName="System.IoThrottleValve.ThrottleValve.TVPositionSetPoint" isPressureAxis="false"/>
    <DataElement displayName="TV Pressure"  cn="蝶阀压力反馈值" en="" dbName="System.IoThrottleValve.ThrottleValve.TVPressure" isPressureAxis="false"/>
    <DataElement displayName="TV Pressure SP"  cn="蝶阀压力设定值" en="" dbName="System.IoThrottleValve.ThrottleValve.TVPressureSetPoint" isPressureAxis="false"/>

    <DataElement displayName="Pump N2 Flow"  cn="蝶阀压力设定值" en="" dbName="System.IoPump.MainPump.N2PressureValue" isPressureAxis="false"/>
    <DataElement displayName="Pump Water Flow"  cn="蝶阀压力设定值" en="" dbName="System.IoPump.MainPump.WaterFlowValue" isPressureAxis="false"/>

    <DataElement displayName="RF Power SP"  cn="射频功率设定值" en="" dbName="System.IoRf.Rf.RFSetPoint" isPressureAxis=""/>
    <DataElement displayName="RF Forward Power" cn="射频输出功率" en=""  dbName="System.IoRf.Rf.RFForwardPower" isPressureAxis=""/>
    <DataElement displayName="RF Reflect Power" cn="射频反射功率" en=""  dbName="System.IoRf.Rf.RFReflectPower" isPressureAxis=""/>

    <DataElement displayName="RF Match C1"  cn="射频适配器C1反馈值" en="" dbName="System.IoRf.Rf.RFMatchPositionC1Feedback" isPressureAxis=""/>
    <DataElement displayName="RF Match C2"  cn="射频适配器C2反馈值" en="" dbName="System.IoRf.Rf.RFMatchPositionC2Feedback" isPressureAxis=""/>
    <DataElement displayName="RF Match C1 SP" cn="射频适配器C1设定值" en=""  dbName="System.IoRf.Rf.RFMatchPositionC1SetPoint" isPressureAxis=""/>
    <DataElement displayName="RF Match C2 SP" cn="射频适配器C2设定值" en=""  dbName="System.IoRf.Rf.RFMatchPositionC2SetPoint" isPressureAxis=""/>

    <DataElement displayName="RF Pulsing Frequency SP" cn="射频频率设定值" en=""  dbName="System.IoRf.Rf.RFFrequency" isPressureAxis=""/>
    <DataElement displayName="RF Pulsing DC SP"  cn="射频电流设定值" en="" dbName="System.IoRf.Rf.RFDuty" isPressureAxis=""/>

    <DataElement displayName="Gas1 MFC"  cn="Gas1 MFC流量" en="" dbName="System.IoMfc.MfcGas1.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas1 MFC SP"  cn="Gas1 MFC设定值" en="" dbName="System.IoMfc.MfcGas1.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas2 MFC" cn="Gas2 MFC流量" en=""  dbName="System.IoMfc.MfcGas2.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas2 MFC SP" cn="Gas2 MFC设定值" en=""  dbName="System.IoMfc.MfcGas2.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas3 MFC" cn="Gas3 MFC流量" en=""  dbName="System.IoMfc.MfcGas3.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas3 MFC SP" cn="Gas3 MFC设定值" en=""  dbName="System.IoMfc.MfcGas3.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas4 MFC"  cn="Gas4 MFC流量" en="" dbName="System.IoMfc.MfcGas4.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas4 MFC SP"  cn="Gas4 MFC设定值" en="" dbName="System.IoMfc.MfcGas4.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas5 MFC" cn="Gas5 MFC流量" en=""  dbName="System.IoMfc.MfcGas5.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas5 MFC SP" cn="Gas5 MFC设定值" en=""  dbName="System.IoMfc.MfcGas5.SetPoint" isPressureAxis=""/>

  </DataElements>
</SystemConfig>