Triton_160/Triton160RT/Config/Interlock.triton160.xml

<?xml version="1.0" encoding="utf-16"?>
<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <Action do="DO_Pumping_valve_" value="true" tip="Open pump valve" tip.zh-CN="打开抽气阀门" tip.en-US="">
    <Limit di="DI_Lever1_pump_running"  value="true" tip="pump not running" tip.zh-CN="泵没有打开" tip.en-US="" />
    
    <Limit di="DI_Lever1_pump_overload"  value="false" tip="pump overload alarmed" tip.zh-CN="泵过载报警" tip.en-US="" />

    <Limit di="DI_Chamber_vent_valve_state_fb"  value="false" tip="vent valve is opened" tip.zh-CN="充气阀门打开" tip.en-US="" />

    <Limit di="LogicPumpN2PressureAlarm"  value="false" tip="n2 pressure alarm" tip.zh-CN="干泵氮气不足" tip.en-US="" />

    <Limit di="LogicPumpWaterFlowAlarm"  value="false" tip="water flow alarmed" tip.zh-CN="干泵冷却水流量报警" tip.en-US="" />

    <Limit di="DI_Lever1_pump_stop_bt"  value="false" tip="stop button pushed" tip.zh-CN="干泵停止按钮被按下" tip.en-US="" />

    <Limit di="DI_Lever1_pump_temp_alarm"  value="false" tip="temperature high alarm" tip.zh-CN="干泵温度过高报警" tip.en-US="" />




  </Action>

  <Action do="DO_RF_on_off" value="true" tip="rf power on" tip.zh-CN="打开射频开关" tip.en-US="">
    
    <Limit di="DI_RF_hardware_interlock"  value="true" tip="RF hardware interlock not satisfied" tip.zh-CN="射频硬件互锁条件不满足" tip.en-US="" />

    <Limit di="DI_Chamber_door_sw"  value="true" tip="chamber door is opened" tip.zh-CN="腔体门打开" tip.en-US="" />

    <Limit di="DI_Lever1_pump_running"  value="true" tip="pump not running" tip.zh-CN="泵没有打开" tip.en-US="" />

    <Limit di="DI_Chamber_vent_valve_state_fb"  value="false" tip="vent valve is opened" tip.zh-CN="充气阀门打开" tip.en-US="" />

    <Limit di="DI_Pumping_valve_state_fb"  value="true" tip="pumping valve not open" tip.zh-CN="抽气阀门没打开" tip.en-US="" />

    <Limit di="DI_Lever1_pump_overload"  value="false" tip="pump overload alarmed" tip.zh-CN="泵过载报警" tip.en-US="" />
    
    <Limit di="DI_RF_over_temp_"  value="false" tip="rf temperature high alarmed" tip.zh-CN="射频温度过高报警" tip.en-US="" />
    
 
  </Action>

  <Action do="DO_MFC1_valve__" value="true" tip="open mfc1 valve" tip.zh-CN="打开气路阀门" tip.en-US="">

    <Limit di="DI_Lever1_pump_running"  value="true" tip="pump not running" tip.zh-CN="泵没有打开" tip.en-US="" />
    <Limit di="DI_Lever1_pump_overload"  value="false" tip="pump overload alarmed" tip.zh-CN="泵过载报警" tip.en-US="" />

    <Limit di="DI_Chamber_vent_valve_state_fb"  value="false" tip="vent valve is opened" tip.zh-CN="充气阀门打开" tip.en-US="" />
  </Action>

  <Action do="DO_MFC2_valve" value="true" tip="open mfc2 valve" tip.zh-CN="打开气路阀门" tip.en-US="">

    <Limit di="DI_Lever1_pump_running"  value="true" tip="pump not running" tip.zh-CN="泵没有打开" tip.en-US="" />

    <Limit di="DI_Lever1_pump_overload"  value="false" tip="pump overload alarmed" tip.zh-CN="泵过载报警" tip.en-US="" />

    <Limit di="DI_Chamber_vent_valve_state_fb"  value="false" tip="vent valve is opened" tip.zh-CN="充气阀门打开" tip.en-US="" />
 
  </Action>

  <Action do="DO_Chamber_purge_valve" value="false" tip="" tip.zh-CN="" tip.en-US="">
 
  </Action>

  <Action do="DO_Process_gas_final_valve" value="false" tip="" tip.zh-CN="" tip.en-US="">
 
  </Action>

  <Action do="DO_Chamber_vent_valve" value="true" tip="open vent valve" tip.zh-CN="打开充气阀门" tip.en-US="">

    <Limit di="DI_Pumping_valve_state_fb"  value="false" tip="Pumping valve is opened" tip.zh-CN="抽气阀门打开" tip.en-US="" />
    
  </Action>
</Interlock>