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- <?xml version="1.0" encoding="UTF-8"?>
- <Equipment xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema" persistence="false" schemaVersion="1.0.3" productInfo="SecsToHost.Net Compatible">
- <License licenseId="" licensePath="" />
- <Nameable id="JetPlasma" description="JetPlasma" locator="" alias="JetPlasma" make="JetPlasma" model="JetPlasma" softwareRev="1.0" />
- <GemConnection protocol="Hsms" defaultCommunicationState="Enabled" defaultControlState="Online" defaultOnlineSubState="Local" deviceId="0" multipleOpen="false" maxOpenTransactions="3">
- <HSMS connectionMode="Passive" linktestInterval="0" localIPAddress="127.0.0.1" localPortNumber="5021" remoteIPAddress="127.0.0.1" remotePortNumber="5020" T3Timeout="45" T5Timeout="10" T6Timeout="5" T7Timeout="10" T8Timeout="5" />
- <RS232 commPort="1" baudRate="9600" retry="3" t1="1" t2="10" t3="30" t4="10" />
- </GemConnection>
- <SecsItemFormats ackc5="Binary" ackc7="Binary" ackc7a="U1" ackc10="Binary" alid="U4" alcd="Binary" altx="Ascii" aled="Binary" attrid="Ascii" ccode="U2" ceid="U4" cpname="Ascii" dataid="U4" dsper="Ascii" errw7="Ascii" loc="Binary" mdln="Ascii" mid="Ascii" objid="Ascii" objspec="Ascii" objtype="Ascii" ppbody="Binary" ppid="Ascii" rcmd="Ascii" repgsz="U4" rptid="U4" seqnum="U2" softrev="Ascii" text="Ascii" tid="Binary" totsmp="U4" trid="U4" svid="U4" ecid="U4" ddid="U4" errcode="U1" opid="U1" length="U4" cmda="U1" ecmin="U4" ecmax="U4" ecdef="Ascii" idtyp="Binary" fnloc="U2" ffrot="U2" orloc="Binary" rpsel="U1" dutms="Ascii" xdies="U4" ydies="U4" rowct="U4" colct="U4" nulbc_binlt_bcequ="U1" prdct="U1" praxi="Binary" smpln="U4" mlcl="U8" refp="I2" />
- <Logger logLevel="Info" rolloverSize="10000000" maxBytes="100000" messageLengthLimit="1048576" />
- <Clock timeFormat="yymmddhhmmss" />
- <RemoteCommand allowLocalMode="false">
- <S2F21>
- <S2F21Command name="100" logicalName="START" description=" " />
- <S2F21Command name="101" logicalName="PAUSE" description=" " />
- <S2F21Command name="102" logicalName="STOP" description=" " />
- <S2F21Command name="103" logicalName="PP-SELECT" description=" " />
- <S2F21Command name="104" logicalName="RESUME" description=" " />
- <S2F21Command name="105" logicalName="ABORT" description=" " />
- </S2F21>
- <S2F41>
- <S2F41Command name="Start" logicalName="Start" description=" ">
- </S2F41Command>
- <S2F41Command name="Pause" logicalName="Pause" description=" " />
- <S2F41Command name="Resume" logicalName="Resume" description=" " />
- <S2F41Command name="Abort" logicalName="Abort" description=" " />
- <S2F41Command name="LotComplete" logicalName="LotComplete" description=" " />
- <S2F41Command name="GoRemote" logicalName="GoRemote" description=" " />
- <S2F41Command name="GoLocal" logicalName="GoLocal" description=" " />
- <S2F41Command name="Unclamp" logicalName="Unclamp" description=" " />
- <S2F41Command name="ReadID" logicalName="ReadID" description=" " />
- <S2F41Command name="Unload" logicalName="Unload" description=" " />
- <S2F41Command name="ScanSlot" logicalName="ScanSlot" description=" " />
- </S2F41>
- <S2F49>
- <S2F49Command name="GOREMOTE" logicalName="GOREMOTE" description="">
- </S2F49Command>
- <S2F49Command name="PP-SELECT" logicalName="PP-SELECT" description=" ">
- </S2F49Command>
- <S2F49Command name="START" logicalName="START" description=" ">
- </S2F49Command>
- <S2F49Command name="STOP" logicalName="STOP" description=" ">
- </S2F49Command>
- <S2F49Command name="ABORT" logicalName="ABORT" description=" ">
- </S2F49Command>
- <S2F49Command name="PAUSE" logicalName="PAUSE" description=" ">
- </S2F49Command>
- <S2F49Command name="RESUME" logicalName="RESUME" description=" ">
- </S2F49Command>
- <S2F49Command name="Start_Transfer" logicalName="Start_Transfer" description=" " />
- </S2F49>
- </RemoteCommand>
- <StatusVariables>
- <SVID id="1" valueType="List" logicalName="AlarmsEnabled" value="" eventTrigger="" units="" description=" " isArray="false" />
- <SVID id="2" valueType="List" logicalName="AlarmsSet" value="" eventTrigger="" description=" " isArray="false" />
- <SVID id="3" valueType="Ascii" logicalName="Clock" value="" eventTrigger="" description=" " isArray="false" />
- <SVID id="4" valueType="U4" logicalName="ControlState" value="1" eventTrigger="" description=" " isArray="false" />
- <SVID id="5" valueType="List" logicalName="EventsEnabled" value="" eventTrigger="" description=" " isArray="false" />
- <SVID id="6" valueType="Ascii" logicalName="PPExecName" value="PPExecName" eventTrigger="" description=" " isArray="false" />
- <SVID id="7" valueType="U1" logicalName="PreviousProcessState" value="0" eventTrigger="" description=" " isArray="false" />
- <SVID id="8" valueType="U1" logicalName="ProcessState" value="0" eventTrigger="" description=" " isArray="false" />
- <SVID id="9" valueType="U4" logicalName="SpoolCountActual" eventTrigger="" description=" " isArray="false" />
- <SVID id="10" valueType="U4" logicalName="SpoolCountTotal" eventTrigger="" description=" " isArray="false" />
- <SVID id="11" valueType="Ascii" logicalName="SpoolFullTime" eventTrigger="" description=" " isArray="false" />
- <SVID id="12" valueType="Ascii" logicalName="SpoolStartTime" eventTrigger="" description=" " isArray="false" />
- <SVID id="13" valueType="Ascii" logicalName="SpoolState" value="1" eventTrigger="" description=" " isArray="false" />
- <SVID id="14" valueType="Ascii" logicalName="SpoolSubstate" value="0" eventTrigger="" description=" " isArray="false">
- </SVID>
- <SVID id="1101" valueType="U4" logicalName="EquipmentMode" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1102" valueType="U4" logicalName="EquipmentStatus" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1103" valueType="List" logicalName="RecipeList" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1201" valueType="Ascii" logicalName="System.IoPressureMeter.PressureMeterChamber.Feedback" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1202" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPosition" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1203" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPositionSetPoint" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1204" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPressure" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1205" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPressureSetPoint" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1206" valueType="Ascii" logicalName="System.IoPump.MainPump.N2PressureValue" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1207" valueType="Ascii" logicalName="System.IoPump.MainPump.WaterFlowValue" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1208" valueType="Ascii" logicalName="System.IoRf.Rf.RFSetPoint" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1209" valueType="Ascii" logicalName="System.IoRf.Rf.RFForwardPower" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1210" valueType="Ascii" logicalName="System.IoRf.Rf.RFReflectPower" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1211" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC1Feedback" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1212" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC2Feedback" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1213" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC1SetPoint" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1214" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC2SetPoint" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1215" valueType="Ascii" logicalName="System.IoRf.Rf.RFFrequency" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1216" valueType="Ascii" logicalName="System.IoRf.Rf.RFDuty" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1217" valueType="Ascii" logicalName="System.IoMfc.MfcGas1.FeedBack" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1218" valueType="Ascii" logicalName="System.IoMfc.MfcGas1.SetPoint" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1219" valueType="Ascii" logicalName="System.IoMfc.MfcGas2.FeedBack" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1220" valueType="Ascii" logicalName="System.IoMfc.MfcGas2.SetPoint" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1221" valueType="Ascii" logicalName="System.IoMfc.MfcGas3.FeedBack" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1222" valueType="Ascii" logicalName="System.IoMfc.MfcGas3.SetPoint" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1223" valueType="Ascii" logicalName="System.IoMfc.MfcGas4.FeedBack" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1224" valueType="Ascii" logicalName="System.IoMfc.MfcGas4.SetPoint" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1225" valueType="Ascii" logicalName="System.IoMfc.MfcGas5.FeedBack" value="" units="" description=" " eventTrigger=" " />
- <SVID id="1226" valueType="Ascii" logicalName="System.IoMfc.MfcGas5.SetPoint" value="" units="" description=" " eventTrigger=" " />
- </StatusVariables>
- <EquipmentConstants suppressECMinMaxType="false">
- <ECID id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="2" units="" description="" eventTrigger=" " isArray="false" />
- <ECID id="2001" valueType="U4" logicalName="MaxSpoolTransmit" value="100" min="0" max="100" units="" description="" eventTrigger=" " isArray="false" />
- <ECID id="2003" valueType="Boolean" logicalName="OverWriteSpool" value="FALSE" min="0" max="0" units="" description="" eventTrigger=" " isArray="false" />
- <ECID id="2005" valueType="U4" logicalName="MaxSpoolCapacity" value="100" min="0" max="100" units="" description="" eventTrigger=" " isArray="false" />
- <ECID id="2006" valueType="Boolean" logicalName="SpoolEnabled" value="FALSE" min="0" max="0" units="" description="" eventTrigger=" " isArray="false" />
- <ECID id="2007" valueType="U1" logicalName="TimeFormat" value="0" min="0" max="1" units="" description="" eventTrigger=" " isArray="false" />
- </EquipmentConstants>
- <DataVariables>
- <DVID id="3001" valueType="U4" logicalName="EventLimit" value="0" eventTrigger="" description=" " isArray="false" />
- <DVID id="3002" valueType="U4" logicalName="LimitVariable" value="0" eventTrigger="" description=" " isArray="false" />
- <DVID id="3003" valueType="Ascii" logicalName="PPChangeName" value="" eventTrigger="" description=" " isArray="false" />
- <DVID id="3004" valueType="U2" logicalName="PPChangeStatus" value="1" eventTrigger="" description=" " isArray="false" />
- <DVID id="3005" valueType="Binary" logicalName="TransitionType" value="0" eventTrigger="" description=" " isArray="false" />
- <DVID id="3006" valueType="U4" logicalName="AlarmID" eventTrigger="" description=" " isArray="false" />
- <DVID id="3007" valueType="U4" logicalName="ECChangedID" value="" eventTrigger="" description=" " isArray="false" />
- <DVID id="3101" valueType="Ascii" logicalName="EventName" value="" eventTrigger="" description=" " isArray="false" />
- <DVID id="3102" valueType="Ascii" logicalName="LotId" value="" eventTrigger="" description=" " isArray="false" />
- <DVID id="3103" valueType="Ascii" logicalName="RecipeId" value="" eventTrigger="" description=" " isArray="false" />
- <DVID id="3104" valueType="Ascii" logicalName="JobId" value="" eventTrigger="" description=" " isArray="false" />
- </DataVariables>
- <DataCollections useAnnotatedEvent="false">
- <RPTIDs>
- <RPTID id="1" logicalName="ControlReport">
- <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="2" logicalName="ProcessingReport">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
- </RPTID>
- <RPTID id="4" logicalName="ProcessingStateChangedReport">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="8" varType="StatusVariable" logicalName="ProcessState" />
- <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
- </RPTID>
- <RPTID id="5" logicalName="ECChangedReport">
- <ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
- </RPTID>
- <RPTID id="6" logicalName="PPChangedReport">
- <ReportVariable id="3003" varType="DataVariable" logicalName="PPChangeName" />
- <ReportVariable id="3004" varType="DataVariable" logicalName="PPChangeStatus" />
- </RPTID>
- <RPTID id="7" logicalName="PPSelectedReport">
- <ReportVariable id="6" varType="StatusVariable" logicalName="PPExecName" />
- </RPTID>
- <RPTID id="8" logicalName="AlarmEventReport">
- <ReportVariable id="3006" varType="DataVariable" logicalName="AlarmID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="2" varType="StatusVariable" logicalName="AlarmsSet" />
- </RPTID>
- </RPTIDs>
- <CEIDs>
- <CEID id="1" logicalName="EquipmentOFFLINE" description=" " enabled="false">
- <RPTID id="1" logicalName="ControlReport" />
- </CEID>
- <CEID id="2" logicalName="ControlStateLOCAL" description=" " enabled="false">
- <RPTID id="1" logicalName="ControlReport" />
- </CEID>
- <CEID id="3" logicalName="ControlStateREMOTE" description=" " enabled="false">
- <RPTID id="1" logicalName="ControlReport" />
- </CEID>
- <CEID id="4" logicalName="ProcessingStarted" description=" " enabled="false">
- <RPTID id="2" logicalName="ProcessingReport" />
- </CEID>
- <CEID id="5" logicalName="ProcessingCompleted" description=" " enabled="false">
- <RPTID id="2" logicalName="ProcessingReport" />
- </CEID>
- <CEID id="6" logicalName="ProcessingStopped" description=" " enabled="false">
- <RPTID id="2" logicalName="ProcessingReport" />
- </CEID>
- <CEID id="7" logicalName="ProcessingStateChanged" description=" " enabled="false">
- <RPTID id="4" logicalName="ProcessingStateChangedReport" />
- </CEID>
- <CEID id="8" logicalName="EquipmentConstantChanged" description=" " enabled="false">
- <RPTID id="5" logicalName="ECChangedReport" />
- </CEID>
- <CEID id="9" logicalName="ProcessProgramChanged" description=" " enabled="false">
- <RPTID id="6" logicalName="PPChangedReport" />
- </CEID>
- <CEID id="10" logicalName="ProcessProgramSelected" description=" " enabled="false">
- <RPTID id="7" logicalName="PPSelectedReport" />
- </CEID>
- <CEID id="11" logicalName="SpoolingActivated" description=" " enabled="false" />
- <CEID id="12" logicalName="SpoolingDeactivated" description=" " enabled="false" />
- <CEID id="13" logicalName="SpoolingFailed" description=" " enabled="false" />
- <CEID id="101" logicalName="CarrierLoaded" description=" " enabled="false" />
- <CEID id="102" logicalName="LotStart" description=" " enabled="false" />
- <CEID id="103" logicalName="LotFinished" description=" " enabled="false" />
- <CEID id="104" logicalName="CarrierUnloaded" description=" " enabled="false" />
- <CEID id="105" logicalName="EquipmentStatusChanged" description=" " enabled="false" />
- <CEID id="106" logicalName="EquipmentModeChanged" description=" " enabled="false" />
- </CEIDs>
- </DataCollections>
- <Alarms>
- </Alarms>
- </Equipment>
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