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-
- namespace Aitex.Core.RT.SCCore
- {
- public class SCName
- {
- #region TransferConfig
- public const string TransferConfig_InitAllTimeout = "TransferConfig_InitAllTimeout";
- public const string TransferConfig_MotorPushBarInAcceleration = "TransferConfig_MotorPushBarInAcceleration";
- public const string TransferConfig_MotorPushBarInDeceleration = "TransferConfig_MotorPushBarInDeceleration";
- public const string TransferConfig_MotorPushBarInStartFrequency = "TransferConfig_MotorPushBarInStartFrequency";
- public const string TransferConfig_MotorPushBarInDefaultServoSpeed = "TransferConfig_MotorPushBarInDefaultServoSpeed";
- public const string TransferConfig_MotorPushBarInDefaultManualSpeed = "TransferConfig_MotorPushBarInDefaultManualSpeed";
- public const string TransferConfig_MotorPushBarInServoOnTimeout = "TransferConfig_MotorPushBarInServoOnTimeout";
- public const string TransferConfig_MotorPushBarInMoveTimeout = "TransferConfig_MotorPushBarInMoveTimeout";
- public const string TransferConfig_MotorPushBarInStopTimeout = "TransferConfig_MotorPushBarInStopTimeout";
- public const string TransferConfig_MotorPushBarInResetAlarmTimeout = "TransferConfig_MotorPushBarInResetAlarmTimeout";
- public const string TransferConfig_MotorPushBarInHomeTimeout = "TransferConfig_MotorPushBarInHomeTimeout";
- public const string TransferConfig_MotorLoadStationInAcceleration = "TransferConfig_MotorLoadStationInAcceleration";
- public const string TransferConfig_MotorLoadStationInDeceleration = "TransferConfig_MotorLoadStationInDeceleration";
- public const string TransferConfig_MotorLoadStationInStartFrequency = "TransferConfig_MotorLoadStationInStartFrequency";
- public const string TransferConfig_MotorLoadStationInDefaultServoSpeed = "TransferConfig_MotorLoadStationInDefaultServoSpeed";
- public const string TransferConfig_MotorLoadStationInDefaultManualSpeed = "TransferConfig_MotorLoadStationInDefaultManualSpeed";
- public const string TransferConfig_MotorLoadStationInServoOnTimeout = "TransferConfig_MotorLoadStationInServoOnTimeout";
- public const string TransferConfig_MotorLoadStationInMoveTimeout = "TransferConfig_MotorLoadStationInMoveTimeout";
- public const string TransferConfig_MotorLoadStationInStopTimeout = "TransferConfig_MotorLoadStationInStopTimeout";
- public const string TransferConfig_MotorLoadStationInResetAlarmTimeout = "TransferConfig_MotorLoadStationInResetAlarmTimeout";
- public const string TransferConfig_MotorLoadStationInHomeTimeout = "TransferConfig_MotorLoadStationInHomeTimeout";
- public const string TransferConfig_MotorPushBarChamberAcceleration = "TransferConfig_MotorPushBarChamberAcceleration";
- public const string TransferConfig_MotorPushBarChamberDeceleration = "TransferConfig_MotorPushBarChamberDeceleration";
- public const string TransferConfig_MotorPushBarChamberStartFrequency = "TransferConfig_MotorPushBarChamberStartFrequency";
- public const string TransferConfig_MotorPushBarChamberDefaultServoSpeed = "TransferConfig_MotorPushBarChamberDefaultServoSpeed";
- public const string TransferConfig_MotorPushBarChamberDefaultManualSpeed = "TransferConfig_MotorPushBarChamberDefaultManualSpeed";
- public const string TransferConfig_MotorPushBarChamberServoOnTimeout = "TransferConfig_MotorPushBarChamberServoOnTimeout";
- public const string TransferConfig_MotorPushBarChamberMoveTimeout = "TransferConfig_MotorPushBarChamberMoveTimeout";
- public const string TransferConfig_MotorPushBarChamberStopTimeout = "TransferConfig_MotorPushBarChamberStopTimeout";
- public const string TransferConfig_MotorPushBarChamberResetAlarmTimeout = "TransferConfig_MotorPushBarChamberResetAlarmTimeout";
- public const string TransferConfig_MotorPushBarChamberHomeTimeout = "TransferConfig_MotorPushBarChamberHomeTimeout";
- public const string TransferConfig_MotorLoadStationOutAcceleration = "TransferConfig_MotorLoadStationOutAcceleration";
- public const string TransferConfig_MotorLoadStationOutDeceleration = "TransferConfig_MotorLoadStationOutDeceleration";
- public const string TransferConfig_MotorLoadStationOutStartFrequency = "TransferConfig_MotorLoadStationOutStartFrequency";
- public const string TransferConfig_MotorLoadStationOutDefaultServoSpeed = "TransferConfig_MotorLoadStationOutDefaultServoSpeed";
- public const string TransferConfig_MotorLoadStationOutDefaultManualSpeed = "TransferConfig_MotorLoadStationOutDefaultManualSpeed";
- public const string TransferConfig_MotorLoadStationOutServoOnTimeout = "TransferConfig_MotorLoadStationOutServoOnTimeout";
- public const string TransferConfig_MotorLoadStationOutMoveTimeout = "TransferConfig_MotorLoadStationOutMoveTimeout";
- public const string TransferConfig_MotorLoadStationOutStopTimeout = "TransferConfig_MotorLoadStationOutStopTimeout";
- public const string TransferConfig_MotorLoadStationOutResetAlarmTimeout = "TransferConfig_MotorLoadStationOutResetAlarmTimeout";
- public const string TransferConfig_MotorLoadStationOutHomeTimeout = "TransferConfig_MotorLoadStationOutHomeTimeout";
- #endregion
- #region System
- public const string System_IsEnableLocalPlc = "System_IsEnableLocalPlc";
- public const string System_IsEnableRemotePlc = "System_IsEnableRemotePlc";
- public const string System_TimeLimitForOpenCloseSlitVavle = "System_TimeLimitForOpenCloseSlitVavle";
- public const string System_TimeLimitOfOpenGasVavle = "System_TimeLimitOfOpenGasVavle";
- public const string System_TimeLimitOfCloseGasValve = "System_TimeLimitOfCloseGasValve";
- public const string System_IsSimulatorMode = "System_IsSimulatorMode";
- public const string System_IsMesMode = "System_IsMesMode";
- public const string System_Company = "System_Company";
- public const string System_IsAtmCycleMode = "System_IsAtmCycleMode";
- public const string System_IsCheckSafeInterlockBeforeAutoRun = "System_IsCheckSafeInterlockBeforeAutoRun";
- public const string System_PumpBasePressure = "System_PumpBasePressure";
- public const string System_PumpTimeLimit = "System_PumpTimeLimit";
- public const string System_VentTime = "System_VentTime";
- public const string System_VentTimeLimit = "System_VentTimeLimit";
- public const string System_GasFlowPressureAlarmTime = "System_GasFlowPressureAlarmTime";
- public const string System_GasFlowPressureAlarmRange = "System_GasFlowPressureAlarmRange";
- public const string System_RfPowerAlarmRange = "System_RfPowerAlarmRange";
- public const string System_RfPowerAlarmTime = "System_RfPowerAlarmTime";
- public const string System_Language = "System_Language";
- public const string System_MatchMode = "System_MatchMode";
- public const string System_MatchPositionC1 = "System_MatchPositionC1";
- public const string System_MatchPositionC2 = "System_MatchPositionC2";
- public const string System_IsMatchPresetMode = "System_IsMatchPresetMode";
- public const string System_RfOnTimeLastPMTime = "System_RfOnTimeLastPMTime";
- public const string System_RfOnTimeFromLastPM = "System_RfOnTimeFromLastPM";
- public const string System_RfOnTimeTotal = "System_RfOnTimeTotal";
- public const string System_RfOnTimePMInterval = "System_RfOnTimePMInterval";
- public const string System_RfOnTimeEnableAlarm = "System_RfOnTimeEnableAlarm";
- public const string System_PumpOnTimeLastPMTime = "System_PumpOnTimeLastPMTime";
- public const string System_PumpOnTimeFromLastPM = "System_PumpOnTimeFromLastPM";
- public const string System_PumpOnTimeTotal = "System_PumpOnTimeTotal";
- public const string System_PumpOnTimePMInterval = "System_PumpOnTimePMInterval";
- public const string System_PumpOnTimeEnableAlarm = "System_PumpOnTimeEnableAlarm";
- public const string System_RfReflectPowerAlarmRange = "System_RfReflectPowerAlarmRange";
- public const string System_RfReflectPowerAlarmTime = "System_RfReflectPowerAlarmTime";
- public const string System_RfMatchModeDuringProcess = "System_RfMatchModeDuringProcess";
- public const string System_BuzzerBlinkingTime = "System_BuzzerBlinkingTime";
- public const string System_IsTestMode = "System_IsTestMode";
- public const string System_EnableFa = "System_EnableFa";
- public const string System_FaLocalIPAddress = "System_FaLocalIPAddress";
- public const string System_YZQZMachineNumber = "System_YZQZMachineNumber";
- public const string System_YZQZMachineType = "System_YZQZMachineType";
- public const string System_YZQZWebapi = "System_YZQZWebapi";
- public const string System_YZQZWanPan = "System_YZQZWanPan";
- #endregion
- #region BarcodeConfig
- public const string BarcodeConfig_EnableBarcode = "BarcodeConfig_EnableBarcode";
- public const string BarcodeConfig_EnableSelectRecipeInAutoRun = "BarcodeConfig_EnableSelectRecipeInAutoRun";
- public const string BarcodeConfig_MinLotInputBarcodeLength = "BarcodeConfig_MinLotInputBarcodeLength";
- public const string BarcodeConfig_MaxLotInputBarcodeLength = "BarcodeConfig_MaxLotInputBarcodeLength";
- public const string BarcodeConfig_MaxLotBarcodeCount = "BarcodeConfig_MaxLotBarcodeCount";
- public const string BarcodeConfig_MinRecipeInputBarcodeLength = "BarcodeConfig_MinRecipeInputBarcodeLength";
- public const string BarcodeConfig_MaxRecipeInputBarcodeLength = "BarcodeConfig_MaxRecipeInputBarcodeLength";
- public const string BarcodeConfig_MaxRecipeBarcodeCount = "BarcodeConfig_MaxRecipeBarcodeCount";
-
- #endregion
- #region RfConfig
- public const string RfConfig_EnablePulsingFunction = "RfConfig_EnablePulsingFunction";
- public const string RfConfig_EnableReflectPower = "RfConfig_EnableReflectPower";
- public const string RfConfig_EnableC1C2Position = "RfConfig_EnableC1C2Position";
- public const string RfConfig_EnableVoltageCurrent = "RfConfig_EnableVoltageCurrent";
- public const string RfConfig_PowerRange = "RfConfig_PowerRange";
- public const string RfConfig_Coefficient = "RfConfig_Coefficient";
- public const string RfConfig_PowerRegulationFactor = "RfConfig_PowerRegulationFactor";
-
- #endregion
- #region GasLineConfig
- public const string GasLineConfig_Gas1Name = "GasLineConfig_Gas1Name";
- public const string GasLineConfig_Gas1Enable = "GasLineConfig_Gas1Enable";
- public const string GasLineConfig_Gas1MfcN2Scale = "GasLineConfig_Gas1MfcN2Scale";
- public const string GasLineConfig_Gas1MfcScaleFactor = "GasLineConfig_Gas1MfcScaleFactor";
- public const string GasLineConfig_Gas1MfcEnableAlarm = "GasLineConfig_Gas1MfcEnableAlarm";
- public const string GasLineConfig_Gas1MfcAlarmRange = "GasLineConfig_Gas1MfcAlarmRange";
- public const string GasLineConfig_Gas1MfcAlarmTime = "GasLineConfig_Gas1MfcAlarmTime";
- public const string GasLineConfig_Gas1MfcDefaultSetPoint = "GasLineConfig_Gas1MfcDefaultSetPoint";
- public const string GasLineConfig_Gas1PressureMinValue = "GasLineConfig_Gas1PressureMinValue";
- public const string GasLineConfig_Gas1PressureMaxValue = "GasLineConfig_Gas1PressureMaxValue";
- public const string GasLineConfig_Gas1PressureWarningTime = "GasLineConfig_Gas1PressureWarningTime";
- public const string GasLineConfig_Gas1PressureAlarmTime = "GasLineConfig_Gas1PressureAlarmTime";
- public const string GasLineConfig_Gas1MfcFlowRegulationFactor = "GasLineConfig_Gas1MfcFlowRegulationFactor";
- public const string GasLineConfig_Gas2Name = "GasLineConfig_Gas2Name";
- public const string GasLineConfig_Gas2Enable = "GasLineConfig_Gas2Enable";
- public const string GasLineConfig_Gas2MfcN2Scale = "GasLineConfig_Gas2MfcN2Scale";
- public const string GasLineConfig_Gas2MfcScaleFactor = "GasLineConfig_Gas2MfcScaleFactor";
- public const string GasLineConfig_Gas2MfcEnableAlarm = "GasLineConfig_Gas2MfcEnableAlarm";
- public const string GasLineConfig_Gas2MfcAlarmRange = "GasLineConfig_Gas2MfcAlarmRange";
- public const string GasLineConfig_Gas2MfcAlarmTime = "GasLineConfig_Gas2MfcAlarmTime";
- public const string GasLineConfig_Gas2MfcDefaultSetPoint = "GasLineConfig_Gas2MfcDefaultSetPoint";
- public const string GasLineConfig_Gas2PressureMinValue = "GasLineConfig_Gas2PressureMinValue";
- public const string GasLineConfig_Gas2PressureMaxValue = "GasLineConfig_Gas2PressureMaxValue";
- public const string GasLineConfig_Gas2PressureWarningTime = "GasLineConfig_Gas2PressureWarningTime";
- public const string GasLineConfig_Gas2PressureAlarmTime = "GasLineConfig_Gas2PressureAlarmTime";
- public const string GasLineConfig_Gas2MfcFlowRegulationFactor = "GasLineConfig_Gas2MfcFlowRegulationFactor";
- public const string GasLineConfig_Gas3Name = "GasLineConfig_Gas3Name";
- public const string GasLineConfig_Gas3Enable = "GasLineConfig_Gas3Enable";
- public const string GasLineConfig_Gas3MfcN2Scale = "GasLineConfig_Gas3MfcN2Scale";
- public const string GasLineConfig_Gas3MfcScaleFactor = "GasLineConfig_Gas3MfcScaleFactor";
- public const string GasLineConfig_Gas3MfcEnableAlarm = "GasLineConfig_Gas3MfcEnableAlarm";
- public const string GasLineConfig_Gas3MfcAlarmRange = "GasLineConfig_Gas3MfcAlarmRange";
- public const string GasLineConfig_Gas3MfcAlarmTime = "GasLineConfig_Gas3MfcAlarmTime";
- public const string GasLineConfig_Gas3MfcDefaultSetPoint = "GasLineConfig_Gas3MfcDefaultSetPoint";
- public const string GasLineConfig_Gas3PressureMinValue = "GasLineConfig_Gas3PressureMinValue";
- public const string GasLineConfig_Gas3PressureMaxValue = "GasLineConfig_Gas3PressureMaxValue";
- public const string GasLineConfig_Gas3PressureWarningTime = "GasLineConfig_Gas3PressureWarningTime";
- public const string GasLineConfig_Gas3PressureAlarmTime = "GasLineConfig_Gas3PressureAlarmTime";
- public const string GasLineConfig_Gas3MfcFlowRegulationFactor = "GasLineConfig_Gas3MfcFlowRegulationFactor";
- public const string GasLineConfig_Gas4Name = "GasLineConfig_Gas4Name";
- public const string GasLineConfig_Gas4Enable = "GasLineConfig_Gas4Enable";
- public const string GasLineConfig_Gas4MfcN2Scale = "GasLineConfig_Gas4MfcN2Scale";
- public const string GasLineConfig_Gas4MfcScaleFactor = "GasLineConfig_Gas4MfcScaleFactor";
- public const string GasLineConfig_Gas4MfcEnableAlarm = "GasLineConfig_Gas4MfcEnableAlarm";
- public const string GasLineConfig_Gas4MfcAlarmRange = "GasLineConfig_Gas4MfcAlarmRange";
- public const string GasLineConfig_Gas4MfcAlarmTime = "GasLineConfig_Gas4MfcAlarmTime";
- public const string GasLineConfig_Gas4MfcDefaultSetPoint = "GasLineConfig_Gas4MfcDefaultSetPoint";
- public const string GasLineConfig_Gas4PressureMinValue = "GasLineConfig_Gas4PressureMinValue";
- public const string GasLineConfig_Gas4PressureMaxValue = "GasLineConfig_Gas4PressureMaxValue";
- public const string GasLineConfig_Gas4PressureWarningTime = "GasLineConfig_Gas4PressureWarningTime";
- public const string GasLineConfig_Gas4PressureAlarmTime = "GasLineConfig_Gas4PressureAlarmTime";
- public const string GasLineConfig_Gas4MfcFlowRegulationFactor = "GasLineConfig_Gas4MfcFlowRegulationFactor";
- public const string GasLineConfig_Gas5Name = "GasLineConfig_Gas5Name";
- public const string GasLineConfig_Gas5Enable = "GasLineConfig_Gas5Enable";
- public const string GasLineConfig_Gas5MfcN2Scale = "GasLineConfig_Gas5MfcN2Scale";
- public const string GasLineConfig_Gas5MfcScaleFactor = "GasLineConfig_Gas5MfcScaleFactor";
- public const string GasLineConfig_Gas5MfcEnableAlarm = "GasLineConfig_Gas5MfcEnableAlarm";
- public const string GasLineConfig_Gas5MfcAlarmRange = "GasLineConfig_Gas5MfcAlarmRange";
- public const string GasLineConfig_Gas5MfcAlarmTime = "GasLineConfig_Gas5MfcAlarmTime";
- public const string GasLineConfig_Gas5MfcDefaultSetPoint = "GasLineConfig_Gas5MfcDefaultSetPoint";
- public const string GasLineConfig_Gas5PressureMinValue = "GasLineConfig_Gas5PressureMinValue";
- public const string GasLineConfig_Gas5PressureMaxValue = "GasLineConfig_Gas5PressureMaxValue";
- public const string GasLineConfig_Gas5PressureWarningTime = "GasLineConfig_Gas5PressureWarningTime";
- public const string GasLineConfig_Gas5PressureAlarmTime = "GasLineConfig_Gas5PressureAlarmTime";
- public const string GasLineConfig_Gas5MfcFlowRegulationFactor = "GasLineConfig_Gas5MfcFlowRegulationFactor";
- public const string GasLineConfig_CdaPressureMinValue = "GasLineConfig_CdaPressureMinValue";
- public const string GasLineConfig_CdaPressureMaxValue = "GasLineConfig_CdaPressureMaxValue";
- public const string GasLineConfig_CdaPressureWarningTime = "GasLineConfig_CdaPressureWarningTime";
- public const string GasLineConfig_CdaPressureAlarmTime = "GasLineConfig_CdaPressureAlarmTime";
- public const string GasLineConfig_N2PressureMinValue = "GasLineConfig_N2PressureMinValue";
- public const string GasLineConfig_N2PressureMaxValue = "GasLineConfig_N2PressureMaxValue";
- public const string GasLineConfig_N2PressureWarningTime = "GasLineConfig_N2PressureWarningTime";
- public const string GasLineConfig_N2PressureAlarmTime = "GasLineConfig_N2PressureAlarmTime";
-
- #endregion
- #region VaporLineConfig
- public const string VaporLineConfig_Vapor1Name = "VaporLineConfig_Vapor1Name";
- public const string VaporLineConfig_Vapor1Enable = "VaporLineConfig_Vapor1Enable";
- public const string VaporLineConfig_Vapor1EnableMfc = "VaporLineConfig_Vapor1EnableMfc";
- public const string VaporLineConfig_Vapor1MfcN2Scale = "VaporLineConfig_Vapor1MfcN2Scale";
- public const string VaporLineConfig_Vapor1MfcScaleFactor = "VaporLineConfig_Vapor1MfcScaleFactor";
- public const string VaporLineConfig_Vapor1MfcEnableAlarm = "VaporLineConfig_Vapor1MfcEnableAlarm";
- public const string VaporLineConfig_Vapor1MfcAlarmRange = "VaporLineConfig_Vapor1MfcAlarmRange";
- public const string VaporLineConfig_Vapor1MfcAlarmTime = "VaporLineConfig_Vapor1MfcAlarmTime";
- public const string VaporLineConfig_Vapor2Name = "VaporLineConfig_Vapor2Name";
- public const string VaporLineConfig_Vapor2Enable = "VaporLineConfig_Vapor2Enable";
- public const string VaporLineConfig_Vapor2EnableMfc = "VaporLineConfig_Vapor2EnableMfc";
- public const string VaporLineConfig_Vapor2MfcN2Scale = "VaporLineConfig_Vapor2MfcN2Scale";
- public const string VaporLineConfig_Vapor2MfcScaleFactor = "VaporLineConfig_Vapor2MfcScaleFactor";
- public const string VaporLineConfig_Vapor2MfcEnableAlarm = "VaporLineConfig_Vapor2MfcEnableAlarm";
- public const string VaporLineConfig_Vapor2MfcAlarmRange = "VaporLineConfig_Vapor2MfcAlarmRange";
- public const string VaporLineConfig_Vapor2MfcAlarmTime = "VaporLineConfig_Vapor2MfcAlarmTime";
- public const string VaporLineConfig_Vapor3Name = "VaporLineConfig_Vapor3Name";
- public const string VaporLineConfig_Vapor3Enable = "VaporLineConfig_Vapor3Enable";
- public const string VaporLineConfig_Vapor3EnableMfc = "VaporLineConfig_Vapor3EnableMfc";
- public const string VaporLineConfig_Vapor3MfcN2Scale = "VaporLineConfig_Vapor3MfcN2Scale";
- public const string VaporLineConfig_Vapor3MfcScaleFactor = "VaporLineConfig_Vapor3MfcScaleFactor";
- public const string VaporLineConfig_Vapor3MfcEnableAlarm = "VaporLineConfig_Vapor3MfcEnableAlarm";
- public const string VaporLineConfig_Vapor3MfcAlarmRange = "VaporLineConfig_Vapor3MfcAlarmRange";
- public const string VaporLineConfig_Vapor3MfcAlarmTime = "VaporLineConfig_Vapor3MfcAlarmTime";
-
- #endregion
- #region PressureControlConfig
- public const string PressureControlConfig_IsIndependentControl = "PressureControlConfig_IsIndependentControl";
- public const string PressureControlConfig_EnableBoosterPump = "PressureControlConfig_EnableBoosterPump";
- public const string PressureControlConfig_EnableBoosterPumpFrequency = "PressureControlConfig_EnableBoosterPumpFrequency";
- public const string PressureControlConfig_EnableDryPump = "PressureControlConfig_EnableDryPump";
- public const string PressureControlConfig_EnableThrottleValve = "PressureControlConfig_EnableThrottleValve";
- public const string PressureControlConfig_ChamberPressureGaugePrecision = "PressureControlConfig_ChamberPressureGaugePrecision";
-
- public const string PressureControlConfig_PumpEnableWaterFlow = "PressureControlConfig_PumpEnableWaterFlow";
- public const string PressureControlConfig_PumpWaterFlowMinValue = "PressureControlConfig_PumpWaterFlowMinValue";
- public const string PressureControlConfig_PumpWaterFlowMaxValue = "PressureControlConfig_PumpWaterFlowMaxValue";
- public const string PressureControlConfig_PumpWaterFlowOutOfToleranceWarningTime = "PressureControlConfig_PumpWaterFlowOutOfToleranceWarningTime";
- public const string PressureControlConfig_PumpWaterFlowOutOfToleranceAlarmTime = "PressureControlConfig_PumpWaterFlowOutOfToleranceAlarmTime";
- public const string PressureControlConfig_PumpEnableN2Pressure = "PressureControlConfig_PumpEnableN2Pressure";
- public const string PressureControlConfig_PumpN2PressureMinValue = "PressureControlConfig_PumpN2PressureMinValue";
- public const string PressureControlConfig_PumpN2PressureMaxValue = "PressureControlConfig_PumpN2PressureMaxValue";
- public const string PressureControlConfig_PumpN2PressureOutOfToleranceWarningTime = "PressureControlConfig_PumpN2PressureOutOfToleranceWarningTime";
- public const string PressureControlConfig_PumpN2PressureOutOfToleranceAlarmTime = "PressureControlConfig_PumpN2PressureOutOfToleranceAlarmTime";
- public const string PressureControlConfig_PumpN2PurgeMaxTimeWhenPumpOff = "PressureControlConfig_PumpN2PurgeMaxTimeWhenPumpOff";
- public const string PressureControlConfig_MinVacuumGaugePressureAfterVent = "PressureControlConfig_MinVacuumGaugePressureAfterVent";
- public const string PressureControlConfig_AtmPressure = "PressureControlConfig_AtmPressure";
-
- #endregion
- #region ProcessConfig
- public const string ProcessConfig_ChamberPressureMaxValue = "ProcessConfig_ChamberPressureMaxValue";
- public const string ProcessConfig_PurgePumpTimeLimit = "ProcessConfig_PurgePumpTimeLimit";
- public const string ProcessConfig_PurgeVentTimeLimit = "ProcessConfig_PurgeVentTimeLimit";
- public const string ProcessConfig_PurgePumpStableTime = "ProcessConfig_PurgePumpStableTime";
- public const string ProcessConfig_PurgeVentStableTime = "ProcessConfig_PurgeVentStableTime";
- public const string ProcessConfig_PurgePumpPressure = "ProcessConfig_PurgePumpPressure";
- public const string ProcessConfig_PurgeVentPressure = "ProcessConfig_PurgeVentPressure";
- public const string ProcessConfig_PurgeCycleCount = "ProcessConfig_PurgeCycleCount";
- public const string ProcessConfig_PurgeVentTime = "ProcessConfig_PurgeVentTime";
- public const string ProcessConfig_ElectrodeTemperatureAlarmRange = "ProcessConfig_ElectrodeTemperatureAlarmRange";
- public const string ProcessConfig_ElectrodeTemperatureAlarmTime = "ProcessConfig_ElectrodeTemperatureAlarmTime";
- public const string ProcessConfig_ElectrodeTemperatureCriticalDefault = "ProcessConfig_ElectrodeTemperatureCriticalDefault";
- public const string ProcessConfig_RecipeCycleCouterFlag = "ProcessConfig_RecipeCycleCouterFlag";
- public const string ProcessConfig_ProcessFinishedReminderFlag = "ProcessConfig_ProcessFinishedReminderFlag";
- #endregion
- #region CoolingConfig
- public const string CoolingConfig_EnableElectrodeTcLeftAsControlTc = "CoolingConfig_EnableElectrodeTcLeftAsControlTc";
- public const string CoolingConfig_ElectrodeTcDifferenceMaxValue = "CoolingConfig_ElectrodeTcDifferenceMaxValue";
- public const string CoolingConfig_ElectrodeCriticalTemperatureManualProcess = "CoolingConfig_ElectrodeCriticalTemperatureManualProcess";
- public const string CoolingConfig_RfCoolingValveMaxOpenTime = "CoolingConfig_RfCoolingValveMaxOpenTime";
- public const string CoolingConfig_PumpCoolingValveMaxOpenTime = "CoolingConfig_PumpCoolingValveMaxOpenTime";
- public const string CoolingConfig_ElectrodeOverTemperatureTime = "CoolingConfig_ElectrodeOverTemperatureTime";
- public const string CoolingConfig_ElectrodeCoolingWaterOpenTime = "CoolingConfig_ElectrodeCoolingWaterOpenTime";
- public const string CoolingConfig_WaterFlowPumpMinValue = "CoolingConfig_WaterFlowPumpMinValue";
- public const string CoolingConfig_WaterFlowPumpMaxValue = "CoolingConfig_WaterFlowPumpMaxValue";
- public const string CoolingConfig_WaterFlowPumpOutOfToleranceWarningTime = "CoolingConfig_WaterFlowPumpOutOfToleranceWarningTime";
- public const string CoolingConfig_WaterFlowPumpOutOfToleranceAlarmTime = "CoolingConfig_WaterFlowPumpOutOfToleranceAlarmTime";
-
- public const string CoolingConfig_WaterFlowRfMinValue = "CoolingConfig_WaterFlowRfMinValue";
- public const string CoolingConfig_WaterFlowRfMaxValue = "CoolingConfig_WaterFlowRfMaxValue";
- public const string CoolingConfig_WaterFlowRfOutOfToleranceWarningTime = "CoolingConfig_WaterFlowRfOutOfToleranceWarningTime";
- public const string CoolingConfig_WaterFlowRfOutOfToleranceAlarmTime = "CoolingConfig_WaterFlowRfOutOfToleranceAlarmTime";
-
- public const string CoolingConfig_WaterTemperatureInletMinValue = "CoolingConfig_WaterTemperatureInletMinValue";
- public const string CoolingConfig_WaterTemperatureInletMaxValue = "CoolingConfig_WaterTemperatureInletMaxValue";
- public const string CoolingConfig_WaterTemperatureInletOutOfToleranceWarningTime = "CoolingConfig_WaterTemperatureInletOutOfToleranceWarningTime";
- public const string CoolingConfig_WaterTemperatureInletOutOfToleranceAlarmTime = "CoolingConfig_WaterTemperatureInletOutOfToleranceAlarmTime";
-
- #endregion
- }
- }
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