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JetPlasma
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Triton_160
Watch 2
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트리: 11453a84b7
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Triton_160
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Triton160UI
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Debug
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Logs
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appLog20241216.txt

appLog20241216.txt 53 KB
히스토리 Raw

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  1. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-16 09:14:28.970 LOG.INFO UiEvent.cs Line:57 Event() - 厮将銭俊貧譜姥糞扮陣崙狼由
    2. 

  2. [Save Log Job] 2024-12-16 09:14:28.973 LOG.INFO UiEvent.cs Line:58 Event() - 厮将銭俊貧譜姥糞扮陣崙狼由
    3. 

  3. [Save Log Job] 2024-12-16 09:14:30.399 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    4. 

  4. [Save Log Job] 2024-12-16 09:14:36.151 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
    5. 

  5. [Save Log Job] 2024-12-16 09:14:36.151 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    6. 

  6. [Save Log Job] 2024-12-16 09:14:43.612 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    7. 

  7. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-16 10:29:07.764 LOG.INFO UiEvent.cs Line:58 Event() - 厮将銭俊貧譜姥糞扮陣崙狼由
    8. 

  8. [Save Log Job] 2024-12-16 10:29:07.765 LOG.INFO UiEvent.cs Line:57 Event() - 厮将銭俊貧譜姥糞扮陣崙狼由
    9. 

  9. [Save Log Job] 2024-12-16 10:29:09.154 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    10. 

  10. [Save Log Job] 2024-12-16 10:29:09.506 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    11. 

  11. [Save Log Job] 2024-12-16 10:29:12.725 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
    12. 

  12. [Save Log Job] 2024-12-16 10:29:26.307 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    13. 

  13. [Save Log Job] 2024-12-16 10:29:53.667 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    14. 

  14. [Save Log Job] 2024-12-16 10:29:53.668 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    15. 

  15. [Save Log Job] 2024-12-16 10:29:53.668 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    16. 

  16. [Save Log Job] 2024-12-16 10:30:23.595 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 1111111111/, , )
    17. 

  17. [Save Log Job] 2024-12-16 10:30:50.962 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    18. 

  18. [Save Log Job] 2024-12-16 10:30:50.962 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    19. 

  19. [Save Log Job] 2024-12-16 10:30:50.964 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    20. 

  20. [Save Log Job] 2024-12-16 10:30:51.041 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check door status。
    21. 

  21. [Save Log Job] 2024-12-16 10:30:51.043 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check chamber door。
    22. 

  22. [Save Log Job] 2024-12-16 10:30:51.043 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Close all the valves。
    23. 

  23. [Save Log Job] 2024-12-16 10:30:51.043 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Open pumping valve。
    24. 

  24. [Save Log Job] 2024-12-16 10:30:51.064 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check pump status。
    25. 

  25. [Save Log Job] 2024-12-16 10:30:51.064 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check backpanel door。
    26. 

  26. [Save Log Job] 2024-12-16 10:30:53.056 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇Chamber pumping valveOpen払移�圻咀�Valve keep closed 。
    27. 

  27. [Save Log Job] 2024-12-16 10:30:54.765 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check chamber pressure。
    28. 

  28. [Save Log Job] 2024-12-16 10:31:33.567 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Pump below 100mTorr。
    29. 

  29. [Save Log Job] 2024-12-16 10:31:33.567 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�PreProcess Finished in 0.8 minitues。
    30. 

  30. [Save Log Job] 2024-12-16 10:31:33.568 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    31. 

  31. [Save Log Job] 2024-12-16 10:31:33.568 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241216103048-CACB
    32. 

  32. [Save Log Job] 2024-12-16 10:31:33.568 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241216103048-CACB'
    33. 

  33. [Save Log Job] 2024-12-16 10:31:33.667 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103048-CACB' start run step 1�initial。
    34. 

  34. [Save Log Job] 2024-12-16 10:31:33.667 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVMode�TV mode set to TVPressureCtrl。
    35. 

  35. [Save Log Job] 2024-12-16 10:31:33.668 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    36. 

  36. [Save Log Job] 2024-12-16 10:31:33.668 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVPressure�TV pressure set to 50 mtorr。
    37. 

  37. [Save Log Job] 2024-12-16 10:31:33.670 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetBoostPressure�Boost pump pressure set to 100 mTorr。
    38. 

  38. [Save Log Job] 2024-12-16 10:31:33.670 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMode�Set RF work mode to ContinuousWaveMode。
    39. 

  39. [Save Log Job] 2024-12-16 10:31:33.670 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingFrequency�RF set Frequency:0。
    40. 

  40. [Save Log Job] 2024-12-16 10:31:33.671 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingDuty�RF set Duty:0 。
    41. 

  41. [Save Log Job] 2024-12-16 10:31:33.671 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPower�RF set Power:0。
    42. 

  42. [Save Log Job] 2024-12-16 10:31:33.671 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchProcessMode�Match mode set to PresetMode。
    43. 

  43. [Save Log Job] 2024-12-16 10:31:33.671 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC2�Set RF match position c2 :50。
    44. 

  44. [Save Log Job] 2024-12-16 10:31:33.672 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC1�Set RF match position c1 :50。
    45. 

  45. [Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas1� ramp to 45sccm。
    46. 

  46. [Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas3� ramp to 66sccm。
    47. 

  47. [Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas4� ramp to 76sccm。
    48. 

  48. [Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas2� ramp to 56sccm。
    49. 

  49. [Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas5� ramp to 86sccm。
    50. 

  50. [Save Log Job] 2024-12-16 10:31:33.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPowerOnOff�Set RF power Off。
    51. 

  51. [Save Log Job] 2024-12-16 10:31:33.675 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    52. 

  52. [Save Log Job] 2024-12-16 10:32:03.743 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103048-CACB' end step 1
    53. 

  53. [Save Log Job] 2024-12-16 10:32:03.743 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103048-CACB' start run step 2�initial。
    54. 

  54. [Save Log Job] 2024-12-16 10:32:03.744 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVMode�TV mode set to TVPressureCtrl。
    55. 

  55. [Save Log Job] 2024-12-16 10:32:03.744 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    56. 

  56. [Save Log Job] 2024-12-16 10:32:03.744 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVPressure�TV pressure set to 50 mtorr。
    57. 

  57. [Save Log Job] 2024-12-16 10:32:03.745 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetBoostPressure�Boost pump pressure set to 100 mTorr。
    58. 

  58. [Save Log Job] 2024-12-16 10:32:03.745 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMode�Set RF work mode to ContinuousWaveMode。
    59. 

  59. [Save Log Job] 2024-12-16 10:32:03.745 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingFrequency�RF set Frequency:0。
    60. 

  60. [Save Log Job] 2024-12-16 10:32:03.746 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingDuty�RF set Duty:0 。
    61. 

  61. [Save Log Job] 2024-12-16 10:32:03.746 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPower�RF set Power:150。
    62. 

  62. [Save Log Job] 2024-12-16 10:32:03.746 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchProcessMode�Match mode set to PresetMode。
    63. 

  63. [Save Log Job] 2024-12-16 10:32:03.747 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC1�Set RF match position c1 :50。
    64. 

  64. [Save Log Job] 2024-12-16 10:32:03.747 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC2�Set RF match position c2 :50。
    65. 

  65. [Save Log Job] 2024-12-16 10:32:03.747 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas1� ramp to 45sccm。
    66. 

  66. [Save Log Job] 2024-12-16 10:32:03.748 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas2� ramp to 56sccm。
    67. 

  67. [Save Log Job] 2024-12-16 10:32:03.748 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas3� ramp to 66sccm。
    68. 

  68. [Save Log Job] 2024-12-16 10:32:03.748 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas4� ramp to 76sccm。
    69. 

  69. [Save Log Job] 2024-12-16 10:32:03.749 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas5� ramp to 86sccm。
    70. 

  70. [Save Log Job] 2024-12-16 10:32:03.749 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPowerOnOff�Set RF power On。
    71. 

  71. [Save Log Job] 2024-12-16 10:32:09.427 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm�Forward power 18 out of range[149,151] in 1 seconds.
    72. 

  72. [Save Log Job] 2024-12-16 10:32:09.428 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    73. 

  73. [Save Log Job] 2024-12-16 10:32:09.510 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    74. 

  74. [Save Log Job] 2024-12-16 10:32:09.510 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed�Recipe�20241216103048-CACB
    75. 

  75. Start time�2024/12/16 10:31:33
    76. 

  76. End time�2024/12/16 10:32:09
    77. 

  77. Total time�0:0:35
    78. 

  78. [Save Log Job] 2024-12-16 10:32:09.511 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    79. 

  79. [Save Log Job] 2024-12-16 10:32:09.712 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    80. 

  80. [Save Log Job] 2024-12-16 10:32:11.522 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇Process gas final valveClose払移�圻咀�Valve keep open。
    81. 

  81. [Save Log Job] 2024-12-16 10:38:32.896 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    82. 

  82. [Save Log Job] 2024-12-16 10:38:32.896 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  CACB  save completed
    83. 

  83. [Save Log Job] 2024-12-16 10:39:15.506 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    84. 

  84. [Save Log Job] 2024-12-16 10:39:36.825 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 2222222222/, , )
    85. 

  85. [Save Log Job] 2024-12-16 10:39:38.103 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check door status。
    86. 

  86. [Save Log Job] 2024-12-16 10:39:38.103 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    87. 

  87. [Save Log Job] 2024-12-16 10:39:38.103 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check chamber door。
    88. 

  88. [Save Log Job] 2024-12-16 10:39:38.105 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Close all the valves。
    89. 

  89. [Save Log Job] 2024-12-16 10:39:38.105 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check backpanel door。
    90. 

  90. [Save Log Job] 2024-12-16 10:39:38.105 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check pump status。
    91. 

  91. [Save Log Job] 2024-12-16 10:39:38.204 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Pump below 100mTorr。
    92. 

  92. [Save Log Job] 2024-12-16 10:39:38.204 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Open pumping valve。
    93. 

  93. [Save Log Job] 2024-12-16 10:39:38.225 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    94. 

  94. [Save Log Job] 2024-12-16 10:39:38.225 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check chamber pressure。
    95. 

  95. [Save Log Job] 2024-12-16 10:39:38.303 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�PreProcess Finished in 0.0 minitues。
    96. 

  96. [Save Log Job] 2024-12-16 10:39:38.303 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    97. 

  97. [Save Log Job] 2024-12-16 10:39:38.303 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241216103938-CACB
    98. 

  98. [Save Log Job] 2024-12-16 10:39:38.303 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241216103938-CACB'
    99. 

  99. [Save Log Job] 2024-12-16 10:39:38.303 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103938-CACB' start run step 1�initial。
    100. 

  100. [Save Log Job] 2024-12-16 10:39:38.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVMode�TV mode set to TVPressureCtrl。
    101. 

  101. [Save Log Job] 2024-12-16 10:39:38.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    102. 

  102. [Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVPressure�TV pressure set to 50 mtorr。
    103. 

  103. [Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetBoostPressure�Boost pump pressure set to 100 mTorr。
    104. 

  104. [Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMode�Set RF work mode to ContinuousWaveMode。
    105. 

  105. [Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingFrequency�RF set Frequency:0。
    106. 

  106. [Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingDuty�RF set Duty:0 。
    107. 

  107. [Save Log Job] 2024-12-16 10:39:38.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPower�RF set Power:0。
    108. 

  108. [Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchProcessMode�Match mode set to PresetMode。
    109. 

  109. [Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC1�Set RF match position c1 :50。
    110. 

  110. [Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC2�Set RF match position c2 :50。
    111. 

  111. [Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas1� ramp to 45sccm。
    112. 

  112. [Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas2� ramp to 56sccm。
    113. 

  113. [Save Log Job] 2024-12-16 10:39:38.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas3� ramp to 66sccm。
    114. 

  114. [Save Log Job] 2024-12-16 10:39:38.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas4� ramp to 76sccm。
    115. 

  115. [Save Log Job] 2024-12-16 10:39:38.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas5� ramp to 86sccm。
    116. 

  116. [Save Log Job] 2024-12-16 10:39:38.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPowerOnOff�Set RF power Off。
    117. 

  117. [Save Log Job] 2024-12-16 10:39:38.404 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    118. 

  118. [Save Log Job] 2024-12-16 10:40:08.367 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103938-CACB' end step 1
    119. 

  119. [Save Log Job] 2024-12-16 10:40:08.468 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVMode�TV mode set to TVPressureCtrl。
    120. 

  120. [Save Log Job] 2024-12-16 10:40:08.468 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103938-CACB' start run step 2�initial。
    121. 

  121. [Save Log Job] 2024-12-16 10:40:08.468 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    122. 

  122. [Save Log Job] 2024-12-16 10:40:08.468 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVPressure�TV pressure set to 50 mtorr。
    123. 

  123. [Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetBoostPressure�Boost pump pressure set to 100 mTorr。
    124. 

  124. [Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMode�Set RF work mode to ContinuousWaveMode。
    125. 

  125. [Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingFrequency�RF set Frequency:0。
    126. 

  126. [Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingDuty�RF set Duty:0 。
    127. 

  127. [Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPower�RF set Power:0。
    128. 

  128. [Save Log Job] 2024-12-16 10:40:08.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchProcessMode�Match mode set to PresetMode。
    129. 

  129. [Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC1�Set RF match position c1 :50。
    130. 

  130. [Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC2�Set RF match position c2 :50。
    131. 

  131. [Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas1� ramp to 45sccm。
    132. 

  132. [Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas2� ramp to 56sccm。
    133. 

  133. [Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas3� ramp to 66sccm。
    134. 

  134. [Save Log Job] 2024-12-16 10:40:08.470 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas4� ramp to 76sccm。
    135. 

  135. [Save Log Job] 2024-12-16 10:40:08.471 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas5� ramp to 86sccm。
    136. 

  136. [Save Log Job] 2024-12-16 10:40:08.471 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPowerOnOff�Set RF power Off。
    137. 

  137. [Save Log Job] 2024-12-16 10:40:38.527 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216103938-CACB' end step 2
    138. 

  138. [Save Log Job] 2024-12-16 10:40:38.528 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    139. 

  139. [Save Log Job] 2024-12-16 10:40:38.528 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed�Recipe�20241216103938-CACB
    140. 

  140. Start time�2024/12/16 10:39:38
    141. 

  141. End time�2024/12/16 10:40:38
    142. 

  142. Total time�0:1:0
    143. 

  143. [Save Log Job] 2024-12-16 10:40:38.528 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    144. 

  144. [Save Log Job] 2024-12-16 10:40:38.630 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    145. 

  145. [Save Log Job] 2024-12-16 10:40:40.540 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC1 ValveClose払移�圻咀�Valve keep open。
    146. 

  146. [Save Log Job] 2024-12-16 10:40:40.540 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC2 ValveClose払移�圻咀�Valve keep open。
    147. 

  147. [Save Log Job] 2024-12-16 10:40:48.702 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    148. 

  148. [Save Log Job] 2024-12-16 10:40:48.702 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    149. 

  149. [Save Log Job] 2024-12-16 10:40:55.647 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    150. 

  150. [Save Log Job] 2024-12-16 10:40:55.747 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    151. 

  151. [Save Log Job] 2024-12-16 10:40:57.761 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇Chamber pumping valveClose払移�圻咀�Valve keep open。
    152. 

  152. [Save Log Job] 2024-12-16 10:40:59.170 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    153. 

  153. [Save Log Job] 2024-12-16 10:41:02.297 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    154. 

  154. [Save Log Job] 2024-12-16 10:41:52.364 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    155. 

  155. [Save Log Job] 2024-12-16 10:43:02.998 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    156. 

  156. [Save Log Job] 2024-12-16 10:43:03.012 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    157. 

  157. [Save Log Job] 2024-12-16 10:43:03.034 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    158. 

  158. [Save Log Job] 2024-12-16 10:43:03.034 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    159. 

  159. [Save Log Job] 2024-12-16 10:43:54.568 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 333333333/, , )
    160. 

  160. [Save Log Job] 2024-12-16 10:43:54.668 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    161. 

  161. [Save Log Job] 2024-12-16 10:43:54.668 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check chamber door。
    162. 

  162. [Save Log Job] 2024-12-16 10:43:54.670 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check door status。
    163. 

  163. [Save Log Job] 2024-12-16 10:43:54.670 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Close all the valves。
    164. 

  164. [Save Log Job] 2024-12-16 10:43:54.670 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check backpanel door。
    165. 

  165. [Save Log Job] 2024-12-16 10:43:54.671 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check pump status。
    166. 

  166. [Save Log Job] 2024-12-16 10:43:54.768 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Open pumping valve。
    167. 

  167. [Save Log Job] 2024-12-16 10:43:54.768 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    168. 

  168. [Save Log Job] 2024-12-16 10:43:56.779 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇Chamber pumping valveOpen払移�圻咀�Valve keep closed 。
    169. 

  169. [Save Log Job] 2024-12-16 10:43:58.391 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check chamber pressure。
    170. 

  170. [Save Log Job] 2024-12-16 10:44:44.432 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    171. 

  171. [Save Log Job] 2024-12-16 10:44:44.532 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    172. 

  172. [Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 33333333366/, , )
    173. 

  173. [Save Log Job] 2024-12-16 10:45:12.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check door status。
    174. 

  174. [Save Log Job] 2024-12-16 10:45:12.994 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    175. 

  175. [Save Log Job] 2024-12-16 10:45:12.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check chamber door。
    176. 

  176. [Save Log Job] 2024-12-16 10:45:12.995 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check backpanel door。
    177. 

  177. [Save Log Job] 2024-12-16 10:45:12.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check pump status。
    178. 

  178. [Save Log Job] 2024-12-16 10:45:12.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Close all the valves。
    179. 

  179. [Save Log Job] 2024-12-16 10:45:12.996 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    180. 

  180. [Save Log Job] 2024-12-16 10:45:13.093 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check chamber pressure。
    181. 

  181. [Save Log Job] 2024-12-16 10:45:13.093 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Open pumping valve。
    182. 

  182. [Save Log Job] 2024-12-16 10:45:15.610 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Pump below 100mTorr。
    183. 

  183. [Save Log Job] 2024-12-16 10:45:15.611 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�PreProcess Finished in 0.0 minitues。
    184. 

  184. [Save Log Job] 2024-12-16 10:45:15.611 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    185. 

  185. [Save Log Job] 2024-12-16 10:45:15.611 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241216104512-CACB
    186. 

  186. [Save Log Job] 2024-12-16 10:45:15.611 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241216104512-CACB'
    187. 

  187. [Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104512-CACB' start run step 1�initial。
    188. 

  188. [Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVMode�TV mode set to TVPressureCtrl。
    189. 

  189. [Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    190. 

  190. [Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVPressure�TV pressure set to 50 mtorr。
    191. 

  191. [Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetBoostPressure�Boost pump pressure set to 100 mTorr。
    192. 

  192. [Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMode�Set RF work mode to ContinuousWaveMode。
    193. 

  193. [Save Log Job] 2024-12-16 10:45:15.712 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingFrequency�RF set Frequency:0。
    194. 

  194. [Save Log Job] 2024-12-16 10:45:15.713 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingDuty�RF set Duty:0 。
    195. 

  195. [Save Log Job] 2024-12-16 10:45:15.713 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPower�RF set Power:0。
    196. 

  196. [Save Log Job] 2024-12-16 10:45:15.713 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchProcessMode�Match mode set to PresetMode。
    197. 

  197. [Save Log Job] 2024-12-16 10:45:15.714 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC1�Set RF match position c1 :50。
    198. 

  198. [Save Log Job] 2024-12-16 10:45:15.714 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC2�Set RF match position c2 :50。
    199. 

  199. [Save Log Job] 2024-12-16 10:45:15.714 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas1� ramp to 45sccm。
    200. 

  200. [Save Log Job] 2024-12-16 10:45:15.714 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas2� ramp to 56sccm。
    201. 

  201. [Save Log Job] 2024-12-16 10:45:15.715 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas3� ramp to 66sccm。
    202. 

  202. [Save Log Job] 2024-12-16 10:45:15.715 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas4� ramp to 76sccm。
    203. 

  203. [Save Log Job] 2024-12-16 10:45:15.715 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas5� ramp to 86sccm。
    204. 

  204. [Save Log Job] 2024-12-16 10:45:15.715 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPowerOnOff�Set RF power Off。
    205. 

  205. [Save Log Job] 2024-12-16 10:45:15.716 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    206. 

  206. [Save Log Job] 2024-12-16 10:45:45.771 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104512-CACB' end step 1
    207. 

  207. [Save Log Job] 2024-12-16 10:45:45.771 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104512-CACB' start run step 2�initial。
    208. 

  208. [Save Log Job] 2024-12-16 10:45:45.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVMode�TV mode set to TVPressureCtrl。
    209. 

  209. [Save Log Job] 2024-12-16 10:45:45.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    210. 

  210. [Save Log Job] 2024-12-16 10:45:45.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVPressure�TV pressure set to 50 mtorr。
    211. 

  211. [Save Log Job] 2024-12-16 10:45:45.775 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetBoostPressure�Boost pump pressure set to 100 mTorr。
    212. 

  212. [Save Log Job] 2024-12-16 10:45:45.775 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMode�Set RF work mode to ContinuousWaveMode。
    213. 

  213. [Save Log Job] 2024-12-16 10:45:45.775 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingFrequency�RF set Frequency:0。
    214. 

  214. [Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingDuty�RF set Duty:0 。
    215. 

  215. [Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPower�RF set Power:0。
    216. 

  216. [Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC1�Set RF match position c1 :50。
    217. 

  217. [Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC2�Set RF match position c2 :50。
    218. 

  218. [Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas1� ramp to 45sccm。
    219. 

  219. [Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas2� ramp to 56sccm。
    220. 

  220. [Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas3� ramp to 66sccm。
    221. 

  221. [Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas4� ramp to 76sccm。
    222. 

  222. [Save Log Job] 2024-12-16 10:45:45.776 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas5� ramp to 86sccm。
    223. 

  223. [Save Log Job] 2024-12-16 10:45:45.777 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchProcessMode�Match mode set to PresetMode。
    224. 

  224. [Save Log Job] 2024-12-16 10:45:45.777 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPowerOnOff�Set RF power Off。
    225. 

  225. [Save Log Job] 2024-12-16 10:46:15.926 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104512-CACB' end step 2
    226. 

  226. [Save Log Job] 2024-12-16 10:46:15.926 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    227. 

  227. [Save Log Job] 2024-12-16 10:46:15.926 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed�Recipe�20241216104512-CACB
    228. 

  228. Start time�2024/12/16 10:45:15
    229. 

  229. End time�2024/12/16 10:46:15
    230. 

  230. Total time�0:1:0
    231. 

  231. [Save Log Job] 2024-12-16 10:46:15.926 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    232. 

  232. [Save Log Job] 2024-12-16 10:46:15.926 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    233. 

  233. [Save Log Job] 2024-12-16 10:46:17.965 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC1 ValveClose払移�圻咀�Valve keep open。
    234. 

  234. [Save Log Job] 2024-12-16 10:46:17.965 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC2 ValveClose払移�圻咀�Valve keep open。
    235. 

  235. [Save Log Job] 2024-12-16 10:46:17.967 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC4 ValveClose払移�圻咀�Valve keep open。
    236. 

  236. [Save Log Job] 2024-12-16 10:46:17.967 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC5 ValveClose払移�圻咀�Valve keep open。
    237. 

  237. [Save Log Job] 2024-12-16 10:46:17.968 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC3 ValveClose払移�圻咀�Valve keep open。
    238. 

  238. [Save Log Job] 2024-12-16 10:46:26.019 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    239. 

  239. [Save Log Job] 2024-12-16 10:46:26.119 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    240. 

  240. [Save Log Job] 2024-12-16 10:46:32.464 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    241. 

  241. [Save Log Job] 2024-12-16 10:46:32.464 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    242. 

  242. [Save Log Job] 2024-12-16 10:46:34.476 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇Chamber pumping valveClose払移�圻咀�Valve keep open。
    243. 

  243. [Save Log Job] 2024-12-16 10:46:35.786 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    244. 

  244. [Save Log Job] 2024-12-16 10:46:38.903 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    245. 

  245. [Save Log Job] 2024-12-16 10:47:28.974 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    246. 

  246. [Save Log Job] 2024-12-16 10:47:29.778 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    247. 

  247. [Save Log Job] 2024-12-16 10:47:29.781 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    248. 

  248. [Save Log Job] 2024-12-16 10:47:29.784 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    249. 

  249. [Save Log Job] 2024-12-16 10:47:29.880 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    250. 

  250. [Save Log Job] 2024-12-16 10:47:58.026 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 444444444444/, , )
    251. 

  251. [Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    252. 

  252. [Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check door status。
    253. 

  253. [Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check chamber door。
    254. 

  254. [Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check backpanel door。
    255. 

  255. [Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check pump status。
    256. 

  256. [Save Log Job] 2024-12-16 10:47:58.027 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Close all the valves。
    257. 

  257. [Save Log Job] 2024-12-16 10:47:58.127 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Open pumping valve。
    258. 

  258. [Save Log Job] 2024-12-16 10:47:58.129 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    259. 

  259. [Save Log Job] 2024-12-16 10:48:00.137 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇Chamber pumping valveOpen払移�圻咀�Valve keep closed 。
    260. 

  260. [Save Log Job] 2024-12-16 10:48:00.339 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check chamber pressure。
    261. 

  261. [Save Log Job] 2024-12-16 10:48:46.739 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Pump below 100mTorr。
    262. 

  262. [Save Log Job] 2024-12-16 10:48:46.839 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�PreProcess Finished in 0.8 minitues。
    263. 

  263. [Save Log Job] 2024-12-16 10:48:46.839 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    264. 

  264. [Save Log Job] 2024-12-16 10:48:46.839 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241216104757-CACB
    265. 

  265. [Save Log Job] 2024-12-16 10:48:46.839 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241216104757-CACB'
    266. 

  266. [Save Log Job] 2024-12-16 10:48:46.839 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104757-CACB' start run step 1�initial。
    267. 

  267. [Save Log Job] 2024-12-16 10:48:46.840 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVMode�TV mode set to TVPressureCtrl。
    268. 

  268. [Save Log Job] 2024-12-16 10:48:46.843 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    269. 

  269. [Save Log Job] 2024-12-16 10:48:46.843 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVPressure�TV pressure set to 50 mtorr。
    270. 

  270. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingFrequency�RF set Frequency:0。
    271. 

  271. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMode�Set RF work mode to ContinuousWaveMode。
    272. 

  272. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingDuty�RF set Duty:0 。
    273. 

  273. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPower�RF set Power:0。
    274. 

  274. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchProcessMode�Match mode set to PresetMode。
    275. 

  275. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC1�Set RF match position c1 :50。
    276. 

  276. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC2�Set RF match position c2 :50。
    277. 

  277. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas1� ramp to 45sccm。
    278. 

  278. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas2� ramp to 56sccm。
    279. 

  279. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas3� ramp to 66sccm。
    280. 

  280. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas4� ramp to 76sccm。
    281. 

  281. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas5� ramp to 86sccm。
    282. 

  282. [Save Log Job] 2024-12-16 10:48:46.844 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPowerOnOff�Set RF power Off。
    283. 

  283. [Save Log Job] 2024-12-16 10:48:46.867 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetBoostPressure�Boost pump pressure set to 100 mTorr。
    284. 

  284. [Save Log Job] 2024-12-16 10:48:46.940 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    285. 

  285. [Save Log Job] 2024-12-16 10:49:16.903 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104757-CACB' end step 1
    286. 

  286. [Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104757-CACB' start run step 2�initial。
    287. 

  287. [Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVMode�TV mode set to TVPressureCtrl。
    288. 

  288. [Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    289. 

  289. [Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVPressure�TV pressure set to 50 mtorr。
    290. 

  290. [Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetBoostPressure�Boost pump pressure set to 100 mTorr。
    291. 

  291. [Save Log Job] 2024-12-16 10:49:17.003 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMode�Set RF work mode to ContinuousWaveMode。
    292. 

  292. [Save Log Job] 2024-12-16 10:49:17.004 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingFrequency�RF set Frequency:0。
    293. 

  293. [Save Log Job] 2024-12-16 10:49:17.004 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingDuty�RF set Duty:0 。
    294. 

  294. [Save Log Job] 2024-12-16 10:49:17.004 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPower�RF set Power:0。
    295. 

  295. [Save Log Job] 2024-12-16 10:49:17.004 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchProcessMode�Match mode set to PresetMode。
    296. 

  296. [Save Log Job] 2024-12-16 10:49:17.005 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC1�Set RF match position c1 :50。
    297. 

  297. [Save Log Job] 2024-12-16 10:49:17.005 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC2�Set RF match position c2 :50。
    298. 

  298. [Save Log Job] 2024-12-16 10:49:17.005 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas1� ramp to 45sccm。
    299. 

  299. [Save Log Job] 2024-12-16 10:49:17.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas4� ramp to 76sccm。
    300. 

  300. [Save Log Job] 2024-12-16 10:49:17.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas3� ramp to 66sccm。
    301. 

  301. [Save Log Job] 2024-12-16 10:49:17.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas2� ramp to 56sccm。
    302. 

  302. [Save Log Job] 2024-12-16 10:49:17.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas5� ramp to 86sccm。
    303. 

  303. [Save Log Job] 2024-12-16 10:49:17.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPowerOnOff�Set RF power Off。
    304. 

  304. [Save Log Job] 2024-12-16 10:49:47.056 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216104757-CACB' end step 2
    305. 

  305. [Save Log Job] 2024-12-16 10:49:47.056 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    306. 

  306. [Save Log Job] 2024-12-16 10:49:47.056 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed�Recipe�20241216104757-CACB
    307. 

  307. Start time�2024/12/16 10:48:46
    308. 

  308. End time�2024/12/16 10:49:47
    309. 

  309. Total time�0:1:0
    310. 

  310. [Save Log Job] 2024-12-16 10:49:47.056 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    311. 

  311. [Save Log Job] 2024-12-16 10:49:47.158 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    312. 

  312. [Save Log Job] 2024-12-16 10:49:49.071 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC1 ValveClose払移�圻咀�Valve keep open。
    313. 

  313. [Save Log Job] 2024-12-16 10:49:49.071 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC3 ValveClose払移�圻咀�Valve keep open。
    314. 

  314. [Save Log Job] 2024-12-16 10:49:49.071 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC2 ValveClose払移�圻咀�Valve keep open。
    315. 

  315. [Save Log Job] 2024-12-16 10:49:49.071 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC4 ValveClose払移�圻咀�Valve keep open。
    316. 

  316. [Save Log Job] 2024-12-16 10:49:49.071 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC5 ValveClose払移�圻咀�Valve keep open。
    317. 

  317. [Save Log Job] 2024-12-16 10:49:57.221 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    318. 

  318. [Save Log Job] 2024-12-16 10:49:57.222 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    319. 

  319. [Save Log Job] 2024-12-16 10:50:03.571 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    320. 

  320. [Save Log Job] 2024-12-16 10:50:03.671 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    321. 

  321. [Save Log Job] 2024-12-16 10:50:05.688 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇Chamber pumping valveClose払移�圻咀�Valve keep open。
    322. 

  322. [Save Log Job] 2024-12-16 10:50:07.001 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    323. 

  323. [Save Log Job] 2024-12-16 10:50:10.122 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    324. 

  324. [Save Log Job] 2024-12-16 10:51:00.180 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    325. 

  325. [Save Log Job] 2024-12-16 10:51:00.984 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    326. 

  326. [Save Log Job] 2024-12-16 10:51:00.984 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    327. 

  327. [Save Log Job] 2024-12-16 10:51:00.984 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    328. 

  328. [Save Log Job] 2024-12-16 10:51:01.086 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    329. 

  329. [Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 5555555555/666666666666/, , )
    330. 

  330. [Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    331. 

  331. [Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check door status。
    332. 

  332. [Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check chamber door。
    333. 

  333. [Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�check backpanel door。
    334. 

  334. [Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check pump status。
    335. 

  335. [Save Log Job] 2024-12-16 10:55:10.299 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Close all the valves。
    336. 

  336. [Save Log Job] 2024-12-16 10:55:10.398 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Open pumping valve。
    337. 

  337. [Save Log Job] 2024-12-16 10:55:10.500 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    338. 

  338. [Save Log Job] 2024-12-16 10:55:12.408 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇Chamber pumping valveOpen払移�圻咀�Valve keep closed 。
    339. 

  339. [Save Log Job] 2024-12-16 10:55:14.020 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Check chamber pressure。
    340. 

  340. [Save Log Job] 2024-12-16 10:56:04.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�Pump below 100mTorr。
    341. 

  341. [Save Log Job] 2024-12-16 10:56:04.262 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    342. 

  342. [Save Log Job] 2024-12-16 10:56:04.262 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241216105510-CACB
    343. 

  343. [Save Log Job] 2024-12-16 10:56:04.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe�PreProcess Finished in 0.9 minitues。
    344. 

  344. [Save Log Job] 2024-12-16 10:56:04.263 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241216105510-CACB'
    345. 

  345. [Save Log Job] 2024-12-16 10:56:04.362 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216105510-CACB' start run step 1�initial。
    346. 

  346. [Save Log Job] 2024-12-16 10:56:04.362 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVMode�TV mode set to TVPressureCtrl。
    347. 

  347. [Save Log Job] 2024-12-16 10:56:04.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVPressure�TV pressure set to 50 mtorr。
    348. 

  348. [Save Log Job] 2024-12-16 10:56:04.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    349. 

  349. [Save Log Job] 2024-12-16 10:56:04.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetBoostPressure�Boost pump pressure set to 100 mTorr。
    350. 

  350. [Save Log Job] 2024-12-16 10:56:04.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMode�Set RF work mode to ContinuousWaveMode。
    351. 

  351. [Save Log Job] 2024-12-16 10:56:04.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPower�RF set Power:0。
    352. 

  352. [Save Log Job] 2024-12-16 10:56:04.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingFrequency�RF set Frequency:0。
    353. 

  353. [Save Log Job] 2024-12-16 10:56:04.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchProcessMode�Match mode set to PresetMode。
    354. 

  354. [Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC2�Set RF match position c2 :50。
    355. 

  355. [Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas1� ramp to 45sccm。
    356. 

  356. [Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC1�Set RF match position c1 :50。
    357. 

  357. [Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas4� ramp to 76sccm。
    358. 

  358. [Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas3� ramp to 66sccm。
    359. 

  359. [Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas5� ramp to 86sccm。
    360. 

  360. [Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPowerOnOff�Set RF power Off。
    361. 

  361. [Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas2� ramp to 56sccm。
    362. 

  362. [Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    363. 

  363. [Save Log Job] 2024-12-16 10:56:04.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingDuty�RF set Duty:0 。
    364. 

  364. [Save Log Job] 2024-12-16 10:56:34.420 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216105510-CACB' end step 1
    365. 

  365. [Save Log Job] 2024-12-16 10:56:34.520 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216105510-CACB' start run step 2�initial。
    366. 

  366. [Save Log Job] 2024-12-16 10:56:34.522 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVMode�TV mode set to TVPressureCtrl。
    367. 

  367. [Save Log Job] 2024-12-16 10:56:34.522 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    368. 

  368. [Save Log Job] 2024-12-16 10:56:34.523 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetTVPressure�TV pressure set to 50 mtorr。
    369. 

  369. [Save Log Job] 2024-12-16 10:56:34.523 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�PressureControl.SetBoostPressure�Boost pump pressure set to 100 mTorr。
    370. 

  370. [Save Log Job] 2024-12-16 10:56:34.524 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMode�Set RF work mode to ContinuousWaveMode。
    371. 

  371. [Save Log Job] 2024-12-16 10:56:34.524 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingDuty�RF set Duty:0 。
    372. 

  372. [Save Log Job] 2024-12-16 10:56:34.524 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPower�RF set Power:0。
    373. 

  373. [Save Log Job] 2024-12-16 10:56:34.524 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPulsingFrequency�RF set Frequency:0。
    374. 

  374. [Save Log Job] 2024-12-16 10:56:34.525 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC2�Set RF match position c2 :50。
    375. 

  375. [Save Log Job] 2024-12-16 10:56:34.525 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchPositionC1�Set RF match position c1 :50。
    376. 

  376. [Save Log Job] 2024-12-16 10:56:34.525 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas1� ramp to 45sccm。
    377. 

  377. [Save Log Job] 2024-12-16 10:56:34.525 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas2� ramp to 56sccm。
    378. 

  378. [Save Log Job] 2024-12-16 10:56:34.525 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetMatchProcessMode�Match mode set to PresetMode。
    379. 

  379. [Save Log Job] 2024-12-16 10:56:34.526 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas3� ramp to 66sccm。
    380. 

  380. [Save Log Job] 2024-12-16 10:56:34.526 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas5� ramp to 86sccm。
    381. 

  381. [Save Log Job] 2024-12-16 10:56:34.526 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�Rf.SetPowerOnOff�Set RF power Off。
    382. 

  382. [Save Log Job] 2024-12-16 10:56:34.526 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute�MfcGas4� ramp to 76sccm。
    383. 

  383. [Save Log Job] 2024-12-16 10:57:04.574 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241216105510-CACB' end step 2
    384. 

  384. [Save Log Job] 2024-12-16 10:57:04.574 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    385. 

  385. [Save Log Job] 2024-12-16 10:57:04.576 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    386. 

  386. [Save Log Job] 2024-12-16 10:57:04.576 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed�Recipe�20241216105510-CACB
    387. 

  387. Start time�2024/12/16 10:56:04
    388. 

  388. End time�2024/12/16 10:57:04
    389. 

  389. Total time�0:1:0
    390. 

  390. [Save Log Job] 2024-12-16 10:57:04.578 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    391. 

  391. [Save Log Job] 2024-12-16 10:57:06.585 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC1 ValveClose払移�圻咀�Valve keep open。
    392. 

  392. [Save Log Job] 2024-12-16 10:57:06.585 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC2 ValveClose払移�圻咀�Valve keep open。
    393. 

  393. [Save Log Job] 2024-12-16 10:57:06.585 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC3 ValveClose払移�圻咀�Valve keep open。
    394. 

  394. [Save Log Job] 2024-12-16 10:57:06.585 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC4 ValveClose払移�圻咀�Valve keep open。
    395. 

  395. [Save Log Job] 2024-12-16 10:57:06.585 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇MFC5 ValveClose払移�圻咀�Valve keep open。
    396. 

  396. [Save Log Job] 2024-12-16 10:57:14.736 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    397. 

  397. [Save Log Job] 2024-12-16 10:57:14.736 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    398. 

  398. [Save Log Job] 2024-12-16 10:57:21.078 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    399. 

  399. [Save Log Job] 2024-12-16 10:57:21.079 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    400. 

  400. [Save Log Job] 2024-12-16 10:57:23.096 LOG.INFO UiEvent.cs Line:51 Event() - System 熊壇Chamber pumping valveClose払移�圻咀�Valve keep open。
    401. 

  401. [Save Log Job] 2024-12-16 10:57:24.503 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    402. 

  402. [Save Log Job] 2024-12-16 10:57:27.522 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    403. 

  403. [Save Log Job] 2024-12-16 10:58:17.584 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    404. 

  404. [Save Log Job] 2024-12-16 10:58:18.490 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    405. 

  405. [Save Log Job] 2024-12-16 10:58:18.490 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    406. 

  406. [Save Log Job] 2024-12-16 10:58:18.490 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    407. 

  407. [Save Log Job] 2024-12-16 10:58:18.490 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    408. 

  408. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-16 11:04:10.079 LOG.INFO UiEvent.cs Line:57 Event() - 厮将銭俊貧譜姥糞扮陣崙狼由
    409. 

  409. [Save Log Job] 2024-12-16 11:04:10.081 LOG.INFO UiEvent.cs Line:58 Event() - 厮将銭俊貧譜姥糞扮陣崙狼由
    410. 

  410. [Save Log Job] 2024-12-16 11:04:11.466 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    411. 

  411. [Save Log Job] 2024-12-16 11:04:11.913 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    412. 

  412. [Save Log Job] 2024-12-16 11:04:15.034 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
    413. 

  413. [Save Log Job] 2024-12-16 11:04:17.948 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    414. 

  414. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-16 11:07:03.939 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    415. 

  415. [Save Log Job] 2024-12-16 11:07:04.557 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    416. 

  416. [Save Log Job] 2024-12-16 11:07:07.674 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
    417. 

  417. [Save Log Job] 2024-12-16 11:07:12.630 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    418. 

  418. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-16 11:07:39.302 LOG.INFO UiEvent.cs Line:58 Event() - 厮将銭俊貧譜姥糞扮陣崙狼由
    419. 

  419. [Save Log Job] 2024-12-16 11:07:39.303 LOG.INFO UiEvent.cs Line:58 Event() - 厮将銭俊貧譜姥糞扮陣崙狼由
    420. 

  420. [Save Log Job] 2024-12-16 11:07:40.711 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    421. 

  421. [Save Log Job] 2024-12-16 11:07:40.928 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    422. 

  422. [Save Log Job] 2024-12-16 11:07:44.544 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
    423. 

  423. [Save Log Job] 2024-12-16 11:07:48.672 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    424. 

  424. --------------------------------[Footer Log]----------------------------------------- 
    425.