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Triton160UI
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appLog20241115.txt

appLog20241115.txt 22 KB
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  1. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-15 00:21:50.160 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。
    2. 

  2. [Save Log Job] 2024-11-15 03:21:51.019 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。
    3. 

  3. [Save Log Job] 2024-11-15 06:21:51.779 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。
    4. 

  4. [Save Log Job] 2024-11-15 09:21:52.468 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。
    5. 

  5. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-15 13:38:20.104 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    6. 

  6. [Save Log Job] 2024-11-15 13:38:21.353 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    7. 

  7. [Save Log Job] 2024-11-15 13:38:22.373 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    8. 

  8. [Save Log Job] 2024-11-15 13:38:24.980 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM 。
    9. 

  9. [Save Log Job] 2024-11-15 13:38:33.345 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    10. 

  10. [Save Log Job] 2024-11-15 13:38:43.947 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    11. 

  11. [Save Log Job] 2024-11-15 13:38:43.948 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    12. 

  12. [Save Log Job] 2024-11-15 13:38:43.949 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    13. 

  13. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-15 13:40:43.120 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    14. 

  14. [Save Log Job] 2024-11-15 13:40:43.123 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    15. 

  15. [Save Log Job] 2024-11-15 13:40:44.818 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    16. 

  16. [Save Log Job] 2024-11-15 13:40:44.818 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    17. 

  17. [Save Log Job] 2024-11-15 13:40:48.364 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM 。
    18. 

  18. [Save Log Job] 2024-11-15 13:40:50.586 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    19. 

  19. [Save Log Job] 2024-11-15 13:40:53.879 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    20. 

  20. [Save Log Job] 2024-11-15 13:40:53.880 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    21. 

  21. [Save Log Job] 2024-11-15 13:40:53.881 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    22. 

  22. [Save Log Job] 2024-11-15 13:41:13.655 LOG.INFO YZQZFabAuto.cs Line:56 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"12332432434324","MachineNumber":"22","MachineType":"稷以打胶机"}]
    23. 

  23. [Save Log Job] 2024-11-15 13:41:15.722 LOG.INFO YZQZFabAuto.cs Line:58 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|操作超时
    24. 

  24. [Save Log Job] 2024-11-15 13:41:32.347 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 12332432434324/)
    25. 

  25. [Save Log Job] 2024-11-15 13:41:32.348 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    26. 

  26. [Save Log Job] 2024-11-15 13:41:32.351 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    27. 

  27. [Save Log Job] 2024-11-15 13:41:32.358 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    28. 

  28. [Save Log Job] 2024-11-15 13:41:32.359 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    29. 

  29. [Save Log Job] 2024-11-15 13:41:32.361 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    30. 

  30. [Save Log Job] 2024-11-15 13:41:32.362 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    31. 

  31. [Save Log Job] 2024-11-15 13:41:32.448 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    32. 

  32. [Save Log Job] 2024-11-15 13:41:32.449 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    33. 

  33. [Save Log Job] 2024-11-15 13:41:34.454 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    34. 

  34. [Save Log Job] 2024-11-15 13:41:35.056 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    35. 

  35. [Save Log Job] 2024-11-15 13:42:10.119 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    36. 

  36. [Save Log Job] 2024-11-15 13:42:10.120 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    37. 

  37. [Save Log Job] 2024-11-15 13:42:10.120 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    38. 

  38. [Save Log Job] 2024-11-15 13:42:10.121 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241115134132-CACB
    39. 

  39. [Save Log Job] 2024-11-15 13:42:10.122 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241115134132-CACB'
    40. 

  40. [Save Log Job] 2024-11-15 13:42:10.219 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115134132-CACB' start run step 1：initial。
    41. 

  41. [Save Log Job] 2024-11-15 13:42:10.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    42. 

  42. [Save Log Job] 2024-11-15 13:42:10.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    43. 

  43. [Save Log Job] 2024-11-15 13:42:10.222 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    44. 

  44. [Save Log Job] 2024-11-15 13:42:10.223 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    45. 

  45. [Save Log Job] 2024-11-15 13:42:10.223 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    46. 

  46. [Save Log Job] 2024-11-15 13:42:10.224 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    47. 

  47. [Save Log Job] 2024-11-15 13:42:10.225 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    48. 

  48. [Save Log Job] 2024-11-15 13:42:10.227 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    49. 

  49. [Save Log Job] 2024-11-15 13:42:10.228 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    50. 

  50. [Save Log Job] 2024-11-15 13:42:10.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    51. 

  51. [Save Log Job] 2024-11-15 13:42:10.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    52. 

  52. [Save Log Job] 2024-11-15 13:42:10.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    53. 

  53. [Save Log Job] 2024-11-15 13:42:10.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    54. 

  54. [Save Log Job] 2024-11-15 13:42:10.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    55. 

  55. [Save Log Job] 2024-11-15 13:42:10.235 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    56. 

  56. [Save Log Job] 2024-11-15 13:42:10.236 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    57. 

  57. [Save Log Job] 2024-11-15 13:42:10.237 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    58. 

  58. [Save Log Job] 2024-11-15 13:42:10.238 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    59. 

  59. [Save Log Job] 2024-11-15 13:42:40.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115134132-CACB' end step 1
    60. 

  60. [Save Log Job] 2024-11-15 13:42:40.321 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115134132-CACB' start run step 2：initial。
    61. 

  61. [Save Log Job] 2024-11-15 13:42:40.322 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    62. 

  62. [Save Log Job] 2024-11-15 13:42:40.323 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    63. 

  63. [Save Log Job] 2024-11-15 13:42:40.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    64. 

  64. [Save Log Job] 2024-11-15 13:42:40.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    65. 

  65. [Save Log Job] 2024-11-15 13:42:40.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    66. 

  66. [Save Log Job] 2024-11-15 13:42:40.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    67. 

  67. [Save Log Job] 2024-11-15 13:42:40.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    68. 

  68. [Save Log Job] 2024-11-15 13:42:40.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    69. 

  69. [Save Log Job] 2024-11-15 13:42:40.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    70. 

  70. [Save Log Job] 2024-11-15 13:42:40.331 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    71. 

  71. [Save Log Job] 2024-11-15 13:42:40.332 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    72. 

  72. [Save Log Job] 2024-11-15 13:42:40.333 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    73. 

  73. [Save Log Job] 2024-11-15 13:42:40.333 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    74. 

  74. [Save Log Job] 2024-11-15 13:42:40.334 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    75. 

  75. [Save Log Job] 2024-11-15 13:42:40.335 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    76. 

  76. [Save Log Job] 2024-11-15 13:42:40.336 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    77. 

  77. [Save Log Job] 2024-11-15 13:42:40.337 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    78. 

  78. [Save Log Job] 2024-11-15 13:51:03.978 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
    79. 

  79. [Save Log Job] 2024-11-15 13:51:03.986 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    80. 

  80. [Save Log Job] 2024-11-15 13:51:03.989 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    81. 

  81. [Save Log Job] 2024-11-15 13:51:04.013 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241115134132-CACB
    82. 

  82. Start time：2024/11/15 13:42:10
    83. 

  83. End time：2024/11/15 13:42:41
    84. 

  84. Total time：0:0:31
    85. 

  85. [Save Log Job] 2024-11-15 13:51:04.037 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    86. 

  86. [Save Log Job] 2024-11-15 13:51:04.038 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    87. 

  87. [Save Log Job] 2024-11-15 13:51:04.040 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    88. 

  88. [Save Log Job] 2024-11-15 13:51:04.040 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    89. 

  89. [Save Log Job] 2024-11-15 13:51:04.040 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    90. 

  90. [Save Log Job] 2024-11-15 13:51:04.040 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    91. 

  91. [Save Log Job] 2024-11-15 13:51:04.040 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    92. 

  92. [Save Log Job] 2024-11-15 13:51:04.062 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    93. 

  93. [Save Log Job] 2024-11-15 13:51:04.062 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    94. 

  94. [Save Log Job] 2024-11-15 13:51:04.062 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    95. 

  95. [Save Log Job] 2024-11-15 13:51:14.763 LOG.INFO YZQZFabAuto.cs Line:56 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"21323432432","MachineNumber":"22","MachineType":"稷以打胶机"}]
    96. 

  96. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-15 13:52:55.503 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    97. 

  97. [Save Log Job] 2024-11-15 13:52:55.505 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    98. 

  98. [Save Log Job] 2024-11-15 13:52:57.012 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    99. 

  99. [Save Log Job] 2024-11-15 13:52:57.129 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    100. 

  100. [Save Log Job] 2024-11-15 13:53:00.641 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM 。
    101. 

  101. [Save Log Job] 2024-11-15 13:53:04.653 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    102. 

  102. [Save Log Job] 2024-11-15 13:53:08.767 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    103. 

  103. [Save Log Job] 2024-11-15 13:53:08.768 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    104. 

  104. [Save Log Job] 2024-11-15 13:53:08.778 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    105. 

  105. [Save Log Job] 2024-11-15 13:53:14.244 LOG.INFO YZQZFabAuto.cs Line:56 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"32423423423","MachineNumber":"22","MachineType":"稷以打胶机"}]
    106. 

  106. [Save Log Job] 2024-11-15 13:53:16.305 LOG.INFO YZQZFabAuto.cs Line:58 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|操作超时
    107. 

  107. [Save Log Job] 2024-11-15 13:53:49.513 LOG.INFO YZQZFabAuto.cs Line:56 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"32423423423","MachineNumber":"22","MachineType":"稷以打胶机"}]
    108. 

  108. [Save Log Job] 2024-11-15 13:53:51.544 LOG.INFO YZQZFabAuto.cs Line:58 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|操作超时
    109. 

  109. [Save Log Job] 2024-11-15 13:54:12.786 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 32423423423/)
    110. 

  110. [Save Log Job] 2024-11-15 13:54:12.787 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    111. 

  111. [Save Log Job] 2024-11-15 13:54:12.788 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    112. 

  112. [Save Log Job] 2024-11-15 13:54:12.890 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    113. 

  113. [Save Log Job] 2024-11-15 13:54:12.891 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    114. 

  114. [Save Log Job] 2024-11-15 13:54:12.891 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    115. 

  115. [Save Log Job] 2024-11-15 13:54:12.892 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    116. 

  116. [Save Log Job] 2024-11-15 13:54:12.893 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    117. 

  117. [Save Log Job] 2024-11-15 13:54:12.990 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    118. 

  118. [Save Log Job] 2024-11-15 13:54:15.006 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    119. 

  119. [Save Log Job] 2024-11-15 13:54:16.811 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    120. 

  120. [Save Log Job] 2024-11-15 13:55:07.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    121. 

  121. [Save Log Job] 2024-11-15 13:55:07.347 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    122. 

  122. [Save Log Job] 2024-11-15 13:55:07.348 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    123. 

  123. [Save Log Job] 2024-11-15 13:55:07.349 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241115135412-CACB
    124. 

  124. [Save Log Job] 2024-11-15 13:55:07.349 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241115135412-CACB'
    125. 

  125. [Save Log Job] 2024-11-15 13:55:07.350 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115135412-CACB' start run step 1：initial。
    126. 

  126. [Save Log Job] 2024-11-15 13:55:07.351 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    127. 

  127. [Save Log Job] 2024-11-15 13:55:07.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    128. 

  128. [Save Log Job] 2024-11-15 13:55:07.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    129. 

  129. [Save Log Job] 2024-11-15 13:55:07.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    130. 

  130. [Save Log Job] 2024-11-15 13:55:07.354 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    131. 

  131. [Save Log Job] 2024-11-15 13:55:07.356 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    132. 

  132. [Save Log Job] 2024-11-15 13:55:07.356 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    133. 

  133. [Save Log Job] 2024-11-15 13:55:07.357 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    134. 

  134. [Save Log Job] 2024-11-15 13:55:07.358 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    135. 

  135. [Save Log Job] 2024-11-15 13:55:07.358 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    136. 

  136. [Save Log Job] 2024-11-15 13:55:07.359 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    137. 

  137. [Save Log Job] 2024-11-15 13:55:07.360 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    138. 

  138. [Save Log Job] 2024-11-15 13:55:07.361 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    139. 

  139. [Save Log Job] 2024-11-15 13:55:07.362 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    140. 

  140. [Save Log Job] 2024-11-15 13:55:07.362 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    141. 

  141. [Save Log Job] 2024-11-15 13:55:07.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    142. 

  142. [Save Log Job] 2024-11-15 13:55:07.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    143. 

  143. [Save Log Job] 2024-11-15 13:55:07.365 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    144. 

  144. [Save Log Job] 2024-11-15 13:55:37.443 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115135412-CACB' end step 1
    145. 

  145. [Save Log Job] 2024-11-15 13:55:37.444 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241115135412-CACB' start run step 2：initial。
    146. 

  146. [Save Log Job] 2024-11-15 13:55:37.445 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    147. 

  147. [Save Log Job] 2024-11-15 13:55:37.445 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    148. 

  148. [Save Log Job] 2024-11-15 13:55:37.446 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    149. 

  149. [Save Log Job] 2024-11-15 13:55:37.447 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    150. 

  150. [Save Log Job] 2024-11-15 13:55:37.448 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    151. 

  151. [Save Log Job] 2024-11-15 13:55:37.449 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    152. 

  152. [Save Log Job] 2024-11-15 13:55:37.450 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    153. 

  153. [Save Log Job] 2024-11-15 13:55:37.450 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    154. 

  154. [Save Log Job] 2024-11-15 13:55:37.451 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    155. 

  155. [Save Log Job] 2024-11-15 13:55:37.452 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    156. 

  156. [Save Log Job] 2024-11-15 13:55:37.453 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    157. 

  157. [Save Log Job] 2024-11-15 13:55:37.454 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    158. 

  158. [Save Log Job] 2024-11-15 13:55:37.455 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    159. 

  159. [Save Log Job] 2024-11-15 13:55:37.456 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    160. 

  160. [Save Log Job] 2024-11-15 13:55:37.457 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    161. 

  161. [Save Log Job] 2024-11-15 13:55:37.457 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    162. 

  162. [Save Log Job] 2024-11-15 13:55:37.458 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    163. 

  163. [Save Log Job] 2024-11-15 13:55:45.447 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
    164. 

  164. [Save Log Job] 2024-11-15 13:55:45.454 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    165. 

  165. [Save Log Job] 2024-11-15 13:55:45.482 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    166. 

  166. [Save Log Job] 2024-11-15 13:55:45.483 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241115135412-CACB
    167. 

  167. Start time：2024/11/15 13:55:07
    168. 

  168. End time：2024/11/15 13:55:38
    169. 

  169. Total time：0:0:31
    170. 

  170. [Save Log Job] 2024-11-15 13:55:45.991 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    171. 

  171. [Save Log Job] 2024-11-15 13:55:46.000 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    172. 

  172. [Save Log Job] 2024-11-15 13:55:46.023 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    173. 

  173. [Save Log Job] 2024-11-15 13:55:46.522 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    174. 

  174. [Save Log Job] 2024-11-15 13:55:47.140 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    175. 

  175.