Triton_160/Triton160UI/bin/Debug/Logs/appLog20241028.txt

--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 09:12:21.685 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 09:12:21.685 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 09:12:23.274 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 09:12:23.524 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 09:12:26.946 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 09:12:33.887 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 09:23:25.297 LOG.ERROR LOG.cs Line:51 Write() - 
System.ArgumentNullException: Value cannot be null.
参数名: element
   在 MS.Internal.Media.VisualTreeUtils.AsNonNullVisual(DependencyObject element, Visual& visual, Visual3D& visual3D)
   在 System.Windows.Media.VisualTreeHelper.GetParent(DependencyObject reference)
   在 Aitex.Triton160.UI.Views.RecipeEditorView.TreeViewRcpList_DragEnter(Object sender, DragEventArgs e) 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\Views\RecipeEditorView.xaml.cs:行号 909
[Save Log Job] 2024-10-28 09:23:25.403 LOG.INFO UiEvent.cs Line:51 Event() - Move System recipe 123。
[Save Log Job] 2024-10-28 10:05:10.350 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-28 10:05:10.457 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 10:51:14.453 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 10:51:14.782 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 10:51:17.998 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 10:51:20.920 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 11:02:35.577 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-28 11:07:39.625 LOG.ERROR DuplexChannelServiceClientWrapper.cs Line:97 Do() - EventService 服务异常
System.ServiceModel.CommunicationException: 服务器未提供有意义的回复；这可能是由协定不匹配、会话过早关闭或内部服务器错误引起的。

Server stack trace: 
   在 System.ServiceModel.Channels.ServiceChannel.Call(String action, Boolean oneway, ProxyOperationRuntime operation, Object[] ins, Object[] outs, TimeSpan timeout)
   在 System.ServiceModel.Channels.ServiceChannelProxy.InvokeService(IMethodCallMessage methodCall, ProxyOperationRuntime operation)
   在 System.ServiceModel.Channels.ServiceChannelProxy.Invoke(IMessage message)

Exception rethrown at [0]: 
   在 System.Runtime.Remoting.Proxies.RealProxy.HandleReturnMessage(IMessage reqMsg, IMessage retMsg)
   在 System.Runtime.Remoting.Proxies.RealProxy.PrivateInvoke(MessageData& msgData, Int32 type)
   在 Aitex.Core.WCF.Interface.IEventService.Register(Guid id)
   在 Aitex.Core.WCF.EventServiceClient.<>c__DisplayClass5_0.<Register>b__0(IEventService svc) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\EventServiceClient.cs:行号 34
   在 Aitex.Core.WCF.DuplexChannelServiceClientWrapper`1.Do(Action`1 action) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\DuplexChannelServiceClientWrapper.cs:行号 66
[Save Log Job] 2024-10-28 11:07:45.846 LOG.INFO DuplexChannelServiceClientWrapper.cs Line:71 Do() - EventService 服务恢复
[Save Log Job] 2024-10-28 11:11:50.096 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-28 11:19:24.444 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 11:36:05.083 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 11:36:05.084 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 11:36:12.105 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 11:36:42.835 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 11:37:40.679 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 14:49:29.059 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 14:53:59.083 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 14:53:59.084 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 14:54:00.368 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 14:54:00.909 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 14:54:02.416 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 14:57:17.698 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-28 14:57:27.125 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 15:06:20.338 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 15:12:34.057 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 16:09:20.777 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 16:53:47.192 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 16:53:47.194 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 16:53:48.625 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 16:53:48.625 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 16:53:52.272 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 16:54:02.329 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 16:54:13.180 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-28 16:54:13.180 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-28 16:54:13.181 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-28 16:54:24.041 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-28 16:54:49.715 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 16:54:49.719 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 16:55:00.190 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-28 16:55:29.977 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-28 16:55:36.677 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-28 16:55:36.683 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-28 16:55:36.683 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-28 16:55:36.683 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-28 16:55:54.583 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-28 16:55:54.584 LOG.INFO UiEvent.cs Line:51 Event() - System Can not run recipe：can not set chamber pumping open valve to open。
[Save Log Job] 2024-10-28 16:55:54.586 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-28 16:55:54.587 LOG.INFO UiEvent.cs Line:51 Event() - System running failed
[Save Log Job] 2024-10-28 16:55:54.852 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 16:56:15.054 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 16:56:28.802 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-28 16:56:28.803 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 16:56:28.803 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 16:56:28.810 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-28 16:56:29.394 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-28 16:56:29.400 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-28 16:56:29.400 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-28 16:56:29.401 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-28 16:56:29.401 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-28 16:56:29.401 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-28 16:56:30.459 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-28 16:56:32.664 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-28 16:56:32.664 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-28 16:56:32.664 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.1 minitues。
[Save Log Job] 2024-10-28 16:56:32.746 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241028165628-123
[Save Log Job] 2024-10-28 16:56:32.747 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241028165628-123'
[Save Log Job] 2024-10-28 16:56:32.747 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028165628-123' start run step 1：initial。
[Save Log Job] 2024-10-28 16:56:32.747 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-28 16:56:32.748 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-28 16:56:32.748 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-28 16:56:32.749 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-28 16:56:32.749 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-28 16:56:32.749 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-28 16:56:32.750 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-28 16:56:32.751 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-28 16:56:32.751 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-28 16:56:32.751 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-28 16:56:32.752 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-28 16:56:32.752 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-28 16:56:32.753 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-28 16:56:32.753 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-28 16:56:32.753 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-28 16:56:32.754 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-28 16:56:32.754 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-28 16:56:32.847 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-28 16:56:56.376 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-10-28 16:56:56.377 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-28 16:56:56.476 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-28 16:56:56.476 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241028165628-123
Start time：2024/10/28 16:56:32
End time：2024/10/28 16:56:56
Total time：0:0:23
[Save Log Job] 2024-10-28 16:56:56.477 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-28 16:56:56.477 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-10-28 16:56:58.489 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 16:57:06.546 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-10-28 16:57:06.647 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-10-28 16:57:14.825 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-10-28 16:57:14.825 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Start cycle purge, Loop 1
[Save Log Job] 2024-10-28 16:57:14.825 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, pumping pressure to 100 mTor
[Save Log Job] 2024-10-28 16:57:14.926 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, pump delay 10 seconds
[Save Log Job] 2024-10-28 16:57:16.839 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 16:57:24.998 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent pressure to 700000 mtor
[Save Log Job] 2024-10-28 16:57:57.312 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-10-28 16:57:57.312 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-10-28 16:57:57.413 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 16:57:59.323 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber purge valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 16:57:59.323 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 16:58:15.586 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 16:58:15.586 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-28 16:58:15.587 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 16:58:15.592 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-28 16:58:22.521 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-28 16:58:22.528 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-28 16:58:22.529 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-28 16:58:22.529 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-28 16:58:22.531 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-28 16:58:22.532 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-28 16:58:25.167 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-28 16:58:28.319 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 17:21:16.155 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 17:21:16.157 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 17:21:17.490 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 17:21:17.490 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 17:21:27.086 LOG.ERROR LOG.cs Line:51 Write() - 
System.NullReferenceException: Object reference not set to an instance of an object.
   在 Aitex.Triton160.UI.UiEvent.Stop() 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\UiEvent.cs:行号 32
   在 Aitex.Triton160.UI.Triton160UiSystem.Terminate() 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\Triton160UiSystem.cs:行号 134
[Save Log Job] 2024-10-28 17:21:27.176 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 17:24:42.359 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 17:24:42.359 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 17:25:43.685 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 17:25:43.688 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 17:25:45.014 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 17:25:45.264 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 17:25:48.885 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 17:25:56.846 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 17:26:03.180 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-28 17:26:03.181 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-28 17:26:03.181 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-28 17:30:16.632 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-28 17:30:16.638 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 17:30:16.638 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 17:30:16.731 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-28 17:30:16.731 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-28 17:30:16.733 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-28 17:30:16.735 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-28 17:30:16.735 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-28 17:30:16.735 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-28 17:30:16.832 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-28 17:30:17.942 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-28 17:31:08.225 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-28 17:31:14.301 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
[Save Log Job] 2024-10-28 17:31:14.301 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-28 17:31:14.303 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241028173013-123
[Save Log Job] 2024-10-28 17:31:14.303 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241028173013-123'
[Save Log Job] 2024-10-28 17:31:14.393 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028173013-123' start run step 1：initial。
[Save Log Job] 2024-10-28 17:31:14.393 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-28 17:31:14.394 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-28 17:31:14.394 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-28 17:31:14.394 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-28 17:31:14.395 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-28 17:31:14.395 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-28 17:31:14.396 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-28 17:31:14.396 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-28 17:31:14.396 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-28 17:31:14.397 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-28 17:31:14.397 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-28 17:31:14.398 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-28 17:31:14.398 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-28 17:31:14.398 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-28 17:31:14.399 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-28 17:31:14.399 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-28 17:31:14.400 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-28 17:31:14.493 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-28 17:31:44.451 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028173013-123' end step 1
[Save Log Job] 2024-10-28 17:31:44.552 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028173013-123' start run step 2：initial。
[Save Log Job] 2024-10-28 17:31:44.552 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-28 17:31:44.553 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-28 17:31:44.553 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-28 17:31:44.554 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-28 17:31:44.555 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-28 17:31:44.555 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-28 17:31:44.555 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-28 17:31:44.556 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-28 17:31:44.556 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-28 17:31:44.556 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-28 17:31:44.557 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-28 17:31:44.558 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-28 17:31:44.558 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-28 17:31:44.559 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-28 17:31:44.559 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-28 17:31:44.559 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-28 17:31:44.560 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-28 17:31:59.839 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-28 17:31:59.941 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-28 17:31:59.941 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-28 17:31:59.941 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241028173013-123
Start time：2024/10/28 17:31:14
End time：2024/10/28 17:31:59
Total time：0:0:45
[Save Log Job] 2024-10-28 17:31:59.941 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-28 17:32:00.041 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 17:32:01.953 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 17:32:01.953 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 17:32:01.954 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 17:32:01.954 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 17:47:24.070 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  123  save completed
[Save Log Job] 2024-10-28 17:47:24.070 LOG.INFO UiEvent.cs Line:51 Event() - System Information
[Save Log Job] 2024-10-28 17:47:31.540 LOG.INFO UiEvent.cs Line:51 Event() - System Information
[Save Log Job] 2024-10-28 17:47:31.540 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  123  save completed
[Save Log Job] 2024-10-28 17:47:37.839 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 17:47:43.065 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-28 17:47:43.065 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-28 17:47:43.167 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-28 17:47:43.167 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-28 17:47:43.167 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-28 17:47:43.167 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-28 17:47:43.169 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-28 17:47:43.270 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-28 17:47:43.270 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 17:47:43.271 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-28 17:47:52.937 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。
[Save Log Job] 2024-10-28 17:47:52.937 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-28 17:47:52.937 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-28 17:47:52.939 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241028174743-123
[Save Log Job] 2024-10-28 17:47:52.939 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241028174743-123'
[Save Log Job] 2024-10-28 17:47:53.037 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028174743-123' start run step 1：initial。
[Save Log Job] 2024-10-28 17:47:53.038 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-28 17:47:53.038 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-28 17:47:53.038 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-28 17:47:53.038 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-28 17:47:53.039 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-28 17:47:53.039 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-28 17:47:53.039 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-28 17:47:53.039 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-28 17:47:53.039 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-28 17:47:53.041 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-28 17:47:53.041 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-28 17:47:53.041 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-28 17:47:53.041 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-28 17:47:53.041 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-28 17:47:53.042 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-28 17:47:53.042 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-28 17:47:53.042 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-28 17:47:53.042 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-28 17:48:23.098 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028174743-123' end step 1
[Save Log Job] 2024-10-28 17:48:23.098 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-28 17:48:23.098 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241028174743-123
Start time：2024/10/28 17:47:52
End time：2024/10/28 17:48:23
Total time：0:0:30
[Save Log Job] 2024-10-28 17:48:23.098 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-28 17:48:49.355 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 17:48:49.355 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 17:48:49.355 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 17:48:50.989 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 17:48:50.989 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-10-28 17:48:50.989 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 17:48:50.989 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 17:48:59.463 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-10-28 17:48:59.463 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-10-28 17:49:09.227 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-10-28 17:49:09.327 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-10-28 17:49:11.339 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 17:49:12.648 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-10-28 17:49:15.767 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-10-28 17:50:05.902 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
[Save Log Job] 2024-10-28 17:50:06.606 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.7 minitues
[Save Log Job] 2024-10-28 17:50:06.607 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
[Save Log Job] 2024-10-28 17:50:06.607 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-10-28 17:50:06.807 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 18:01:41.086 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 18:01:41.087 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 18:01:42.535 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 18:01:42.670 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 18:01:46.389 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 18:01:50.113 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 18:15:42.128 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-28 18:16:33.851 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 18:16:33.852 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 18:20:33.557 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-28 18:38:22.198 LOG.ERROR LOG.cs Line:56 Write() - UI exception
System.ComponentModel.Win32Exception (0x80004005): 配额不足，无法处理此命令。
   在 MS.Win32.UnsafeNativeMethods.PostMessage(HandleRef hwnd, WindowMessage msg, IntPtr wparam, IntPtr lparam)
   在 System.Windows.Interop.HwndTarget.UpdateWindowSettings(Boolean enableRenderTarget, Nullable`1 channelSet)
   在 System.Windows.Interop.HwndTarget.OnShowWindow(Boolean enableRenderTarget)
   在 System.Windows.Interop.HwndTarget.HandleMessage(WindowMessage msg, IntPtr wparam, IntPtr lparam)
   在 System.Windows.Interop.HwndSource.HwndTargetFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled)
   在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled)
   在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o)
   在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs)
   在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler)
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 19:59:15.429 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 19:59:16.924 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 20:00:54.054 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:00:55.529 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 20:00:55.529 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:00:59.192 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 20:01:07.235 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 20:04:55.465 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-28 20:04:56.602 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:04:57.528 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 20:07:24.642 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:07:24.644 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:07:26.364 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:07:26.493 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 20:07:29.911 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 20:07:41.671 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 20:28:09.777 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:28:09.778 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 20:32:53.065 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:32:53.066 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:32:54.448 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 20:32:54.496 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:32:58.115 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 20:33:02.352 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 20:33:08.070 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-28 20:33:08.071 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-28 20:33:08.071 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-28 20:33:22.760 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-28 20:33:31.714 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 20:37:45.573 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:37:45.576 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:37:47.009 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:37:47.009 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 20:37:50.576 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 20:38:55.930 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:38:55.932 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:38:57.472 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:38:57.472 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 20:39:01.116 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 20:39:05.247 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 20:40:11.714 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:40:13.207 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 20:40:13.207 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:40:16.871 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 20:40:20.827 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 20:40:23.914 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-28 20:40:23.915 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-28 20:40:23.916 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-28 20:40:30.934 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-28 20:40:36.760 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-28 20:40:36.761 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:40:37.750 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:40:37.759 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-28 20:40:41.714 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-28 20:40:41.718 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-28 20:40:41.748 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-28 20:40:43.277 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-28 20:40:58.746 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-28 20:41:01.616 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 20:42:22.076 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:42:22.079 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:42:23.521 LOG.INFO UiEvent.cs Line:50 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 20:42:23.521 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:42:27.193 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 20:50:59.386 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:50:59.387 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 20:51:00.755 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:51:00.802 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 20:51:04.322 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 20:51:11.601 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 20:51:15.284 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-28 20:51:15.284 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-28 20:51:15.285 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-28 20:51:22.530 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-28 20:51:22.534 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-28 20:51:22.535 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 20:51:22.535 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-28 20:51:22.535 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-28 20:51:22.535 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-28 20:51:22.536 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-28 20:51:22.536 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-28 20:51:22.626 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-28 20:51:24.642 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-28 20:51:24.945 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-28 20:51:59.804 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-28 20:51:59.902 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
[Save Log Job] 2024-10-28 20:51:59.902 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-28 20:51:59.903 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241028205122-123
[Save Log Job] 2024-10-28 20:51:59.903 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241028205122-123'
[Save Log Job] 2024-10-28 20:52:00.004 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028205122-123' start run step 1：initial。
[Save Log Job] 2024-10-28 20:52:00.005 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-28 20:52:00.005 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-28 20:52:00.008 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-28 20:52:00.008 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-28 20:52:00.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-28 20:52:00.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-28 20:52:00.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-28 20:52:00.011 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-28 20:52:00.011 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-28 20:52:00.011 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-28 20:52:00.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-28 20:52:00.014 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-28 20:52:00.014 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-28 20:52:00.014 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-28 20:52:00.014 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-28 20:52:00.014 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-28 20:52:00.014 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-28 20:52:00.016 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-28 20:52:29.980 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028205122-123' end step 1
[Save Log Job] 2024-10-28 20:52:29.981 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-28 20:52:29.981 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241028205122-123
Start time：2024/10/28 20:51:59
End time：2024/10/28 20:52:29
Total time：0:0:30
[Save Log Job] 2024-10-28 20:52:29.982 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-28 20:53:31.783 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-10-28 20:53:36.354 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 20:53:38.945 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 20:53:40.495 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 20:54:51.403 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 20:54:53.129 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 20:55:06.243 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 20:56:21.852 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-10-28 20:56:22.654 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-10-28 20:57:31.109 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-10-28 20:57:31.209 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-10-28 20:57:33.220 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 20:57:34.532 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-10-28 20:57:37.659 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-10-28 20:58:27.762 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
[Save Log Job] 2024-10-28 20:58:28.565 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 6.0 minitues
[Save Log Job] 2024-10-28 20:58:28.565 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
[Save Log Job] 2024-10-28 20:58:28.565 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-10-28 20:58:28.566 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 21:02:33.998 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-28 21:02:33.998 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-28 21:02:33.998 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-28 21:02:33.998 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-28 21:02:33.998 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-28 21:02:33.998 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-28 21:02:33.999 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-28 21:02:34.095 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 21:02:34.095 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-28 21:02:36.109 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-28 21:02:38.124 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-28 21:03:24.570 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-28 21:03:24.671 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-28 21:03:24.671 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。
[Save Log Job] 2024-10-28 21:03:24.672 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241028210233-123
[Save Log Job] 2024-10-28 21:03:24.672 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241028210233-123'
[Save Log Job] 2024-10-28 21:03:24.672 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028210233-123' start run step 1：initial。
[Save Log Job] 2024-10-28 21:03:24.672 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-28 21:03:24.672 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-28 21:03:24.672 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-28 21:03:24.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-28 21:03:24.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-28 21:03:24.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-28 21:03:24.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-28 21:03:24.673 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-28 21:03:24.675 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-28 21:03:24.675 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-28 21:03:24.677 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-28 21:03:24.677 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-28 21:03:24.677 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-28 21:03:24.677 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-28 21:03:24.678 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-28 21:03:24.678 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-28 21:03:24.678 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-28 21:03:24.775 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-28 21:03:54.726 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-28 21:03:54.729 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028210233-123' end step 1
[Save Log Job] 2024-10-28 21:03:54.729 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-28 21:03:54.729 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241028210233-123
Start time：2024/10/28 21:03:24
End time：2024/10/28 21:03:54
Total time：0:0:30
[Save Log Job] 2024-10-28 21:04:08.220 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:04:08.248 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-10-28 21:04:08.250 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:04:08.251 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:04:08.254 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:04:08.254 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:04:08.254 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:04:16.094 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-10-28 21:04:16.094 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-10-28 21:05:49.109 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-10-28 21:05:49.208 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-10-28 21:05:51.225 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:05:52.537 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-10-28 21:05:55.666 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-10-28 21:06:45.743 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
[Save Log Job] 2024-10-28 21:06:53.265 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 2.9 minitues
[Save Log Job] 2024-10-28 21:06:53.266 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
[Save Log Job] 2024-10-28 21:06:53.266 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-10-28 21:06:53.466 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-28 21:11:00.902 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 21:11:00.903 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-28 21:11:02.398 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 21:11:02.398 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-28 21:11:05.911 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-28 21:11:10.034 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-28 21:11:17.979 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-28 21:11:17.979 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-28 21:11:17.979 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-28 21:11:19.187 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-28 21:11:19.187 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-28 21:11:19.187 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-28 21:11:19.187 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-28 21:11:19.188 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-28 21:11:19.188 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-28 21:11:19.189 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-28 21:11:19.288 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-28 21:11:19.389 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 21:11:21.308 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-28 21:11:22.817 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-28 21:11:57.684 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-28 21:11:57.784 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
[Save Log Job] 2024-10-28 21:11:57.784 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-28 21:11:57.785 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241028211119-123
[Save Log Job] 2024-10-28 21:11:57.785 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241028211119-123'
[Save Log Job] 2024-10-28 21:11:57.786 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028211119-123' start run step 1：initial。
[Save Log Job] 2024-10-28 21:11:57.787 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-28 21:11:57.787 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-28 21:11:57.788 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-28 21:11:57.788 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-28 21:11:57.789 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-28 21:11:57.789 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-28 21:11:57.789 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-28 21:11:57.790 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-28 21:11:57.790 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-28 21:11:57.790 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-28 21:11:57.791 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-28 21:11:57.791 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-28 21:11:57.792 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-28 21:11:57.792 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-28 21:11:57.792 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-28 21:11:57.793 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-28 21:11:57.793 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-28 21:11:57.886 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-28 21:12:27.859 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028211119-123' end step 1
[Save Log Job] 2024-10-28 21:12:27.861 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-28 21:12:27.862 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241028211119-123
Start time：2024/10/28 21:11:57
End time：2024/10/28 21:12:27
Total time：0:0:30
[Save Log Job] 2024-10-28 21:12:27.862 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-28 21:12:27.960 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-10-28 21:12:29.875 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:12:29.875 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:12:29.875 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:12:29.876 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:12:29.876 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:12:29.876 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:12:38.038 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-10-28 21:12:38.139 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-10-28 21:12:43.976 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-10-28 21:12:43.976 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-10-28 21:12:45.992 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:12:47.401 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-10-28 21:12:50.425 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-10-28 21:13:40.513 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
[Save Log Job] 2024-10-28 21:13:47.870 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
[Save Log Job] 2024-10-28 21:13:54.073 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
[Save Log Job] 2024-10-28 21:13:58.280 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-10-28 21:13:58.285 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 21:14:10.484 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-28 21:14:10.485 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-28 21:14:10.584 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 21:14:10.584 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-28 21:14:10.585 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-28 21:14:10.585 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-28 21:14:10.585 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-28 21:14:10.586 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-28 21:14:10.586 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-28 21:14:12.597 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-28 21:15:02.991 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-28 21:15:02.991 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
[Save Log Job] 2024-10-28 21:15:02.992 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-28 21:15:02.992 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241028211410-123
[Save Log Job] 2024-10-28 21:15:02.994 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241028211410-123'
[Save Log Job] 2024-10-28 21:15:03.092 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028211410-123' start run step 1：initial。
[Save Log Job] 2024-10-28 21:15:03.092 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-28 21:15:03.092 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-28 21:15:03.093 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-28 21:15:03.093 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-28 21:15:03.093 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-28 21:15:03.094 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-28 21:15:03.094 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-28 21:15:03.094 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-28 21:15:03.095 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-28 21:15:03.095 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-28 21:15:03.095 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-28 21:15:03.096 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-28 21:15:03.096 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-28 21:15:03.097 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-28 21:15:03.097 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-28 21:15:03.097 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-28 21:15:03.098 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-28 21:15:03.098 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-28 21:15:33.176 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-28 21:15:33.176 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241028211410-123' end step 1
[Save Log Job] 2024-10-28 21:15:33.177 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241028211410-123
Start time：2024/10/28 21:15:02
End time：2024/10/28 21:15:33
Total time：0:0:30
[Save Log Job] 2024-10-28 21:15:33.177 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-28 21:15:33.177 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-10-28 21:15:35.193 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:15:35.193 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:15:35.193 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:15:35.194 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:15:35.195 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:15:35.195 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:15:43.256 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-10-28 21:15:43.357 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-10-28 21:15:49.203 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-10-28 21:15:49.203 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-10-28 21:15:51.321 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-28 21:15:52.629 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-10-28 21:15:55.648 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-10-28 21:16:45.723 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
[Save Log Job] 2024-10-28 21:16:49.336 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
[Save Log Job] 2024-10-28 21:17:32.856 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
[Save Log Job] 2024-10-28 21:17:32.861 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-10-28 21:17:32.885 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-28 21:17:32.885 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged