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log20241224.txt

log20241224.txt 245 KB
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    1074. 

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    1075. 

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    1089. 

  1089. [Save Log Job] 2024-12-24 09:02:22.766 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
    1090. 

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    1091. 

  1091. [Save Log Job] 2024-12-24 09:02:22.767 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
    1092. 

  1092. [Save Log Job] 2024-12-24 09:02:38.974 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1093. 

  1093. [Save Log Job] 2024-12-24 09:02:55.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1094. 

  1094. [Save Log Job] 2024-12-24 09:02:55.503 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    1095. 

  1095. [Save Log Job] 2024-12-24 09:02:55.554 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    1096. 

  1096. [Save Log Job] 2024-12-24 09:02:55.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1097. 

  1097. [Save Log Job] 2024-12-24 09:02:55.613 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。
    1098. 

  1098. [Save Log Job] 2024-12-24 09:02:55.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。
    1099. 

  1099. [Save Log Job] 2024-12-24 09:02:57.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.0 minitues。
    1100. 

  1100. [Save Log Job] 2024-12-24 09:02:57.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''.
    1101. 

  1101. [Save Log Job] 2024-12-24 09:02:57.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump
    1102. 

  1102. [Save Log Job] 2024-12-24 09:02:57.224 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1103. 

  1103. [Save Log Job] 2024-12-24 09:02:57.382 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1104. 

  1104. [Save Log Job] 2024-12-24 09:03:08.975 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1105. 

  1105. [Save Log Job] 2024-12-24 09:03:11.167 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 0)
    1106. 

  1106. [Save Log Job] 2024-12-24 09:03:11.168 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    1107. 

  1107. [Save Log Job] 2024-12-24 09:03:11.168 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    1108. 

  1108. [Save Log Job] 2024-12-24 09:03:11.169 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 120)
    1109. 

  1109. [Save Log Job] 2024-12-24 09:03:11.169 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    1110. 

  1110. [Save Log Job] 2024-12-24 09:03:11.170 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    1111. 

  1111. [Save Log Job] 2024-12-24 09:03:11.221 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    1112. 

  1112. [Save Log Job] 2024-12-24 09:03:11.221 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    1113. 

  1113. [Save Log Job] 2024-12-24 09:03:11.221 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    1114. 

  1114. [Save Log Job] 2024-12-24 09:03:11.221 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    1115. 

  1115. [Save Log Job] 2024-12-24 09:03:11.221 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    1116. 

  1116. [Save Log Job] 2024-12-24 09:03:11.237 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1117. 

  1117. [Save Log Job] 2024-12-24 09:03:11.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    1118. 

  1118. [Save Log Job] 2024-12-24 09:03:12.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    1119. 

  1119. [Save Log Job] 2024-12-24 09:03:12.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump below 500mTorr。
    1120. 

  1120. [Save Log Job] 2024-12-24 09:03:12.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump Finished in 0.0 minitues。
    1121. 

  1121. [Save Log Job] 2024-12-24 09:03:12.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Pump''.
    1122. 

  1122. [Save Log Job] 2024-12-24 09:03:12.574 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Pump
    1123. 

  1123. [Save Log Job] 2024-12-24 09:03:12.574 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1124. 

  1124. [Save Log Job] 2024-12-24 09:03:12.642 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1125. 

  1125. [Save Log Job] 2024-12-24 09:03:14.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1126. 

  1126. [Save Log Job] 2024-12-24 09:03:14.671 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    1127. 

  1127. [Save Log Job] 2024-12-24 09:03:14.721 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    1128. 

  1128. [Save Log Job] 2024-12-24 09:03:14.778 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。
    1129. 

  1129. [Save Log Job] 2024-12-24 09:03:14.836 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。
    1130. 

  1130. [Save Log Job] 2024-12-24 09:03:14.847 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1131. 

  1131. [Save Log Job] 2024-12-24 09:03:16.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.0 minitues。
    1132. 

  1132. [Save Log Job] 2024-12-24 09:03:16.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''.
    1133. 

  1133. [Save Log Job] 2024-12-24 09:03:16.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump
    1134. 

  1134. [Save Log Job] 2024-12-24 09:03:16.421 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1135. 

  1135. [Save Log Job] 2024-12-24 09:03:16.452 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1136. 

  1136. [Save Log Job] 2024-12-24 09:03:16.513 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1137. 

  1137. [Save Log Job] 2024-12-24 09:03:18.237 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1138. 

  1138. [Save Log Job] 2024-12-24 09:03:21.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 0)
    1139. 

  1139. [Save Log Job] 2024-12-24 09:03:21.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    1140. 

  1140. [Save Log Job] 2024-12-24 09:03:21.487 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    1141. 

  1141. [Save Log Job] 2024-12-24 09:03:21.487 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 120)
    1142. 

  1142. [Save Log Job] 2024-12-24 09:03:21.489 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    1143. 

  1143. [Save Log Job] 2024-12-24 09:03:21.489 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    1144. 

  1144. [Save Log Job] 2024-12-24 09:03:21.540 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    1145. 

  1145. [Save Log Job] 2024-12-24 09:03:21.540 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    1146. 

  1146. [Save Log Job] 2024-12-24 09:03:21.540 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    1147. 

  1147. [Save Log Job] 2024-12-24 09:03:21.540 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    1148. 

  1148. [Save Log Job] 2024-12-24 09:03:21.540 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    1149. 

  1149. [Save Log Job] 2024-12-24 09:03:21.596 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    1150. 

  1150. [Save Log Job] 2024-12-24 09:03:21.662 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1151. 

  1151. [Save Log Job] 2024-12-24 09:03:23.638 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1152. 

  1152. [Save Log Job] 2024-12-24 09:03:24.080 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    1153. 

  1153. [Save Log Job] 2024-12-24 09:03:24.080 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump below 500mTorr。
    1154. 

  1154. [Save Log Job] 2024-12-24 09:03:24.136 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump Finished in 0.0 minitues。
    1155. 

  1155. [Save Log Job] 2024-12-24 09:03:24.136 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Pump''.
    1156. 

  1156. [Save Log Job] 2024-12-24 09:03:24.136 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Pump
    1157. 

  1157. [Save Log Job] 2024-12-24 09:03:24.136 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1158. 

  1158. [Save Log Job] 2024-12-24 09:03:24.220 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1159. 

  1159. [Save Log Job] 2024-12-24 09:03:32.176 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1160. 

  1160. [Save Log Job] 2024-12-24 09:03:33.584 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1161. 

  1161. [Save Log Job] 2024-12-24 09:03:35.684 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1162. 

  1162. [Save Log Job] 2024-12-24 09:03:37.431 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1163. 

  1163. [Save Log Job] 2024-12-24 09:03:38.975 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1164. 

  1164. [Save Log Job] 2024-12-24 09:03:42.493 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1165. 

  1165. [Save Log Job] 2024-12-24 09:03:45.140 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1166. 

  1166. [Save Log Job] 2024-12-24 09:04:08.976 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1167. 

  1167. [Save Log Job] 2024-12-24 09:04:37.887 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1168. 

  1168. [Save Log Job] 2024-12-24 09:04:37.888 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    1169. 

  1169. [Save Log Job] 2024-12-24 09:04:37.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    1170. 

  1170. [Save Log Job] 2024-12-24 09:04:37.988 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。
    1171. 

  1171. [Save Log Job] 2024-12-24 09:04:38.012 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1172. 

  1172. [Save Log Job] 2024-12-24 09:04:38.038 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。
    1173. 

  1173. [Save Log Job] 2024-12-24 09:04:38.976 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1174. 

  1174. [Save Log Job] 2024-12-24 09:04:40.067 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    1175. 

  1175. [Save Log Job] 2024-12-24 09:04:40.771 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.0 minitues。
    1176. 

  1176. [Save Log Job] 2024-12-24 09:04:40.771 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''.
    1177. 

  1177. [Save Log Job] 2024-12-24 09:04:40.771 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump
    1178. 

  1178. [Save Log Job] 2024-12-24 09:04:40.772 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1179. 

  1179. [Save Log Job] 2024-12-24 09:04:40.783 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1180. 

  1180. [Save Log Job] 2024-12-24 09:04:58.890 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1181. 

  1181. [Save Log Job] 2024-12-24 09:05:01.777 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1182. 

  1182. [Save Log Job] 2024-12-24 09:05:08.977 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1183. 

  1183. [Save Log Job] 2024-12-24 09:05:38.977 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1184. 

  1184. [Save Log Job] 2024-12-24 09:06:08.978 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1185. 

  1185. [Save Log Job] 2024-12-24 09:06:38.979 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1186. 

  1186. [Save Log Job] 2024-12-24 09:07:08.979 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1187. 

  1187. [Save Log Job] 2024-12-24 09:07:38.979 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1188. 

  1188. [Save Log Job] 2024-12-24 09:08:08.980 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1189. 

  1189. [Save Log Job] 2024-12-24 09:08:38.980 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1190. 

  1190. [Save Log Job] 2024-12-24 09:09:08.981 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1191. 

  1191. [Save Log Job] 2024-12-24 09:09:38.981 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1192. 

  1192. [Save Log Job] 2024-12-24 09:10:08.982 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1193. 

  1193. [Save Log Job] 2024-12-24 09:10:38.983 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1194. 

  1194. [Save Log Job] 2024-12-24 09:11:08.983 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1195. 

  1195. [Save Log Job] 2024-12-24 09:11:38.984 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1196. 

  1196. [Save Log Job] 2024-12-24 09:12:08.984 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1197. 

  1197. [Save Log Job] 2024-12-24 09:12:38.985 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1198. 

  1198. [Save Log Job] 2024-12-24 09:13:08.985 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1199. 

  1199. [Save Log Job] 2024-12-24 09:13:38.986 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1200. 

  1200. [Save Log Job] 2024-12-24 09:14:08.987 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1201. 

  1201. [Save Log Job] 2024-12-24 09:14:38.988 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1202. 

  1202. [Save Log Job] 2024-12-24 09:15:08.989 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1203. 

  1203. [Save Log Job] 2024-12-24 09:15:38.989 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1204. 

  1204. [Save Log Job] 2024-12-24 09:16:08.989 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1205. 

  1205. [Save Log Job] 2024-12-24 09:16:38.990 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1206. 

  1206. [Save Log Job] 2024-12-24 09:17:08.991 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1207. 

  1207. [Save Log Job] 2024-12-24 09:17:38.991 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1208. 

  1208. [Save Log Job] 2024-12-24 09:18:08.991 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1209. 

  1209. [Save Log Job] 2024-12-24 09:18:38.992 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1210. 

  1210. [Save Log Job] 2024-12-24 09:19:08.992 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1211. 

  1211. [Save Log Job] 2024-12-24 09:19:38.992 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1212. 

  1212. [Save Log Job] 2024-12-24 09:20:08.993 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1213. 

  1213. [Save Log Job] 2024-12-24 09:20:38.993 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1214. 

  1214. [Save Log Job] 2024-12-24 09:21:08.994 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1215. 

  1215. [Save Log Job] 2024-12-24 09:21:38.994 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1216. 

  1216. [Save Log Job] 2024-12-24 09:22:08.995 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1217. 

  1217. [Save Log Job] 2024-12-24 09:22:38.996 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1218. 

  1218. [Save Log Job] 2024-12-24 09:23:08.996 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1219. 

  1219. [Save Log Job] 2024-12-24 09:23:38.996 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1220. 

  1220. [Save Log Job] 2024-12-24 09:24:08.996 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1221. 

  1221. [Save Log Job] 2024-12-24 09:24:38.997 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1222. 

  1222. [Save Log Job] 2024-12-24 09:25:08.998 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1223. 

  1223. [Save Log Job] 2024-12-24 09:25:38.998 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1224. 

  1224. [Save Log Job] 2024-12-24 09:26:08.999 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1225. 

  1225. [Save Log Job] 2024-12-24 09:26:38.999 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1226. 

  1226. [Save Log Job] 2024-12-24 09:27:08.999 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1227. 

  1227. [Save Log Job] 2024-12-24 09:27:39.001 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1228. 

  1228. [Save Log Job] 2024-12-24 09:28:09.001 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1229. 

  1229. [Save Log Job] 2024-12-24 09:28:39.002 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1230. 

  1230. [Save Log Job] 2024-12-24 09:29:09.003 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1231. 

  1231. [Save Log Job] 2024-12-24 09:29:39.003 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1232. 

  1232. [Save Log Job] 2024-12-24 09:30:09.003 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1233. 

  1233. [Save Log Job] 2024-12-24 09:30:39.003 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1234. 

  1234. [Save Log Job] 2024-12-24 09:31:09.004 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1235. 

  1235. [Save Log Job] 2024-12-24 09:31:39.005 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1236. 

  1236. [Save Log Job] 2024-12-24 09:32:09.006 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1237. 

  1237. [Save Log Job] 2024-12-24 09:32:39.006 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1238. 

  1238. [Save Log Job] 2024-12-24 09:33:09.006 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1239. 

  1239. [Save Log Job] 2024-12-24 09:33:39.007 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1240. 

  1240. [Save Log Job] 2024-12-24 09:34:09.008 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1241. 

  1241. [Save Log Job] 2024-12-24 09:34:39.008 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1242. 

  1242. [Save Log Job] 2024-12-24 09:35:09.009 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1243. 

  1243. [Save Log Job] 2024-12-24 09:35:39.009 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1244. 

  1244. [Save Log Job] 2024-12-24 09:36:09.010 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1245. 

  1245. [Save Log Job] 2024-12-24 09:36:39.010 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1246. 

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    1408. 

  1408. [Save Log Job] 2024-12-24 10:58:09.092 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1409. 

  1409. [Save Log Job] 2024-12-24 10:58:39.093 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1410. 

  1410. [Save Log Job] 2024-12-24 10:59:09.094 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1411. 

  1411. [Save Log Job] 2024-12-24 10:59:39.094 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1412. 

  1412. [Save Log Job] 2024-12-24 11:00:09.095 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1413. 

  1413. <==  [Save Log Job] 2024-12-24 11:00:29.196 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1414. 

  1414. [Save Log Job] 2024-12-24 11:00:30.186 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1415. 

  1415. [Save Log Job] 2024-12-24 11:00:30.187 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1416. 

  1416. [Save Log Job] 2024-12-24 11:00:30.261 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1417. 

  1417. [Save Log Job] 2024-12-24 11:00:30.372 LOG.INFO EventService.cs Line:60 Register() - 客户端e9d04311-cb32-44bd-b4d9-978f95e7a1f9已连接
    1418. 

  1418. [Save Log Job] 2024-12-24 11:00:31.317 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1419. 

  1419. [Save Log Job] 2024-12-24 11:00:31.319 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1420. 

  1420. [Save Log Job] 2024-12-24 11:00:31.486 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1421. 

  1421. [Save Log Job] 2024-12-24 11:00:31.535 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1422. 

  1422. [Save Log Job] 2024-12-24 11:00:31.544 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1423. 

  1423. [Save Log Job] 2024-12-24 11:00:32.247 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1424. 

  1424. [Save Log Job] 2024-12-24 11:00:35.274 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
    1425. 

  1425. [Save Log Job] 2024-12-24 11:00:44.550 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1426. 

  1426. [Save Log Job] 2024-12-24 11:00:44.551 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1427. 

  1427. [Save Log Job] 2024-12-24 11:00:44.560 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1428. 

  1428. [Save Log Job] 2024-12-24 11:00:44.673 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1429. 

  1429. [Save Log Job] 2024-12-24 11:00:52.391 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1430. 

  1430. [Save Log Job] 2024-12-24 11:00:52.495 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1431. 

  1431. [Save Log Job] 2024-12-24 11:00:52.543 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1432. 

  1432. [Save Log Job] 2024-12-24 11:01:13.383 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1433. 

  1433. [Save Log Job] 2024-12-24 11:01:21.984 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 1000)
    1434. 

  1434. [Save Log Job] 2024-12-24 11:01:21.985 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 1000 mTorr。
    1435. 

  1435. [Save Log Job] 2024-12-24 11:01:27.414 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 1000)
    1436. 

  1436. [Save Log Job] 2024-12-24 11:01:27.414 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 1000 mTorr。
    1437. 

  1437. [Save Log Job] 2024-12-24 11:01:40.044 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1438. 

  1438. [Save Log Job] 2024-12-24 11:01:40.046 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1439. 

  1439. [Save Log Job] 2024-12-24 11:01:40.047 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1440. 

  1440. [Save Log Job] 2024-12-24 11:01:51.656 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    1441. 

  1441. [Save Log Job] 2024-12-24 11:01:51.688 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    1442. 

  1442. [Save Log Job] 2024-12-24 11:01:51.690 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241224110151-CACB
    1443. 

  1443. [Save Log Job] 2024-12-24 11:01:51.690 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1444. 

  1444. [Save Log Job] 2024-12-24 11:01:51.691 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    1445. 

  1445. [Save Log Job] 2024-12-24 11:01:51.692 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    1446. 

  1446. [Save Log Job] 2024-12-24 11:01:51.693 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1447. 

  1447. [Save Log Job] 2024-12-24 11:01:51.695 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1448. 

  1448. [Save Log Job] 2024-12-24 11:01:51.744 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1449. 

  1449. [Save Log Job] 2024-12-24 11:01:51.744 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1450. 

  1450. [Save Log Job] 2024-12-24 11:01:51.744 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1451. 

  1451. [Save Log Job] 2024-12-24 11:01:51.745 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1452. 

  1452. [Save Log Job] 2024-12-24 11:01:51.746 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1453. 

  1453. [Save Log Job] 2024-12-24 11:01:51.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1454. 

  1454. [Save Log Job] 2024-12-24 11:01:51.873 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1455. 

  1455. [Save Log Job] 2024-12-24 11:01:53.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1456. 

  1456. [Save Log Job] 2024-12-24 11:02:02.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    1457. 

  1457. [Save Log Job] 2024-12-24 11:02:07.102 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1458. 

  1458. [Save Log Job] 2024-12-24 11:02:07.301 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1459. 

  1459. [Save Log Job] 2024-12-24 11:02:12.701 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1460. 

  1460. [Save Log Job] 2024-12-24 11:02:12.707 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1461. 

  1461. [Save Log Job] 2024-12-24 11:02:24.164 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1462. 

  1462. [Save Log Job] 2024-12-24 11:02:24.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
    1463. 

  1463. [Save Log Job] 2024-12-24 11:02:24.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1464. 

  1464. [Save Log Job] 2024-12-24 11:02:24.172 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
    1465. 

  1465. [Save Log Job] 2024-12-24 11:02:28.112 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1466. 

  1466. [Save Log Job] 2024-12-24 11:03:07.928 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1467. 

  1467. [Save Log Job] 2024-12-24 11:06:04.816 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1468. 

  1468. [Save Log Job] 2024-12-24 11:06:04.816 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    1469. 

  1469. [Save Log Job] 2024-12-24 11:06:04.822 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    1470. 

  1470. [Save Log Job] 2024-12-24 11:06:04.822 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1471. 

  1471. [Save Log Job] 2024-12-24 11:06:04.866 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
    1472. 

  1472. [Save Log Job] 2024-12-24 11:06:04.868 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
    1473. 

  1473. [Save Log Job] 2024-12-24 11:13:21.434 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1474. 

  1474. [Save Log Job] 2024-12-24 11:13:21.435 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1475. 

  1475. [Save Log Job] 2024-12-24 11:13:21.472 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    1476. 

  1476. 

  1477. [Save Log Job] 2024-12-24 11:41:29.155 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    1478. 

  1478. [Save Log Job] 2024-12-24 11:44:12.550 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    1479. 

  1479. [Save Log Job] 2024-12-24 11:44:13.521 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1480. 

  1480. [Save Log Job] 2024-12-24 11:44:13.522 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Error，can not do StopPumpDown。
    1481. 

  1481. [Save Log Job] 2024-12-24 11:44:33.743 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1482. 

  1482. [Save Log Job] 2024-12-24 13:34:59.814 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    1483. 

  1483. [Save Log Job] 2024-12-24 13:35:02.706 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    1484. 

  1484. [Save Log Job] 2024-12-24 13:35:02.976 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1485. 

  1485. [Save Log Job] 2024-12-24 13:46:16.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1486. 

  1486. [Save Log Job] 2024-12-24 13:46:22.787 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1487. 

  1487. [Save Log Job] 2024-12-24 13:47:45.377 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    1488. 

  1488. [Save Log Job] 2024-12-24 13:47:47.195 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    1489. 

  1489. [Save Log Job] 2024-12-24 13:47:54.936 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Error，can not do StopPumpDown。
    1490. 

  1490. <==  [Save Log Job] 2024-12-24 13:51:44.766 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1491. 

  1491. <==  [Save Log Job] 2024-12-24 14:05:03.335 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1492. 

  1492. [Save Log Job] 2024-12-24 14:05:04.561 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1493. 

  1493. [Save Log Job] 2024-12-24 14:05:04.561 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1494. 

  1494. [Save Log Job] 2024-12-24 14:05:04.647 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1495. 

  1495. [Save Log Job] 2024-12-24 14:05:07.908 LOG.INFO EventService.cs Line:60 Register() - 客户端fc988935-68ba-4460-a4cf-7fc463216aa5已连接
    1496. 

  1496. [Save Log Job] 2024-12-24 14:05:07.909 LOG.INFO EventService.cs Line:60 Register() - 客户端fc988935-68ba-4460-a4cf-7fc463216aa5已连接
    1497. 

  1497. [Save Log Job] 2024-12-24 14:05:08.830 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1498. 

  1498. [Save Log Job] 2024-12-24 14:05:08.914 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1499. 

  1499. [Save Log Job] 2024-12-24 14:05:09.087 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1500. 

  1500. [Save Log Job] 2024-12-24 14:05:09.134 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1501. 

  1501. [Save Log Job] 2024-12-24 14:05:09.213 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1502. 

  1502. [Save Log Job] 2024-12-24 14:05:12.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1503. 

  1503. [Save Log Job] 2024-12-24 14:05:12.908 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
    1504. 

  1504. [Save Log Job] 2024-12-24 14:05:29.889 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1505. 

  1505. [Save Log Job] 2024-12-24 14:05:29.924 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1506. 

  1506. [Save Log Job] 2024-12-24 14:05:30.098 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1507. 

  1507. [Save Log Job] 2024-12-24 14:05:30.142 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1508. 

  1508. [Save Log Job] 2024-12-24 14:05:31.616 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1509. 

  1509. [Save Log Job] 2024-12-24 14:05:31.617 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1510. 

  1510. [Save Log Job] 2024-12-24 14:05:31.630 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1511. 

  1511. [Save Log Job] 2024-12-24 14:05:31.733 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1512. 

  1512. [Save Log Job] 2024-12-24 14:09:11.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1513. 

  1513. [Save Log Job] 2024-12-24 14:09:11.523 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1514. 

  1514. [Save Log Job] 2024-12-24 14:09:11.524 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1515. 

  1515. [Save Log Job] 2024-12-24 14:09:21.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    1516. 

  1516. [Save Log Job] 2024-12-24 14:09:21.522 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    1517. 

  1517. [Save Log Job] 2024-12-24 14:09:21.526 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241224140921-CACB
    1518. 

  1518. [Save Log Job] 2024-12-24 14:09:21.526 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1519. 

  1519. [Save Log Job] 2024-12-24 14:09:21.529 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    1520. 

  1520. [Save Log Job] 2024-12-24 14:09:21.530 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    1521. 

  1521. [Save Log Job] 2024-12-24 14:09:21.531 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1522. 

  1522. [Save Log Job] 2024-12-24 14:09:21.533 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1523. 

  1523. [Save Log Job] 2024-12-24 14:09:21.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1524. 

  1524. [Save Log Job] 2024-12-24 14:09:21.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1525. 

  1525. [Save Log Job] 2024-12-24 14:09:21.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1526. 

  1526. [Save Log Job] 2024-12-24 14:09:21.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1527. 

  1527. [Save Log Job] 2024-12-24 14:09:21.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1528. 

  1528. [Save Log Job] 2024-12-24 14:09:21.644 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1529. 

  1529. [Save Log Job] 2024-12-24 14:09:21.681 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1530. 

  1530. [Save Log Job] 2024-12-24 14:09:22.381 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1531. 

  1531. [Save Log Job] 2024-12-24 14:09:30.510 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    1532. 

  1532. [Save Log Job] 2024-12-24 14:09:30.511 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1533. 

  1533. [Save Log Job] 2024-12-24 14:09:30.708 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1534. 

  1534. [Save Log Job] 2024-12-24 14:09:35.505 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
    1535. 

  1535. [Save Log Job] 2024-12-24 14:09:35.506 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1536. 

  1536. [Save Log Job] 2024-12-24 14:09:35.506 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
    1537. 

  1537. [Save Log Job] 2024-12-24 14:09:42.536 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1538. 

  1538. [Save Log Job] 2024-12-24 14:09:42.540 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1539. 

  1539. [Save Log Job] 2024-12-24 14:09:51.520 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1540. 

  1540. [Save Log Job] 2024-12-24 14:09:51.533 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1541. 

  1541. [Save Log Job] 2024-12-24 14:10:08.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1542. 

  1542. [Save Log Job] 2024-12-24 14:10:32.135 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1543. 

  1543. [Save Log Job] 2024-12-24 14:44:07.655 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1544. 

  1544. [Save Log Job] 2024-12-24 14:44:50.294 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1545. 

  1545. [Save Log Job] 2024-12-24 14:44:59.320 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    1546. 

  1546. [Save Log Job] 2024-12-24 14:45:04.521 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1547. 

  1547. [Save Log Job] 2024-12-24 14:45:05.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1548. 

  1548. [Save Log Job] 2024-12-24 14:45:22.853 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1549. 

  1549. [Save Log Job] 2024-12-24 14:45:24.209 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    1550. 

  1550. [Save Log Job] 2024-12-24 14:45:26.012 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    1551. 

  1551. [Save Log Job] 2024-12-24 14:45:26.015 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1552. 

  1552. [Save Log Job] 2024-12-24 14:45:26.021 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    1553. 

  1553. [Save Log Job] 2024-12-24 14:45:26.021 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1554. 

  1554. [Save Log Job] 2024-12-24 14:45:28.311 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1555. 

  1555. [Save Log Job] 2024-12-24 14:45:31.338 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1556. 

  1556. [Save Log Job] 2024-12-24 14:45:32.110 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Error，can not do StopPumpDown。
    1557. 

  1557. [Save Log Job] 2024-12-24 14:45:32.111 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
    1558. 

  1558. [Save Log Job] 2024-12-24 14:45:32.118 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
    1559. 

  1559. [Save Log Job] 2024-12-24 14:45:32.118 LOG.ERROR EventService.cs Line:46 FireEvent() - 给客户端fc988935-68ba-4460-a4cf-7fc463216aa5发送事件失败，客户端被删除。
    1560. 

  1560. System.ServiceModel.CommunicationException: 套接字连接已中止。这可能是由于处理消息时出错或远程主机超过接收超时或者潜在的网络资源问题导致的。本地套接字超时是“00:00:15.0190680”。 ---> System.Net.Sockets.SocketException: 远程主机强迫关闭了一个现有的连接。
    1561. 

  1561.    在 System.Net.Sockets.Socket.Send(Byte[] buffer, Int32 offset, Int32 size, SocketFlags socketFlags)
    1562. 

  1562.    在 System.ServiceModel.Channels.SocketConnection.Write(Byte[] buffer, Int32 offset, Int32 size, Boolean immediate, TimeSpan timeout)
    1563. 

  1563.    --- 内部异常堆栈跟踪的结尾 ---
    1564. 

  1564. 

  1565. Server stack trace: 
    1566. 

  1566.    在 System.ServiceModel.Channels.SocketConnection.Write(Byte[] buffer, Int32 offset, Int32 size, Boolean immediate, TimeSpan timeout)
    1567. 

  1567.    在 System.ServiceModel.Channels.SocketConnection.Write(Byte[] buffer, Int32 offset, Int32 size, Boolean immediate, TimeSpan timeout, BufferManager bufferManager)
    1568. 

  1568.    在 System.ServiceModel.Channels.BufferedConnection.WriteNow(Byte[] buffer, Int32 offset, Int32 size, TimeSpan timeout, BufferManager bufferManager)
    1569. 

  1569.    在 System.ServiceModel.Channels.BufferedConnection.Write(Byte[] buffer, Int32 offset, Int32 size, Boolean immediate, TimeSpan timeout, BufferManager bufferManager)
    1570. 

  1570.    在 System.ServiceModel.Channels.TracingConnection.Write(Byte[] buffer, Int32 offset, Int32 size, Boolean immediate, TimeSpan timeout, BufferManager bufferManager)
    1571. 

  1571.    在 System.ServiceModel.Channels.FramingDuplexSessionChannel.OnSendCore(Message message, TimeSpan timeout)
    1572. 

  1572.    在 System.ServiceModel.Channels.TransportDuplexSessionChannel.OnSend(Message message, TimeSpan timeout)
    1573. 

  1573.    在 System.ServiceModel.Channels.OutputChannel.Send(Message message, TimeSpan timeout)
    1574. 

  1574.    在 System.ServiceModel.Dispatcher.DuplexChannelBinder.Send(Message message, TimeSpan timeout)
    1575. 

  1575.    在 System.ServiceModel.Channels.ServiceChannel.Call(String action, Boolean oneway, ProxyOperationRuntime operation, Object[] ins, Object[] outs, TimeSpan timeout)
    1576. 

  1576.    在 System.ServiceModel.Channels.ServiceChannelProxy.InvokeService(IMethodCallMessage methodCall, ProxyOperationRuntime operation)
    1577. 

  1577.    在 System.ServiceModel.Channels.ServiceChannelProxy.Invoke(IMessage message)
    1578. 

  1578. 

  1579. Exception rethrown at [0]: 
    1580. 

  1580.    在 System.Runtime.Remoting.Proxies.RealProxy.HandleReturnMessage(IMessage reqMsg, IMessage retMsg)
    1581. 

  1581.    在 System.Runtime.Remoting.Proxies.RealProxy.PrivateInvoke(MessageData& msgData, Int32 type)
    1582. 

  1582.    在 Aitex.Core.WCF.Interface.IEventServiceCallback.SendEvent(EventItem ev)
    1583. 

  1583.    在 Aitex.Core.WCF.EventService.FireEvent(EventItem obj) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\EventService.cs:行号 40
    1584. 

  1584. [Save Log Job] 2024-12-24 14:45:32.338 LOG.INFO EventService.cs Line:60 Register() - 客户端fc988935-68ba-4460-a4cf-7fc463216aa5已连接
    1585. 

  1585. [Save Log Job] 2024-12-24 14:45:43.865 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1586. 

  1586. [Save Log Job] 2024-12-24 14:45:46.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1587. 

  1587. [Save Log Job] 2024-12-24 14:45:58.644 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    1588. 

  1588. 

  1589. [Save Log Job] 2024-12-24 14:45:59.531 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1590. 

  1590. [Save Log Job] 2024-12-24 14:49:52.997 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    1591. 

  1591. [Save Log Job] 2024-12-24 14:53:01.564 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1592. 

  1592. [Save Log Job] 2024-12-24 14:53:02.314 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    1593. 

  1593. [Save Log Job] 2024-12-24 14:53:52.374 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    1594. 

  1594. [Save Log Job] 2024-12-24 14:53:52.423 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1595. 

  1595. [Save Log Job] 2024-12-24 14:53:52.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1596. 

  1596. <==  [Save Log Job] 2024-12-24 15:06:51.216 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1597. 

  1597. [Save Log Job] 2024-12-24 15:06:52.036 LOG.INFO EventService.cs Line:60 Register() - 客户端17f90d62-cc6f-4bc6-a4b7-3b859fc478ad已连接
    1598. 

  1598. [Save Log Job] 2024-12-24 15:06:52.335 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1599. 

  1599. [Save Log Job] 2024-12-24 15:06:52.335 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1600. 

  1600. [Save Log Job] 2024-12-24 15:06:52.394 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1601. 

  1601. [Save Log Job] 2024-12-24 15:06:59.896 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1602. 

  1602. [Save Log Job] 2024-12-24 15:06:59.988 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1603. 

  1603. [Save Log Job] 2024-12-24 15:07:00.065 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1604. 

  1604. [Save Log Job] 2024-12-24 15:07:00.260 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1605. 

  1605. [Save Log Job] 2024-12-24 15:07:00.314 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1606. 

  1606. [Save Log Job] 2024-12-24 15:07:00.365 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1607. 

  1607. [Save Log Job] 2024-12-24 15:07:05.994 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
    1608. 

  1608. [Save Log Job] 2024-12-24 15:07:12.139 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1609. 

  1609. [Save Log Job] 2024-12-24 15:07:12.140 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1610. 

  1610. [Save Log Job] 2024-12-24 15:07:15.202 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1611. 

  1611. [Save Log Job] 2024-12-24 15:07:15.303 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1612. 

  1612. [Save Log Job] 2024-12-24 15:07:21.051 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1613. 

  1613. [Save Log Job] 2024-12-24 15:07:21.074 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1614. 

  1614. [Save Log Job] 2024-12-24 15:07:21.267 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1615. 

  1615. [Save Log Job] 2024-12-24 15:07:21.322 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1616. 

  1616. [Save Log Job] 2024-12-24 15:48:25.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1617. 

  1617. [Save Log Job] 2024-12-24 15:48:26.037 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1618. 

  1618. [Save Log Job] 2024-12-24 15:48:26.217 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1619. 

  1619. [Save Log Job] 2024-12-24 15:48:39.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    1620. 

  1620. [Save Log Job] 2024-12-24 15:48:40.341 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    1621. 

  1621. [Save Log Job] 2024-12-24 15:48:40.345 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241224154840-CACB
    1622. 

  1622. [Save Log Job] 2024-12-24 15:48:40.345 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1623. 

  1623. [Save Log Job] 2024-12-24 15:48:40.346 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    1624. 

  1624. [Save Log Job] 2024-12-24 15:48:40.347 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    1625. 

  1625. [Save Log Job] 2024-12-24 15:48:40.347 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1626. 

  1626. [Save Log Job] 2024-12-24 15:48:40.349 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1627. 

  1627. [Save Log Job] 2024-12-24 15:48:40.550 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1628. 

  1628. [Save Log Job] 2024-12-24 15:48:40.551 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1629. 

  1629. [Save Log Job] 2024-12-24 15:48:40.724 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1630. 

  1630. [Save Log Job] 2024-12-24 15:48:40.904 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1631. 

  1631. [Save Log Job] 2024-12-24 15:48:41.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1632. 

  1632. [Save Log Job] 2024-12-24 15:48:41.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1633. 

  1633. [Save Log Job] 2024-12-24 15:48:41.592 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1634. 

  1634. [Save Log Job] 2024-12-24 15:48:45.703 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1635. 

  1635. [Save Log Job] 2024-12-24 15:48:47.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1636. 

  1636. [Save Log Job] 2024-12-24 15:49:01.349 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1637. 

  1637. [Save Log Job] 2024-12-24 15:49:01.353 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1638. 

  1638. [Save Log Job] 2024-12-24 15:49:12.996 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1639. 

  1639. [Save Log Job] 2024-12-24 15:49:14.037 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    1640. 

  1640. [Save Log Job] 2024-12-24 15:49:21.540 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1641. 

  1641. [Save Log Job] 2024-12-24 15:49:21.569 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1642. 

  1642. [Save Log Job] 2024-12-24 15:49:40.062 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
    1643. 

  1643. [Save Log Job] 2024-12-24 15:49:40.458 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1644. 

  1644. [Save Log Job] 2024-12-24 15:49:40.458 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
    1645. 

  1645. [Save Log Job] 2024-12-24 15:49:42.550 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1646. 

  1646. [Save Log Job] 2024-12-24 15:49:42.996 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1647. 

  1647. [Save Log Job] 2024-12-24 15:49:52.398 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1648. 

  1648. [Save Log Job] 2024-12-24 15:50:14.174 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1649. 

  1649. [Save Log Job] 2024-12-24 15:50:44.020 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    1650. 

  1650. [Save Log Job] 2024-12-24 15:50:50.517 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1651. 

  1651. [Save Log Job] 2024-12-24 15:50:50.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1652. 

  1652. [Save Log Job] 2024-12-24 15:50:50.518 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1653. 

  1653. [Save Log Job] 2024-12-24 15:51:12.445 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    1654. 

  1654. [Save Log Job] 2024-12-24 15:51:51.134 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1655. 

  1655. [Save Log Job] 2024-12-24 15:51:51.138 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1656. 

  1656. [Save Log Job] 2024-12-24 15:51:53.009 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。
    1657. 

  1657. <==  [Save Log Job] 2024-12-24 15:52:19.930 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1658. 

  1658. [Save Log Job] 2024-12-24 15:52:20.656 LOG.INFO EventService.cs Line:60 Register() - 客户端f1d865f7-dae0-4766-866f-0bc8cbefaa34已连接
    1659. 

  1659. [Save Log Job] 2024-12-24 15:52:20.921 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1660. 

  1660. [Save Log Job] 2024-12-24 15:52:20.922 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1661. 

  1661. [Save Log Job] 2024-12-24 15:52:20.984 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1662. 

  1662. [Save Log Job] 2024-12-24 15:52:21.987 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1663. 

  1663. [Save Log Job] 2024-12-24 15:52:22.033 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1664. 

  1664. [Save Log Job] 2024-12-24 15:52:22.204 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1665. 

  1665. [Save Log Job] 2024-12-24 15:52:22.253 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1666. 

  1666. [Save Log Job] 2024-12-24 15:52:22.408 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1667. 

  1667. [Save Log Job] 2024-12-24 15:52:22.630 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1668. 

  1668. [Save Log Job] 2024-12-24 15:52:25.995 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
    1669. 

  1669. [Save Log Job] 2024-12-24 15:52:29.245 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1670. 

  1670. [Save Log Job] 2024-12-24 15:52:29.246 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1671. 

  1671. [Save Log Job] 2024-12-24 15:52:33.889 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1672. 

  1672. [Save Log Job] 2024-12-24 15:52:33.890 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1673. 

  1673. [Save Log Job] 2024-12-24 15:52:33.891 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1674. 

  1674. [Save Log Job] 2024-12-24 15:52:34.022 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1675. 

  1675. [Save Log Job] 2024-12-24 15:52:43.047 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1676. 

  1676. [Save Log Job] 2024-12-24 15:52:43.053 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1677. 

  1677. [Save Log Job] 2024-12-24 15:52:43.216 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1678. 

  1678. [Save Log Job] 2024-12-24 15:52:43.266 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1679. 

  1679. [Save Log Job] 2024-12-24 15:52:55.162 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1680. 

  1680. [Save Log Job] 2024-12-24 15:52:55.164 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1681. 

  1681. [Save Log Job] 2024-12-24 15:52:55.164 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1682. 

  1682. [Save Log Job] 2024-12-24 15:52:57.600 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    1683. 

  1683. [Save Log Job] 2024-12-24 15:52:57.625 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    1684. 

  1684. [Save Log Job] 2024-12-24 15:52:57.627 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241224155257-CACB
    1685. 

  1685. [Save Log Job] 2024-12-24 15:52:57.627 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1686. 

  1686. [Save Log Job] 2024-12-24 15:52:57.630 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    1687. 

  1687. [Save Log Job] 2024-12-24 15:52:57.630 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    1688. 

  1688. [Save Log Job] 2024-12-24 15:52:57.631 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1689. 

  1689. [Save Log Job] 2024-12-24 15:52:57.633 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1690. 

  1690. [Save Log Job] 2024-12-24 15:52:57.682 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1691. 

  1691. [Save Log Job] 2024-12-24 15:52:57.682 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1692. 

  1692. [Save Log Job] 2024-12-24 15:52:57.683 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1693. 

  1693. [Save Log Job] 2024-12-24 15:52:57.683 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1694. 

  1694. [Save Log Job] 2024-12-24 15:52:57.684 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1695. 

  1695. [Save Log Job] 2024-12-24 15:52:57.691 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1696. 

  1696. [Save Log Job] 2024-12-24 15:52:57.747 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1697. 

  1697. [Save Log Job] 2024-12-24 15:52:58.139 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1698. 

  1698. [Save Log Job] 2024-12-24 15:53:07.156 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    1699. 

  1699. [Save Log Job] 2024-12-24 15:53:07.158 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1700. 

  1700. [Save Log Job] 2024-12-24 15:53:07.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1701. 

  1701. [Save Log Job] 2024-12-24 15:53:16.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
    1702. 

  1702. [Save Log Job] 2024-12-24 15:53:16.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1703. 

  1703. [Save Log Job] 2024-12-24 15:53:16.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
    1704. 

  1704. [Save Log Job] 2024-12-24 15:53:18.633 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1705. 

  1705. [Save Log Job] 2024-12-24 15:53:18.638 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1706. 

  1706. [Save Log Job] 2024-12-24 15:53:19.000 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1707. 

  1707. [Save Log Job] 2024-12-24 15:53:26.157 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    1708. 

  1708. [Save Log Job] 2024-12-24 15:53:27.702 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1709. 

  1709. [Save Log Job] 2024-12-24 15:53:27.702 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1710. 

  1710. [Save Log Job] 2024-12-24 15:53:27.702 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1711. 

  1711. [Save Log Job] 2024-12-24 15:53:27.708 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    1712. 

  1712. [Save Log Job] 2024-12-24 15:53:40.141 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1713. 

  1713. [Save Log Job] 2024-12-24 15:53:57.738 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1714. 

  1714. [Save Log Job] 2024-12-24 15:54:54.959 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1715. 

  1715. [Save Log Job] 2024-12-24 15:54:54.960 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1716. 

  1716. [Save Log Job] 2024-12-24 15:54:58.262 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。
    1717. 

  1717. [Save Log Job] 2024-12-24 15:55:07.243 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。
    1718. 

  1718. [Save Log Job] 2024-12-24 15:55:09.447 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    1719. 

  1719. [Save Log Job] 2024-12-24 15:55:15.555 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 1.9 minitues。
    1720. 

  1720. [Save Log Job] 2024-12-24 15:55:15.556 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''.
    1721. 

  1721. [Save Log Job] 2024-12-24 15:55:15.556 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump
    1722. 

  1722. [Save Log Job] 2024-12-24 15:55:15.556 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1723. 

  1723. [Save Log Job] 2024-12-24 15:55:15.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1724. 

  1724. [Save Log Job] 2024-12-24 15:55:24.966 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1725. 

  1725. [Save Log Job] 2024-12-24 15:55:36.568 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1726. 

  1726. [Save Log Job] 2024-12-24 15:55:54.971 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1727. 

  1727. [Save Log Job] 2024-12-24 15:56:24.974 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1728. 

  1728. [Save Log Job] 2024-12-24 15:56:54.980 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1729. 

  1729. [Save Log Job] 2024-12-24 15:57:24.990 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1730. 

  1730. [Save Log Job] 2024-12-24 15:57:54.997 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1731. 

  1731. [Save Log Job] 2024-12-24 15:58:25.000 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1732. 

  1732. [Save Log Job] 2024-12-24 15:58:55.018 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1733. 

  1733. [Save Log Job] 2024-12-24 15:59:25.021 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1734. 

  1734. [Save Log Job] 2024-12-24 15:59:55.022 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1735. 

  1735. [Save Log Job] 2024-12-24 16:00:25.032 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1736. 

  1736. [Save Log Job] 2024-12-24 16:00:55.032 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1737. 

  1737. [Save Log Job] 2024-12-24 16:01:25.032 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1738. 

  1738. [Save Log Job] 2024-12-24 16:01:55.033 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1739. 

  1739. [Save Log Job] 2024-12-24 16:02:25.034 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1740. 

  1740. [Save Log Job] 2024-12-24 16:02:55.034 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1741. 

  1741. [Save Log Job] 2024-12-24 16:03:25.034 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1742. 

  1742. [Save Log Job] 2024-12-24 16:03:55.034 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1743. 

  1743. [Save Log Job] 2024-12-24 16:04:25.035 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1744. 

  1744. [Save Log Job] 2024-12-24 16:04:55.036 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1745. 

  1745. [Save Log Job] 2024-12-24 16:05:25.037 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1746. 

  1746. [Save Log Job] 2024-12-24 16:05:55.038 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1747. 

  1747. [Save Log Job] 2024-12-24 16:06:25.038 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1748. 

  1748. [Save Log Job] 2024-12-24 16:06:55.038 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1749. 

  1749. [Save Log Job] 2024-12-24 16:07:25.039 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1750. 

  1750. [Save Log Job] 2024-12-24 16:07:55.040 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1751. 

  1751. [Save Log Job] 2024-12-24 16:08:25.040 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1752. 

  1752. [Save Log Job] 2024-12-24 16:08:55.040 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1753. 

  1753. [Save Log Job] 2024-12-24 16:09:25.040 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1754. 

  1754. [Save Log Job] 2024-12-24 16:09:55.041 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1755. 

  1755. [Save Log Job] 2024-12-24 16:10:25.041 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1756. 

  1756. [Save Log Job] 2024-12-24 16:10:55.041 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1757. 

  1757. [Save Log Job] 2024-12-24 16:11:25.042 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1758. 

  1758. [Save Log Job] 2024-12-24 16:11:55.042 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1759. 

  1759. [Save Log Job] 2024-12-24 16:12:25.042 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1760. 

  1760. [Save Log Job] 2024-12-24 16:12:55.043 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1761. 

  1761. [Save Log Job] 2024-12-24 16:13:25.043 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1762. 

  1762. [Save Log Job] 2024-12-24 16:13:55.044 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1763. 

  1763. [Save Log Job] 2024-12-24 16:14:25.044 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1764. 

  1764. [Save Log Job] 2024-12-24 16:14:55.045 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1765. 

  1765. [Save Log Job] 2024-12-24 16:15:25.045 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1766. 

  1766. [Save Log Job] 2024-12-24 16:15:48.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1767. 

  1767. [Save Log Job] 2024-12-24 16:15:48.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1768. 

  1768. [Save Log Job] 2024-12-24 16:15:48.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1769. 

  1769. [Save Log Job] 2024-12-24 16:15:55.045 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1770. 

  1770. [Save Log Job] 2024-12-24 16:15:58.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    1771. 

  1771. [Save Log Job] 2024-12-24 16:15:58.241 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    1772. 

  1772. [Save Log Job] 2024-12-24 16:15:58.241 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241224161558-CACB
    1773. 

  1773. [Save Log Job] 2024-12-24 16:15:58.242 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1774. 

  1774. [Save Log Job] 2024-12-24 16:15:58.242 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    1775. 

  1775. [Save Log Job] 2024-12-24 16:15:58.242 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    1776. 

  1776. [Save Log Job] 2024-12-24 16:15:58.293 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1777. 

  1777. [Save Log Job] 2024-12-24 16:15:58.293 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1778. 

  1778. [Save Log Job] 2024-12-24 16:15:58.293 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1779. 

  1779. [Save Log Job] 2024-12-24 16:15:58.293 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1780. 

  1780. [Save Log Job] 2024-12-24 16:15:58.294 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1781. 

  1781. [Save Log Job] 2024-12-24 16:15:58.350 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1782. 

  1782. [Save Log Job] 2024-12-24 16:15:58.436 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1783. 

  1783. [Save Log Job] 2024-12-24 16:15:58.906 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1784. 

  1784. [Save Log Job] 2024-12-24 16:17:46.452 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1785. 

  1785. [Save Log Job] 2024-12-24 16:18:13.780 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1786. 

  1786. [Save Log Job] 2024-12-24 16:18:13.780 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1787. 

  1787. [Save Log Job] 2024-12-24 16:18:13.781 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    1788. 

  1788. [Save Log Job] 2024-12-24 16:18:13.781 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    1789. 

  1789. [Save Log Job] 2024-12-24 16:18:13.781 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1790. 

  1790. [Save Log Job] 2024-12-24 16:18:13.783 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    1791. 

  1791. [Save Log Job] 2024-12-24 16:18:53.168 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1792. 

  1792. [Save Log Job] 2024-12-24 16:18:53.193 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1793. 

  1793. [Save Log Job] 2024-12-24 16:18:53.194 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
    1794. 

  1794. [Save Log Job] 2024-12-24 16:19:03.462 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
    1795. 

  1795. [Save Log Job] 2024-12-24 16:19:13.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Error，can not do RciepeAbort。
    1796. 

  1796. [Save Log Job] 2024-12-24 16:19:32.251 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    1797. 

  1797. 

  1798. [Save Log Job] 2024-12-24 16:20:16.298 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1799. 

  1799. [Save Log Job] 2024-12-24 16:20:24.994 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    1800. 

  1800. [Save Log Job] 2024-12-24 16:20:24.997 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    1801. 

  1801. [Save Log Job] 2024-12-24 16:20:24.997 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241224162024-CACB
    1802. 

  1802. [Save Log Job] 2024-12-24 16:20:24.997 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1803. 

  1803. [Save Log Job] 2024-12-24 16:20:24.997 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    1804. 

  1804. [Save Log Job] 2024-12-24 16:20:24.997 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    1805. 

  1805. [Save Log Job] 2024-12-24 16:20:24.997 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1806. 

  1806. [Save Log Job] 2024-12-24 16:20:25.004 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1807. 

  1807. [Save Log Job] 2024-12-24 16:20:25.047 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1808. 

  1808. [Save Log Job] 2024-12-24 16:20:25.048 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1809. 

  1809. [Save Log Job] 2024-12-24 16:20:25.048 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1810. 

  1810. [Save Log Job] 2024-12-24 16:20:25.048 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1811. 

  1811. [Save Log Job] 2024-12-24 16:20:25.048 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1812. 

  1812. [Save Log Job] 2024-12-24 16:20:25.106 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1813. 

  1813. [Save Log Job] 2024-12-24 16:20:25.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1814. 

  1814. [Save Log Job] 2024-12-24 16:20:25.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    1815. 

  1815. [Save Log Job] 2024-12-24 16:20:25.195 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1816. 

  1816. [Save Log Job] 2024-12-24 16:20:25.219 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    1817. 

  1817. [Save Log Job] 2024-12-24 16:20:25.219 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    1818. 

  1818. [Save Log Job] 2024-12-24 16:20:25.222 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241224162024-CACB
    1819. 

  1819. [Save Log Job] 2024-12-24 16:20:25.222 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241224162024-CACB''
    1820. 

  1820. [Save Log Job] 2024-12-24 16:20:25.222 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    1821. 

  1821. [Save Log Job] 2024-12-24 16:20:25.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241224162024-CACB'' start run step 1：initial。
    1822. 

  1822. [Save Log Job] 2024-12-24 16:20:25.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1823. 

  1823. [Save Log Job] 2024-12-24 16:20:25.275 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1824. 

  1824. [Save Log Job] 2024-12-24 16:20:25.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1825. 

  1825. [Save Log Job] 2024-12-24 16:20:25.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1826. 

  1826. [Save Log Job] 2024-12-24 16:20:25.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1827. 

  1827. [Save Log Job] 2024-12-24 16:20:25.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1828. 

  1828. [Save Log Job] 2024-12-24 16:20:25.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1829. 

  1829. [Save Log Job] 2024-12-24 16:20:25.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    1830. 

  1830. [Save Log Job] 2024-12-24 16:20:25.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1831. 

  1831. [Save Log Job] 2024-12-24 16:20:25.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1832. 

  1832. [Save Log Job] 2024-12-24 16:20:25.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1833. 

  1833. [Save Log Job] 2024-12-24 16:20:25.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    1834. 

  1834. [Save Log Job] 2024-12-24 16:20:25.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    1835. 

  1835. [Save Log Job] 2024-12-24 16:20:25.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    1836. 

  1836. [Save Log Job] 2024-12-24 16:20:25.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    1837. 

  1837. [Save Log Job] 2024-12-24 16:20:25.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    1838. 

  1838. [Save Log Job] 2024-12-24 16:20:25.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1839. 

  1839. [Save Log Job] 2024-12-24 16:20:25.331 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    1840. 

  1840. [Save Log Job] 2024-12-24 16:20:43.493 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    1841. 

  1841. [Save Log Job] 2024-12-24 16:20:57.385 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1842. 

  1842. [Save Log Job] 2024-12-24 16:22:31.412 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1843. 

  1843. [Save Log Job] 2024-12-24 16:22:31.419 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1844. 

  1844. [Save Log Job] 2024-12-24 16:22:31.419 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1845. 

  1845. [Save Log Job] 2024-12-24 16:22:31.419 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1846. 

  1846. [Save Log Job] 2024-12-24 16:22:31.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241224162024-CACB'' end step 1
    1847. 

  1847. [Save Log Job] 2024-12-24 16:22:54.389 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    1848. 

  1848. [Save Log Job] 2024-12-24 16:23:03.896 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1849. 

  1849. [Save Log Job] 2024-12-24 16:23:58.196 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1850. 

  1850. [Save Log Job] 2024-12-24 16:24:19.131 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1851. 

  1851. [Save Log Job] 2024-12-24 16:24:38.080 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1852. 

  1852. [Save Log Job] 2024-12-24 16:24:38.080 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1853. 

  1853. [Save Log Job] 2024-12-24 16:24:49.561 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1854. 

  1854. [Save Log Job] 2024-12-24 16:25:17.986 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1855. 

  1855. [Save Log Job] 2024-12-24 16:25:18.019 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1856. 

  1856. [Save Log Job] 2024-12-24 16:25:21.313 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1857. 

  1857. [Save Log Job] 2024-12-24 16:25:27.218 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    1858. 

  1858. <==  [Save Log Job] 2024-12-24 16:30:14.876 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1859. 

  1859. [Save Log Job] 2024-12-24 16:30:15.745 LOG.INFO EventService.cs Line:60 Register() - 客户端3e8e6375-1589-43e1-b7e1-67dcfd26ab7b已连接
    1860. 

  1860. [Save Log Job] 2024-12-24 16:30:15.745 LOG.INFO EventService.cs Line:60 Register() - 客户端3e8e6375-1589-43e1-b7e1-67dcfd26ab7b已连接
    1861. 

  1861. [Save Log Job] 2024-12-24 16:30:15.908 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1862. 

  1862. [Save Log Job] 2024-12-24 16:30:15.909 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1863. 

  1863. [Save Log Job] 2024-12-24 16:30:19.747 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1864. 

  1864. [Save Log Job] 2024-12-24 16:30:21.476 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1865. 

  1865. [Save Log Job] 2024-12-24 16:30:21.500 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1866. 

  1866. [Save Log Job] 2024-12-24 16:30:21.532 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1867. 

  1867. [Save Log Job] 2024-12-24 16:30:21.699 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1868. 

  1868. [Save Log Job] 2024-12-24 16:30:21.753 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1869. 

  1869. [Save Log Job] 2024-12-24 16:30:21.867 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1870. 

  1870. [Save Log Job] 2024-12-24 16:30:24.758 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
    1871. 

  1871. <==  [Save Log Job] 2024-12-24 16:31:10.805 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1872. 

  1872. [Save Log Job] 2024-12-24 16:31:11.625 LOG.INFO EventService.cs Line:60 Register() - 客户端0b924c12-7cf8-45dc-acf2-4ca6c7f66fe7已连接
    1873. 

  1873. [Save Log Job] 2024-12-24 16:31:11.625 LOG.INFO EventService.cs Line:55 Register() - 客户端0b924c12-7cf8-45dc-acf2-4ca6c7f66fe7已连接
    1874. 

  1874. [Save Log Job] 2024-12-24 16:31:11.855 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1875. 

  1875. [Save Log Job] 2024-12-24 16:31:11.856 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1876. 

  1876. [Save Log Job] 2024-12-24 16:31:15.884 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1877. 

  1877. [Save Log Job] 2024-12-24 16:31:17.317 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1878. 

  1878. [Save Log Job] 2024-12-24 16:31:17.406 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1879. 

  1879. [Save Log Job] 2024-12-24 16:31:17.485 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1880. 

  1880. [Save Log Job] 2024-12-24 16:31:17.651 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1881. 

  1881. [Save Log Job] 2024-12-24 16:31:17.705 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1882. 

  1882. [Save Log Job] 2024-12-24 16:31:17.707 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1883. 

  1883. [Save Log Job] 2024-12-24 16:31:20.894 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
    1884. 

  1884. [Save Log Job] 2024-12-24 16:31:32.102 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1885. 

  1885. [Save Log Job] 2024-12-24 16:31:32.103 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1886. 

  1886. [Save Log Job] 2024-12-24 16:31:32.108 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1887. 

  1887. [Save Log Job] 2024-12-24 16:31:32.222 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1888. 

  1888. [Save Log Job] 2024-12-24 16:31:35.642 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1889. 

  1889. [Save Log Job] 2024-12-24 16:31:35.643 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1890. 

  1890. [Save Log Job] 2024-12-24 16:31:35.643 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1891. 

  1891. [Save Log Job] 2024-12-24 16:31:38.460 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1892. 

  1892. [Save Log Job] 2024-12-24 16:31:38.500 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1893. 

  1893. [Save Log Job] 2024-12-24 16:31:38.662 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1894. 

  1894. [Save Log Job] 2024-12-24 16:31:38.715 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1895. 

  1895. [Save Log Job] 2024-12-24 16:31:43.612 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    1896. 

  1896. [Save Log Job] 2024-12-24 16:31:43.630 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    1897. 

  1897. [Save Log Job] 2024-12-24 16:31:43.633 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241224163143-CACB
    1898. 

  1898. [Save Log Job] 2024-12-24 16:31:43.633 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1899. 

  1899. [Save Log Job] 2024-12-24 16:31:43.634 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    1900. 

  1900. [Save Log Job] 2024-12-24 16:31:43.634 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    1901. 

  1901. [Save Log Job] 2024-12-24 16:31:43.635 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1902. 

  1902. [Save Log Job] 2024-12-24 16:31:43.639 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1903. 

  1903. [Save Log Job] 2024-12-24 16:31:43.686 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1904. 

  1904. [Save Log Job] 2024-12-24 16:31:43.687 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1905. 

  1905. [Save Log Job] 2024-12-24 16:31:43.687 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1906. 

  1906. [Save Log Job] 2024-12-24 16:31:43.687 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1907. 

  1907. [Save Log Job] 2024-12-24 16:31:43.689 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1908. 

  1908. [Save Log Job] 2024-12-24 16:31:43.753 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1909. 

  1909. [Save Log Job] 2024-12-24 16:31:43.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1910. 

  1910. [Save Log Job] 2024-12-24 16:31:45.782 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1911. 

  1911. [Save Log Job] 2024-12-24 16:31:45.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1912. 

  1912. [Save Log Job] 2024-12-24 16:31:50.615 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    1913. 

  1913. [Save Log Job] 2024-12-24 16:31:50.616 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    1914. 

  1914. [Save Log Job] 2024-12-24 16:31:50.625 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1915. 

  1915. [Save Log Job] 2024-12-24 16:31:50.777 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1916. 

  1916. [Save Log Job] 2024-12-24 16:32:04.637 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1917. 

  1917. [Save Log Job] 2024-12-24 16:32:04.642 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1918. 

  1918. [Save Log Job] 2024-12-24 16:32:11.634 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1919. 

  1919. [Save Log Job] 2024-12-24 16:32:13.639 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1920. 

  1920. [Save Log Job] 2024-12-24 16:32:43.647 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1921. 

  1921. [Save Log Job] 2024-12-24 16:33:13.650 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1922. 

  1922. <==  [Save Log Job] 2024-12-24 16:33:44.651 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1923. 

  1923. [Save Log Job] 2024-12-24 16:33:45.349 LOG.INFO EventService.cs Line:60 Register() - 客户端c1bfb776-9b54-4d98-b71b-92bb49dfd4ed已连接
    1924. 

  1924. [Save Log Job] 2024-12-24 16:33:45.760 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1925. 

  1925. [Save Log Job] 2024-12-24 16:33:45.760 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1926. 

  1926. [Save Log Job] 2024-12-24 16:33:45.836 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1927. 

  1927. [Save Log Job] 2024-12-24 16:33:46.854 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1928. 

  1928. [Save Log Job] 2024-12-24 16:33:46.883 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1929. 

  1929. [Save Log Job] 2024-12-24 16:33:47.065 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1930. 

  1930. [Save Log Job] 2024-12-24 16:33:47.115 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1931. 

  1931. [Save Log Job] 2024-12-24 16:33:47.258 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1932. 

  1932. [Save Log Job] 2024-12-24 16:33:47.389 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1933. 

  1933. [Save Log Job] 2024-12-24 16:33:50.851 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
    1934. 

  1934. <==  [Save Log Job] 2024-12-24 16:38:20.938 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    1935. 

  1935. [Save Log Job] 2024-12-24 16:38:21.930 LOG.INFO EventService.cs Line:55 Register() - 客户端a2443ffc-745f-431a-8737-1926bd48fc36已连接
    1936. 

  1936. [Save Log Job] 2024-12-24 16:38:21.930 LOG.INFO EventService.cs Line:60 Register() - 客户端a2443ffc-745f-431a-8737-1926bd48fc36已连接
    1937. 

  1937. [Save Log Job] 2024-12-24 16:38:22.085 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    1938. 

  1938. [Save Log Job] 2024-12-24 16:38:22.086 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    1939. 

  1939. [Save Log Job] 2024-12-24 16:38:22.160 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    1940. 

  1940. [Save Log Job] 2024-12-24 16:38:23.256 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1941. 

  1941. [Save Log Job] 2024-12-24 16:38:23.257 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1942. 

  1942. [Save Log Job] 2024-12-24 16:38:23.405 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1943. 

  1943. [Save Log Job] 2024-12-24 16:38:23.454 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1944. 

  1944. [Save Log Job] 2024-12-24 16:38:23.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1945. 

  1945. [Save Log Job] 2024-12-24 16:38:23.949 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    1946. 

  1946. [Save Log Job] 2024-12-24 16:38:27.173 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
    1947. 

  1947. [Save Log Job] 2024-12-24 16:38:30.061 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    1948. 

  1948. [Save Log Job] 2024-12-24 16:38:30.062 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1949. 

  1949. [Save Log Job] 2024-12-24 16:38:30.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    1950. 

  1950. [Save Log Job] 2024-12-24 16:38:30.198 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    1951. 

  1951. [Save Log Job] 2024-12-24 16:38:37.406 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    1952. 

  1952. [Save Log Job] 2024-12-24 16:38:37.408 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1953. 

  1953. [Save Log Job] 2024-12-24 16:38:37.408 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    1954. 

  1954. [Save Log Job] 2024-12-24 16:38:40.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    1955. 

  1955. [Save Log Job] 2024-12-24 16:38:40.194 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    1956. 

  1956. [Save Log Job] 2024-12-24 16:38:40.197 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241224163840-CACB
    1957. 

  1957. [Save Log Job] 2024-12-24 16:38:40.198 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    1958. 

  1958. [Save Log Job] 2024-12-24 16:38:40.199 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    1959. 

  1959. [Save Log Job] 2024-12-24 16:38:40.199 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    1960. 

  1960. [Save Log Job] 2024-12-24 16:38:40.200 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1961. 

  1961. [Save Log Job] 2024-12-24 16:38:40.204 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1962. 

  1962. [Save Log Job] 2024-12-24 16:38:40.216 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1963. 

  1963. [Save Log Job] 2024-12-24 16:38:40.251 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    1964. 

  1964. [Save Log Job] 2024-12-24 16:38:40.252 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    1965. 

  1965. [Save Log Job] 2024-12-24 16:38:40.252 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    1966. 

  1966. [Save Log Job] 2024-12-24 16:38:40.253 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    1967. 

  1967. [Save Log Job] 2024-12-24 16:38:40.253 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    1968. 

  1968. [Save Log Job] 2024-12-24 16:38:40.314 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    1969. 

  1969. [Save Log Job] 2024-12-24 16:38:42.339 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1970. 

  1970. [Save Log Job] 2024-12-24 16:38:43.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    1971. 

  1971. [Save Log Job] 2024-12-24 16:38:44.382 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1972. 

  1972. [Save Log Job] 2024-12-24 16:38:44.417 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1973. 

  1973. [Save Log Job] 2024-12-24 16:38:44.464 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1974. 

  1974. [Save Log Job] 2024-12-24 16:39:00.123 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    1975. 

  1975. [Save Log Job] 2024-12-24 16:39:03.973 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1976. 

  1976. [Save Log Job] 2024-12-24 16:39:04.428 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1977. 

  1977. [Save Log Job] 2024-12-24 16:39:05.891 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1978. 

  1978. [Save Log Job] 2024-12-24 16:39:05.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    1979. 

  1979. [Save Log Job] 2024-12-24 16:39:05.900 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1980. 

  1980. [Save Log Job] 2024-12-24 16:39:06.083 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1981. 

  1981. [Save Log Job] 2024-12-24 16:39:10.207 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1982. 

  1982. [Save Log Job] 2024-12-24 16:39:26.911 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    1983. 

  1983. [Save Log Job] 2024-12-24 16:39:37.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
    1984. 

  1984. [Save Log Job] 2024-12-24 16:39:37.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    1985. 

  1985. [Save Log Job] 2024-12-24 16:39:37.487 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
    1986. 

  1986. [Save Log Job] 2024-12-24 16:39:40.217 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    1987. 

  1987. [Save Log Job] 2024-12-24 16:39:40.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    1988. 

  1988. [Save Log Job] 2024-12-24 16:39:40.495 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    1989. 

  1989. [Save Log Job] 2024-12-24 16:39:40.545 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    1990. 

  1990. [Save Log Job] 2024-12-24 16:39:40.584 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1991. 

  1991. [Save Log Job] 2024-12-24 16:39:40.602 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。
    1992. 

  1992. [Save Log Job] 2024-12-24 16:39:40.662 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。
    1993. 

  1993. [Save Log Job] 2024-12-24 16:39:42.696 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    1994. 

  1994. [Save Log Job] 2024-12-24 16:39:42.860 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.0 minitues。
    1995. 

  1995. [Save Log Job] 2024-12-24 16:39:42.860 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''.
    1996. 

  1996. [Save Log Job] 2024-12-24 16:39:42.861 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump
    1997. 

  1997. [Save Log Job] 2024-12-24 16:39:42.862 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    1998. 

  1998. [Save Log Job] 2024-12-24 16:39:42.991 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    1999. 

  1999. [Save Log Job] 2024-12-24 16:40:01.505 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2000. 

  2000. [Save Log Job] 2024-12-24 16:40:03.873 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2001. 

  2001. [Save Log Job] 2024-12-24 16:40:10.223 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2002. 

  2002. [Save Log Job] 2024-12-24 16:40:40.228 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2003. 

  2003. [Save Log Job] 2024-12-24 16:41:10.234 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2004. 

  2004. [Save Log Job] 2024-12-24 16:41:40.249 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2005. 

  2005. [Save Log Job] 2024-12-24 16:42:10.253 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2006. 

  2006. [Save Log Job] 2024-12-24 16:42:40.266 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2007. 

  2007. [Save Log Job] 2024-12-24 16:43:10.287 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2008. 

  2008. [Save Log Job] 2024-12-24 16:43:40.305 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2009. 

  2009. [Save Log Job] 2024-12-24 16:44:10.315 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2010. 

  2010. [Save Log Job] 2024-12-24 16:44:40.328 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2011. 

  2011. [Save Log Job] 2024-12-24 16:45:10.328 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2012. 

  2012. [Save Log Job] 2024-12-24 16:45:40.329 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2013. 

  2013. [Save Log Job] 2024-12-24 16:46:10.329 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2014. 

  2014. [Save Log Job] 2024-12-24 16:46:40.329 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2015. 

  2015. [Save Log Job] 2024-12-24 16:47:10.331 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2016. 

  2016. [Save Log Job] 2024-12-24 16:47:40.331 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2017. 

  2017. [Save Log Job] 2024-12-24 16:48:10.332 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2018. 

  2018. [Save Log Job] 2024-12-24 16:48:40.332 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2019. 

  2019. [Save Log Job] 2024-12-24 16:49:10.333 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2020. 

  2020. [Save Log Job] 2024-12-24 16:49:40.333 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2021. 

  2021. [Save Log Job] 2024-12-24 16:50:10.334 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2022. 

  2022. [Save Log Job] 2024-12-24 16:50:40.335 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2023. 

  2023. [Save Log Job] 2024-12-24 16:51:10.335 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2024. 

  2024. [Save Log Job] 2024-12-24 16:51:40.335 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2025. 

  2025. [Save Log Job] 2024-12-24 16:52:10.336 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2026. 

  2026. [Save Log Job] 2024-12-24 16:52:40.336 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2027. 

  2027. [Save Log Job] 2024-12-24 16:53:10.336 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2028. 

  2028. [Save Log Job] 2024-12-24 16:53:40.337 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2029. 

  2029. [Save Log Job] 2024-12-24 16:54:10.337 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2030. 

  2030. [Save Log Job] 2024-12-24 16:54:40.338 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2031. 

  2031. [Save Log Job] 2024-12-24 16:55:10.338 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2032. 

  2032. [Save Log Job] 2024-12-24 16:55:40.338 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2033. 

  2033. [Save Log Job] 2024-12-24 16:56:10.339 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2034. 

  2034. [Save Log Job] 2024-12-24 16:56:40.340 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2035. 

  2035. [Save Log Job] 2024-12-24 16:57:10.341 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2036. 

  2036. [Save Log Job] 2024-12-24 16:57:40.341 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2037. 

  2037. [Save Log Job] 2024-12-24 16:58:10.344 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2038. 

  2038. [Save Log Job] 2024-12-24 16:58:40.345 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2039. 

  2039. [Save Log Job] 2024-12-24 16:59:10.346 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2040. 

  2040. [Save Log Job] 2024-12-24 16:59:40.346 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2041. 

  2041. [Save Log Job] 2024-12-24 17:00:10.347 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2042. 

  2042. [Save Log Job] 2024-12-24 17:00:40.347 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2043. 

  2043. [Save Log Job] 2024-12-24 17:01:10.347 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2044. 

  2044. [Save Log Job] 2024-12-24 17:01:40.349 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2045. 

  2045. [Save Log Job] 2024-12-24 17:02:10.349 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2046. 

  2046. [Save Log Job] 2024-12-24 17:02:40.350 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2047. 

  2047. [Save Log Job] 2024-12-24 17:03:10.350 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2048. 

  2048. [Save Log Job] 2024-12-24 17:03:40.351 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2049. 

  2049. [Save Log Job] 2024-12-24 17:04:10.351 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2050. 

  2050. [Save Log Job] 2024-12-24 17:04:40.352 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2051. 

  2051. [Save Log Job] 2024-12-24 17:05:10.352 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2052. 

  2052. [Save Log Job] 2024-12-24 17:05:40.353 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2053. 

  2053. [Save Log Job] 2024-12-24 17:06:10.353 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2054. 

  2054. [Save Log Job] 2024-12-24 17:06:40.353 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2055. 

  2055. [Save Log Job] 2024-12-24 17:07:10.354 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2056. 

  2056. [Save Log Job] 2024-12-24 17:07:40.354 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2057. 

  2057. [Save Log Job] 2024-12-24 17:08:10.355 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2058. 

  2058. [Save Log Job] 2024-12-24 17:08:40.356 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2059. 

  2059. [Save Log Job] 2024-12-24 17:09:10.356 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2060. 

  2060. [Save Log Job] 2024-12-24 17:09:40.357 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2061. 

  2061. [Save Log Job] 2024-12-24 17:10:10.357 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2062. 

  2062. [Save Log Job] 2024-12-24 17:10:39.951 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 0)
    2063. 

  2063. [Save Log Job] 2024-12-24 17:10:39.952 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    2064. 

  2064. [Save Log Job] 2024-12-24 17:10:39.953 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    2065. 

  2065. [Save Log Job] 2024-12-24 17:10:39.954 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 120)
    2066. 

  2066. [Save Log Job] 2024-12-24 17:10:39.954 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    2067. 

  2067. [Save Log Job] 2024-12-24 17:10:39.955 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    2068. 

  2068. [Save Log Job] 2024-12-24 17:10:40.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    2069. 

  2069. [Save Log Job] 2024-12-24 17:10:40.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    2070. 

  2070. [Save Log Job] 2024-12-24 17:10:40.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    2071. 

  2071. [Save Log Job] 2024-12-24 17:10:40.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    2072. 

  2072. [Save Log Job] 2024-12-24 17:10:40.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    2073. 

  2073. [Save Log Job] 2024-12-24 17:10:40.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    2074. 

  2074. [Save Log Job] 2024-12-24 17:10:40.153 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2075. 

  2075. [Save Log Job] 2024-12-24 17:10:40.357 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2076. 

  2076. [Save Log Job] 2024-12-24 17:10:42.089 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    2077. 

  2077. [Save Log Job] 2024-12-24 17:10:44.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    2078. 

  2078. [Save Log Job] 2024-12-24 17:10:44.099 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump below 500mTorr。
    2079. 

  2079. [Save Log Job] 2024-12-24 17:10:44.156 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump Finished in 0.1 minitues。
    2080. 

  2080. [Save Log Job] 2024-12-24 17:10:44.156 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Pump''.
    2081. 

  2081. [Save Log Job] 2024-12-24 17:10:44.156 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Pump
    2082. 

  2082. [Save Log Job] 2024-12-24 17:10:44.156 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2083. 

  2083. [Save Log Job] 2024-12-24 17:10:44.169 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2084. 

  2084. [Save Log Job] 2024-12-24 17:11:00.964 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2085. 

  2085. [Save Log Job] 2024-12-24 17:11:05.168 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2086. 

  2086. [Save Log Job] 2024-12-24 17:11:10.358 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    2087. 

  2087. <==  [Save Log Job] 2024-12-24 17:11:25.104 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    2088. 

  2088. [Save Log Job] 2024-12-24 17:11:25.853 LOG.INFO EventService.cs Line:60 Register() - 客户端06712429-3d0f-4189-815f-d3231e1d956b已连接
    2089. 

  2089. [Save Log Job] 2024-12-24 17:11:26.126 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    2090. 

  2090. [Save Log Job] 2024-12-24 17:11:26.129 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    2091. 

  2091. [Save Log Job] 2024-12-24 17:11:26.199 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    2092. 

  2092. [Save Log Job] 2024-12-24 17:11:27.228 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2093. 

  2093. [Save Log Job] 2024-12-24 17:11:27.261 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2094. 

  2094. [Save Log Job] 2024-12-24 17:11:27.438 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2095. 

  2095. [Save Log Job] 2024-12-24 17:11:27.474 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2096. 

  2096. [Save Log Job] 2024-12-24 17:11:27.484 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2097. 

  2097. [Save Log Job] 2024-12-24 17:11:27.971 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    2098. 

  2098. [Save Log Job] 2024-12-24 17:11:31.212 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
    2099. 

  2099. [Save Log Job] 2024-12-24 17:11:36.496 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    2100. 

  2100. [Save Log Job] 2024-12-24 17:11:36.497 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    2101. 

  2101. [Save Log Job] 2024-12-24 17:11:36.502 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    2102. 

  2102. [Save Log Job] 2024-12-24 17:11:36.621 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    2103. 

  2103. [Save Log Job] 2024-12-24 17:11:48.327 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2104. 

  2104. [Save Log Job] 2024-12-24 17:11:48.449 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2105. 

  2105. [Save Log Job] 2024-12-24 17:11:48.495 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2106. 

  2106. [Save Log Job] 2024-12-24 17:12:09.319 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2107. 

  2107. [Save Log Job] 2024-12-24 17:12:52.322 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Vent()
    2108. 

  2108. [Save Log Job] 2024-12-24 17:12:52.323 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Vent
    2109. 

  2109. [Save Log Job] 2024-12-24 17:12:52.375 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：check sensor。
    2110. 

  2110. [Save Log Job] 2024-12-24 17:12:52.376 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：Close pumping open valve。
    2111. 

  2111. [Save Log Job] 2024-12-24 17:12:52.437 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：close all the valve。
    2112. 

  2112. [Save Log Job] 2024-12-24 17:12:52.489 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2113. 

  2113. [Save Log Job] 2024-12-24 17:12:52.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：vent delay 2 seconds before open vent valve。
    2114. 

  2114. [Save Log Job] 2024-12-24 17:12:54.593 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：Open vent valve。
    2115. 

  2115. [Save Log Job] 2024-12-24 17:12:56.639 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveOpen失败，原因：Valve keep closed 。
    2116. 

  2116. [Save Log Job] 2024-12-24 17:12:57.361 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：vent 50 seconds。
    2117. 

  2117. [Save Log Job] 2024-12-24 17:13:13.332 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2118. 

  2118. [Save Log Job] 2024-12-24 17:13:47.455 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：Close vent valve。
    2119. 

  2119. [Save Log Job] 2024-12-24 17:13:49.480 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
    2120. 

  2120. [Save Log Job] 2024-12-24 17:13:51.177 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：Vent Finished in 1.0 minitues。
    2121. 

  2121. [Save Log Job] 2024-12-24 17:13:51.177 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Vent''.
    2122. 

  2122. [Save Log Job] 2024-12-24 17:13:51.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Vent
    2123. 

  2123. [Save Log Job] 2024-12-24 17:13:51.178 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2124. 

  2124. [Save Log Job] 2024-12-24 17:13:51.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2125. 

  2125. [Save Log Job] 2024-12-24 17:14:12.186 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2126. 

  2126. [Save Log Job] 2024-12-24 17:15:09.736 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    2127. 

  2127. [Save Log Job] 2024-12-24 17:15:09.737 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    2128. 

  2128. [Save Log Job] 2024-12-24 17:15:09.738 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
    2129. 

  2129. [Save Log Job] 2024-12-24 17:15:09.740 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
    2130. 

  2130. [Save Log Job] 2024-12-24 17:15:09.740 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation GasFlow(300, 300, 300, 800, 900, 0)
    2131. 

  2131. [Save Log Job] 2024-12-24 17:15:09.741 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Pumping valve not open, open pump valve first。
    2132. 

  2132. [Save Log Job] 2024-12-24 17:15:13.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    2133. 

  2133. [Save Log Job] 2024-12-24 17:15:13.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    2134. 

  2134. [Save Log Job] 2024-12-24 17:15:13.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
    2135. 

  2135. [Save Log Job] 2024-12-24 17:15:13.890 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
    2136. 

  2136. [Save Log Job] 2024-12-24 17:15:13.890 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation GasFlow(300, 300, 300, 800, 900, 0)
    2137. 

  2137. [Save Log Job] 2024-12-24 17:15:13.890 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Pumping valve not open, open pump valve first。
    2138. 

  2138. [Save Log Job] 2024-12-24 17:15:15.321 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    2139. 

  2139. [Save Log Job] 2024-12-24 17:15:15.321 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    2140. 

  2140. [Save Log Job] 2024-12-24 17:15:15.322 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
    2141. 

  2141. [Save Log Job] 2024-12-24 17:15:15.322 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
    2142. 

  2142. [Save Log Job] 2024-12-24 17:15:15.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation GasFlow(300, 300, 300, 800, 900, 0)
    2143. 

  2143. [Save Log Job] 2024-12-24 17:15:15.323 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Pumping valve not open, open pump valve first。
    2144. 

  2144. [Save Log Job] 2024-12-24 17:15:16.552 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    2145. 

  2145. [Save Log Job] 2024-12-24 17:15:16.552 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    2146. 

  2146. [Save Log Job] 2024-12-24 17:15:16.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
    2147. 

  2147. [Save Log Job] 2024-12-24 17:15:16.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
    2148. 

  2148. [Save Log Job] 2024-12-24 17:15:16.554 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation GasFlow(300, 300, 300, 800, 900, 0)
    2149. 

  2149. [Save Log Job] 2024-12-24 17:15:16.554 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Pumping valve not open, open pump valve first。
    2150. 

  2150. [Save Log Job] 2024-12-24 17:15:16.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    2151. 

  2151. [Save Log Job] 2024-12-24 17:15:16.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    2152. 

  2152. [Save Log Job] 2024-12-24 17:15:16.806 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
    2153. 

  2153. [Save Log Job] 2024-12-24 17:15:16.806 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
    2154. 

  2154. [Save Log Job] 2024-12-24 17:15:16.807 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation GasFlow(300, 300, 300, 800, 900, 0)
    2155. 

  2155. [Save Log Job] 2024-12-24 17:15:16.807 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Pumping valve not open, open pump valve first。
    2156. 

  2156. [Save Log Job] 2024-12-24 17:15:16.961 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    2157. 

  2157. [Save Log Job] 2024-12-24 17:15:16.961 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    2158. 

  2158. [Save Log Job] 2024-12-24 17:15:16.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
    2159. 

  2159. [Save Log Job] 2024-12-24 17:15:16.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
    2160. 

  2160. [Save Log Job] 2024-12-24 17:15:16.964 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation GasFlow(300, 300, 300, 800, 900, 0)
    2161. 

  2161. [Save Log Job] 2024-12-24 17:15:16.964 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Pumping valve not open, open pump valve first。
    2162. 

  2162. [Save Log Job] 2024-12-24 17:15:17.169 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    2163. 

  2163. [Save Log Job] 2024-12-24 17:15:17.169 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    2164. 

  2164. [Save Log Job] 2024-12-24 17:15:17.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
    2165. 

  2165. [Save Log Job] 2024-12-24 17:15:17.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
    2166. 

  2166. [Save Log Job] 2024-12-24 17:15:17.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation GasFlow(300, 300, 300, 800, 900, 0)
    2167. 

  2167. [Save Log Job] 2024-12-24 17:15:17.172 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Pumping valve not open, open pump valve first。
    2168. 

  2168. [Save Log Job] 2024-12-24 17:15:59.776 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    2169. 

  2169. [Save Log Job] 2024-12-24 17:15:59.777 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    2170. 

  2170. [Save Log Job] 2024-12-24 17:15:59.778 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
    2171. 

  2171. [Save Log Job] 2024-12-24 17:15:59.778 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
    2172. 

  2172. [Save Log Job] 2024-12-24 17:15:59.779 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation GasFlow(300, 300, 300, 800, 900, 0)
    2173. 

  2173. [Save Log Job] 2024-12-24 17:15:59.779 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Pumping valve not open, open pump valve first。
    2174. 

  2174. [Save Log Job] 2024-12-24 17:16:02.680 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Purge()
    2175. 

  2175. [Save Log Job] 2024-12-24 17:16:02.681 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|CyclePurge
    2176. 

  2176. [Save Log Job] 2024-12-24 17:16:02.733 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Cycle Purge：Check if the rf is on。
    2177. 

  2177. [Save Log Job] 2024-12-24 17:16:02.792 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Cycle Purge：Check if the pump valve open。
    2178. 

  2178. [Save Log Job] 2024-12-24 17:16:02.793 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System ''Cycle Purge'' stopped
    2179. 

  2179. [Save Log Job] 2024-12-24 17:16:02.793 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System ''Cycle Purge'' stopped，reason: pump valve not open。
    2180. 

  2180. [Save Log Job] 2024-12-24 17:16:02.800 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2181. 

  2181. [Save Log Job] 2024-12-24 17:16:13.121 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    2182. 

  2182. [Save Log Job] 2024-12-24 17:16:13.121 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    2183. 

  2183. [Save Log Job] 2024-12-24 17:16:13.122 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
    2184. 

  2184. [Save Log Job] 2024-12-24 17:16:13.122 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
    2185. 

  2185. [Save Log Job] 2024-12-24 17:16:13.123 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation GasFlow(300, 300, 300, 800, 900, 0)
    2186. 

  2186. [Save Log Job] 2024-12-24 17:16:13.123 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Pumping valve not open, open pump valve first。
    2187. 

  2187. [Save Log Job] 2024-12-24 17:16:19.776 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Purge()
    2188. 

  2188. [Save Log Job] 2024-12-24 17:16:19.777 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|CyclePurge
    2189. 

  2189. [Save Log Job] 2024-12-24 17:16:19.827 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Cycle Purge：Check if the rf is on。
    2190. 

  2190. [Save Log Job] 2024-12-24 17:16:19.856 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2191. 

  2191. [Save Log Job] 2024-12-24 17:16:19.884 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Cycle Purge：Check if the pump valve open。
    2192. 

  2192. [Save Log Job] 2024-12-24 17:16:19.885 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System ''Cycle Purge'' stopped
    2193. 

  2193. [Save Log Job] 2024-12-24 17:16:19.885 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System ''Cycle Purge'' stopped，reason: pump valve not open。
    2194. 

  2194. [Save Log Job] 2024-12-24 17:16:19.892 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2195. 

  2195. [Save Log Job] 2024-12-24 17:16:20.056 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2196. 

  2196. [Save Log Job] 2024-12-24 17:16:23.692 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2197. 

  2197. [Save Log Job] 2024-12-24 17:16:23.808 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2198. 

  2198. [Save Log Job] 2024-12-24 17:16:40.785 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2199. 

  2199. [Save Log Job] 2024-12-24 17:16:40.901 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2200. 

  2200. [Save Log Job] 2024-12-24 17:16:55.809 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 0)
    2201. 

  2201. [Save Log Job] 2024-12-24 17:16:55.810 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    2202. 

  2202. [Save Log Job] 2024-12-24 17:17:10.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 666)
    2203. 

  2203. [Save Log Job] 2024-12-24 17:17:10.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    2204. 

  2204. [Save Log Job] 2024-12-24 17:17:22.113 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    2205. 

  2205. [Save Log Job] 2024-12-24 17:17:22.114 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    2206. 

  2206. [Save Log Job] 2024-12-24 17:17:22.115 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
    2207. 

  2207. [Save Log Job] 2024-12-24 17:17:22.115 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
    2208. 

  2208. [Save Log Job] 2024-12-24 17:17:22.116 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation GasFlow(300, 300, 300, 800, 900, 0)
    2209. 

  2209. [Save Log Job] 2024-12-24 17:17:22.116 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Pumping valve not open, open pump valve first。
    2210. 

  2210. [Save Log Job] 2024-12-24 17:17:25.441 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
    2211. 

  2211. [Save Log Job] 2024-12-24 17:17:25.441 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
    2212. 

  2212. [Save Log Job] 2024-12-24 17:17:25.442 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
    2213. 

  2213. [Save Log Job] 2024-12-24 17:17:25.442 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
    2214. 

  2214. [Save Log Job] 2024-12-24 17:17:25.444 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation GasFlow(300, 300, 300, 800, 900, 0)
    2215. 

  2215. [Save Log Job] 2024-12-24 17:17:25.444 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Pumping valve not open, open pump valve first。
    2216. 

  2216. [Save Log Job] 2024-12-24 17:17:44.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 800)
    2217. 

  2217. [Save Log Job] 2024-12-24 17:17:44.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    2218. 

  2218. [Save Log Job] 2024-12-24 17:17:44.281 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    2219. 

  2219. [Save Log Job] 2024-12-24 17:17:44.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 90)
    2220. 

  2220. [Save Log Job] 2024-12-24 17:17:44.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    2221. 

  2221. [Save Log Job] 2024-12-24 17:17:44.283 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    2222. 

  2222. [Save Log Job] 2024-12-24 17:17:44.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    2223. 

  2223. [Save Log Job] 2024-12-24 17:17:44.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    2224. 

  2224. [Save Log Job] 2024-12-24 17:17:44.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    2225. 

  2225. [Save Log Job] 2024-12-24 17:17:44.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    2226. 

  2226. [Save Log Job] 2024-12-24 17:17:44.336 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    2227. 

  2227. [Save Log Job] 2024-12-24 17:17:44.394 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    2228. 

  2228. [Save Log Job] 2024-12-24 17:17:44.470 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2229. 

  2229. [Save Log Job] 2024-12-24 17:17:45.292 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    2230. 

  2230. [Save Log Job] 2024-12-24 17:18:05.290 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2231. 

  2231. [Save Log Job] 2024-12-24 17:19:14.050 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump below 500mTorr。
    2232. 

  2232. [Save Log Job] 2024-12-24 17:19:14.107 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump Finished in 1.5 minitues。
    2233. 

  2233. [Save Log Job] 2024-12-24 17:19:14.107 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Pump''.
    2234. 

  2234. [Save Log Job] 2024-12-24 17:19:14.107 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Pump
    2235. 

  2235. [Save Log Job] 2024-12-24 17:19:14.108 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2236. 

  2236. [Save Log Job] 2024-12-24 17:19:14.145 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2237. 

  2237. [Save Log Job] 2024-12-24 17:19:35.119 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2238. 

  2238. [Save Log Job] 2024-12-24 17:24:21.609 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    2239. 

  2239. [Save Log Job] 2024-12-24 17:24:21.609 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    2240. 

  2240. [Save Log Job] 2024-12-24 17:24:21.660 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    2241. 

  2241. [Save Log Job] 2024-12-24 17:24:21.717 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。
    2242. 

  2242. [Save Log Job] 2024-12-24 17:24:21.736 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2243. 

  2243. [Save Log Job] 2024-12-24 17:24:21.773 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。
    2244. 

  2244. [Save Log Job] 2024-12-24 17:24:23.821 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    2245. 

  2245. [Save Log Job] 2024-12-24 17:24:24.544 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.0 minitues。
    2246. 

  2246. [Save Log Job] 2024-12-24 17:24:24.544 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''.
    2247. 

  2247. [Save Log Job] 2024-12-24 17:24:24.544 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump
    2248. 

  2248. [Save Log Job] 2024-12-24 17:24:24.545 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2249. 

  2249. [Save Log Job] 2024-12-24 17:24:24.546 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2250. 

  2250. [Save Log Job] 2024-12-24 17:24:42.620 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2251. 

  2251. [Save Log Job] 2024-12-24 17:24:45.554 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2252. 

  2252. [Save Log Job] 2024-12-24 17:28:23.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 800)
    2253. 

  2253. [Save Log Job] 2024-12-24 17:28:23.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    2254. 

  2254. [Save Log Job] 2024-12-24 17:28:23.309 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    2255. 

  2255. [Save Log Job] 2024-12-24 17:28:23.310 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 90)
    2256. 

  2256. [Save Log Job] 2024-12-24 17:28:23.311 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    2257. 

  2257. [Save Log Job] 2024-12-24 17:28:23.311 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    2258. 

  2258. [Save Log Job] 2024-12-24 17:28:23.362 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    2259. 

  2259. [Save Log Job] 2024-12-24 17:28:23.362 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    2260. 

  2260. [Save Log Job] 2024-12-24 17:28:23.362 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    2261. 

  2261. [Save Log Job] 2024-12-24 17:28:23.362 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    2262. 

  2262. [Save Log Job] 2024-12-24 17:28:23.362 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    2263. 

  2263. [Save Log Job] 2024-12-24 17:28:23.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    2264. 

  2264. [Save Log Job] 2024-12-24 17:28:23.424 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2265. 

  2265. [Save Log Job] 2024-12-24 17:28:25.424 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    2266. 

  2266. [Save Log Job] 2024-12-24 17:28:26.300 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    2267. 

  2267. [Save Log Job] 2024-12-24 17:28:26.300 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump below 500mTorr。
    2268. 

  2268. [Save Log Job] 2024-12-24 17:28:26.357 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump Finished in 0.1 minitues。
    2269. 

  2269. [Save Log Job] 2024-12-24 17:28:26.357 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Pump''.
    2270. 

  2270. [Save Log Job] 2024-12-24 17:28:26.357 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Pump
    2271. 

  2271. [Save Log Job] 2024-12-24 17:28:26.357 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2272. 

  2272. [Save Log Job] 2024-12-24 17:28:26.431 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2273. 

  2273. [Save Log Job] 2024-12-24 17:28:26.972 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Abort()
    2274. 

  2274. [Save Log Job] 2024-12-24 17:28:26.972 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Idle，can not do Abort。
    2275. 

  2275. [Save Log Job] 2024-12-24 17:28:32.861 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    2276. 

  2276. [Save Log Job] 2024-12-24 17:28:32.861 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    2277. 

  2277. [Save Log Job] 2024-12-24 17:28:32.911 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    2278. 

  2278. [Save Log Job] 2024-12-24 17:28:32.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。
    2279. 

  2279. [Save Log Job] 2024-12-24 17:28:33.023 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。
    2280. 

  2280. [Save Log Job] 2024-12-24 17:28:33.045 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2281. 

  2281. [Save Log Job] 2024-12-24 17:28:34.033 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.0 minitues。
    2282. 

  2282. [Save Log Job] 2024-12-24 17:28:34.033 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''.
    2283. 

  2283. [Save Log Job] 2024-12-24 17:28:34.033 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump
    2284. 

  2284. [Save Log Job] 2024-12-24 17:28:34.033 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2285. 

  2285. [Save Log Job] 2024-12-24 17:28:34.047 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2286. 

  2286. [Save Log Job] 2024-12-24 17:28:44.320 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2287. 

  2287. [Save Log Job] 2024-12-24 17:28:47.366 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2288. 

  2288. [Save Log Job] 2024-12-24 17:28:53.878 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2289. 

  2289. [Save Log Job] 2024-12-24 17:28:55.042 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2290. 

  2290. [Save Log Job] 2024-12-24 17:28:57.468 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 800)
    2291. 

  2291. [Save Log Job] 2024-12-24 17:28:57.468 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    2292. 

  2292. [Save Log Job] 2024-12-24 17:28:57.469 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    2293. 

  2293. [Save Log Job] 2024-12-24 17:28:57.469 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
    2294. 

  2294. [Save Log Job] 2024-12-24 17:28:57.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    2295. 

  2295. [Save Log Job] 2024-12-24 17:28:57.471 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    2296. 

  2296. [Save Log Job] 2024-12-24 17:28:57.493 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2297. 

  2297. [Save Log Job] 2024-12-24 17:28:57.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    2298. 

  2298. [Save Log Job] 2024-12-24 17:28:57.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    2299. 

  2299. [Save Log Job] 2024-12-24 17:28:57.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    2300. 

  2300. [Save Log Job] 2024-12-24 17:28:57.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    2301. 

  2301. [Save Log Job] 2024-12-24 17:28:57.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    2302. 

  2302. [Save Log Job] 2024-12-24 17:28:57.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    2303. 

  2303. [Save Log Job] 2024-12-24 17:28:59.619 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    2304. 

  2304. [Save Log Job] 2024-12-24 17:29:00.883 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    2305. 

  2305. [Save Log Job] 2024-12-24 17:29:00.883 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump below 500mTorr。
    2306. 

  2306. [Save Log Job] 2024-12-24 17:29:00.939 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump Finished in 0.1 minitues。
    2307. 

  2307. [Save Log Job] 2024-12-24 17:29:00.939 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Pump''.
    2308. 

  2308. [Save Log Job] 2024-12-24 17:29:00.939 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Pump
    2309. 

  2309. [Save Log Job] 2024-12-24 17:29:00.939 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2310. 

  2310. [Save Log Job] 2024-12-24 17:29:01.101 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2311. 

  2311. [Save Log Job] 2024-12-24 17:29:18.478 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2312. 

  2312. [Save Log Job] 2024-12-24 17:29:21.951 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2313. 

  2313. [Save Log Job] 2024-12-24 17:29:40.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    2314. 

  2314. [Save Log Job] 2024-12-24 17:29:40.668 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    2315. 

  2315. [Save Log Job] 2024-12-24 17:29:40.668 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    2316. 

  2316. [Save Log Job] 2024-12-24 17:29:42.092 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
    2317. 

  2317. [Save Log Job] 2024-12-24 17:29:42.094 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    2318. 

  2318. [Save Log Job] 2024-12-24 17:29:42.095 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
    2319. 

  2319. [Save Log Job] 2024-12-24 17:29:47.732 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Vent()
    2320. 

  2320. [Save Log Job] 2024-12-24 17:29:47.732 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Vent
    2321. 

  2321. [Save Log Job] 2024-12-24 17:29:47.783 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：check sensor。
    2322. 

  2322. [Save Log Job] 2024-12-24 17:29:47.783 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：Close pumping open valve。
    2323. 

  2323. [Save Log Job] 2024-12-24 17:29:47.786 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2324. 

  2324. [Save Log Job] 2024-12-24 17:29:49.819 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    2325. 

  2325. [Save Log Job] 2024-12-24 17:29:50.769 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：close all the valve。
    2326. 

  2326. [Save Log Job] 2024-12-24 17:29:50.826 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：vent delay 2 seconds before open vent valve。
    2327. 

  2327. [Save Log Job] 2024-12-24 17:29:52.888 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：Open vent valve。
    2328. 

  2328. [Save Log Job] 2024-12-24 17:29:54.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：vent 50 seconds。
    2329. 

  2329. [Save Log Job] 2024-12-24 17:30:08.743 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2330. 

  2330. [Save Log Job] 2024-12-24 17:30:44.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：Close vent valve。
    2331. 

  2331. [Save Log Job] 2024-12-24 17:30:47.024 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
    2332. 

  2332. [Save Log Job] 2024-12-24 17:30:48.643 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：Vent Finished in 1.0 minitues。
    2333. 

  2333. [Save Log Job] 2024-12-24 17:30:48.643 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Vent''.
    2334. 

  2334. [Save Log Job] 2024-12-24 17:30:48.643 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Vent
    2335. 

  2335. [Save Log Job] 2024-12-24 17:30:48.644 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2336. 

  2336. [Save Log Job] 2024-12-24 17:30:48.747 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2337. 

  2337. [Save Log Job] 2024-12-24 17:31:09.652 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2338. 

  2338. [Save Log Job] 2024-12-24 17:31:10.260 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 800)
    2339. 

  2339. [Save Log Job] 2024-12-24 17:31:10.260 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    2340. 

  2340. [Save Log Job] 2024-12-24 17:31:10.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    2341. 

  2341. [Save Log Job] 2024-12-24 17:31:10.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
    2342. 

  2342. [Save Log Job] 2024-12-24 17:31:10.262 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    2343. 

  2343. [Save Log Job] 2024-12-24 17:31:10.262 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    2344. 

  2344. [Save Log Job] 2024-12-24 17:31:10.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    2345. 

  2345. [Save Log Job] 2024-12-24 17:31:10.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    2346. 

  2346. [Save Log Job] 2024-12-24 17:31:10.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    2347. 

  2347. [Save Log Job] 2024-12-24 17:31:10.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    2348. 

  2348. [Save Log Job] 2024-12-24 17:31:10.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    2349. 

  2349. [Save Log Job] 2024-12-24 17:31:10.369 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    2350. 

  2350. [Save Log Job] 2024-12-24 17:31:10.394 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2351. 

  2351. [Save Log Job] 2024-12-24 17:31:11.490 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    2352. 

  2352. [Save Log Job] 2024-12-24 17:31:21.492 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Can not pump to base pressure 500 in 10 seconds。
    2353. 

  2353. [Save Log Job] 2024-12-24 17:31:21.498 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    2354. 

  2354. [Save Log Job] 2024-12-24 17:31:21.624 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    2355. 

  2355. [Save Log Job] 2024-12-24 17:31:31.273 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2356. 

  2356. [Save Log Job] 2024-12-24 17:31:42.509 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    2357. 

  2357. [Save Log Job] 2024-12-24 17:32:01.357 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    2358. 

  2358. [Save Log Job] 2024-12-24 17:32:01.358 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    2359. 

  2359. [Save Log Job] 2024-12-24 17:32:03.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_Language, 2)
    2360. 

  2360. [Save Log Job] 2024-12-24 17:32:13.509 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    2361. 

  2361. [Save Log Job] 2024-12-24 17:32:13.509 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    2362. 

  2362. [Save Log Job] 2024-12-24 17:32:31.257 LOG.INFO LOG.cs Line:61 Write() - user login server
    2363. 

  2363. [Save Log Job] 2024-12-24 17:32:36.520 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面
    2364. 

  2364. [Save Log Job] 2024-12-24 20:11:32.417 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM。
    2365. 

  2365. [Save Log Job] 2024-12-24 23:11:31.736 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM。
    2366. 

  2366.  ==> 
    2367.