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System:
Contactor:
EMO:
Host:
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User Name：
Password：
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Event：
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Version：
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Role：
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Lot Scan
Operator
Select Recipe
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Data Log
Lot ID
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Chamber Door：
Pump Door：
Pump
Inlet
Outlet
Vent
Precursor Door：
Backpanel Door：
Process Status
Parameters
Feedback
Set Point
ProcessTime(s)
Step No
Step Time
Chamber Pressure(mTorr)
TV Mode
TV Position(%)
TV Pressure(mTorr)
Boost Pressure(mTorr)
RF Time(s)
RF Mode
RF Power(w)
Reflect Power(w)
Pulsing Frequency(Hz)
Pulsing DC(%)
RF Match Preset Mode
RF Match Position C1
RF Match Position C2
Vapor MFC1(sccm)
Vapor MFC2(sccm)
Electrode Temp(c)
Operation
Manual
Auto
Working Mode
Manual Operation
Base Pressure(mT)
Pump Down Limit(s)
Pump Time(s)
Pump
SetWaterFlowAlarm
ResetWaterFlowAlarm
Gas
RF
Purge
Vent
ChamberStatus
Load Unload
Load
Unload
Process Configuration
Vent Time Limit(s)
Purge Pump Time Limit(s)
Purge Pump Pressure(mTor)
Purge Time Limit(s)
Purge Pressure(mTor)
Purge Cycle Count
Gas Flow Pressure Alarm Time(s)
Gas Flow Pressure Alarm Range(mTor)
RF Power Alarm Range(w)
RF Power Alarm Time(s)
RF Reflect Power Alarm Range(w)
RF Reflect Power Alarm Time(s)
Vent Time(s)
Set
RF Match Running Mode
RF Match Position C1
RF Match Position C2
RF Match Mode In Auto Run Process
Gas
Enable
Display Name
N2 Scale
Scale Factor
Alarm Range
Alarm Time
Enable Alarm
Set
Gas 1
Gas 2
Gas 3
Gas 4
Gas 5
Pulsing Function
Power Range
Enable Barcode
Enable Manual Select Recipe
Vacuum System
Independent Pressure Control
Dry Pump
Dry Pump Setting
Cooling Water Flow
N2 Pressure
Pressure Control
Min
Max
Device Control
Test Mode
Statistics
RF On Time
Pump On Time
Last PM Time
From Last PM
Reset
Total
PM Interval(Days)
Account Management
Add
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Password
Role
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Current User
Only display enabled user
No.
Login Name
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Name
Role
Department
Last Login
Telephone
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Description
Title
Company
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ResetPassword
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registered user count:
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RecipeList
Current Recipe：
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Recipe Editor
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succeeded export '{0}' to
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Excel file (.xls)|*.xls
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Recipe file (.rcp)|*.rcp
rename
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failed!
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failed to rename recipe file!
rename "{0}" to:
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create recipe file
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create recipe file
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All the files and foldes under this folder will be deleted.
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Import file:
import recipe and rename
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delete recipe exception!
Liquid Level：
Standing Time：
Name
Set
Real
Alarm Range
Alarm Time
Enable Alarm
Precursor Temp
Precursor Container Temp
Vapor Line Temp
Pumping Line Temp
Precursor High Limit
Precursor Low Limit
Vapor Pressure
Container Vacuum Pressure
Maintenance Control
Tank Pump
Status:
Pumping
Container Pump
Vapor line Pump
Precursor Feed
Leak Check Configuration
Pump Down Time(m)
Leak Check Time(m)
Leak Check Mode
Status
Leak Check
Abort
Delete
Date
Start Pressure
Stop Pressure
Leak Rate
Pressure
RF Match
RF Power On/Off
RF Power (w)
Match Mode
C1 Setting (%)
C2 Setting (%)
ON
OFF
Query condition
Time Range
Recipe Run
Query
Data Log History List
Recipe Name
End Time
Start Time
Running result
Lot
Data Charting
Export List
Export Data