<== [Save Log Job] 2024-11-21 13:10:26.749 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 13:10:27.684 LOG.INFO EventService.cs Line:60 Register() - 客户端558951d6-7ff3-4ddb-8809-8d1e692efe3a已连接 [Save Log Job] 2024-11-21 13:10:27.685 LOG.INFO EventService.cs Line:60 Register() - 客户端558951d6-7ff3-4ddb-8809-8d1e692efe3a已连接 [Save Log Job] 2024-11-21 13:10:27.746 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:10:27.747 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:10:27.814 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 13:10:28.951 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:10:28.954 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:10:29.037 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:10:29.050 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:10:29.086 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:10:32.826 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 13:10:35.672 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 13:10:35.673 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:10:35.687 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 13:10:35.831 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:10:40.830 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 13:10:40.831 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 13:10:40.831 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 13:10:44.319 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 13:10:44.320 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:10:47.008 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 13:10:47.009 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:10:50.025 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:10:50.030 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:10:50.044 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:10:50.098 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:10:51.868 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:10:51.871 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:10:53.508 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:10:53.508 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:10:53.660 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:10:53.661 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) <== [Save Log Job] 2024-11-21 13:11:06.169 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 13:11:06.941 LOG.INFO EventService.cs Line:60 Register() - 客户端613d6637-dadc-414a-9c8c-9a37ad328db2已连接 [Save Log Job] 2024-11-21 13:11:07.160 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:11:07.160 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:11:07.207 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 13:11:08.169 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:11:08.251 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:11:08.421 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:11:08.468 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:11:08.557 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:11:12.217 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 13:11:14.869 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 13:11:14.870 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:11:14.875 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 13:11:15.004 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:11:20.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 13:11:20.991 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 13:11:20.991 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 13:11:29.247 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:11:29.259 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:11:29.429 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:11:29.482 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:11:32.112 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 13:11:32.112 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:11:36.673 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:36.676 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:36.839 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:36.840 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:37.003 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:37.004 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:37.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:37.172 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:37.328 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:37.329 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:37.507 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:37.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:37.673 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:37.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:37.859 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:37.860 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:38.011 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:38.012 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:38.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:38.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:38.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:38.500 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:38.651 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:38.652 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:38.787 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:38.788 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:38.959 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:38.960 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:39.148 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:39.149 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:39.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:39.292 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:39.475 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:39.478 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) [Save Log Job] 2024-11-21 13:11:39.604 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableBarcode, True) [Save Log Job] 2024-11-21 13:11:39.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True) <== [Save Log Job] 2024-11-21 13:11:52.787 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 13:11:53.606 LOG.INFO EventService.cs Line:60 Register() - 客户端0e5fb5a8-575e-466e-99dc-2ad131448705已连接 [Save Log Job] 2024-11-21 13:11:53.790 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:11:53.794 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:11:53.840 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 13:11:54.824 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:11:54.878 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:11:55.053 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:11:55.100 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:11:55.199 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:11:58.850 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 13:12:01.658 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 13:12:01.659 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:12:01.664 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 13:12:01.804 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:12:05.065 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 13:12:05.066 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 13:12:05.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode <== [Save Log Job] 2024-11-21 13:22:14.146 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 13:22:14.935 LOG.INFO EventService.cs Line:60 Register() - 客户端defa4155-37a3-416c-a82f-ee162f448043已连接 [Save Log Job] 2024-11-21 13:22:15.134 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:22:15.136 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:22:15.193 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 13:22:23.892 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 13:22:24.811 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:22:24.851 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:22:25.025 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:22:25.052 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:22:25.072 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:22:30.506 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 13:22:30.508 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:22:30.514 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 13:22:30.647 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:22:40.288 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 13:22:40.290 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 13:22:40.290 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 13:22:45.876 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:22:46.033 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:22:46.081 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:23:06.508 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-11-21 13:23:38.850 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:23:38.853 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-11-21 13:23:38.857 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241121132338-CACB [Save Log Job] 2024-11-21 13:23:38.857 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-11-21 13:23:38.858 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-11-21 13:23:38.858 LOG.INFO YZQZFabAuto.cs Line:164 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-11-21 13:23:38.859 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 13:23:38.861 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 13:23:38.911 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-11-21 13:23:38.911 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-11-21 13:23:38.911 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-11-21 13:23:38.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-11-21 13:23:38.913 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-11-21 13:23:38.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-11-21 13:23:39.022 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:23:39.706 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 <== [Save Log Job] 2024-11-21 13:24:11.263 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 13:24:11.970 LOG.INFO EventService.cs Line:60 Register() - 客户端1dcfcf83-3f34-4894-8bac-07930719e732已连接 [Save Log Job] 2024-11-21 13:24:12.224 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:24:12.225 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:24:12.273 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 13:24:13.238 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:24:13.329 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:24:13.503 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:24:13.551 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:24:13.572 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:24:17.285 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 13:24:22.852 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 13:24:22.853 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:24:26.517 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 13:24:26.518 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:24:30.519 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 13:24:30.519 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:24:34.301 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:24:34.338 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:24:34.515 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:24:34.559 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:24:36.424 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 13:24:36.424 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:24:36.425 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 13:24:36.546 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:24:40.847 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 13:24:40.848 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 13:24:40.848 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 13:24:59.071 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-11-21 13:25:08.367 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-11-21 13:25:08.370 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241121132508-CACB [Save Log Job] 2024-11-21 13:25:08.370 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-11-21 13:25:08.371 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-11-21 13:25:08.372 LOG.INFO YZQZFabAuto.cs Line:164 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-11-21 13:25:08.372 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 13:25:08.375 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 13:25:08.423 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-11-21 13:25:08.424 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-11-21 13:25:08.424 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-11-21 13:25:08.425 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-11-21 13:25:08.425 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-11-21 13:25:08.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-11-21 13:25:08.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:25:10.490 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-11-21 13:25:11.554 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-11-21 13:25:28.091 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 13:25:28.092 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:25:29.378 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:25:29.385 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:25:29.776 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 13:25:29.776 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:25:32.468 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 13:25:32.468 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:25:36.400 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 13:25:36.400 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:25:37.429 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 13:25:37.429 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:25:38.375 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 13:25:43.633 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 13:25:43.633 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:25:46.462 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-11-21 13:25:46.519 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-11-21 13:25:46.519 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-11-21 13:25:46.525 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241121132508-CACB [Save Log Job] 2024-11-21 13:25:46.525 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241121132508-CACB'' [Save Log Job] 2024-11-21 13:25:46.526 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-11-21 13:25:46.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241121132508-CACB'' start run step 1：initial。 [Save Log Job] 2024-11-21 13:25:46.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-21 13:25:46.579 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-21 13:25:46.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-21 13:25:46.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-21 13:25:46.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-21 13:25:46.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-21 13:25:46.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-21 13:25:46.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-11-21 13:25:46.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-21 13:25:46.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-21 13:25:46.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-21 13:25:46.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-21 13:25:46.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-21 13:25:46.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-21 13:25:46.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-21 13:25:46.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-21 13:25:46.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-11-21 13:25:46.633 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-11-21 13:25:52.310 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 13:25:52.310 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:26:00.138 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-11-21 13:26:07.535 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:26:08.377 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 <== [Save Log Job] 2024-11-21 13:26:17.195 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 13:26:18.012 LOG.INFO EventService.cs Line:60 Register() - 客户端a5ccec38-e856-4207-9e49-830222e4e08f已连接 [Save Log Job] 2024-11-21 13:26:18.216 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:26:18.216 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:26:18.257 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 13:26:19.222 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:26:19.294 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:26:19.463 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:26:19.474 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:26:19.510 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:26:23.266 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 13:26:29.641 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 13:26:29.642 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:26:29.647 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 13:26:29.777 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:26:40.286 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:26:40.301 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:26:40.350 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 13:26:40.351 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 13:26:40.352 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 13:26:40.470 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:26:40.520 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. <== [Save Log Job] 2024-11-21 13:30:06.451 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 13:30:07.192 LOG.INFO EventService.cs Line:60 Register() - 客户端76b59832-cb21-40bb-9ec5-db68797fbeb5已连接 [Save Log Job] 2024-11-21 13:30:07.409 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:30:07.410 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:30:07.459 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 13:30:08.444 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:30:08.499 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:30:08.671 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:30:08.719 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:30:08.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:30:12.472 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 13:30:14.063 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 13:30:14.065 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:30:14.072 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 13:30:14.199 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:30:20.706 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 13:30:20.707 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 13:30:20.708 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 13:30:24.810 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 123, jerry) [Save Log Job] 2024-11-21 13:31:40.028 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-11-21 13:31:40.048 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:31:40.050 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241121133140-CACB [Save Log Job] 2024-11-21 13:31:40.050 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-11-21 13:31:40.052 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:31:40.059 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:31:40.061 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:31:40.063 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-11-21 13:31:40.069 LOG.INFO YZQZFabAuto.cs Line:164 StartJobRecord() - StartJobRecord|start|123|CACB [Save Log Job] 2024-11-21 13:31:40.070 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 13:31:40.072 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 13:31:40.115 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-11-21 13:31:40.115 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-11-21 13:31:40.115 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-11-21 13:31:40.116 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-11-21 13:31:40.118 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-11-21 13:31:40.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-11-21 13:31:40.217 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:31:42.197 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-11-21 13:31:42.810 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-11-21 13:31:52.357 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-11-21 13:31:52.358 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:31:52.528 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:32:11.190 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 13:32:11.199 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:32:11.205 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:32:48.950 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 13:32:48.996 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:34:16.489 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 13:34:16.492 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-11-21 13:34:16.519 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-21 13:34:16.519 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 13:38:22.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:38:22.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:38:26.155 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 123, jerry) [Save Log Job] 2024-11-21 13:39:11.784 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202411211338—123.csv [Save Log Job] 2024-11-21 13:39:11.791 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Error，can not do RunRecipe。 [Save Log Job] 2024-11-21 13:39:11.791 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202411211338—123.csv [Save Log Job] 2024-11-21 13:40:22.368 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 [Save Log Job] 2024-11-21 13:41:48.698 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-11-21 13:41:48.698 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-21 13:48:45.198 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-11-21 13:48:45.236 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-21 13:51:36.757 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-11-21 13:51:36.771 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-21 13:51:42.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 123, jerry) [Save Log Job] 2024-11-21 13:55:21.348 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-11-21 13:55:22.081 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| <== [Save Log Job] 2024-11-21 13:58:24.092 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 13:58:24.951 LOG.INFO EventService.cs Line:60 Register() - 客户端65026dc9-ad49-48d5-999e-795b77212235已连接 [Save Log Job] 2024-11-21 13:58:25.238 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:58:25.238 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 13:58:25.315 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 13:58:26.298 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:58:26.356 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:58:26.535 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:58:26.582 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 13:58:26.627 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 13:58:30.326 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 13:58:33.152 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 13:58:33.154 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:58:33.167 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 13:58:33.296 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 13:58:44.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 13:58:44.945 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 13:58:44.946 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 13:58:47.350 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:58:47.364 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:58:47.546 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:58:47.589 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 13:59:00.273 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 123, jerry) <== [Save Log Job] 2024-11-21 15:08:07.816 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 15:08:08.683 LOG.INFO EventService.cs Line:60 Register() - 客户端b39ee3f2-6d96-4277-bd6f-0a9b9e036daa已连接 [Save Log Job] 2024-11-21 15:08:08.873 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 15:08:08.873 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 15:08:08.939 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 15:08:09.923 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:08:09.964 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:08:10.134 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:08:10.148 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:08:10.182 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:08:13.950 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 15:08:14.096 LOG.ERROR DatabaseManager.cs Line:70 PeriodicRun() - 执行数据库操作错误, 流不支持读取。, Insert into "EventManager"("ID","EventEnum","Type","Source","Description","Level","OccurTime") values(2053,'DefaultWarning','EventUI_Notify','System','Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。','Warning','2024-11-21 15:08:13.949') [Save Log Job] 2024-11-21 15:08:14.128 LOG.ERROR PostgresqlDB.cs Line:113 ExecuteDataset() - 执行查询出错，SELECT * FROM "RecipeRunHistory" where "ProcessBeginTime" >= '2024/11/21 00:00:00.000' and "ProcessBeginTime" <= '2024/11/21 23:59:59.999' order by "ProcessBeginTime" ASC; System.Data.DataException: Data Exception。 在 Npgsql.StringRowReaderV3.AbandonShip() 在 Npgsql.StringRowReaderV3.ReadNext() 在 Npgsql.RowReader.GetNext() 在 Npgsql.ForwardsOnlyRow.get_Item(Int32 index) 在 Npgsql.ForwardsOnlyDataReader.GetProviderSpecificValue(Int32 ordinal) 在 Npgsql.ForwardsOnlyDataReader.GetValue(Int32 Index) 在 Npgsql.CachingDataReader..ctor(ForwardsOnlyDataReader reader, CommandBehavior behavior) 在 Npgsql.NpgsqlCommand.ExecuteReader(CommandBehavior cb) 在 Npgsql.NpgsqlCommand.ExecuteDbDataReader(CommandBehavior behavior) 在 System.Data.Common.DbCommand.System.Data.IDbCommand.ExecuteReader(CommandBehavior behavior) 在 System.Data.Common.DbDataAdapter.FillInternal(DataSet dataset, DataTable[] datatables, Int32 startRecord, Int32 maxRecords, String srcTable, IDbCommand command, CommandBehavior behavior) 在 System.Data.Common.DbDataAdapter.Fill(DataSet dataSet, Int32 startRecord, Int32 maxRecords, String srcTable, IDbCommand command, CommandBehavior behavior) 在 System.Data.Common.DbDataAdapter.Fill(DataSet dataSet) 在 Aitex.Core.RT.DBCore.PostgresqlDB.ExecuteDataset(String cmdText, Object[] p) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\DBCore\PostgresqlDB.cs:行号 107 [Save Log Job] 2024-11-21 15:08:30.980 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:08:30.982 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:08:31.142 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:08:31.191 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:08:32.336 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 15:08:32.338 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:08:32.342 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 15:08:32.455 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:08:39.222 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 15:08:39.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 15:08:39.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 15:09:38.952 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 1222222222/) [Save Log Job] 2024-11-21 15:10:34.706 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-11-21 15:10:34.711 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241121151034-CACB [Save Log Job] 2024-11-21 15:10:34.711 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-11-21 15:10:34.712 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-11-21 15:10:34.713 LOG.INFO YZQZFabAuto.cs Line:164 StartJobRecord() - StartJobRecord|start|1222222222/|CACB [Save Log Job] 2024-11-21 15:10:34.714 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 15:10:34.718 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 15:10:34.767 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-11-21 15:10:34.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-11-21 15:10:34.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-11-21 15:10:34.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-11-21 15:10:34.769 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-11-21 15:10:34.830 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-11-21 15:10:34.847 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:10:36.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-11-21 15:10:39.149 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-11-21 15:10:39.156 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:10:39.349 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:10:55.718 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:10:55.723 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:11:00.166 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:11:04.719 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 15:13:07.097 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 15:13:08.423 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 33333333545/) [Save Log Job] 2024-11-21 15:13:09.897 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-11-21 15:13:09.897 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241121151309-CACB [Save Log Job] 2024-11-21 15:13:09.897 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-11-21 15:13:09.898 LOG.INFO YZQZFabAuto.cs Line:164 StartJobRecord() - StartJobRecord|start|33333333545/|CACB [Save Log Job] 2024-11-21 15:13:09.898 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-11-21 15:13:09.950 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-11-21 15:13:09.950 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-11-21 15:13:09.950 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-11-21 15:13:09.950 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-11-21 15:13:09.950 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-11-21 15:13:10.007 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-11-21 15:13:10.064 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-11-21 15:13:10.096 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:13:11.297 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 15:13:11.297 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:13:15.284 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-11-21 15:13:15.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.1 minitues。 [Save Log Job] 2024-11-21 15:13:15.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-11-21 15:13:15.345 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241121151309-CACB [Save Log Job] 2024-11-21 15:13:15.345 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241121151309-CACB'' [Save Log Job] 2024-11-21 15:13:15.345 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-11-21 15:13:15.399 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241121151309-CACB'' start run step 1：initial。 [Save Log Job] 2024-11-21 15:13:15.400 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-21 15:13:15.400 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-21 15:13:15.400 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-21 15:13:15.401 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-21 15:13:15.401 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-21 15:13:15.401 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-21 15:13:15.401 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-21 15:13:15.402 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-11-21 15:13:15.402 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-21 15:13:15.402 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-21 15:13:15.402 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-21 15:13:15.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-21 15:13:15.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-21 15:13:15.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-21 15:13:15.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-21 15:13:15.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-21 15:13:15.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-11-21 15:13:15.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-11-21 15:13:16.601 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 15:13:16.601 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:13:19.081 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-11-21 15:13:19.082 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:13:23.677 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-11-21 15:13:30.906 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:13:30.911 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:13:34.148 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-11-21 15:13:34.150 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-11-21 15:13:34.154 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-11-21 15:13:34.154 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241121151309-CACB Start time：2024/11/21 15:13:15 End time：2024/11/21 15:13:34 Total time：0:0:18 [Save Log Job] 2024-11-21 15:13:34.155 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-11-21 15:13:34.155 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess [Save Log Job] 2024-11-21 15:13:34.208 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-11-21 15:13:36.172 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:13:36.172 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:13:36.172 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:13:36.172 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:13:36.172 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:13:36.172 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:13:36.354 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:13:37.098 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 15:13:44.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-11-21 15:13:44.333 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-11-21 15:13:46.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-11-21 15:13:46.064 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-11-21 15:13:48.399 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:13:48.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-11-21 15:13:48.608 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-11-21 15:13:48.609 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:13:48.609 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-21 15:13:48.609 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-21 15:13:48.772 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202411211513—1222222222.csv [Save Log Job] 2024-11-21 15:13:48.774 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202411211513—1222222222.csv [Save Log Job] 2024-11-21 15:13:48.807 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:13:55.165 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. <== [Save Log Job] 2024-11-21 15:22:44.148 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 15:22:45.024 LOG.INFO EventService.cs Line:60 Register() - 客户端c4f7c4f6-531e-4dac-8628-31e6815253a8已连接 [Save Log Job] 2024-11-21 15:22:45.024 LOG.INFO EventService.cs Line:60 Register() - 客户端c4f7c4f6-531e-4dac-8628-31e6815253a8已连接 [Save Log Job] 2024-11-21 15:22:45.240 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 15:22:45.240 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 15:22:45.289 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 15:22:46.263 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:22:46.347 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:22:49.043 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:22:49.279 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:22:49.281 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:22:49.282 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-11-21 15:22:50.301 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 15:22:54.647 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 15:22:54.649 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:22:54.653 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 15:22:54.772 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:23:01.855 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 15:23:01.863 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 15:23:01.864 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 15:23:07.319 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:23:07.355 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:23:10.052 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:23:10.287 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:24:20.326 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 11111111111/, 12333, jerrry) <== [Save Log Job] 2024-11-21 15:37:00.294 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 15:37:01.183 LOG.INFO EventService.cs Line:60 Register() - 客户端744ef1da-0ae1-4762-970d-2b73523a13bb已连接 [Save Log Job] 2024-11-21 15:37:01.358 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 15:37:01.361 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 15:37:01.428 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 15:37:02.401 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:37:02.485 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:37:08.353 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 15:37:08.355 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:37:08.972 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:37:08.977 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:37:09.687 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-11-21 15:37:17.309 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 15:37:17.310 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:37:17.315 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 15:37:17.429 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:37:23.457 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:37:23.494 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:37:26.762 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 15:37:26.764 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 15:37:26.765 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 15:37:29.365 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:37:29.980 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:37:49.316 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 111111111111/, 12333, jerrry) [Save Log Job] 2024-11-21 15:37:49.661 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-11-21 15:37:49.665 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241121153749-CACB [Save Log Job] 2024-11-21 15:37:49.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-11-21 15:37:49.666 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-11-21 15:37:49.667 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|111111111111/|CACB [Save Log Job] 2024-11-21 15:37:49.667 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:37:49.670 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:37:49.704 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:37:49.719 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-11-21 15:37:49.719 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-11-21 15:37:49.719 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-11-21 15:37:49.720 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-11-21 15:37:49.721 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-11-21 15:37:49.783 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-11-21 15:37:50.233 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-11-21 15:38:10.672 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:38:10.677 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:38:19.670 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:38:29.059 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-11-21 15:38:29.116 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-11-21 15:38:29.116 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-11-21 15:38:29.118 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241121153749-CACB [Save Log Job] 2024-11-21 15:38:29.118 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241121153749-CACB'' [Save Log Job] 2024-11-21 15:38:29.119 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-11-21 15:38:29.172 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241121153749-CACB'' start run step 1：initial。 [Save Log Job] 2024-11-21 15:38:29.172 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-21 15:38:29.173 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-21 15:38:29.173 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-21 15:38:29.173 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-21 15:38:29.174 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-21 15:38:29.174 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-21 15:38:29.174 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-21 15:38:29.174 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-11-21 15:38:29.174 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-21 15:38:29.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-21 15:38:29.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-21 15:38:29.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-21 15:38:29.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-21 15:38:29.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-21 15:38:29.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-21 15:38:29.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-21 15:38:29.176 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-11-21 15:38:29.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-11-21 15:38:49.676 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:38:50.126 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:38:59.227 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241121153749-CACB'' end step 1 [Save Log Job] 2024-11-21 15:38:59.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241121153749-CACB'' start run step 2：initial。 [Save Log Job] 2024-11-21 15:38:59.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-21 15:38:59.277 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-21 15:38:59.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-21 15:38:59.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-21 15:38:59.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-21 15:38:59.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-21 15:38:59.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-21 15:38:59.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。 [Save Log Job] 2024-11-21 15:38:59.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-21 15:38:59.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-21 15:38:59.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-21 15:38:59.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-21 15:38:59.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-21 15:38:59.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-21 15:38:59.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-21 15:38:59.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-21 15:38:59.279 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-11-21 15:39:00.724 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-21 15:39:00.724 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:39:00.724 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds. [Save Log Job] 2024-11-21 15:39:00.727 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-11-21 15:39:00.732 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-11-21 15:39:00.732 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241121153749-CACB Start time：2024/11/21 15:38:29 End time：2024/11/21 15:39:00 Total time：0:0:31 [Save Log Job] 2024-11-21 15:39:00.733 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-11-21 15:39:07.974 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202411211539—111111111111.csv [Save Log Job] 2024-11-21 15:39:07.974 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Error [Save Log Job] 2024-11-21 15:39:07.998 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:39:07.998 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:39:07.998 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:39:07.999 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:39:08.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:39:08.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:39:08.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:39:08.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:39:08.001 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202411211539—111111111111.csv [Save Log Job] 2024-11-21 15:39:29.008 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:39:34.525 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 [Save Log Job] 2024-11-21 15:39:42.780 LOG.INFO YZQZFabAuto.cs Line:107 SaveMachineErrorRecord() - MES|ErrorResponse|One or more errors occurred. <== [Save Log Job] 2024-11-21 15:43:32.236 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 15:43:33.317 LOG.INFO EventService.cs Line:60 Register() - 客户端54240f76-f79e-4e22-90b4-911fa0ae2a70已连接 [Save Log Job] 2024-11-21 15:43:33.328 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 15:43:33.329 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 15:43:33.396 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 15:43:34.407 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:43:34.434 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:43:34.575 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:43:34.602 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:43:34.622 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:43:38.741 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 15:43:39.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-11-21 15:43:45.492 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 15:43:45.493 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:43:49.847 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 15:43:49.847 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:43:53.790 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 15:43:53.791 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:43:53.792 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 15:43:53.896 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:43:55.500 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:43:55.504 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:43:55.583 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:43:55.630 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:44:02.133 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 15:44:02.138 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 15:44:02.138 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 15:44:32.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 111111111111/, 12333, jerry) [Save Log Job] 2024-11-21 15:44:32.760 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-11-21 15:44:32.763 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241121154432-CACB [Save Log Job] 2024-11-21 15:44:32.764 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-11-21 15:44:32.765 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-11-21 15:44:32.765 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|111111111111/|CACB [Save Log Job] 2024-11-21 15:44:32.766 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:44:32.769 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:44:32.818 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-11-21 15:44:32.818 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-11-21 15:44:32.819 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-11-21 15:44:32.819 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-11-21 15:44:32.821 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-11-21 15:44:32.881 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-11-21 15:44:32.958 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:44:34.233 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-11-21 15:44:53.772 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:44:53.778 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:45:02.770 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:45:13.069 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-11-21 15:45:13.126 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-11-21 15:45:13.126 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-11-21 15:45:13.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241121154432-CACB [Save Log Job] 2024-11-21 15:45:13.128 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241121154432-CACB'' [Save Log Job] 2024-11-21 15:45:13.128 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-11-21 15:45:13.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241121154432-CACB'' start run step 1：initial。 [Save Log Job] 2024-11-21 15:45:13.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-21 15:45:13.183 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-21 15:45:13.183 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-21 15:45:13.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-21 15:45:13.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-21 15:45:13.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-21 15:45:13.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-21 15:45:13.184 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-11-21 15:45:13.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-21 15:45:13.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-21 15:45:13.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-21 15:45:13.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-21 15:45:13.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-21 15:45:13.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-21 15:45:13.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-21 15:45:13.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-21 15:45:13.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-11-21 15:45:13.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-11-21 15:45:32.772 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:45:34.137 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:45:43.235 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241121154432-CACB'' end step 1 [Save Log Job] 2024-11-21 15:45:43.285 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241121154432-CACB'' start run step 2：initial。 [Save Log Job] 2024-11-21 15:45:43.285 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-21 15:45:43.285 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-21 15:45:43.285 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-21 15:45:43.285 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-21 15:45:43.285 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-21 15:45:43.285 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-21 15:45:43.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-21 15:45:43.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。 [Save Log Job] 2024-11-21 15:45:43.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-21 15:45:43.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-21 15:45:43.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-21 15:45:43.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-21 15:45:43.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-21 15:45:43.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-21 15:45:43.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-21 15:45:43.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-21 15:45:43.286 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-11-21 15:45:44.748 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-21 15:45:44.748 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds. [Save Log Job] 2024-11-21 15:45:44.750 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:45:44.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-11-21 15:45:44.754 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-11-21 15:45:44.754 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241121154432-CACB Start time：2024/11/21 15:45:13 End time：2024/11/21 15:45:44 Total time：0:0:31 [Save Log Job] 2024-11-21 15:45:44.755 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-11-21 15:45:44.758 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Error [Save Log Job] 2024-11-21 15:45:44.759 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202411211545—111111111111.csv [Save Log Job] 2024-11-21 15:45:44.760 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202411211545—111111111111.csv [Save Log Job] 2024-11-21 15:45:44.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:45:46.764 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:46:05.770 LOG.INFO YZQZFabAuto.cs Line:107 SaveMachineErrorRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:46:05.772 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:46:11.283 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 <== [Save Log Job] 2024-11-21 15:52:03.039 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 15:52:03.757 LOG.INFO EventService.cs Line:60 Register() - 客户端504c02a5-0bd7-43c6-b844-56150c6d25ce已连接 [Save Log Job] 2024-11-21 15:52:04.004 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 15:52:04.007 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 15:52:04.081 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 15:52:05.069 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:52:05.126 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:52:07.865 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:52:08.049 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 15:52:08.053 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-11-21 15:52:08.064 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:52:09.092 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 15:52:17.978 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 15:52:17.979 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:52:17.983 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 15:52:18.091 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 15:52:22.811 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-21 15:52:22.813 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-21 15:52:22.814 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-21 15:52:26.115 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:52:26.138 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:52:28.875 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:52:29.061 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:52:59.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, CA111111111/CA2222222222/, 12333, jerry) [Save Log Job] 2024-11-21 15:53:00.277 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-11-21 15:53:00.280 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241121155300-CACB [Save Log Job] 2024-11-21 15:53:00.280 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-11-21 15:53:00.281 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-11-21 15:53:00.282 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|CA111111111/CA2222222222/|CACB [Save Log Job] 2024-11-21 15:53:00.282 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:53:00.285 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:53:00.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-11-21 15:53:00.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-11-21 15:53:00.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-11-21 15:53:00.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-11-21 15:53:00.337 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-11-21 15:53:00.399 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-11-21 15:53:00.425 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:53:02.450 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-11-21 15:53:03.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-11-21 15:53:21.285 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:53:21.290 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:53:30.286 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:53:38.413 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-11-21 15:53:38.470 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-11-21 15:53:38.470 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-11-21 15:53:38.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241121155300-CACB [Save Log Job] 2024-11-21 15:53:38.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241121155300-CACB'' [Save Log Job] 2024-11-21 15:53:38.472 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-11-21 15:53:38.527 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241121155300-CACB'' start run step 1：initial。 [Save Log Job] 2024-11-21 15:53:38.529 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-21 15:53:38.529 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-21 15:53:38.529 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-21 15:53:38.530 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-21 15:53:38.530 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-21 15:53:38.530 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-21 15:53:38.530 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-21 15:53:38.531 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-11-21 15:53:38.531 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-21 15:53:38.531 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-21 15:53:38.531 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-21 15:53:38.532 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-21 15:53:38.532 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-21 15:53:38.532 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-21 15:53:38.532 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-21 15:53:38.532 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-21 15:53:38.532 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-11-21 15:53:38.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-11-21 15:53:59.480 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:54:00.286 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:54:08.620 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241121155300-CACB'' end step 1 [Save Log Job] 2024-11-21 15:54:08.670 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241121155300-CACB'' start run step 2：initial。 [Save Log Job] 2024-11-21 15:54:08.670 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-21 15:54:08.670 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-21 15:54:08.670 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-21 15:54:08.670 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-21 15:54:08.670 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-21 15:54:08.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-11-21 15:54:10.056 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-21 15:54:10.056 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-11-21 15:54:10.056 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds. [Save Log Job] 2024-11-21 15:54:10.058 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-11-21 15:54:10.062 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-11-21 15:54:10.062 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241121155300-CACB Start time：2024/11/21 15:53:38 End time：2024/11/21 15:54:10 Total time：0:0:31 [Save Log Job] 2024-11-21 15:54:10.064 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-11-21 15:54:10.064 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\CA111111111-CA2222222222.csv [Save Log Job] 2024-11-21 15:54:10.064 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Error [Save Log Job] 2024-11-21 15:54:10.066 LOG.INFO YZQZFabAuto.cs Line:289 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\CA111111111-CA2222222222.csv [Save Log Job] 2024-11-21 15:54:10.259 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 15:54:12.074 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-21 15:54:31.092 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:54:31.093 LOG.INFO YZQZFabAuto.cs Line:107 SaveMachineErrorRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 15:54:36.593 LOG.INFO YZQZFabAuto.cs Line:325 Export2CsvWanPanFile() - 找不到网络路径。 <== [Save Log Job] 2024-11-21 16:08:03.711 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-21 16:08:04.545 LOG.INFO EventService.cs Line:60 Register() - 客户端f4d089af-7bcd-4f8f-a877-d6a81900bde3已连接 [Save Log Job] 2024-11-21 16:08:04.545 LOG.INFO EventService.cs Line:55 Register() - 客户端f4d089af-7bcd-4f8f-a877-d6a81900bde3已连接 [Save Log Job] 2024-11-21 16:08:04.794 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 16:08:04.794 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-21 16:08:04.847 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-21 16:08:05.849 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 16:08:05.893 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 16:08:09.714 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 16:08:09.719 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-11-21 16:08:09.763 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-21 16:08:09.859 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-21 16:08:09.904 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 16:08:15.451 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-21 16:08:15.452 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 16:08:15.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-21 16:08:15.589 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-21 16:08:26.902 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 16:08:26.907 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 16:08:30.721 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 16:08:30.770 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-21 16:57:00.387 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-11-21 16:57:00.387 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-21 16:57:00.506 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-21 17:37:18.396 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-21 17:37:18.396 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-11-21 19:08:14.542 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM。 [Save Log Job] 2024-11-21 22:08:15.618 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM。 ==>