using System; using System.Collections.Generic; using Aitex.Core.RT.RecipeCenter; using Aitex.Common.Util; using System.Xml; using Aitex.Core.RT.SCCore; using System.IO; using Aitex.Core.RT.Log; using Aitex.Core.RT.Event; using Aitex.RT.Properties; namespace Aitex.RT.Module { class RtRecipeFileContext : IRecipeFileContext { private Dictionary _dicDisplayName = new Dictionary() { {"StepInfo", "步骤信息"}, {"Set", "设置"}, {"No.", "步数"}, {"Name", "名称"}, {"Loop", "循环"}, {"Loop 10", "循环 10"}, {"Loop End", "循环结束"}, {"Step Mode", "步骤结束模式"}, {"Step Time Mode", "按步骤设定时间"}, {"RF Time Mode", "按射频时间"}, {"Step Time", "步骤时间"}, {"Chamber Pressure Setting", "压力设定"}, {"Chamber Pressure", "腔体压力"}, {"ValveMode", "球阀模式"}, {"Pressure", "压力模式"}, {"Position", "位置模式"}, {"Valve Position", "球阀位置"}, {"TVPressure", "球阀压力"}, {"RF Setting", "射频设置"}, {"RF", "射频"}, {"RF Time", "射频时间"}, {"RFMode", "射频模式"}, {"Continuous", "持续模式"}, {"Pulsing", "脉冲模式"}, {"Pulsing Frequency", "脉冲频率"}, {"Pulsing Duty", "脉冲频次Duty"}, {"RFPower", "射频功率"}, {"GasFlow", "气体流量设置"}, {"MFC", "气流"}, }; public string GetRecipeDefiniton(string chamberId) { try { string recipeSchema = PathManager.GetCfgDir() + @"\RecipeFormat.xml"; XmlDocument xmlDom = new XmlDocument(); xmlDom.Load(recipeSchema); if (Resources.Culture.Name.ToLower() == "zh-cn") { foreach (var nodeCatalog in xmlDom.SelectNodes("/Aitex/TableRecipeFormat/Catalog")) { XmlElement catalog = nodeCatalog as XmlElement; if (catalog != null) { if (catalog.HasAttribute("DisplayName")) { if (_dicDisplayName.ContainsKey(catalog.GetAttribute("DisplayName"))) { catalog.SetAttribute("DisplayName", _dicDisplayName[catalog.GetAttribute("DisplayName")]); } } } } foreach (var node in xmlDom.SelectNodes("/Aitex/TableRecipeFormat/Catalog/Group/Step")) { XmlElement step = node as XmlElement; if (step != null) { if (step.HasAttribute("DisplayName")) { if (_dicDisplayName.ContainsKey(step.GetAttribute("DisplayName"))) { step.SetAttribute("DisplayName", _dicDisplayName[step.GetAttribute("DisplayName")]); } } } } foreach (var node in xmlDom.SelectNodes("/Aitex/TableRecipeFormat/Catalog/Group/Step/Item")) { XmlElement item = node as XmlElement; if (item != null) { if (item.HasAttribute("DisplayName")) { if (_dicDisplayName.ContainsKey(item.GetAttribute("DisplayName"))) { item.SetAttribute("DisplayName", _dicDisplayName[item.GetAttribute("DisplayName")]); } } } } } double rfPowerRange = SC.GetValue(SCName.RfConfig_PowerRange); bool rfEnablePulsing = SC.GetValue(SCName.RfConfig_EnablePulsingFunction); var nodeRfPower = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf.SetPower']")) as XmlElement; if (nodeRfPower != null) { nodeRfPower.SetAttribute("Max", (int)rfPowerRange + ""); } if (!rfEnablePulsing) { var node1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf.SetPulsingFrequency']")) as XmlElement; if (node1 != null) node1.ParentNode.RemoveChild(node1); var node2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='Rf.SetPulsingDuty']")) as XmlElement; if (node2 != null) node2.ParentNode.RemoveChild(node2); var node3 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step/Item[@ControlName='PulsingMode']")) as XmlElement; if (node3 != null) node3.ParentNode.RemoveChild(node3); } string gas1Name = (string)SC.GetItemValue(SCName.GasLineConfig_Gas1Name); bool gas1Enable = SC.GetValue(SCName.GasLineConfig_Gas1Enable); double gas1N2Scale = SC.GetValue(SCName.GasLineConfig_Gas1MfcN2Scale); double gas1ScaleFactor = SC.GetValue(SCName.GasLineConfig_Gas1MfcScaleFactor); var nodeGas1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas1']")) as XmlElement; if (nodeGas1 != null) { nodeGas1.SetAttribute("DisplayName", string.Format("MFC1（{0}）", gas1Name)); nodeGas1.SetAttribute("Max", (int)(gas1N2Scale * gas1ScaleFactor) + ""); if (!gas1Enable) nodeGas1.ParentNode.RemoveChild(nodeGas1); } string gas2Name = (string)SC.GetItemValue(SCName.GasLineConfig_Gas2Name); bool gas2Enable = SC.GetValue(SCName.GasLineConfig_Gas2Enable); double gas2N2Scale = SC.GetValue(SCName.GasLineConfig_Gas2MfcN2Scale); double gas2ScaleFactor = SC.GetValue(SCName.GasLineConfig_Gas2MfcScaleFactor); var nodeGas2 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas2']")) as XmlElement; if (nodeGas2 != null) { nodeGas2.SetAttribute("DisplayName", string.Format("MFC2（{0}）", gas2Name)); nodeGas2.SetAttribute("Max", (int)(gas2N2Scale * gas2ScaleFactor) + ""); if (!gas2Enable) nodeGas2.ParentNode.RemoveChild(nodeGas2); } string gas3Name = (string)SC.GetItemValue(SCName.GasLineConfig_Gas3Name); bool gas3Enable = SC.GetValue(SCName.GasLineConfig_Gas3Enable); double gas3N2Scale = SC.GetValue(SCName.GasLineConfig_Gas3MfcN2Scale); double gas3ScaleFactor = SC.GetValue(SCName.GasLineConfig_Gas3MfcScaleFactor); var nodeGas3 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas3']")) as XmlElement; if (nodeGas3 != null) { nodeGas3.SetAttribute("DisplayName", string.Format("MFC3（{0}）", gas3Name)); nodeGas3.SetAttribute("Max", (int)(gas3N2Scale * gas3ScaleFactor) + ""); if (!gas3Enable) nodeGas3.ParentNode.RemoveChild(nodeGas3); } string gas4Name = (string)SC.GetItemValue(SCName.GasLineConfig_Gas4Name); bool gas4Enable = SC.GetValue(SCName.GasLineConfig_Gas4Enable); double gas4N2Scale = SC.GetValue(SCName.GasLineConfig_Gas4MfcN2Scale); double gas4ScaleFactor = SC.GetValue(SCName.GasLineConfig_Gas4MfcScaleFactor); var nodeGas4 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas4']")) as XmlElement; if (nodeGas4 != null) { nodeGas4.SetAttribute("DisplayName", string.Format("MFC4（{0}）", gas4Name)); nodeGas4.SetAttribute("Max", (int)(gas4N2Scale * gas4ScaleFactor) + ""); if (!gas4Enable) nodeGas4.ParentNode.RemoveChild(nodeGas4); } string gas5Name = (string)SC.GetItemValue(SCName.GasLineConfig_Gas5Name); bool gas5Enable = SC.GetValue(SCName.GasLineConfig_Gas5Enable); double gas5N2Scale = SC.GetValue(SCName.GasLineConfig_Gas5MfcN2Scale); double gas5ScaleFactor = SC.GetValue(SCName.GasLineConfig_Gas5MfcScaleFactor); var nodeGas5 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='MfcGas5']")) as XmlElement; if (nodeGas5 != null) { nodeGas5.SetAttribute("DisplayName", string.Format("MFC5（{0}）", gas5Name)); nodeGas5.SetAttribute("Max", (int)(gas5N2Scale * gas5ScaleFactor) + ""); if (!gas5Enable) nodeGas5.ParentNode.RemoveChild(nodeGas5); } bool isTvInstalled = SC.GetValue(SCName.PressureControlConfig_EnableThrottleValve); if (!isTvInstalled) { var nodeSetMode = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='PressureControl.SetTVMode']")) as XmlElement; if (nodeSetMode != null) { nodeSetMode.ParentNode.RemoveChild(nodeSetMode); } var nodeSetPosition = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='PressureControl.SetTVPosition']")) as XmlElement; if (nodeSetPosition != null) { nodeSetPosition.ParentNode.RemoveChild(nodeSetPosition); } var nodeSetPressure = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='PressureControl.SetTVPressure']")) as XmlElement; if (nodeSetPressure != null) { nodeSetPressure.ParentNode.RemoveChild(nodeSetPressure); } } bool isBoostInstalled = SC.GetValue(SCName.PressureControlConfig_EnableBoosterPump); if (!isBoostInstalled) { var nodeSetPressure = xmlDom.SelectSingleNode( string.Format( "/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='PressureControl.SetBoostPressure']")) as XmlElement; if (nodeSetPressure != null) { nodeSetPressure.ParentNode.RemoveChild(nodeSetPressure); } } double maxChamberPressure = SC.GetValue(SCName.ProcessConfig_ChamberPressureMaxValue); var nodeSetPressure1 = xmlDom.SelectSingleNode(string.Format("/Aitex/TableRecipeFormat/Catalog/Group/Step[@ControlName='PressureControl.SetChamberPressure']")) as XmlElement; if (nodeSetPressure1 != null) { if (isTvInstalled || isBoostInstalled) nodeSetPressure1.ParentNode.RemoveChild(nodeSetPressure1); else { nodeSetPressure1.SetAttribute("Max", maxChamberPressure.ToString()); } } return xmlDom.OuterXml; } catch (Exception ex) { LOG.Write(ex); return ""; } } public IEnumerable GetRecipes(string chamberId, bool includingUsedRecipe) { try { string recipePath = PathManager.GetRecipeDir() + chamberId + "\\"; var di = new DirectoryInfo(recipePath); var fis = di.GetFiles("*.rcp", SearchOption.AllDirectories); var recipes = new List(); foreach (var fi in fis) { string str = fi.FullName.Substring(recipePath.Length); str = str.Substring(0, str.LastIndexOf('.')); if (includingUsedRecipe || (!str.Contains("HistoryRecipe\\"))) { recipes.Add(str); } } return recipes; } catch (Exception ex) { LOG.Write(ex); return new List(); } } public void PostInfoEvent(string message) { EV.PostMessage("System", EventEnum.GeneralInfo, message); } public void PostWarningEvent(string message) { EV.PostMessage("System", EventEnum.DefaultWarning, message); } public void PostAlarmEvent(string message) { EV.PostMessage("System", EventEnum.DefaultAlarm, message); } public void PostDialogEvent(string message) { EV.PostNotificationMessage(message); } public void PostInfoDialogMessage(string message) { EV.PostMessage("System", EventEnum.GeneralInfo, message); EV.PostPopDialogMessage(EventLevel.Information, "System Information", message); } public void PostWarningDialogMessage(string message) { EV.PostMessage("System", EventEnum.GeneralInfo, message); EV.PostPopDialogMessage(EventLevel.Warning, "System Warning", message); } public void PostAlarmDialogMessage(string message) { EV.PostMessage("System", EventEnum.GeneralInfo, message); EV.PostPopDialogMessage(EventLevel.Alarm, "System Alarm", message); } public string GetRecipeTemplate(string chamberId) { string schema = GetRecipeDefiniton(chamberId); XmlDocument dom = new XmlDocument(); dom.LoadXml(schema); XmlNode nodeTemplate = dom.SelectSingleNode("/Aitex/TableRecipeData"); if (nodeTemplate.Attributes["BasePressure"] != null) nodeTemplate.Attributes["BasePressure"].Value = SC.GetValue(SCName.System_PumpBasePressure).ToString("F0"); if (nodeTemplate.Attributes["PumpDownLimit"] != null) nodeTemplate.Attributes["PumpDownLimit"].Value = SC.GetValue(SCName.System_PumpTimeLimit).ToString("F0"); if (nodeTemplate.Attributes["PurgeActive"] != null) nodeTemplate.Attributes["PurgeActive"].Value = "true"; if (nodeTemplate.Attributes["ElectrodeTemp"] != null) nodeTemplate.Attributes["ElectrodeTemp"].Value = "20"; if (nodeTemplate.Attributes["MatchPositionC1"] != null) nodeTemplate.Attributes["MatchPositionC1"].Value = SC.GetValue(SCName.System_MatchPositionC1).ToString("F0"); if (nodeTemplate.Attributes["MatchPositionC2"] != null) nodeTemplate.Attributes["MatchPositionC2"].Value = SC.GetValue(SCName.System_MatchPositionC2).ToString("F0"); return nodeTemplate.OuterXml; } } }