--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-24 02:55:08.179 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。
[Save Log Job] 2024-12-24 05:55:09.203 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。
[Save Log Job] 2024-12-24 08:55:10.250 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。
[Save Log Job] 2024-12-24 09:02:22.856 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-12-24 09:02:22.856 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 09:02:22.857 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-12-24 09:02:55.520 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-24 09:02:55.624 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 09:02:55.624 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-24 09:02:55.624 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
[Save Log Job] 2024-12-24 09:02:55.725 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
[Save Log Job] 2024-12-24 09:02:57.231 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.0 minitues。
[Save Log Job] 2024-12-24 09:02:57.231 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
[Save Log Job] 2024-12-24 09:02:57.232 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
[Save Log Job] 2024-12-24 09:02:57.433 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 09:03:11.201 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 0)
[Save Log Job] 2024-12-24 09:03:11.201 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
[Save Log Job] 2024-12-24 09:03:11.202 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
[Save Log Job] 2024-12-24 09:03:11.202 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 120)
[Save Log Job] 2024-12-24 09:03:11.202 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
[Save Log Job] 2024-12-24 09:03:11.301 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
[Save Log Job] 2024-12-24 09:03:11.301 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
[Save Log Job] 2024-12-24 09:03:11.302 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
[Save Log Job] 2024-12-24 09:03:11.302 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
[Save Log Job] 2024-12-24 09:03:11.302 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
[Save Log Job] 2024-12-24 09:03:11.302 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 09:03:11.302 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
[Save Log Job] 2024-12-24 09:03:12.611 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
[Save Log Job] 2024-12-24 09:03:12.611 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump below 500mTorr。
[Save Log Job] 2024-12-24 09:03:12.612 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump Finished in 0.0 minitues。
[Save Log Job] 2024-12-24 09:03:12.612 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Pump'.
[Save Log Job] 2024-12-24 09:03:12.612 LOG.INFO UiEvent.cs Line:51 Event() - Pump
[Save Log Job] 2024-12-24 09:03:12.712 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 09:03:14.727 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-24 09:03:14.727 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-24 09:03:14.826 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
[Save Log Job] 2024-12-24 09:03:14.926 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
[Save Log Job] 2024-12-24 09:03:14.927 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 09:03:16.437 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.0 minitues。
[Save Log Job] 2024-12-24 09:03:16.438 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
[Save Log Job] 2024-12-24 09:03:16.438 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
[Save Log Job] 2024-12-24 09:03:16.539 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 09:03:21.565 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 0)
[Save Log Job] 2024-12-24 09:03:21.566 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
[Save Log Job] 2024-12-24 09:03:21.566 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
[Save Log Job] 2024-12-24 09:03:21.566 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 120)
[Save Log Job] 2024-12-24 09:03:21.566 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
[Save Log Job] 2024-12-24 09:03:21.567 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
[Save Log Job] 2024-12-24 09:03:21.567 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
[Save Log Job] 2024-12-24 09:03:21.567 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
[Save Log Job] 2024-12-24 09:03:21.567 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
[Save Log Job] 2024-12-24 09:03:21.567 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
[Save Log Job] 2024-12-24 09:03:21.665 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
[Save Log Job] 2024-12-24 09:03:21.665 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 09:03:23.681 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-24 09:03:24.087 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
[Save Log Job] 2024-12-24 09:03:24.087 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump below 500mTorr。
[Save Log Job] 2024-12-24 09:03:24.186 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump Finished in 0.0 minitues。
[Save Log Job] 2024-12-24 09:03:24.186 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Pump'.
[Save Log Job] 2024-12-24 09:03:24.187 LOG.INFO UiEvent.cs Line:51 Event() - Pump
[Save Log Job] 2024-12-24 09:03:24.288 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 09:04:37.974 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-24 09:04:37.974 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-24 09:04:38.074 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
[Save Log Job] 2024-12-24 09:04:38.074 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 09:04:38.075 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
[Save Log Job] 2024-12-24 09:04:40.085 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 09:04:40.787 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.0 minitues。
[Save Log Job] 2024-12-24 09:04:40.787 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
[Save Log Job] 2024-12-24 09:04:40.788 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
[Save Log Job] 2024-12-24 09:04:40.788 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-24 11:00:30.481 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 11:00:30.484 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 11:00:31.684 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 11:00:32.290 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-24 11:00:35.305 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-24 11:00:44.657 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-24 11:01:22.032 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 1000)
[Save Log Job] 2024-12-24 11:01:22.032 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 1000 mTorr。
[Save Log Job] 2024-12-24 11:01:27.462 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 1000)
[Save Log Job] 2024-12-24 11:01:27.462 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 1000 mTorr。
[Save Log Job] 2024-12-24 11:01:40.144 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-24 11:01:40.144 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 11:01:40.144 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-24 11:01:51.709 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-24 11:01:51.709 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-24 11:01:51.813 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-24 11:01:51.813 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-24 11:01:51.813 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-24 11:01:51.814 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-24 11:01:51.814 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-24 11:01:51.814 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-24 11:01:51.911 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 11:01:53.520 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-24 11:02:06.395 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-24 11:02:07.303 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 11:02:24.266 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-12-24 11:02:24.266 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 11:02:24.266 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-12-24 11:13:39.426 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-12-24 11:13:39.426 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 11:13:42.871 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 11:44:13.522 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-12-24 11:44:13.522 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-24 11:44:14.408 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do StopPumpDown。
[Save Log Job] 2024-12-24 11:44:33.745 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 13:35:02.399 LOG.ERROR ServiceClientWrapper.cs Line:113 Do() - QueryDataService 服务异常
System.TimeoutException: This request operation sent to net.tcp://localhost:8771/QueryDataService did not receive a reply within the configured timeout (00:29:59.9989975).  The time allotted to this operation may have been a portion of a longer timeout.  This may be because the service is still processing the operation or because the service was unable to send a reply message.  Please consider increasing the operation timeout (by casting the channel/proxy to IContextChannel and setting the OperationTimeout property) and ensure that the service is able to connect to the client.

Server stack trace: 
   at System.ServiceModel.Dispatcher.DuplexChannelBinder.SyncDuplexRequest.WaitForReply(TimeSpan timeout)
   at System.ServiceModel.Dispatcher.DuplexChannelBinder.Request(Message message, TimeSpan timeout)
   at System.ServiceModel.Channels.ServiceChannel.Call(String action, Boolean oneway, ProxyOperationRuntime operation, Object[] ins, Object[] outs, TimeSpan timeout)
   at System.ServiceModel.Channels.ServiceChannelProxy.InvokeService(IMethodCallMessage methodCall, ProxyOperationRuntime operation)
   at System.ServiceModel.Channels.ServiceChannelProxy.Invoke(IMessage message)

Exception rethrown at [0]: 
   在 System.Runtime.Remoting.Proxies.RealProxy.HandleReturnMessage(IMessage reqMsg, IMessage retMsg)
   在 System.Runtime.Remoting.Proxies.RealProxy.PrivateInvoke(MessageData& msgData, Int32 type)
   在 Aitex.Triton160.Common.Interface.IQueryDataService.PollConfig(IEnumerable`1 keys)
   在 Aitex.Triton160.UI.WCF.QueryDataServiceClient.<>c__DisplayClass3_0.<PollConfig>b__0(IQueryDataService svc) 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\Wcf\QueryDataServiceClient.cs:行号 36
   在 Aitex.Core.WCF.ServiceClientWrapper`1.Do(Action`1 action) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\ServiceClientWrapper.cs:行号 82
[Save Log Job] 2024-12-24 13:35:02.972 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-12-24 13:35:03.468 LOG.ERROR ServiceClientWrapper.cs Line:113 Do() - InvokeService 服务异常
System.TimeoutException: This request operation sent to net.tcp://localhost:8751/InvokeService did not receive a reply within the configured timeout (00:30:00).  The time allotted to this operation may have been a portion of a longer timeout.  This may be because the service is still processing the operation or because the service was unable to send a reply message.  Please consider increasing the operation timeout (by casting the channel/proxy to IContextChannel and setting the OperationTimeout property) and ensure that the service is able to connect to the client.

Server stack trace: 
   at System.ServiceModel.Dispatcher.DuplexChannelBinder.Request(Message message, TimeSpan timeout)
   at System.ServiceModel.Channels.ServiceChannel.Call(String action, Boolean oneway, ProxyOperationRuntime operation, Object[] ins, Object[] outs, TimeSpan timeout)
   at System.ServiceModel.Channels.ServiceChannelProxy.InvokeService(IMethodCallMessage methodCall, ProxyOperationRuntime operation)
   at System.ServiceModel.Channels.ServiceChannelProxy.Invoke(IMessage message)

Exception rethrown at [0]: 
   在 System.Runtime.Remoting.Proxies.RealProxy.HandleReturnMessage(IMessage reqMsg, IMessage retMsg)
   在 System.Runtime.Remoting.Proxies.RealProxy.PrivateInvoke(MessageData& msgData, Int32 type)
   在 Aitex.Triton160.Common.Interface.IInvokeService.DoOperation(String operationName, Object[] args)
   在 Aitex.Triton160.UI.Wcf.InvokeServiceClient.<>c__DisplayClass1_0.<DoOperation>b__0(IInvokeService svc) 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\Wcf\InvokeServiceClient.cs:行号 20
   在 Aitex.Core.WCF.ServiceClientWrapper`1.Do(Action`1 action) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\ServiceClientWrapper.cs:行号 82
[Save Log Job] 2024-12-24 13:35:03.474 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 13:37:49.002 LOG.INFO ServiceClientWrapper.cs Line:87 Do() - QueryDataService 服务恢复
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-24 14:05:08.002 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 14:05:08.002 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 14:05:09.332 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 14:05:12.384 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-24 14:05:13.287 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-24 14:05:31.710 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-24 14:09:11.548 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-24 14:09:11.549 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 14:09:11.553 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-24 14:09:21.508 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-24 14:09:21.608 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-24 14:09:21.608 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-24 14:09:21.608 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-24 14:09:21.609 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-24 14:09:21.609 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-24 14:09:21.609 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-24 14:09:21.710 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-24 14:09:21.710 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 14:09:22.418 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-24 14:09:30.572 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-24 14:09:30.774 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 14:09:35.603 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-12-24 14:09:35.603 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 14:09:35.604 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-12-24 14:44:48.311 LOG.ERROR DuplexChannelServiceClientWrapper.cs Line:97 Do() - EventService 服务异常
System.TimeoutException: 发送到 net.tcp://localhost:8752/EventService 的请求操作在配置的超时(00:30:00)内未收到回复。分配给此操作的时间可能已经是更长超时的一部分。这可能由于服务仍在处理操作或服务无法发送回复消息。请考虑增加操作超时(将通道/代理转换为 IContextChannel 并设置 OperationTimeout 属性)并确保服务能够连接到客户端。

Server stack trace: 
   在 System.ServiceModel.Dispatcher.DuplexChannelBinder.SyncDuplexRequest.WaitForReply(TimeSpan timeout)
   在 System.ServiceModel.Dispatcher.DuplexChannelBinder.Request(Message message, TimeSpan timeout)
   在 System.ServiceModel.Channels.ServiceChannel.Call(String action, Boolean oneway, ProxyOperationRuntime operation, Object[] ins, Object[] outs, TimeSpan timeout)
   在 System.ServiceModel.Channels.ServiceChannelProxy.InvokeService(IMethodCallMessage methodCall, ProxyOperationRuntime operation)
   在 System.ServiceModel.Channels.ServiceChannelProxy.Invoke(IMessage message)

Exception rethrown at [0]: 
   在 System.Runtime.Remoting.Proxies.RealProxy.HandleReturnMessage(IMessage reqMsg, IMessage retMsg)
   在 System.Runtime.Remoting.Proxies.RealProxy.PrivateInvoke(MessageData& msgData, Int32 type)
   在 Aitex.Core.WCF.Interface.IEventService.Register(Guid id)
   在 Aitex.Core.WCF.EventServiceClient.<>c__DisplayClass5_0.<Register>b__0(IEventService svc) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\EventServiceClient.cs:行号 34
   在 Aitex.Core.WCF.DuplexChannelServiceClientWrapper`1.Do(Action`1 action) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\DuplexChannelServiceClientWrapper.cs:行号 66
[Save Log Job] 2024-12-24 14:44:48.314 LOG.ERROR ServiceClientWrapper.cs Line:113 Do() - InvokeService 服务异常
System.TimeoutException: This request operation sent to net.tcp://localhost:8751/InvokeService did not receive a reply within the configured timeout (00:30:00).  The time allotted to this operation may have been a portion of a longer timeout.  This may be because the service is still processing the operation or because the service was unable to send a reply message.  Please consider increasing the operation timeout (by casting the channel/proxy to IContextChannel and setting the OperationTimeout property) and ensure that the service is able to connect to the client.

Server stack trace: 
   at System.ServiceModel.Dispatcher.DuplexChannelBinder.Request(Message message, TimeSpan timeout)
   at System.ServiceModel.Channels.ServiceChannel.Call(String action, Boolean oneway, ProxyOperationRuntime operation, Object[] ins, Object[] outs, TimeSpan timeout)
   at System.ServiceModel.Channels.ServiceChannelProxy.InvokeService(IMethodCallMessage methodCall, ProxyOperationRuntime operation)
   at System.ServiceModel.Channels.ServiceChannelProxy.Invoke(IMessage message)

Exception rethrown at [0]: 
   在 System.Runtime.Remoting.Proxies.RealProxy.HandleReturnMessage(IMessage reqMsg, IMessage retMsg)
   在 System.Runtime.Remoting.Proxies.RealProxy.PrivateInvoke(MessageData& msgData, Int32 type)
   在 Aitex.Triton160.Common.Interface.IInvokeService.DoOperation(String operationName, Object[] args)
   在 Aitex.Triton160.UI.Wcf.InvokeServiceClient.<>c__DisplayClass1_0.<DoOperation>b__0(IInvokeService svc) 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\Wcf\InvokeServiceClient.cs:行号 20
   在 Aitex.Core.WCF.ServiceClientWrapper`1.Do(Action`1 action) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\ServiceClientWrapper.cs:行号 82
[Save Log Job] 2024-12-24 14:44:52.663 LOG.INFO DuplexChannelServiceClientWrapper.cs Line:71 Do() - EventService 服务恢复
[Save Log Job] 2024-12-24 14:45:32.111 LOG.INFO ServiceClientWrapper.cs Line:87 Do() - InvokeService 服务恢复
[Save Log Job] 2024-12-24 14:45:50.709 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 14:46:10.644 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-24 14:49:53.004 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-12-24 14:53:02.314 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 14:53:52.660 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-24 15:06:52.144 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 15:06:52.144 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 15:07:00.238 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-24 15:07:00.392 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 15:07:06.095 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-24 15:07:15.303 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-24 15:48:25.850 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-24 15:48:26.265 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-24 15:48:26.266 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 15:48:40.549 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-24 15:48:40.549 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-24 15:48:41.184 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-24 15:48:41.184 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 15:48:41.184 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-24 15:48:41.185 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-24 15:48:41.186 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-24 15:48:41.603 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-24 15:48:41.603 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-24 15:48:45.795 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-24 15:48:47.683 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-24 15:49:15.370 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-24 15:49:21.641 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 15:49:40.479 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-12-24 15:49:40.487 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-12-24 15:49:40.487 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 15:49:56.008 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-24 15:51:01.770 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 15:51:12.447 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 15:51:12.470 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-24 15:52:20.766 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 15:52:20.766 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 15:52:22.564 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 15:52:22.698 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-24 15:52:26.015 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-24 15:52:33.984 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-24 15:52:55.175 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-24 15:52:55.175 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 15:52:55.176 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-24 15:52:57.697 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-24 15:52:57.702 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-24 15:52:57.702 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-24 15:52:57.703 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-24 15:52:57.703 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-24 15:52:57.705 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-24 15:52:57.705 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-24 15:52:57.705 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 15:52:57.795 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-24 15:52:58.194 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-24 15:53:07.252 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-24 15:53:07.352 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 15:53:16.608 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-12-24 15:53:16.608 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 15:53:16.608 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-12-24 15:53:21.672 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-24 15:53:40.113 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 15:53:40.142 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 15:53:40.142 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-24 15:55:06.640 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
[Save Log Job] 2024-12-24 15:55:08.416 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
[Save Log Job] 2024-12-24 15:55:10.522 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 15:55:15.652 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 1.9 minitues。
[Save Log Job] 2024-12-24 15:55:15.652 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
[Save Log Job] 2024-12-24 15:55:15.653 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
[Save Log Job] 2024-12-24 15:55:15.753 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:15:48.584 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-24 16:15:48.584 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 16:15:48.584 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-24 16:15:58.337 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-24 16:15:58.337 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-24 16:15:58.337 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-24 16:15:58.337 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-24 16:15:58.337 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-24 16:15:58.338 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-24 16:15:58.338 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-24 16:15:58.436 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-24 16:15:58.437 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:15:58.939 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-24 16:18:53.168 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-12-24 16:19:00.323 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-24 16:19:03.453 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:19:03.458 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:19:16.560 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do RciepeAbort。
[Save Log Job] 2024-12-24 16:20:16.364 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:20:25.095 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-24 16:20:25.095 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-24 16:20:25.095 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-24 16:20:25.096 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-24 16:20:25.096 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-24 16:20:25.097 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-24 16:20:25.097 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-24 16:20:25.199 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-24 16:20:25.199 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-12-24 16:20:25.200 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-24 16:20:25.201 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:20:25.295 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
[Save Log Job] 2024-12-24 16:20:25.295 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-12-24 16:20:25.295 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241224162024-CACB
[Save Log Job] 2024-12-24 16:20:25.296 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241224162024-CACB'
[Save Log Job] 2024-12-24 16:20:25.296 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241224162024-CACB' start run step 1：initial。
[Save Log Job] 2024-12-24 16:20:25.296 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-24 16:20:25.296 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-24 16:20:25.296 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-24 16:20:25.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-24 16:20:25.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-24 16:20:25.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-24 16:20:25.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-24 16:20:25.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-24 16:20:25.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-24 16:20:25.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-24 16:20:25.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-24 16:20:25.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-24 16:20:25.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-24 16:20:25.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-24 16:20:25.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-24 16:20:25.299 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-24 16:20:25.299 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-24 16:20:25.396 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-12-24 16:20:49.013 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-24 16:22:54.389 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241224162024-CACB' end step 1
[Save Log Job] 2024-12-24 16:22:54.394 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-12-24 16:24:19.580 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 16:24:38.082 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 16:24:49.562 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 16:25:18.742 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 16:25:26.739 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 16:25:27.630 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-24 16:30:21.622 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-24 16:30:21.969 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:30:24.782 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-24 16:31:11.717 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 16:31:11.720 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 16:31:17.487 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-24 16:31:17.710 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:31:20.926 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-24 16:31:32.194 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-24 16:31:35.704 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-24 16:31:35.704 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 16:31:35.704 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-24 16:31:43.648 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-24 16:31:43.648 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-24 16:31:43.748 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-24 16:31:43.748 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-24 16:31:43.749 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-24 16:31:43.749 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-24 16:31:43.749 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-24 16:31:43.848 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-24 16:31:43.849 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:31:45.862 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-24 16:31:45.964 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-24 16:31:50.698 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-24 16:31:50.698 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-24 16:31:50.798 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-24 16:33:45.451 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 16:33:45.452 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 16:33:47.403 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:33:47.443 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-24 16:33:50.862 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-24 16:38:22.052 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 16:38:22.052 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 16:38:23.702 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:38:24.043 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-24 16:38:27.259 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-24 16:38:30.097 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-24 16:38:37.434 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-24 16:38:37.434 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 16:38:37.435 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-24 16:38:40.250 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-24 16:38:40.250 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-24 16:38:40.251 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:38:40.351 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-24 16:38:40.351 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-24 16:38:40.352 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-24 16:38:40.352 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-24 16:38:40.352 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-24 16:38:40.353 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-24 16:38:42.373 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-24 16:38:43.986 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-24 16:39:04.416 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-24 16:39:05.983 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-24 16:39:06.084 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:39:37.577 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 16:39:37.577 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-12-24 16:39:37.577 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-12-24 16:39:40.593 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-24 16:39:40.593 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-24 16:39:40.593 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 16:39:40.694 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
[Save Log Job] 2024-12-24 16:39:40.694 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
[Save Log Job] 2024-12-24 16:39:42.714 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 16:39:42.915 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.0 minitues。
[Save Log Job] 2024-12-24 16:39:42.916 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
[Save Log Job] 2024-12-24 16:39:42.916 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
[Save Log Job] 2024-12-24 16:39:43.018 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:10:40.015 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 0)
[Save Log Job] 2024-12-24 17:10:40.015 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
[Save Log Job] 2024-12-24 17:10:40.016 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
[Save Log Job] 2024-12-24 17:10:40.016 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 120)
[Save Log Job] 2024-12-24 17:10:40.017 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
[Save Log Job] 2024-12-24 17:10:40.017 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
[Save Log Job] 2024-12-24 17:10:40.018 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
[Save Log Job] 2024-12-24 17:10:40.018 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
[Save Log Job] 2024-12-24 17:10:40.018 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
[Save Log Job] 2024-12-24 17:10:40.018 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
[Save Log Job] 2024-12-24 17:10:40.112 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
[Save Log Job] 2024-12-24 17:10:40.214 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:10:42.124 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-24 17:10:44.139 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump below 500mTorr。
[Save Log Job] 2024-12-24 17:10:44.139 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
[Save Log Job] 2024-12-24 17:10:44.239 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump Finished in 0.1 minitues。
[Save Log Job] 2024-12-24 17:10:44.239 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Pump'.
[Save Log Job] 2024-12-24 17:10:44.240 LOG.INFO UiEvent.cs Line:51 Event() - Pump
[Save Log Job] 2024-12-24 17:10:44.240 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-24 17:11:25.940 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 17:11:25.941 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-24 17:11:27.604 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:11:28.019 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-24 17:11:31.235 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-24 17:11:36.585 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-24 17:12:52.389 LOG.INFO UiEvent.cs Line:51 Event() - Operation Vent()
[Save Log Job] 2024-12-24 17:12:52.392 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Close pumping open valve。
[Save Log Job] 2024-12-24 17:12:52.392 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：check sensor。
[Save Log Job] 2024-12-24 17:12:52.493 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：close all the valve。
[Save Log Job] 2024-12-24 17:12:52.493 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:12:52.591 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：vent delay 2 seconds before open vent valve。
[Save Log Job] 2024-12-24 17:12:54.602 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Open vent valve。
[Save Log Job] 2024-12-24 17:12:56.714 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-24 17:12:57.427 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：vent 50 seconds。
[Save Log Job] 2024-12-24 17:13:47.491 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Close vent valve。
[Save Log Job] 2024-12-24 17:13:49.503 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 17:13:51.217 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Vent Finished in 1.0 minitues。
[Save Log Job] 2024-12-24 17:13:51.217 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Vent'.
[Save Log Job] 2024-12-24 17:13:51.217 LOG.INFO UiEvent.cs Line:51 Event() - Vent
[Save Log Job] 2024-12-24 17:13:51.317 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:15:09.768 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-12-24 17:15:09.768 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-12-24 17:15:09.768 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
[Save Log Job] 2024-12-24 17:15:09.769 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
[Save Log Job] 2024-12-24 17:15:09.769 LOG.INFO UiEvent.cs Line:51 Event() - Operation GasFlow(300, 300, 300, 800, 900, 0)
[Save Log Job] 2024-12-24 17:15:09.770 LOG.INFO UiEvent.cs Line:51 Event() - Pumping valve not open, open pump valve first。
[Save Log Job] 2024-12-24 17:15:13.898 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-12-24 17:15:13.898 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-12-24 17:15:13.898 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
[Save Log Job] 2024-12-24 17:15:13.898 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
[Save Log Job] 2024-12-24 17:15:13.899 LOG.INFO UiEvent.cs Line:51 Event() - Operation GasFlow(300, 300, 300, 800, 900, 0)
[Save Log Job] 2024-12-24 17:15:13.899 LOG.INFO UiEvent.cs Line:51 Event() - Pumping valve not open, open pump valve first。
[Save Log Job] 2024-12-24 17:15:15.407 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-12-24 17:15:15.407 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-12-24 17:15:15.408 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
[Save Log Job] 2024-12-24 17:15:15.408 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
[Save Log Job] 2024-12-24 17:15:15.408 LOG.INFO UiEvent.cs Line:51 Event() - Operation GasFlow(300, 300, 300, 800, 900, 0)
[Save Log Job] 2024-12-24 17:15:15.409 LOG.INFO UiEvent.cs Line:51 Event() - Pumping valve not open, open pump valve first。
[Save Log Job] 2024-12-24 17:15:16.616 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-12-24 17:15:16.616 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-12-24 17:15:16.616 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
[Save Log Job] 2024-12-24 17:15:16.617 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
[Save Log Job] 2024-12-24 17:15:16.617 LOG.INFO UiEvent.cs Line:51 Event() - Operation GasFlow(300, 300, 300, 800, 900, 0)
[Save Log Job] 2024-12-24 17:15:16.617 LOG.INFO UiEvent.cs Line:51 Event() - Pumping valve not open, open pump valve first。
[Save Log Job] 2024-12-24 17:15:16.817 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-12-24 17:15:16.817 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-12-24 17:15:16.821 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
[Save Log Job] 2024-12-24 17:15:16.821 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
[Save Log Job] 2024-12-24 17:15:16.821 LOG.INFO UiEvent.cs Line:51 Event() - Operation GasFlow(300, 300, 300, 800, 900, 0)
[Save Log Job] 2024-12-24 17:15:16.821 LOG.INFO UiEvent.cs Line:51 Event() - Pumping valve not open, open pump valve first。
[Save Log Job] 2024-12-24 17:15:17.020 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-12-24 17:15:17.021 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
[Save Log Job] 2024-12-24 17:15:17.021 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
[Save Log Job] 2024-12-24 17:15:17.021 LOG.INFO UiEvent.cs Line:51 Event() - Operation GasFlow(300, 300, 300, 800, 900, 0)
[Save Log Job] 2024-12-24 17:15:17.021 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-12-24 17:15:17.022 LOG.INFO UiEvent.cs Line:51 Event() - Pumping valve not open, open pump valve first。
[Save Log Job] 2024-12-24 17:15:17.219 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-12-24 17:15:17.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-12-24 17:15:17.219 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
[Save Log Job] 2024-12-24 17:15:17.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
[Save Log Job] 2024-12-24 17:15:17.220 LOG.INFO UiEvent.cs Line:51 Event() - Operation GasFlow(300, 300, 300, 800, 900, 0)
[Save Log Job] 2024-12-24 17:15:17.221 LOG.INFO UiEvent.cs Line:51 Event() - Pumping valve not open, open pump valve first。
[Save Log Job] 2024-12-24 17:15:59.864 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-12-24 17:15:59.864 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-12-24 17:15:59.864 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
[Save Log Job] 2024-12-24 17:15:59.865 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
[Save Log Job] 2024-12-24 17:15:59.865 LOG.INFO UiEvent.cs Line:51 Event() - Operation GasFlow(300, 300, 300, 800, 900, 0)
[Save Log Job] 2024-12-24 17:15:59.866 LOG.INFO UiEvent.cs Line:51 Event() - Pumping valve not open, open pump valve first。
[Save Log Job] 2024-12-24 17:16:02.780 LOG.INFO UiEvent.cs Line:51 Event() - Operation Purge()
[Save Log Job] 2024-12-24 17:16:02.780 LOG.INFO UiEvent.cs Line:51 Event() - System Cycle Purge：Check if the rf is on。
[Save Log Job] 2024-12-24 17:16:02.883 LOG.INFO UiEvent.cs Line:51 Event() - System Cycle Purge：Check if the pump valve open。
[Save Log Job] 2024-12-24 17:16:02.883 LOG.INFO UiEvent.cs Line:51 Event() - System 'Cycle Purge' stopped
[Save Log Job] 2024-12-24 17:16:02.883 LOG.INFO UiEvent.cs Line:51 Event() - System 'Cycle Purge' stopped，reason: pump valve not open。
[Save Log Job] 2024-12-24 17:16:13.142 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-12-24 17:16:13.142 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-12-24 17:16:13.143 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
[Save Log Job] 2024-12-24 17:16:13.143 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
[Save Log Job] 2024-12-24 17:16:13.143 LOG.INFO UiEvent.cs Line:51 Event() - Operation GasFlow(300, 300, 300, 800, 900, 0)
[Save Log Job] 2024-12-24 17:16:13.144 LOG.INFO UiEvent.cs Line:51 Event() - Pumping valve not open, open pump valve first。
[Save Log Job] 2024-12-24 17:16:19.786 LOG.INFO UiEvent.cs Line:51 Event() - Operation Purge()
[Save Log Job] 2024-12-24 17:16:19.893 LOG.INFO UiEvent.cs Line:51 Event() - System Cycle Purge：Check if the rf is on。
[Save Log Job] 2024-12-24 17:16:19.893 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:16:19.893 LOG.INFO UiEvent.cs Line:51 Event() - System Cycle Purge：Check if the pump valve open。
[Save Log Job] 2024-12-24 17:16:19.893 LOG.INFO UiEvent.cs Line:51 Event() - System 'Cycle Purge' stopped
[Save Log Job] 2024-12-24 17:16:19.897 LOG.INFO UiEvent.cs Line:51 Event() - System 'Cycle Purge' stopped，reason: pump valve not open。
[Save Log Job] 2024-12-24 17:16:20.092 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:16:55.901 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 0)
[Save Log Job] 2024-12-24 17:16:55.901 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
[Save Log Job] 2024-12-24 17:17:10.284 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 666)
[Save Log Job] 2024-12-24 17:17:10.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
[Save Log Job] 2024-12-24 17:17:22.150 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-12-24 17:17:22.151 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-12-24 17:17:22.153 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
[Save Log Job] 2024-12-24 17:17:22.153 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
[Save Log Job] 2024-12-24 17:17:22.153 LOG.INFO UiEvent.cs Line:51 Event() - Operation GasFlow(300, 300, 300, 800, 900, 0)
[Save Log Job] 2024-12-24 17:17:22.153 LOG.INFO UiEvent.cs Line:51 Event() - Pumping valve not open, open pump valve first。
[Save Log Job] 2024-12-24 17:17:25.471 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetMode, TVPressureCtrl)
[Save Log Job] 2024-12-24 17:17:25.471 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetMode，Throttle valve set to TVPressureCtrl mode。
[Save Log Job] 2024-12-24 17:17:25.471 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(ThrottleValve, SetPressure, 6000)
[Save Log Job] 2024-12-24 17:17:25.472 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：ThrottleValve.SetPressure，pressure set 6000 mTorr。
[Save Log Job] 2024-12-24 17:17:25.472 LOG.INFO UiEvent.cs Line:51 Event() - Operation GasFlow(300, 300, 300, 800, 900, 0)
[Save Log Job] 2024-12-24 17:17:25.472 LOG.INFO UiEvent.cs Line:51 Event() - Pumping valve not open, open pump valve first。
[Save Log Job] 2024-12-24 17:17:44.380 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
[Save Log Job] 2024-12-24 17:17:44.380 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 800)
[Save Log Job] 2024-12-24 17:17:44.381 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
[Save Log Job] 2024-12-24 17:17:44.381 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 90)
[Save Log Job] 2024-12-24 17:17:44.381 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
[Save Log Job] 2024-12-24 17:17:44.381 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
[Save Log Job] 2024-12-24 17:17:44.381 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
[Save Log Job] 2024-12-24 17:17:44.381 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
[Save Log Job] 2024-12-24 17:17:44.382 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
[Save Log Job] 2024-12-24 17:17:44.382 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
[Save Log Job] 2024-12-24 17:17:44.482 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:17:44.482 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
[Save Log Job] 2024-12-24 17:17:45.385 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
[Save Log Job] 2024-12-24 17:19:14.111 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump below 500mTorr。
[Save Log Job] 2024-12-24 17:19:14.112 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump Finished in 1.5 minitues。
[Save Log Job] 2024-12-24 17:19:14.112 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Pump'.
[Save Log Job] 2024-12-24 17:19:14.112 LOG.INFO UiEvent.cs Line:51 Event() - Pump
[Save Log Job] 2024-12-24 17:19:14.212 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:24:21.616 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-24 17:24:21.716 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-24 17:24:21.817 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
[Save Log Job] 2024-12-24 17:24:21.819 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:24:21.819 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
[Save Log Job] 2024-12-24 17:24:23.833 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 17:24:24.641 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.0 minitues。
[Save Log Job] 2024-12-24 17:24:24.642 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:24:24.645 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
[Save Log Job] 2024-12-24 17:24:24.645 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
[Save Log Job] 2024-12-24 17:28:23.349 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 800)
[Save Log Job] 2024-12-24 17:28:23.349 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
[Save Log Job] 2024-12-24 17:28:23.349 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
[Save Log Job] 2024-12-24 17:28:23.351 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 90)
[Save Log Job] 2024-12-24 17:28:23.351 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
[Save Log Job] 2024-12-24 17:28:23.449 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
[Save Log Job] 2024-12-24 17:28:23.449 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
[Save Log Job] 2024-12-24 17:28:23.449 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
[Save Log Job] 2024-12-24 17:28:23.452 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
[Save Log Job] 2024-12-24 17:28:23.452 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
[Save Log Job] 2024-12-24 17:28:23.452 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:28:23.452 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
[Save Log Job] 2024-12-24 17:28:25.459 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-24 17:28:26.364 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
[Save Log Job] 2024-12-24 17:28:26.364 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump below 500mTorr。
[Save Log Job] 2024-12-24 17:28:26.365 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump Finished in 0.1 minitues。
[Save Log Job] 2024-12-24 17:28:26.365 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Pump'.
[Save Log Job] 2024-12-24 17:28:26.365 LOG.INFO UiEvent.cs Line:51 Event() - Pump
[Save Log Job] 2024-12-24 17:28:26.464 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:28:27.067 LOG.INFO UiEvent.cs Line:51 Event() - Operation Abort()
[Save Log Job] 2024-12-24 17:28:27.068 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Idle，can not do Abort。
[Save Log Job] 2024-12-24 17:28:32.894 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-24 17:28:32.996 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-24 17:28:32.996 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
[Save Log Job] 2024-12-24 17:28:33.095 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
[Save Log Job] 2024-12-24 17:28:33.096 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:28:34.104 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.0 minitues。
[Save Log Job] 2024-12-24 17:28:34.105 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
[Save Log Job] 2024-12-24 17:28:34.105 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
[Save Log Job] 2024-12-24 17:28:34.106 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:28:57.523 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 800)
[Save Log Job] 2024-12-24 17:28:57.523 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
[Save Log Job] 2024-12-24 17:28:57.523 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
[Save Log Job] 2024-12-24 17:28:57.528 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 10)
[Save Log Job] 2024-12-24 17:28:57.530 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
[Save Log Job] 2024-12-24 17:28:57.531 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:28:57.531 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
[Save Log Job] 2024-12-24 17:28:57.531 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
[Save Log Job] 2024-12-24 17:28:57.532 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
[Save Log Job] 2024-12-24 17:28:57.532 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
[Save Log Job] 2024-12-24 17:28:57.534 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
[Save Log Job] 2024-12-24 17:28:57.624 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
[Save Log Job] 2024-12-24 17:28:59.636 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-24 17:29:00.948 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump below 500mTorr。
[Save Log Job] 2024-12-24 17:29:00.948 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
[Save Log Job] 2024-12-24 17:29:00.948 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump Finished in 0.1 minitues。
[Save Log Job] 2024-12-24 17:29:00.948 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Pump'.
[Save Log Job] 2024-12-24 17:29:00.948 LOG.INFO UiEvent.cs Line:51 Event() - Pump
[Save Log Job] 2024-12-24 17:29:01.150 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:29:40.754 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-24 17:29:40.754 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 17:29:40.754 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-24 17:29:42.162 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-12-24 17:29:42.164 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-24 17:29:42.164 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-12-24 17:29:47.792 LOG.INFO UiEvent.cs Line:51 Event() - Operation Vent()
[Save Log Job] 2024-12-24 17:29:47.792 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：check sensor。
[Save Log Job] 2024-12-24 17:29:47.793 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Close pumping open valve。
[Save Log Job] 2024-12-24 17:29:47.793 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:29:49.914 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 17:29:50.821 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：close all the valve。
[Save Log Job] 2024-12-24 17:29:50.920 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：vent delay 2 seconds before open vent valve。
[Save Log Job] 2024-12-24 17:29:52.932 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Open vent valve。
[Save Log Job] 2024-12-24 17:29:54.947 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：vent 50 seconds。
[Save Log Job] 2024-12-24 17:30:45.012 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Close vent valve。
[Save Log Job] 2024-12-24 17:30:47.027 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-24 17:30:48.740 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Vent Finished in 1.0 minitues。
[Save Log Job] 2024-12-24 17:30:48.741 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Vent'.
[Save Log Job] 2024-12-24 17:30:48.741 LOG.INFO UiEvent.cs Line:51 Event() - Vent
[Save Log Job] 2024-12-24 17:30:48.840 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:31:10.361 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
[Save Log Job] 2024-12-24 17:31:10.361 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 800)
[Save Log Job] 2024-12-24 17:31:10.362 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
[Save Log Job] 2024-12-24 17:31:10.362 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 10)
[Save Log Job] 2024-12-24 17:31:10.362 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
[Save Log Job] 2024-12-24 17:31:10.362 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
[Save Log Job] 2024-12-24 17:31:10.362 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
[Save Log Job] 2024-12-24 17:31:10.362 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
[Save Log Job] 2024-12-24 17:31:10.363 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
[Save Log Job] 2024-12-24 17:31:10.363 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
[Save Log Job] 2024-12-24 17:31:10.461 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
[Save Log Job] 2024-12-24 17:31:10.461 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:31:11.567 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
[Save Log Job] 2024-12-24 17:31:21.530 LOG.INFO UiEvent.cs Line:51 Event() - Can not pump to base pressure 500 in 10 seconds。
[Save Log Job] 2024-12-24 17:31:21.629 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-24 17:32:03.342 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_Language, 2)
[Save Log Job] 2024-12-24 20:11:32.497 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM。
[Save Log Job] 2024-12-24 23:11:31.831 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -61 days, at 10/24/2024 12:00:00 AM。
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