<== [Save Log Job] 2024-12-23 09:13:35.792 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-12-23 09:13:36.605 LOG.INFO EventService.cs Line:60 Register() - 客户端73060004-49fc-41ed-9a9e-f2980a21a87e已连接 [Save Log Job] 2024-12-23 09:13:36.897 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 09:13:36.898 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 09:13:36.969 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-12-23 09:13:38.025 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 09:13:38.027 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 09:13:38.169 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 09:13:38.172 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:13:38.215 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 09:13:38.616 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-12-23 09:13:41.981 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-12-23 09:13:52.817 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-12-23 09:13:52.818 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 09:13:52.829 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-12-23 09:13:52.954 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 09:13:59.101 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:13:59.108 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:13:59.177 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:13:59.228 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:14:07.840 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Vent() [Save Log Job] 2024-12-23 09:14:07.842 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Vent [Save Log Job] 2024-12-23 09:14:07.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：check sensor。 [Save Log Job] 2024-12-23 09:14:07.895 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：Close pumping open valve。 [Save Log Job] 2024-12-23 09:14:07.954 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：close all the valve。 [Save Log Job] 2024-12-23 09:14:07.962 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:14:08.012 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：vent delay 2 seconds before open vent valve。 [Save Log Job] 2024-12-23 09:14:10.086 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：Open vent valve。 [Save Log Job] 2024-12-23 09:14:10.482 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Vent：vent 50 seconds。 [Save Log Job] 2024-12-23 09:14:28.849 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:14:29.839 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Abort() [Save Log Job] 2024-12-23 09:14:29.840 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 09:14:29.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:14:31.870 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 09:14:38.944 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-12-23 09:14:38.945 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-23 09:14:38.945 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-12-23 09:14:42.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 09:14:42.406 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 09:14:42.409 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223091442-CACB [Save Log Job] 2024-12-23 09:14:42.409 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 09:14:42.410 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 09:14:42.410 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 09:14:42.411 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:14:42.414 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:14:42.451 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:14:42.462 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 09:14:42.462 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 09:14:42.462 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 09:14:42.463 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 09:14:42.463 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 09:14:42.521 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 09:14:44.558 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-12-23 09:14:44.888 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 09:14:48.701 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 09:14:48.702 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 09:14:48.794 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:14:50.851 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:15:03.414 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:15:03.418 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:15:07.824 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode() [Save Log Job] 2024-12-23 09:15:07.824 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-23 09:15:07.825 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode [Save Log Job] 2024-12-23 09:15:09.714 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:15:12.414 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:15:12.976 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump() [Save Log Job] 2024-12-23 09:15:12.977 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping [Save Log Job] 2024-12-23 09:15:13.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。 [Save Log Job] 2024-12-23 09:15:13.088 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。 [Save Log Job] 2024-12-23 09:15:13.129 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:15:13.146 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。 [Save Log Job] 2024-12-23 09:15:15.150 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 09:15:15.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.0 minitues。 [Save Log Job] 2024-12-23 09:15:15.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''. [Save Log Job] 2024-12-23 09:15:15.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump [Save Log Job] 2024-12-23 09:15:15.584 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 09:15:15.666 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:15:20.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-12-23 09:15:20.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-23 09:15:20.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-12-23 09:15:26.288 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 09:15:26.290 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 09:15:26.290 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223091526-CACB [Save Log Job] 2024-12-23 09:15:26.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 09:15:26.291 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 09:15:26.291 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 09:15:26.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 09:15:26.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 09:15:26.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 09:15:26.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 09:15:26.342 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 09:15:26.358 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:15:26.399 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 09:15:27.129 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 09:15:33.986 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:15:36.594 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:15:42.415 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:15:47.297 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:15:47.304 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:15:47.589 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 09:15:47.589 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 09:15:47.619 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:16:08.603 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:16:12.417 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:16:42.423 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:17:12.431 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:17:42.437 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:18:12.450 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:18:42.454 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:19:12.459 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:19:42.459 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:20:12.460 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:20:42.460 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:21:12.460 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:21:42.461 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:22:12.462 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:22:42.462 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:23:12.463 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:23:42.463 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:24:12.463 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:24:42.464 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:25:12.464 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:25:42.465 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:26:12.466 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:26:42.466 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:27:12.467 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:27:42.468 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:28:12.469 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:28:42.469 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:29:12.470 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:29:42.471 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:30:12.471 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:30:42.472 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:31:12.473 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:31:42.473 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:32:12.474 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:32:42.475 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:33:12.476 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:33:42.476 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:34:12.477 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:34:42.478 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:35:12.479 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:35:42.481 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:36:12.481 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:36:42.481 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:37:12.482 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:37:42.482 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:38:12.483 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:38:42.483 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:39:12.484 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:39:42.484 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:40:12.485 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:40:42.486 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:41:12.487 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:41:42.487 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:42:12.487 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:42:42.488 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:43:12.489 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:43:42.489 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:44:12.490 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:44:42.490 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:45:12.491 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:45:42.491 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:46:12.493 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:46:42.495 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:47:12.494 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:47:42.495 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:48:12.496 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:48:42.496 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:49:12.497 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:49:42.497 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:50:12.498 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:50:42.499 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:50:52.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode() [Save Log Job] 2024-12-23 09:50:52.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-23 09:50:52.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode [Save Log Job] 2024-12-23 09:50:56.535 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump() [Save Log Job] 2024-12-23 09:50:56.535 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping [Save Log Job] 2024-12-23 09:50:56.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:50:56.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。 [Save Log Job] 2024-12-23 09:50:56.642 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。 [Save Log Job] 2024-12-23 09:50:56.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。 [Save Log Job] 2024-12-23 09:50:58.718 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 09:51:00.565 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.1 minitues。 [Save Log Job] 2024-12-23 09:51:00.565 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''. [Save Log Job] 2024-12-23 09:51:00.565 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump [Save Log Job] 2024-12-23 09:51:00.566 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 09:51:00.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:51:06.863 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 0) [Save Log Job] 2024-12-23 09:51:06.864 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。 [Save Log Job] 2024-12-23 09:51:06.865 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500) [Save Log Job] 2024-12-23 09:51:06.866 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 120) [Save Log Job] 2024-12-23 09:51:06.866 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump() [Save Log Job] 2024-12-23 09:51:06.867 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping [Save Log Job] 2024-12-23 09:51:06.919 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。 [Save Log Job] 2024-12-23 09:51:06.919 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。 [Save Log Job] 2024-12-23 09:51:06.919 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。 [Save Log Job] 2024-12-23 09:51:06.919 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。 [Save Log Job] 2024-12-23 09:51:06.919 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。 [Save Log Job] 2024-12-23 09:51:06.976 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。 [Save Log Job] 2024-12-23 09:51:06.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:51:08.322 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。 [Save Log Job] 2024-12-23 09:51:08.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump below 500mTorr。 [Save Log Job] 2024-12-23 09:51:08.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump Finished in 0.0 minitues。 [Save Log Job] 2024-12-23 09:51:08.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Pump''. [Save Log Job] 2024-12-23 09:51:08.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Pump [Save Log Job] 2024-12-23 09:51:08.380 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 09:51:08.392 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:51:12.499 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:51:12.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump() [Save Log Job] 2024-12-23 09:51:12.623 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping [Save Log Job] 2024-12-23 09:51:12.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。 [Save Log Job] 2024-12-23 09:51:12.731 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。 [Save Log Job] 2024-12-23 09:51:12.787 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。 [Save Log Job] 2024-12-23 09:51:12.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:51:14.803 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 09:51:15.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.1 minitues。 [Save Log Job] 2024-12-23 09:51:15.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''. [Save Log Job] 2024-12-23 09:51:15.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump [Save Log Job] 2024-12-23 09:51:15.975 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 09:51:15.979 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 09:51:17.550 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:51:21.576 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:51:27.879 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:51:29.388 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:51:33.630 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:51:36.983 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 09:51:42.500 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:52:12.500 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:52:42.501 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:53:12.501 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:53:42.502 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:54:12.503 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:54:42.503 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:55:12.503 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:55:42.504 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:56:12.505 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:56:42.505 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:57:12.505 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:57:42.506 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:58:12.506 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:58:42.507 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:59:12.508 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 09:59:42.508 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:00:12.509 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:00:42.509 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:01:12.510 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:01:42.511 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:02:12.511 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:02:42.511 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:03:12.512 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:03:42.513 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:04:12.513 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:04:42.513 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:05:12.514 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:05:42.514 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:06:12.514 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:06:42.515 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:07:12.515 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:07:42.515 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:08:12.516 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:08:42.517 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:09:12.518 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:09:42.518 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:10:12.519 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:10:42.519 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:11:12.520 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:11:42.520 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:12:12.521 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:12:42.522 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:13:12.522 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:13:42.524 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:14:12.525 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:14:42.526 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:15:12.526 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:15:42.527 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:16:12.528 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:16:42.529 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:17:12.530 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:17:42.530 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:18:12.530 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:18:42.531 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:19:12.531 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:19:42.531 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:20:12.532 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:20:42.532 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:21:12.533 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:21:42.534 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:22:12.534 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:22:42.535 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:23:12.535 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:23:42.536 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:24:12.537 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:24:42.537 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:25:12.538 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:25:42.538 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:26:12.539 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:26:42.539 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:27:12.539 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:27:42.540 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:28:12.540 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:28:42.541 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:29:12.541 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:29:42.542 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:30:12.543 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:30:42.543 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:31:12.543 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:31:42.544 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:32:12.544 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:32:42.545 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:33:12.545 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:33:42.546 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:34:12.546 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:34:42.546 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:35:12.547 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:35:42.547 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:36:12.548 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:36:42.548 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:37:12.548 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:37:42.549 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:38:12.549 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:38:42.550 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:39:12.550 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:39:42.551 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:40:12.551 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:40:42.553 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:41:12.553 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:41:42.553 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:42:12.554 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:42:42.554 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:43:12.554 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:43:42.555 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:44:12.555 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:44:42.556 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:45:12.557 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:45:42.557 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:46:12.557 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:46:42.557 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:47:12.558 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:47:42.559 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:48:12.560 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:48:42.560 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:49:12.561 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:49:42.561 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:50:12.561 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:50:42.562 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:51:12.562 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:51:42.563 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:52:12.564 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:52:42.565 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:53:12.565 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:53:42.565 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:54:12.566 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:54:42.566 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:55:12.566 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:55:42.567 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:56:12.567 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:56:42.567 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:57:12.568 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:57:42.569 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:58:12.569 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:58:42.569 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:59:12.570 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 10:59:42.571 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 11:00:12.572 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 11:00:42.573 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 11:01:12.573 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 11:01:42.573 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 11:02:12.574 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 11:02:42.574 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 11:03:12.575 LOG.INFO YZQZFabAuto.cs Line:190 work() - 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work |0 [Save Log Job] 2024-12-23 12:18:41.349 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:19:11.350 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:19:41.350 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:20:11.350 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:20:41.351 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:21:11.352 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:21:41.353 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:22:11.353 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:22:41.355 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:23:11.355 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:23:41.355 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:24:11.356 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:24:41.356 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:25:11.356 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:25:41.357 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:26:11.358 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:26:41.358 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:27:11.359 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:27:41.360 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:28:11.360 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:28:41.362 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:29:11.362 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:29:41.363 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:30:11.364 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:30:41.364 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:31:11.365 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:31:41.365 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:32:11.366 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:32:41.366 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:33:11.367 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:33:41.368 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:34:11.369 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:34:41.371 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:35:11.372 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:35:41.372 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:36:11.373 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:36:41.373 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:37:11.374 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:37:41.374 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:38:11.375 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:38:41.375 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:39:11.376 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:39:41.376 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:40:11.376 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:40:41.377 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:41:11.378 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:41:41.379 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:42:11.379 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:42:41.380 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:43:11.380 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:43:41.381 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:44:11.382 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:44:41.382 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:45:11.383 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:45:41.384 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:46:11.385 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:46:41.385 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:47:11.385 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:47:41.386 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:48:11.386 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:48:41.387 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:49:11.387 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:49:41.388 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:50:11.388 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:50:41.388 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:51:11.390 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:51:41.391 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:52:11.391 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:52:41.392 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:53:11.393 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:53:41.393 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:54:11.394 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:54:41.394 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:55:11.395 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:55:41.395 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:56:11.395 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:56:41.396 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:57:11.396 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:57:41.397 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:58:11.397 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:58:41.398 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:59:11.399 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 12:59:41.399 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 13:00:11.400 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 13:00:41.400 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 13:01:11.401 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 13:01:41.401 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 <== [Save Log Job] 2024-12-23 13:16:19.065 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-12-23 13:16:20.003 LOG.INFO EventService.cs Line:60 Register() - 客户端1030d8a5-8f1e-400e-9716-3ffc9f33b49f已连接 [Save Log Job] 2024-12-23 13:16:20.003 LOG.INFO EventService.cs Line:60 Register() - 客户端1030d8a5-8f1e-400e-9716-3ffc9f33b49f已连接 [Save Log Job] 2024-12-23 13:16:20.161 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 13:16:20.162 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 13:16:20.206 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-12-23 13:16:21.162 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 13:16:21.247 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 13:16:21.415 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 13:16:21.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-12-23 13:16:21.464 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 13:16:21.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 13:16:25.218 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-12-23 13:16:25.682 LOG.INFO LOG.cs Line:61 Write() - 用户尝试登录系统 [Save Log Job] 2024-12-23 13:16:25.683 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息 [Save Log Job] 2024-12-23 13:16:34.452 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-12-23 13:16:34.453 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 13:16:34.458 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-12-23 13:16:34.580 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 13:16:42.213 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 13:16:42.255 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 13:16:42.430 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 13:16:42.473 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 16:16:26.380 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。 [Save Log Job] 2024-12-23 17:12:39.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-12-23 17:12:39.394 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-23 17:12:39.395 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-12-23 17:12:47.689 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:12:47.717 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:12:47.722 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223171247-CACB [Save Log Job] 2024-12-23 17:12:47.722 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:12:47.723 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:12:47.723 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:12:47.724 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:12:47.726 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:12:47.775 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:12:47.775 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:12:47.776 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:12:47.778 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:12:47.779 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:12:47.840 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:12:47.864 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:12:49.883 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-12-23 17:12:51.144 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:12:56.125 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:12:56.128 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:12:56.214 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:13:04.873 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode() [Save Log Job] 2024-12-23 17:13:04.874 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-23 17:13:04.874 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode [Save Log Job] 2024-12-23 17:13:08.729 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:13:08.735 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:13:17.137 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:13:17.726 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:13:47.726 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:14:17.726 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:14:47.727 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:15:24.437 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:16:40.024 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:17:44.535 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:17:44.536 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-12-23 17:17:44.538 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-23 17:17:44.538 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:17:44.574 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv [Save Log Job] 2024-12-23 17:17:44.576 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv [Save Log Job] 2024-12-23 17:17:46.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:17:46.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:20:42.717 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 [Save Log Job] 2024-12-23 17:24:01.585 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-12-23 17:24:04.012 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-23 17:29:59.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump() [Save Log Job] 2024-12-23 17:31:08.046 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Error，can not do StopPumpDown。 [Save Log Job] 2024-12-23 17:31:34.087 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:31:41.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump() [Save Log Job] 2024-12-23 17:31:56.758 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping [Save Log Job] 2024-12-23 17:31:56.809 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。 [Save Log Job] 2024-12-23 17:31:56.869 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。 [Save Log Job] 2024-12-23 17:31:56.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。 [Save Log Job] 2024-12-23 17:31:56.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:31:58.550 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.2 minitues。 [Save Log Job] 2024-12-23 17:31:58.550 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''. [Save Log Job] 2024-12-23 17:31:58.550 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump [Save Log Job] 2024-12-23 17:31:58.551 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:31:58.742 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:32:17.766 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:32:19.560 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:32:24.364 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-12-23 17:32:24.365 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-23 17:32:24.365 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-12-23 17:32:33.140 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:32:33.142 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223173233-CACB [Save Log Job] 2024-12-23 17:32:33.143 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:32:33.143 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:32:33.143 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:32:33.143 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:32:33.143 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:32:33.145 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:32:33.194 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:32:33.194 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:32:33.194 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:32:33.194 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:32:33.195 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:32:33.207 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:32:33.251 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:32:35.280 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-12-23 17:32:36.822 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:32:44.908 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-12-23 17:32:44.964 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。 [Save Log Job] 2024-12-23 17:32:44.964 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-12-23 17:32:44.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241223173233-CACB [Save Log Job] 2024-12-23 17:32:44.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241223173233-CACB'' [Save Log Job] 2024-12-23 17:32:44.971 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-12-23 17:32:45.023 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241223173233-CACB'' start run step 1：initial。 [Save Log Job] 2024-12-23 17:32:45.024 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-23 17:32:45.024 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-23 17:32:45.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-23 17:32:45.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-23 17:32:45.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-23 17:32:45.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-23 17:32:45.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-23 17:32:45.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-23 17:32:45.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-23 17:32:45.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-23 17:32:45.027 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-23 17:32:45.027 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-23 17:32:45.027 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-23 17:32:45.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-23 17:32:45.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-23 17:32:45.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-23 17:32:45.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-23 17:32:45.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-12-23 17:32:47.995 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:32:47.996 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-12-23 17:32:47.998 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-12-23 17:32:47.999 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241223173233-CACB Start time：2024/12/23 17:32:44 End time：2024/12/23 17:32:47 Total time：0:0:3 [Save Log Job] 2024-12-23 17:32:47.999 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-12-23 17:32:48.000 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess [Save Log Job] 2024-12-23 17:32:48.052 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-12-23 17:32:50.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:32:50.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:32:50.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:32:50.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:32:50.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:32:50.001 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:32:54.152 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:32:54.157 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:32:58.133 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-12-23 17:32:58.192 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-12-23 17:32:58.248 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-12-23 17:32:58.305 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-12-23 17:32:59.870 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-12-23 17:33:02.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-12-23 17:33:03.146 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:33:05.980 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:33:09.018 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:33:28.139 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:33:28.140 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-12-23 17:33:28.140 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-23 17:33:28.140 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:33:28.140 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:33:28.146 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv [Save Log Job] 2024-12-23 17:33:28.146 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv [Save Log Job] 2024-12-23 17:33:28.164 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:33:30.169 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:33:43.508 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:33:43.511 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223173343-CACB [Save Log Job] 2024-12-23 17:33:43.511 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:33:43.511 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:33:43.511 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:33:43.511 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:33:43.511 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:33:43.513 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:33:43.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:33:43.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:33:43.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:33:43.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:33:43.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:33:43.598 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:33:43.620 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:33:45.669 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-12-23 17:33:45.999 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:33:48.706 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:33:48.706 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:33:48.811 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:33:49.153 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:33:54.663 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 [Save Log Job] 2024-12-23 17:34:01.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:34:01.407 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:34:01.407 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223173401-CACB [Save Log Job] 2024-12-23 17:34:01.407 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:34:01.407 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:34:01.407 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:34:01.434 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:34:01.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:34:01.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:34:01.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:34:01.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:34:01.458 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:34:01.514 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:34:01.571 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:34:13.514 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:34:22.415 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:34:22.423 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:34:24.728 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-12-23 17:34:24.785 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.4 minitues。 [Save Log Job] 2024-12-23 17:34:24.785 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-12-23 17:34:24.785 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241223173401-CACB [Save Log Job] 2024-12-23 17:34:24.785 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241223173401-CACB'' [Save Log Job] 2024-12-23 17:34:24.786 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-12-23 17:34:24.836 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241223173401-CACB'' start run step 1：initial。 [Save Log Job] 2024-12-23 17:34:24.836 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-23 17:34:24.837 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-23 17:34:24.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-23 17:34:24.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-23 17:34:24.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-23 17:34:24.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-23 17:34:24.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-23 17:34:24.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-23 17:34:24.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-23 17:34:24.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-23 17:34:24.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-23 17:34:24.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-23 17:34:24.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-23 17:34:24.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-23 17:34:24.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-23 17:34:24.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-23 17:34:24.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-23 17:34:24.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-12-23 17:34:25.523 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:34:25.528 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:34:29.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:34:29.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-12-23 17:34:29.931 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-12-23 17:34:29.931 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241223173401-CACB Start time：2024/12/23 17:34:24 End time：2024/12/23 17:34:29 Total time：0:0:5 [Save Log Job] 2024-12-23 17:34:29.931 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-12-23 17:34:29.931 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess [Save Log Job] 2024-12-23 17:34:29.982 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-12-23 17:34:30.719 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:34:40.084 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-12-23 17:34:40.139 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-12-23 17:34:40.196 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-12-23 17:34:40.253 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-12-23 17:34:42.260 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:34:43.514 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:34:43.544 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-12-23 17:34:46.619 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-12-23 17:34:50.944 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:35:06.799 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:35:13.515 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:35:16.197 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:35:16.198 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-12-23 17:35:16.199 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-23 17:35:16.199 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:35:16.199 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:35:16.204 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv [Save Log Job] 2024-12-23 17:35:16.205 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv [Save Log Job] 2024-12-23 17:35:16.251 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:35:18.202 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:35:37.206 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:35:42.721 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 [Save Log Job] 2024-12-23 17:35:49.089 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:35:49.091 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223173549-CACB [Save Log Job] 2024-12-23 17:35:49.091 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:35:49.091 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:35:49.091 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:35:49.091 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:35:49.091 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:35:49.093 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:35:49.112 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:35:49.141 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:35:49.142 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:35:49.142 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:35:49.142 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:35:49.142 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:35:49.199 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:35:51.202 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-12-23 17:35:52.753 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:35:55.080 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:35:55.080 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:35:55.134 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:36:10.104 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:36:10.108 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:36:16.089 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:36:18.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:36:18.343 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:36:18.343 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223173618-CACB [Save Log Job] 2024-12-23 17:36:18.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:36:18.343 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:36:18.343 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:36:18.378 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:36:18.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:36:18.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:36:18.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:36:18.394 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:36:18.394 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:36:18.451 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:36:18.507 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:36:19.093 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:36:39.352 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:36:39.357 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:36:49.094 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:36:50.652 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-12-23 17:36:50.709 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.5 minitues。 [Save Log Job] 2024-12-23 17:36:50.709 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-12-23 17:36:50.709 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241223173618-CACB [Save Log Job] 2024-12-23 17:36:50.709 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241223173618-CACB'' [Save Log Job] 2024-12-23 17:36:50.709 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-12-23 17:36:50.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241223173618-CACB'' start run step 1：initial。 [Save Log Job] 2024-12-23 17:36:50.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-23 17:36:50.760 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-23 17:36:50.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-23 17:36:50.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-23 17:36:50.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-23 17:36:50.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-23 17:36:50.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-23 17:36:50.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-23 17:36:50.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-23 17:36:50.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-23 17:36:50.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-23 17:36:50.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-23 17:36:50.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-23 17:36:50.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-23 17:36:50.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-23 17:36:50.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-23 17:36:50.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-23 17:36:50.812 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-12-23 17:37:00.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:37:00.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-12-23 17:37:00.978 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-12-23 17:37:00.978 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241223173618-CACB Start time：2024/12/23 17:36:50 End time：2024/12/23 17:37:00 Total time：0:0:10 [Save Log Job] 2024-12-23 17:37:00.978 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-12-23 17:37:00.978 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess [Save Log Job] 2024-12-23 17:37:01.029 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-12-23 17:37:03.022 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:37:03.022 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:37:03.022 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:37:03.022 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:37:03.022 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:37:11.124 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-12-23 17:37:11.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-12-23 17:37:11.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-12-23 17:37:11.293 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-12-23 17:37:11.718 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:37:13.357 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-12-23 17:37:16.434 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-12-23 17:37:19.094 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:37:21.987 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:37:49.096 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:38:06.525 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-12-23 17:38:07.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.1 minitues [Save Log Job] 2024-12-23 17:38:07.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-12-23 17:38:07.309 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-12-23 17:38:07.309 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-23 17:38:07.309 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:38:07.309 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:38:07.319 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv [Save Log Job] 2024-12-23 17:38:07.320 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv [Save Log Job] 2024-12-23 17:38:07.469 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:38:28.332 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:38:33.839 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 <== [Save Log Job] 2024-12-23 17:40:37.782 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-12-23 17:40:38.700 LOG.INFO EventService.cs Line:60 Register() - 客户端39c74856-f713-4695-ba8c-8e8b4169b42b已连接 [Save Log Job] 2024-12-23 17:40:38.702 LOG.INFO EventService.cs Line:60 Register() - 客户端39c74856-f713-4695-ba8c-8e8b4169b42b已连接 [Save Log Job] 2024-12-23 17:40:38.855 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 17:40:38.855 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 17:40:38.922 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-12-23 17:40:39.963 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:40:39.965 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:40:40.130 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:40:40.184 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:40:40.255 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:40:40.474 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-12-23 17:40:43.931 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-12-23 17:40:46.269 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-12-23 17:40:46.271 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 17:40:46.283 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-12-23 17:40:46.417 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 17:40:52.321 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-12-23 17:40:52.322 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-23 17:40:52.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-12-23 17:40:58.426 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:40:58.448 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:40:58.450 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223174058-CACB [Save Log Job] 2024-12-23 17:40:58.450 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:40:58.451 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:40:58.451 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:40:58.452 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:40:58.455 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:40:58.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:40:58.503 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:40:58.504 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:40:58.504 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:40:58.504 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:40:58.505 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:40:58.565 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:41:00.575 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-12-23 17:41:00.793 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:41:01.043 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:41:01.047 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:41:01.145 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:41:01.194 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:41:25.594 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:41:25.600 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:41:28.641 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:42:01.592 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:45:59.198 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:45:59.199 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-12-23 17:45:59.199 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Can not pump to base pressure 100 in 120 seconds。 [Save Log Job] 2024-12-23 17:45:59.219 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:45:59.221 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-23 17:45:59.221 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:45:59.230 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv [Save Log Job] 2024-12-23 17:45:59.232 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv [Save Log Job] 2024-12-23 17:45:59.233 LOG.WARN StateMachine.cs Line:169 Loop() - 状态机Chamber FSM未定义在状态Error时处理方法。 [Save Log Job] 2024-12-23 17:45:59.233 LOG.WARN StateMachine.cs Line:169 Loop() - 状态机Chamber FSM未定义在状态Error时处理方法。 [Save Log Job] 2024-12-23 17:45:59.399 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:46:04.180 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:46:09.881 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:46:09.883 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:46:09.883 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223174609-CACB [Save Log Job] 2024-12-23 17:46:09.883 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:46:09.883 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:46:09.883 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:46:09.883 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:46:09.888 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:46:09.933 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:46:09.933 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:46:09.933 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:46:09.933 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:46:09.934 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:46:09.991 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:46:10.021 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:46:10.047 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:46:18.342 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:46:18.906 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:46:19.108 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:46:25.751 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 [Save Log Job] 2024-12-23 17:46:30.898 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:46:30.903 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:46:39.892 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:46:39.915 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:47:09.893 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:47:39.894 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:48:09.897 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:48:39.898 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:49:09.908 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:49:39.918 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:50:09.937 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:50:39.944 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 <== [Save Log Job] 2024-12-23 17:51:13.250 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-12-23 17:51:14.035 LOG.INFO EventService.cs Line:60 Register() - 客户端2b526e0f-e07d-4c2c-84b3-a6f163836adc已连接 [Save Log Job] 2024-12-23 17:51:14.339 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 17:51:14.341 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 17:51:14.423 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-12-23 17:51:15.436 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:51:15.469 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:51:15.648 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:51:15.695 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:51:15.711 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:51:15.972 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-12-23 17:51:19.435 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-12-23 17:51:27.556 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-12-23 17:51:27.557 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 17:51:27.565 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-12-23 17:51:27.675 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 17:51:36.518 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:51:36.660 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:51:36.711 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:51:40.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-12-23 17:51:40.535 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-23 17:51:40.535 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-12-23 17:51:46.165 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:51:46.185 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:51:46.188 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223175146-CACB [Save Log Job] 2024-12-23 17:51:46.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:51:46.189 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:51:46.189 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:51:46.190 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:51:46.192 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:51:46.242 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:51:46.242 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:51:46.242 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:51:46.243 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:51:46.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:51:46.263 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:51:46.304 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:51:47.755 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:51:55.571 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:51:55.572 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:51:55.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:51:57.515 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. <== [Save Log Job] 2024-12-23 17:52:38.646 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-12-23 17:52:39.391 LOG.INFO EventService.cs Line:60 Register() - 客户端a8633e98-80f8-48d7-a47c-0c2d0464d911已连接 [Save Log Job] 2024-12-23 17:52:39.570 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 17:52:39.571 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 17:52:39.636 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-12-23 17:52:40.707 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:52:40.710 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:52:40.843 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:52:40.895 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:52:40.965 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:52:41.239 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-12-23 17:52:44.646 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-12-23 17:52:46.754 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-12-23 17:52:46.755 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 17:52:46.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-12-23 17:52:46.877 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 17:52:55.004 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-12-23 17:52:55.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-23 17:52:55.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-12-23 17:52:57.125 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:52:57.145 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:52:57.147 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223175257-CACB [Save Log Job] 2024-12-23 17:52:57.147 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:52:57.148 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:52:57.149 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:52:57.149 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:52:57.152 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:52:57.200 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:52:57.200 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:52:57.201 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:52:57.201 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:52:57.202 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:52:57.208 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:52:57.263 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:52:57.657 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:53:01.791 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:53:01.853 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:53:01.906 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:53:06.001 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:53:06.002 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:53:06.033 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:53:18.155 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:53:18.161 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:53:22.779 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:53:27.152 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:53:42.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:53:42.134 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:53:42.134 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223175342-CACB [Save Log Job] 2024-12-23 17:53:42.134 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:53:42.134 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:53:42.135 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:53:42.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:53:42.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:53:42.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:53:42.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:53:42.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:53:42.241 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:53:42.298 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:53:42.298 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-12-23 17:53:42.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:53:42.357 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。 [Save Log Job] 2024-12-23 17:53:42.358 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-12-23 17:53:42.359 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241223175342-CACB [Save Log Job] 2024-12-23 17:53:42.359 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241223175342-CACB'' [Save Log Job] 2024-12-23 17:53:42.360 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-12-23 17:53:42.413 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241223175342-CACB'' start run step 1：initial。 [Save Log Job] 2024-12-23 17:53:42.413 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-23 17:53:42.414 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-23 17:53:42.414 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-23 17:53:42.414 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-23 17:53:42.415 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-23 17:53:42.415 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-23 17:53:42.415 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-23 17:53:42.415 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-23 17:53:42.415 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-23 17:53:42.416 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-23 17:53:42.416 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-23 17:53:42.416 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-23 17:53:42.416 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-23 17:53:42.416 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-23 17:53:42.416 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-23 17:53:42.416 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-23 17:53:42.416 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-23 17:53:42.467 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-12-23 17:53:48.019 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:53:55.973 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:54:00.164 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:54:00.267 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-12-23 17:54:00.269 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-12-23 17:54:00.269 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241223175342-CACB Start time：2024/12/23 17:53:42 End time：2024/12/23 17:54:00 Total time：0:0:17 [Save Log Job] 2024-12-23 17:54:00.270 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-12-23 17:54:00.270 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess [Save Log Job] 2024-12-23 17:54:00.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-12-23 17:54:02.290 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:54:02.290 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-23 17:54:10.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-12-23 17:54:10.477 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-12-23 17:54:16.056 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:54:16.057 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-12-23 17:54:16.058 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:54:16.058 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-23 17:54:16.058 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:54:16.068 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv [Save Log Job] 2024-12-23 17:54:16.070 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv [Save Log Job] 2024-12-23 17:54:16.190 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:54:21.286 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:54:24.146 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:54:24.151 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:54:24.372 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:54:39.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:54:39.181 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:54:39.182 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223175439-CACB [Save Log Job] 2024-12-23 17:54:39.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:54:39.182 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:54:39.182 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:54:39.182 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:54:39.185 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:54:39.232 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:54:39.232 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:54:39.232 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:54:39.233 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:54:39.233 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:54:39.265 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:54:39.290 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:54:39.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:54:39.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-12-23 17:54:39.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。 [Save Log Job] 2024-12-23 17:54:39.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-12-23 17:54:39.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241223175439-CACB [Save Log Job] 2024-12-23 17:54:39.404 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241223175439-CACB'' [Save Log Job] 2024-12-23 17:54:39.405 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-12-23 17:54:39.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241223175439-CACB'' start run step 1：initial。 [Save Log Job] 2024-12-23 17:54:39.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-23 17:54:39.456 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-23 17:54:39.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-23 17:54:39.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-23 17:54:39.457 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-23 17:54:39.458 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-23 17:54:39.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-12-23 17:54:42.595 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 <== [Save Log Job] 2024-12-23 17:54:57.193 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-12-23 17:54:58.270 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 17:54:58.271 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-23 17:54:58.320 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-12-23 17:54:58.424 LOG.INFO EventService.cs Line:60 Register() - 客户端ec474aae-a78a-48ff-bb26-80d31cb470a3已连接 [Save Log Job] 2024-12-23 17:54:59.301 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:54:59.381 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:54:59.555 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:54:59.602 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:54:59.707 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:54:59.736 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-12-23 17:55:03.332 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-12-23 17:55:06.431 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-12-23 17:55:06.432 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 17:55:06.437 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-12-23 17:55:06.561 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-23 17:55:14.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-12-23 17:55:14.030 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-23 17:55:14.030 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-12-23 17:55:16.789 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , ) [Save Log Job] 2024-12-23 17:55:16.811 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-23 17:55:16.814 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241223175516-CACB [Save Log Job] 2024-12-23 17:55:16.814 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-23 17:55:16.815 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-23 17:55:16.816 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB [Save Log Job] 2024-12-23 17:55:16.816 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:55:16.820 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:55:16.867 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-23 17:55:16.867 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-23 17:55:16.868 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-23 17:55:16.868 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-23 17:55:16.869 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-23 17:55:16.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-23 17:55:16.944 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:55:18.954 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-12-23 17:55:20.189 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-23 17:55:20.362 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:55:20.393 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:55:20.564 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:55:20.611 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:55:23.832 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-23 17:56:07.758 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:56:16.365 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:56:16.370 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:56:37.878 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:57:04.503 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-23 17:57:04.704 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-23 17:57:07.879 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:57:25.519 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-23 17:57:37.887 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:58:07.893 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:58:37.901 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:59:07.909 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 17:59:37.912 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 18:00:07.917 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 18:00:37.924 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 18:01:07.931 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 18:01:37.940 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 18:02:07.954 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 18:02:37.963 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-23 18:03:07.964 LOG.INFO YZQZFabAuto.cs Line:190 work() - 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