<== [Save Log Job] 2024-10-28 09:12:20.828 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 09:12:21.612 LOG.INFO EventService.cs Line:60 Register() - 客户端a759b17c-da99-4a66-b107-01aa8b241a2b已连接 [Save Log Job] 2024-10-28 09:12:21.794 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 09:12:21.798 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 09:12:21.857 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 09:12:23.156 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 09:12:23.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 09:12:26.868 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 09:12:33.833 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 09:12:33.834 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 09:12:33.845 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 09:12:33.969 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 09:15:47.703 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-10-28 09:15:47.704 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 09:18:34.531 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-10-28 09:18:34.533 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 09:22:43.885 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-10-28 09:22:43.886 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 09:23:01.692 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-28 09:23:15.687 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 [Save Log Job] 2024-10-28 09:23:25.302 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Move System recipe 123。 [Save Log Job] 2024-10-28 09:23:25.323 LOG.INFO LOG.cs Line:61 Write() - recipe file 123 move completed [Save Log Job] 2024-10-28 10:05:10.281 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-28 10:05:10.361 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 10:50:31.058 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-28 10:50:38.179 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 <== [Save Log Job] 2024-10-28 10:51:12.000 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 10:51:12.894 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 10:51:12.894 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 10:51:12.962 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 10:51:13.051 LOG.INFO EventService.cs Line:60 Register() - 客户端6e07e9be-4dd1-4845-9861-2f368c8b5685已连接 [Save Log Job] 2024-10-28 10:51:13.051 LOG.INFO EventService.cs Line:60 Register() - 客户端6e07e9be-4dd1-4845-9861-2f368c8b5685已连接 [Save Log Job] 2024-10-28 10:51:14.302 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 10:51:14.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 10:51:17.972 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 10:51:20.813 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 10:51:20.814 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 10:51:20.818 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 10:51:20.946 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 10:51:34.877 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-28 10:51:37.923 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 [Save Log Job] 2024-10-28 11:02:30.125 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-28 11:02:35.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 11:06:36.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 11:07:45.849 LOG.ERROR EventService.cs Line:46 FireEvent() - 给客户端6e07e9be-4dd1-4845-9861-2f368c8b5685发送事件失败，客户端被删除。 System.TimeoutException: 通过 http://www.w3.org/2005/08/addressing/anonymous 发送在 00:01:00 以后超时。分配给此操作的时间可能已经是更长超时的一部分。 ---> System.TimeoutException: 无法在分配的超时 00:01:00 内获得锁定。分配给该操作的时间可能已经是更长超时的一部分。 --- 内部异常堆栈跟踪的结尾 --- Server stack trace: 在 System.ServiceModel.Channels.TransportDuplexSessionChannel.OnSend(Message message, TimeSpan timeout) 在 System.ServiceModel.Channels.OutputChannel.Send(Message message, TimeSpan timeout) 在 System.ServiceModel.Dispatcher.DuplexChannelBinder.Send(Message message, TimeSpan timeout) 在 System.ServiceModel.Channels.ServiceChannel.Call(String action, Boolean oneway, ProxyOperationRuntime operation, Object[] ins, Object[] outs, TimeSpan timeout) 在 System.ServiceModel.Channels.ServiceChannelProxy.InvokeService(IMethodCallMessage methodCall, ProxyOperationRuntime operation) 在 System.ServiceModel.Channels.ServiceChannelProxy.Invoke(IMessage message) Exception rethrown at [0]: 在 System.Runtime.Remoting.Proxies.RealProxy.HandleReturnMessage(IMessage reqMsg, IMessage retMsg) 在 System.Runtime.Remoting.Proxies.RealProxy.PrivateInvoke(MessageData& msgData, Int32 type) 在 Aitex.Core.WCF.Interface.IEventServiceCallback.SendEvent(EventItem ev) 在 Aitex.Core.WCF.EventService.FireEvent(EventItem obj) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\EventService.cs:行号 40 [Save Log Job] 2024-10-28 11:07:45.878 LOG.INFO EventService.cs Line:60 Register() - 客户端6e07e9be-4dd1-4845-9861-2f368c8b5685已连接 [Save Log Job] 2024-10-28 11:11:45.379 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-28 11:18:54.238 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running <== [Save Log Job] 2024-10-28 11:36:04.149 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 11:36:05.015 LOG.INFO EventService.cs Line:60 Register() - 客户端3bc76f28-753f-4d8f-ac6d-a8c71305034c已连接 [Save Log Job] 2024-10-28 11:36:05.150 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 11:36:05.150 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 11:36:05.199 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 11:36:11.454 LOG.ERROR LOG.cs Line:51 Write() - System.ArgumentOutOfRangeException: Year, Month, and Day parameters describe an un-representable DateTime. 在 System.DateTime.DateToTicks(Int32 year, Int32 month, Int32 day) 在 System.DateTime..ctor(Int32 year, Int32 month, Int32 day, Int32 hour, Int32 minute, Int32 second) 在 Aitex.Core.RT.Device.Unit.IoPlcDateTime.get_CurrentDateTime() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Device\Unit\IoPlcDateTime.cs:行号 23 在 Aitex.Core.RT.Key.KeyManager.get_CurrentDateTime() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Key\KeyManager.cs:行号 46 在 Aitex.Core.RT.Key.KeyManager.get_LeftDays() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Key\KeyManager.cs:行号 38 在 Aitex.Core.RT.Key.KeyManager.OnTimer() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Key\KeyManager.cs:行号 166 [Save Log Job] 2024-10-28 11:36:12.032 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 11:36:16.836 LOG.ERROR InitRoutine.cs Line:129 LaunchMoudle() - 系统启动:IOLayer启动超时失败,超时时间为10秒 [Save Log Job] 2024-10-28 11:36:36.454 LOG.ERROR LOG.cs Line:51 Write() - System.ArgumentOutOfRangeException: Year, Month, and Day parameters describe an un-representable DateTime. 在 System.DateTime.DateToTicks(Int32 year, Int32 month, Int32 day) 在 System.DateTime..ctor(Int32 year, Int32 month, Int32 day, Int32 hour, Int32 minute, Int32 second) 在 Aitex.Core.RT.Device.Unit.IoPlcDateTime.get_CurrentDateTime() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Device\Unit\IoPlcDateTime.cs:行号 23 在 Aitex.Core.RT.Key.KeyManager.get_CurrentDateTime() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Key\KeyManager.cs:行号 46 在 Aitex.Core.RT.Key.KeyManager.get_LeftDays() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Key\KeyManager.cs:行号 38 在 Aitex.Core.RT.Key.KeyManager.OnTimer() 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\Key\KeyManager.cs:行号 166 [Save Log Job] 2024-10-28 11:36:42.282 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 11:37:40.602 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 11:37:40.603 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 11:37:40.607 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 11:37:40.714 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 11:37:46.267 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-28 11:37:49.275 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 [Save Log Job] 2024-10-28 14:42:09.046 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM。 <== [Save Log Job] 2024-10-28 14:53:54.082 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 14:53:54.981 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 14:53:54.981 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 14:53:57.398 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 14:53:57.460 LOG.INFO EventService.cs Line:60 Register() - 客户端691e0b55-d2da-4fda-b86f-ea4aff0bc5f7已连接 [Save Log Job] 2024-10-28 14:54:00.267 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 14:54:00.896 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 14:54:02.408 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 14:54:10.296 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-28 14:54:16.437 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 [Save Log Job] 2024-10-28 14:57:16.167 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-28 14:57:16.628 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 14:57:16.628 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 15:12:33.976 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 15:12:33.977 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 15:12:33.988 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 15:12:34.089 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 16:09:20.733 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running <== [Save Log Job] 2024-10-28 16:53:46.071 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 16:53:47.083 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 16:53:47.083 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 16:53:47.093 LOG.INFO EventService.cs Line:60 Register() - 客户端dd4b361c-cc05-4e33-9355-87a315fb0ef1已连接 [Save Log Job] 2024-10-28 16:53:47.093 LOG.INFO EventService.cs Line:60 Register() - 客户端dd4b361c-cc05-4e33-9355-87a315fb0ef1已连接 [Save Log Job] 2024-10-28 16:53:47.158 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 16:53:48.459 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 16:53:48.498 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 16:53:52.170 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 16:54:02.220 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 16:54:02.221 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 16:54:02.234 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 16:54:02.368 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 16:54:13.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-28 16:54:13.165 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-28 16:54:13.165 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-28 16:54:24.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-28 16:54:31.823 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 16:54:31.823 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 16:54:49.722 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241028165424-123 [Save Log Job] 2024-10-28 16:54:57.693 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-28 16:55:17.060 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-28 16:55:17.060 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-28 16:55:17.060 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-28 16:55:17.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-28 16:55:17.063 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-28 16:55:37.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-28 16:55:54.550 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System Can not run recipe：can not set chamber pumping open valve to open。 [Save Log Job] 2024-10-28 16:55:54.551 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System running failed [Save Log Job] 2024-10-28 16:55:54.552 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-28 16:55:54.583 LOG.WARN StateMachine.cs Line:163 Loop() - 状态机Chamber FSM未定义在状态Error时处理方法。 [Save Log Job] 2024-10-28 16:55:54.749 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 16:56:14.992 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 16:56:28.083 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-28 16:56:28.801 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241028165628-123 [Save Log Job] 2024-10-28 16:56:28.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 16:56:28.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 16:56:28.801 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-28 16:56:29.154 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-28 16:56:29.154 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-28 16:56:29.154 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-28 16:56:29.154 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-28 16:56:29.155 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-28 16:56:29.393 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-28 16:56:29.764 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-28 16:56:32.350 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-28 16:56:32.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.1 minitues。 [Save Log Job] 2024-10-28 16:56:32.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-28 16:56:32.647 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241028165628-123 [Save Log Job] 2024-10-28 16:56:32.647 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241028165628-123'' [Save Log Job] 2024-10-28 16:56:32.699 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028165628-123'' start run step 1：initial。 [Save Log Job] 2024-10-28 16:56:32.700 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-28 16:56:32.700 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-28 16:56:32.700 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-28 16:56:32.700 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-28 16:56:32.701 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-28 16:56:32.701 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-28 16:56:32.701 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-28 16:56:32.701 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-28 16:56:32.702 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-28 16:56:32.702 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-28 16:56:32.702 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-28 16:56:32.703 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-28 16:56:32.703 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-28 16:56:32.703 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-28 16:56:32.703 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-28 16:56:32.703 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-28 16:56:32.703 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-28 16:56:32.755 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-28 16:56:56.373 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-10-28 16:56:56.374 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-28 16:56:56.377 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-28 16:56:56.377 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241028165628-123 Start time：2024/10/28 16:56:32 End time：2024/10/28 16:56:56 Total time：0:0:23 [Save Log Job] 2024-10-28 16:56:56.378 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-28 16:56:56.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-28 16:56:58.415 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 16:57:06.518 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-28 16:57:06.576 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-28 16:57:14.725 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-28 16:57:14.785 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Start cycle purge, Loop 1 [Save Log Job] 2024-10-28 16:57:14.786 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, pumping pressure to 100 mTor [Save Log Job] 2024-10-28 16:57:14.843 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, pump delay 10 seconds [Save Log Job] 2024-10-28 16:57:16.799 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 16:57:24.901 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent pressure to 700000 mtor [Save Log Job] 2024-10-28 16:57:57.217 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-10-28 16:57:57.218 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-28 16:57:57.315 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 16:57:59.250 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber purge valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 16:57:59.250 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 16:58:11.808 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-28 16:58:15.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 16:58:15.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 16:58:15.585 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241028165811-123 [Save Log Job] 2024-10-28 16:58:15.586 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-28 16:58:21.048 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-28 16:58:21.049 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-28 16:58:21.049 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-28 16:58:21.049 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-28 16:58:21.049 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-28 16:58:22.521 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-28 16:58:24.605 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-28 16:58:27.949 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 <== [Save Log Job] 2024-10-28 17:21:15.084 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 17:21:16.031 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 17:21:16.031 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 17:21:16.085 LOG.INFO EventService.cs Line:60 Register() - 客户端914964a7-00c3-4b02-88f0-0905566a0088已连接 [Save Log Job] 2024-10-28 17:21:16.085 LOG.INFO EventService.cs Line:60 Register() - 客户端914964a7-00c3-4b02-88f0-0905566a0088已连接 [Save Log Job] 2024-10-28 17:21:16.100 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 17:21:17.366 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 17:21:17.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 17:21:27.078 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 <== [Save Log Job] 2024-10-28 17:24:41.132 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 17:24:42.075 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 17:24:42.075 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 17:24:42.122 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 17:24:42.268 LOG.INFO EventService.cs Line:60 Register() - 客户端a1acb052-2f10-41b8-be16-b5ea1f97b1f0已连接 [Save Log Job] 2024-10-28 17:24:43.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 17:24:43.565 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) <== [Save Log Job] 2024-10-28 17:25:42.889 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 17:25:43.605 LOG.INFO EventService.cs Line:60 Register() - 客户端8dd09a0f-010d-463b-8c63-aa844e6e8cc5已连接 [Save Log Job] 2024-10-28 17:25:43.605 LOG.INFO EventService.cs Line:60 Register() - 客户端8dd09a0f-010d-463b-8c63-aa844e6e8cc5已连接 [Save Log Job] 2024-10-28 17:25:43.804 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 17:25:43.805 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 17:25:43.848 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 17:25:44.919 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 17:25:45.198 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 17:25:48.859 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 17:25:56.778 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 17:25:56.779 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 17:25:56.784 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 17:25:56.933 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 17:26:03.121 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-28 17:26:03.122 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-28 17:26:03.122 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-28 17:30:13.781 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-28 17:30:16.631 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 17:30:16.631 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 17:30:16.636 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241028173013-123 [Save Log Job] 2024-10-28 17:30:16.636 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-28 17:30:16.690 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-28 17:30:16.690 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-28 17:30:16.690 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-28 17:30:16.691 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-28 17:30:16.692 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-28 17:30:16.753 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-28 17:30:17.925 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-28 17:31:08.217 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-28 17:31:08.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。 [Save Log Job] 2024-10-28 17:31:08.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-28 17:31:14.301 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241028173013-123 [Save Log Job] 2024-10-28 17:31:14.303 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241028173013-123'' [Save Log Job] 2024-10-28 17:31:14.355 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028173013-123'' start run step 1：initial。 [Save Log Job] 2024-10-28 17:31:14.356 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-28 17:31:14.356 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-28 17:31:14.357 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-28 17:31:14.357 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-28 17:31:14.357 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-28 17:31:14.357 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-28 17:31:14.358 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-28 17:31:14.358 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-28 17:31:14.359 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-28 17:31:14.359 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-28 17:31:14.359 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-28 17:31:14.359 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-28 17:31:14.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-28 17:31:14.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-28 17:31:14.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-28 17:31:14.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-28 17:31:14.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-28 17:31:14.412 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-28 17:31:44.444 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028173013-123'' end step 1 [Save Log Job] 2024-10-28 17:31:44.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028173013-123'' start run step 2：initial。 [Save Log Job] 2024-10-28 17:31:44.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-28 17:31:44.494 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-28 17:31:44.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-28 17:31:44.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-28 17:31:44.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-28 17:31:44.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-28 17:31:44.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-28 17:31:44.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。 [Save Log Job] 2024-10-28 17:31:44.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-28 17:31:44.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-28 17:31:44.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-28 17:31:44.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-28 17:31:44.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-28 17:31:44.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-28 17:31:44.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-28 17:31:44.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-28 17:31:44.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-28 17:31:54.898 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds. [Save Log Job] 2024-10-28 17:31:59.840 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-28 17:31:59.844 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-28 17:31:59.845 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241028173013-123 Start time：2024/10/28 17:31:14 End time：2024/10/28 17:31:59 Total time：0:0:45 [Save Log Job] 2024-10-28 17:31:59.845 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-28 17:32:00.003 LOG.ERROR YZQZFabAuto.cs Line:112 SaveMachineErrorRecord() - MES|5126|System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds. [Save Log Job] 2024-10-28 17:32:00.038 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 17:32:01.851 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 17:32:01.852 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 17:32:01.852 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 17:32:01.852 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 17:45:06.217 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-10-28 17:45:06.218 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 17:45:07.845 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-10-28 17:45:07.846 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 17:47:24.043 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file 123 save completed [Save Log Job] 2024-10-28 17:47:24.043 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information [Save Log Job] 2024-10-28 17:47:31.480 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file 123 save completed [Save Log Job] 2024-10-28 17:47:31.480 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information [Save Log Job] 2024-10-28 17:47:37.764 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 17:47:43.062 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-28 17:47:43.065 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241028174743-123 [Save Log Job] 2024-10-28 17:47:43.065 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-28 17:47:43.115 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-28 17:47:43.115 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-28 17:47:43.115 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-28 17:47:43.115 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-28 17:47:43.116 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-28 17:47:43.173 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-28 17:47:43.176 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 17:47:43.229 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-28 17:47:52.879 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-28 17:47:52.935 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。 [Save Log Job] 2024-10-28 17:47:52.935 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-28 17:47:52.935 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241028174743-123 [Save Log Job] 2024-10-28 17:47:52.935 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241028174743-123'' [Save Log Job] 2024-10-28 17:47:52.985 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028174743-123'' start run step 1：initial。 [Save Log Job] 2024-10-28 17:47:52.985 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-28 17:47:52.985 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-28 17:47:52.985 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-28 17:47:52.985 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-28 17:47:52.985 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-28 17:47:52.985 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-28 17:47:52.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-28 17:47:52.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-28 17:47:52.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-28 17:47:52.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-28 17:47:52.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-28 17:47:52.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-28 17:47:52.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-28 17:47:52.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-28 17:47:52.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-28 17:47:52.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-28 17:47:52.986 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-28 17:47:53.037 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-28 17:48:23.074 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028174743-123'' end step 1 [Save Log Job] 2024-10-28 17:48:23.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-28 17:48:23.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241028174743-123 Start time：2024/10/28 17:47:52 End time：2024/10/28 17:48:23 Total time：0:0:30 [Save Log Job] 2024-10-28 17:48:23.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-28 17:48:49.258 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 17:48:49.259 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 17:48:49.259 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 17:48:49.259 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 17:48:49.259 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 17:48:49.259 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 17:48:49.306 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-28 17:48:59.370 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-28 17:48:59.428 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-28 17:49:09.199 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-28 17:49:09.257 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-28 17:49:11.293 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 17:49:12.628 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-28 17:49:15.702 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-28 17:50:05.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-28 17:50:06.594 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.7 minitues [Save Log Job] 2024-10-28 17:50:06.594 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-28 17:50:06.595 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-28 17:50:06.710 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged <== [Save Log Job] 2024-10-28 18:01:40.302 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 18:01:41.017 LOG.INFO EventService.cs Line:60 Register() - 客户端26b42bf8-4653-409a-b6fd-6dd7193b97d1已连接 [Save Log Job] 2024-10-28 18:01:41.225 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 18:01:41.225 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 18:01:41.278 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 18:01:42.384 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 18:01:42.642 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 18:01:46.290 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 18:01:50.072 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 18:01:50.073 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 18:01:50.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 18:01:50.213 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 18:15:35.989 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-28 18:15:41.178 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 18:15:41.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 18:20:33.554 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-28 19:59:15.380 LOG.INFO EventService.cs Line:60 Register() - 客户端6694715b-9e60-4601-a891-fac396988dfe已连接 [Save Log Job] 2024-10-28 19:59:15.380 LOG.INFO EventService.cs Line:60 Register() - 客户端6694715b-9e60-4601-a891-fac396988dfe已连接 [Save Log Job] 2024-10-28 19:59:16.831 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 19:59:16.879 LOG.ERROR EventService.cs Line:46 FireEvent() - 给客户端26b42bf8-4653-409a-b6fd-6dd7193b97d1发送事件失败，客户端被删除。 System.ServiceModel.CommunicationObjectAbortedException: 无法将通信对象 System.ServiceModel.Channels.ServiceChannel 用于通信，因为它已经被中止。 Server stack trace: 在 System.ServiceModel.Channels.CommunicationObject.ThrowIfDisposedOrNotOpen() 在 System.ServiceModel.Channels.ServiceChannel.Call(String action, Boolean oneway, ProxyOperationRuntime operation, Object[] ins, Object[] outs, TimeSpan timeout) 在 System.ServiceModel.Channels.ServiceChannelProxy.InvokeService(IMethodCallMessage methodCall, ProxyOperationRuntime operation) 在 System.ServiceModel.Channels.ServiceChannelProxy.Invoke(IMessage message) Exception rethrown at [0]: 在 System.Runtime.Remoting.Proxies.RealProxy.HandleReturnMessage(IMessage reqMsg, IMessage retMsg) 在 System.Runtime.Remoting.Proxies.RealProxy.PrivateInvoke(MessageData& msgData, Int32 type) 在 Aitex.Core.WCF.Interface.IEventServiceCallback.SendEvent(EventItem ev) 在 Aitex.Core.WCF.EventService.FireEvent(EventItem obj) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\EventService.cs:行号 40 <== [Save Log Job] 2024-10-28 20:00:53.074 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 20:00:53.939 LOG.INFO EventService.cs Line:60 Register() - 客户端84676f5f-8610-4d6e-8b7b-832804b0d59c已连接 [Save Log Job] 2024-10-28 20:00:54.059 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:00:54.059 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:00:54.134 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 20:00:55.399 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:00:55.438 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 20:00:59.145 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 20:01:07.172 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 20:01:07.173 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:01:07.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 20:01:07.315 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:01:30.564 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-28 20:01:34.572 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 [Save Log Job] 2024-10-28 20:04:55.460 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-28 20:04:56.599 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:04:56.601 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:06:04.231 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-28 20:06:07.474 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 <== [Save Log Job] 2024-10-28 20:07:23.816 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 20:07:24.565 LOG.INFO EventService.cs Line:60 Register() - 客户端b6d00869-be6f-419d-9fe5-f03dd034febd已连接 [Save Log Job] 2024-10-28 20:07:24.821 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:07:24.821 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:07:24.866 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 20:07:26.205 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:07:26.439 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 20:07:29.878 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 20:07:41.570 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 20:07:41.571 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:07:41.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 20:07:41.696 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:07:49.689 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-28 20:07:55.013 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 <== [Save Log Job] 2024-10-28 20:28:08.745 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 20:28:09.626 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:28:09.627 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:28:09.679 LOG.INFO EventService.cs Line:60 Register() - 客户端4504150e-08bd-42d7-808e-181663398d23已连接 [Save Log Job] 2024-10-28 20:28:09.699 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start <== [Save Log Job] 2024-10-28 20:32:52.032 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 20:32:52.957 LOG.INFO EventService.cs Line:60 Register() - 客户端804081b5-c8bc-4ac1-9813-a7234ea2559f已连接 [Save Log Job] 2024-10-28 20:32:53.014 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:32:53.015 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:32:53.093 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 20:32:54.358 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 20:32:54.483 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:32:58.103 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 20:33:02.253 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 20:33:02.254 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:33:02.259 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 20:33:02.391 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:33:08.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-28 20:33:08.069 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-28 20:33:08.069 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-28 20:33:22.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-28 20:33:22.770 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241028203322-123 [Save Log Job] 2024-10-28 20:33:22.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-28 20:33:30.331 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:33:31.715 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:33:32.683 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-28 20:33:32.683 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-28 20:33:32.683 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-28 20:33:33.020 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 <== [Save Log Job] 2024-10-28 20:37:44.529 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 20:37:45.465 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:37:45.466 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:37:45.475 LOG.INFO EventService.cs Line:60 Register() - 客户端74398958-509e-4ab6-93b2-b90dfa9646bc已连接 [Save Log Job] 2024-10-28 20:37:45.531 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 20:37:46.883 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 20:37:46.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:37:50.543 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 <== [Save Log Job] 2024-10-28 20:38:55.026 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 20:38:55.806 LOG.INFO EventService.cs Line:60 Register() - 客户端7d31cb08-3e08-40c8-9eeb-7eb16a6b7dc3已连接 [Save Log Job] 2024-10-28 20:38:55.989 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:38:55.991 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:38:56.061 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 20:38:57.293 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 20:38:57.409 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:39:01.075 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 20:39:05.210 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 20:39:05.211 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:39:05.216 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 20:39:05.347 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:39:10.328 LOG.INFO LOG.cs Line:61 Write() - user login server [Save Log Job] 2024-10-28 20:39:14.622 LOG.INFO LOG.cs Line:61 Write() - 用户登入后台界面 <== [Save Log Job] 2024-10-28 20:40:10.845 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 20:40:11.642 LOG.INFO EventService.cs Line:60 Register() - 客户端7c0c3cf5-a327-4d92-95f7-c8538b166122已连接 [Save Log Job] 2024-10-28 20:40:11.731 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:40:11.731 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:40:11.807 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 20:40:13.076 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 20:40:13.161 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:40:13.190 LOG.ERROR DatabaseManager.cs Line:70 PeriodicRun() - 执行数据库操作错误, Backend sent unrecognized response type: ?, Insert into "EventManager"("ID","EventEnum","Type","Source","Description","Level","OccurTime") values(0,'EquipmentStatusChanged','EventUI_Notify','Event','EventEquipmentStatusChanged','Information','2024-10-28 20:40:13.159') [Save Log Job] 2024-10-28 20:40:13.213 LOG.ERROR PostgresqlDB.cs Line:113 ExecuteDataset() - 执行查询出错，SELECT * FROM "RecipeRunHistory" where "ProcessBeginTime" >= '2024/10/28 00:00:00.000' and "ProcessBeginTime" <= '2024/10/28 23:59:59.999' order by "ProcessBeginTime" ASC; System.ObjectDisposedException: 无法访问已关闭的流。 在 System.IO.__Error.StreamIsClosed() 在 System.IO.BufferedStream.Read(Byte[] array, Int32 offset, Int32 count) 在 Npgsql.PGUtil.CheckedStreamRead(Stream stream, Byte[] buffer, Int32 offset, Int32 size) 在 Npgsql.PGUtil.ReadInt32(Stream stream) 在 Npgsql.StringRowReaderV3.GetThisFieldCount() 在 Npgsql.StringRowReaderV3.ReadNext() 在 Npgsql.RowReader.GetNext() 在 Npgsql.ForwardsOnlyRow.get_Item(Int32 index) 在 Npgsql.ForwardsOnlyDataReader.GetProviderSpecificValue(Int32 ordinal) 在 Npgsql.ForwardsOnlyDataReader.GetValue(Int32 Index) 在 Npgsql.CachingDataReader..ctor(ForwardsOnlyDataReader reader, CommandBehavior behavior) 在 Npgsql.NpgsqlCommand.ExecuteReader(CommandBehavior cb) 在 Npgsql.NpgsqlCommand.ExecuteDbDataReader(CommandBehavior behavior) 在 System.Data.Common.DbCommand.System.Data.IDbCommand.ExecuteReader(CommandBehavior behavior) 在 System.Data.Common.DbDataAdapter.FillInternal(DataSet dataset, DataTable[] datatables, Int32 startRecord, Int32 maxRecords, String srcTable, IDbCommand command, CommandBehavior behavior) 在 System.Data.Common.DbDataAdapter.Fill(DataSet dataSet, Int32 startRecord, Int32 maxRecords, String srcTable, IDbCommand command, CommandBehavior behavior) 在 System.Data.Common.DbDataAdapter.Fill(DataSet dataSet) 在 Aitex.Core.RT.DBCore.PostgresqlDB.ExecuteDataset(String cmdText, Object[] p) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\RT\DBCore\PostgresqlDB.cs:行号 107 [Save Log Job] 2024-10-28 20:40:16.818 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 20:40:20.715 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 20:40:20.716 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:40:20.721 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 20:40:20.862 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:40:23.843 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-28 20:40:23.844 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-28 20:40:23.845 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-28 20:40:28.068 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-28 20:40:28.090 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241028204028-123 [Save Log Job] 2024-10-28 20:40:28.090 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-28 20:40:30.933 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:40:35.965 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:40:36.356 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-28 20:40:36.359 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-28 20:40:36.359 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-28 20:40:37.749 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-28 20:40:37.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-28 20:40:43.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-28 20:40:54.196 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-28 20:40:58.745 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System Can not run recipe：can not set chamber pumping open valve to open。 [Save Log Job] 2024-10-28 20:41:01.615 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System running failed <== [Save Log Job] 2024-10-28 20:42:21.171 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 20:42:21.988 LOG.INFO EventService.cs Line:60 Register() - 客户端5d8d3d54-b398-40de-9fe0-e8369cc6f853已连接 [Save Log Job] 2024-10-28 20:42:22.010 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:42:22.011 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:42:22.086 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 20:42:23.440 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 20:42:23.466 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:42:27.100 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 <== [Save Log Job] 2024-10-28 20:50:58.263 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 20:50:59.154 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:50:59.156 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 20:50:59.231 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 20:50:59.275 LOG.INFO EventService.cs Line:60 Register() - 客户端6029b721-aedd-4482-b5c5-9611fcb85df2已连接 [Save Log Job] 2024-10-28 20:51:00.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:51:00.732 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 20:51:04.248 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 20:51:11.502 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 20:51:11.503 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:51:11.510 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 20:51:11.637 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 20:51:15.206 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-28 20:51:15.207 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-28 20:51:15.208 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-28 20:51:22.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-28 20:51:22.467 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241028205122-123 [Save Log Job] 2024-10-28 20:51:22.467 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-28 20:51:22.489 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 20:51:22.521 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-28 20:51:22.521 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-28 20:51:22.521 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-28 20:51:22.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-28 20:51:22.523 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-28 20:51:22.586 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-28 20:51:24.638 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-28 20:51:24.919 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-28 20:51:59.791 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-28 20:51:59.851 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-28 20:51:59.851 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-28 20:51:59.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241028205122-123 [Save Log Job] 2024-10-28 20:51:59.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241028205122-123'' [Save Log Job] 2024-10-28 20:51:59.905 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028205122-123'' start run step 1：initial。 [Save Log Job] 2024-10-28 20:51:59.906 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-28 20:51:59.906 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-28 20:51:59.906 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-28 20:51:59.907 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-28 20:51:59.907 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-28 20:51:59.907 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-28 20:51:59.908 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-28 20:51:59.908 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-28 20:51:59.908 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-28 20:51:59.908 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-28 20:51:59.908 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-28 20:51:59.909 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-28 20:51:59.909 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-28 20:51:59.909 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-28 20:51:59.909 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-28 20:51:59.909 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-28 20:51:59.909 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-28 20:51:59.961 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-28 20:52:29.965 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028205122-123'' end step 1 [Save Log Job] 2024-10-28 20:52:29.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-28 20:52:29.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241028205122-123 Start time：2024/10/28 20:51:59 End time：2024/10/28 20:52:29 Total time：0:0:30 [Save Log Job] 2024-10-28 20:52:29.968 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-28 20:52:30.020 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-28 20:53:10.850 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 20:53:10.850 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 20:53:10.853 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 20:53:10.870 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 20:53:31.782 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 20:53:31.783 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 20:53:36.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-28 20:53:38.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-28 20:57:31.093 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-28 20:57:31.151 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-28 20:57:33.200 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 20:57:34.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-28 20:57:37.564 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-28 20:58:27.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-28 20:58:28.505 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 6.0 minitues [Save Log Job] 2024-10-28 20:58:28.505 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-28 20:58:28.506 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-28 20:58:28.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 21:02:33.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-28 21:02:33.938 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241028210233-123 [Save Log Job] 2024-10-28 21:02:33.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-28 21:02:33.990 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-28 21:02:33.990 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-28 21:02:33.990 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-28 21:02:33.991 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-28 21:02:33.991 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-28 21:02:34.003 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 21:02:34.047 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-28 21:02:36.092 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-28 21:02:38.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-28 21:03:24.528 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-28 21:03:24.584 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。 [Save Log Job] 2024-10-28 21:03:24.584 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-28 21:03:24.584 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241028210233-123 [Save Log Job] 2024-10-28 21:03:24.584 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241028210233-123'' [Save Log Job] 2024-10-28 21:03:24.635 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028210233-123'' start run step 1：initial。 [Save Log Job] 2024-10-28 21:03:24.635 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-28 21:03:24.635 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-28 21:03:24.635 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-28 21:03:24.636 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-28 21:03:24.636 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-28 21:03:24.636 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-28 21:03:24.636 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-28 21:03:24.636 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-28 21:03:24.636 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-28 21:03:24.636 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-28 21:03:24.636 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-28 21:03:24.637 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-28 21:03:24.637 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-28 21:03:24.637 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-28 21:03:24.637 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-28 21:03:24.637 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-28 21:03:24.637 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-28 21:03:24.687 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-28 21:03:54.692 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028210233-123'' end step 1 [Save Log Job] 2024-10-28 21:03:54.693 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-28 21:03:54.693 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241028210233-123 Start time：2024/10/28 21:03:24 End time：2024/10/28 21:03:54 Total time：0:0:30 [Save Log Job] 2024-10-28 21:03:54.693 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-28 21:04:04.000 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-28 21:04:04.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:04:04.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:04:04.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:04:04.000 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:04:04.002 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:04:04.003 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:04:15.365 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-28 21:04:16.093 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-28 21:05:49.064 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-28 21:05:49.121 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-28 21:05:51.135 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:05:52.495 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-28 21:05:55.568 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-28 21:06:45.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-28 21:06:46.529 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 2.9 minitues [Save Log Job] 2024-10-28 21:06:46.530 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-28 21:06:53.264 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-28 21:06:53.465 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged <== [Save Log Job] 2024-10-28 21:10:59.861 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-28 21:11:00.817 LOG.INFO EventService.cs Line:60 Register() - 客户端6de8a9a5-aec5-4351-97fa-b0edfa2cbe7f已连接 [Save Log Job] 2024-10-28 21:11:00.817 LOG.INFO EventService.cs Line:60 Register() - 客户端6de8a9a5-aec5-4351-97fa-b0edfa2cbe7f已连接 [Save Log Job] 2024-10-28 21:11:00.826 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 21:11:00.827 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-28 21:11:00.896 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-28 21:11:02.254 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 21:11:02.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-28 21:11:05.908 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -4 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-28 21:11:09.933 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-28 21:11:09.934 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 21:11:09.939 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-28 21:11:10.069 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-28 21:11:17.945 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-28 21:11:17.947 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-28 21:11:17.947 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-28 21:11:19.097 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-28 21:11:19.121 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241028211119-123 [Save Log Job] 2024-10-28 21:11:19.121 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-28 21:11:19.174 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-28 21:11:19.174 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-28 21:11:19.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-28 21:11:19.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-28 21:11:19.176 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-28 21:11:19.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-28 21:11:19.302 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 21:11:21.285 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-28 21:11:22.745 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-28 21:11:57.636 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-28 21:11:57.693 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-28 21:11:57.693 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-28 21:11:57.695 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241028211119-123 [Save Log Job] 2024-10-28 21:11:57.695 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241028211119-123'' [Save Log Job] 2024-10-28 21:11:57.747 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028211119-123'' start run step 1：initial。 [Save Log Job] 2024-10-28 21:11:57.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-28 21:11:57.748 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-28 21:11:57.749 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-28 21:11:57.749 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-28 21:11:57.749 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-28 21:11:57.749 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-28 21:11:57.750 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-28 21:11:57.750 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-28 21:11:57.750 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-28 21:11:57.750 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-28 21:11:57.750 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-28 21:11:57.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-28 21:11:57.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-28 21:11:57.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-28 21:11:57.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-28 21:11:57.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-28 21:11:57.751 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-28 21:11:57.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-28 21:12:27.824 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028211119-123'' end step 1 [Save Log Job] 2024-10-28 21:12:27.826 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-28 21:12:27.826 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241028211119-123 Start time：2024/10/28 21:11:57 End time：2024/10/28 21:12:27 Total time：0:0:30 [Save Log Job] 2024-10-28 21:12:27.827 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-28 21:12:27.880 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-28 21:12:29.870 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:12:29.870 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:12:29.871 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:12:29.871 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:12:29.871 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:12:29.871 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:12:37.990 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-28 21:12:38.048 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-28 21:12:43.897 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-28 21:12:43.955 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-28 21:12:45.974 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:12:47.321 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-28 21:12:50.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-28 21:13:40.489 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-28 21:13:41.330 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-28 21:13:41.330 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-28 21:13:47.869 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-28 21:13:54.067 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 21:14:10.464 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-28 21:14:10.466 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241028211410-123 [Save Log Job] 2024-10-28 21:14:10.466 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-28 21:14:10.514 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 21:14:10.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-28 21:14:10.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-28 21:14:10.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-28 21:14:10.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-28 21:14:10.517 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-28 21:14:10.574 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-28 21:14:12.525 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-28 21:15:02.899 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-28 21:15:02.956 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。 [Save Log Job] 2024-10-28 21:15:02.956 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-28 21:15:02.956 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241028211410-123 [Save Log Job] 2024-10-28 21:15:02.956 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241028211410-123'' [Save Log Job] 2024-10-28 21:15:03.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028211410-123'' start run step 1：initial。 [Save Log Job] 2024-10-28 21:15:03.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-28 21:15:03.006 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-28 21:15:03.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-28 21:15:03.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-28 21:15:03.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-28 21:15:03.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-28 21:15:03.006 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-28 21:15:03.007 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-28 21:15:03.007 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-28 21:15:03.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-28 21:15:03.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-28 21:15:03.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-28 21:15:03.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-28 21:15:03.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-28 21:15:03.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-28 21:15:03.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-28 21:15:03.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-28 21:15:03.059 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-28 21:15:33.087 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241028211410-123'' end step 1 [Save Log Job] 2024-10-28 21:15:33.089 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-28 21:15:33.089 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241028211410-123 Start time：2024/10/28 21:15:02 End time：2024/10/28 21:15:33 Total time：0:0:30 [Save Log Job] 2024-10-28 21:15:33.089 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-28 21:15:33.140 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-28 21:15:35.134 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:15:35.134 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:15:35.134 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:15:35.134 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:15:35.135 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:15:35.135 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:15:43.205 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-28 21:15:43.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-28 21:15:49.129 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-28 21:15:49.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-28 21:15:51.220 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-28 21:15:52.564 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-28 21:15:55.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-28 21:16:45.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-28 21:16:46.549 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-28 21:16:46.549 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-28 21:16:49.334 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-28 21:16:52.052 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-28 21:16:54.100 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged