【批号】,【机台号】,【程序名称】,【工序】,【开始时间】,【结束时间】,【氧气浓度】,【腔体压力】,【功率】
SFC240912810/EFC241014689,22,CACB,,10/31/2024 3:07:06 PM,,0.02533142,50000,0
SFC240912810/EFC241014689,22,CACB,,,,0.02533142,50000,0
SFC240912810/EFC241014689,22,CACB,,,,0.1832978,40008,0
SFC240912810/EFC241014689,22,CACB,,,,0.7109631,25007,0
SFC240912810/EFC241014689,22,CACB,,,,0.5419938,15019,0
SFC240912810/EFC241014689,22,CACB,,,,0.9895844,94,0
SFC240912810/EFC241014689,22,CACB,,,,42.47215,99,0
SFC240912810/EFC241014689,22,CACB,,,,45.34235,105,0
SFC240912810/EFC241014689,22,CACB,,,,45.79973,104,18
SFC240912810/EFC241014689,22,CACB,,,10/31/2024 3:08:18 PM,45.79973,104,18