【批号】,【机台号】,【程序名称】,【工序】,【开始时间】,【结束时间】,【氧气浓度】,【腔体压力】,【功率】
SFC240912810/EFC241014689/,22,CACB,,10/31/2024 2:01:01 PM,,0.02933318,50000,0
SFC240912810/EFC241014689/,22,CACB,,,,0.02933318,50000,0
SFC240912810/EFC241014689/,22,CACB,,,,0.2658503,40000,0
SFC240912810/EFC241014689/,22,CACB,,,,0.5994235,29994,0
SFC240912810/EFC241014689/,22,CACB,,,,0.114037,15009,0
SFC240912810/EFC241014689/,22,CACB,,,,0.9532794,99,0
SFC240912810/EFC241014689/,22,CACB,,,,41.73299,100,0
SFC240912810/EFC241014689/,22,CACB,,,,45.0981,109,0
SFC240912810/EFC241014689/,22,CACB,,,,45.38303,93,18
SFC240912810/EFC241014689/,22,CACB,,,10/31/2024 2:02:18 PM,45.38303,93,18