【批号】,【机台号】,【程序名称】,【工序】,【开始时间】,【结束时间】,【氧气浓度】,【腔体压力】,【功率】
SFC240912810/,22,CACB,,10/31/2024 1:27:36 PM,,0.6324613,50000,0
SFC240912810/,22,CACB,,,,0.6324613,50000,0
SFC240912810/,22,CACB,,,,0.6363637,39992,0
SFC240912810/,22,CACB,,,,0.98515,24987,0
SFC240912810/,22,CACB,,,,0.9371312,14987,0
SFC240912810/,22,CACB,,,,0.9761189,94,0
SFC240912810/,22,CACB,,,,41.39621,91,0
SFC240912810/,22,CACB,,,,45.87216,95,0
SFC240912810/,22,CACB,,,,45.89563,103,18
SFC240912810/,22,CACB,,,10/31/2024 1:28:48 PM,45.89563,103,18