【批号】,【机台号】,【程序名称】,【工序】,【开始时间】,【结束时间】,【氧气浓度】,【腔体压力】,【功率】
SFC240912810/,22,CACB,,10/31/2024 12:33:15 PM,,0.2997827,50000,0
SFC240912810/,22,CACB,,,,0.2997827,50000,0
SFC240912810/,22,CACB,,,,0.2966487,39987,0
SFC240912810/,22,CACB,,,,0.464701,24989,0
SFC240912810/,22,CACB,,,,0.8780868,14986,0
SFC240912810/,22,CACB,,,,0.4423269,98,0
SFC240912810/,22,CACB,,,,42.30238,94,0
SFC240912810/,22,CACB,,,,45.71424,96,0
SFC240912810/,22,CACB,,,,25.32774,100,0
SFC240912810/,22,CACB,,,,25.32774,100,0
SFC240912810/,22,CACB,,,,0.5787153,106,0
SFC240912810/,22,CACB,,,,0.2163341,90,0
SFC240912810/,22,CACB,,,,0.03357404,5115,0
SFC240912810/,22,CACB,,,,0.2478927,15116,0
SFC240912810/,22,CACB,,,,0.9172353,30103,0
SFC240912810/,22,CACB,,,,0.1972716,40095,0
SFC240912810/,22,CACB,,,,0.1355672,55079,0
SFC240912810/,22,CACB,,,10/31/2024 12:36:15 PM,0.5421697,65077,0