【批号】,【机台号】,【程序名称】,【工序】,【开始时间】,【结束时间】,【氧气浓度】,【腔体压力】,【功率】 ,22,123,,10/30/2024 3:24:58 PM,,0.6780115,50000,0 ,22,123,,,,0.6780115,50000,0 ,22,123,,,,0.6012754,39984,0 ,22,123,,,,0.8957508,24981,0 ,22,123,,,,0.3727953,14975,0 ,22,123,,,,0.6426283,98,0 ,22,123,,,,41.77428,98,0 ,22,123,,,,45.29427,101,0 ,22,123,,,,25.35079,103,0 ,22,123,,,,0.10058,92,0 ,22,123,,,,0.3005743,94,0 ,22,123,,,,0.4651223,15098,0 ,22,123,,,,0.999202,25099,0 ,22,123,,,,0.7887723,40095,0 ,22,123,,,,0.81202,50091,0 ,22,123,,,,0.48349,65085,0 ,22,123,,,10/30/2024 3:27:20 PM,0.48349,65085,0