0 true true false false 0 0 true true false false 0 0 sec 10 10 0 100 0 0 sec 10 10 0 100 0 0 sec 10 10 0 100 0 0 true false false false 0 0 false false false false 0 0 false false false false 0 0 s 500 100 1 756000 0 0 s 10 10 1 3000 0 0 s 50 50 3 3000 0 0 s 300 10 1 3000 0 0 s 60 10 1 300 0 0 mTorr 1000 10 1 756000 0 0 w 1 10 0 1000 0 0 s 1 10 1 3000 0 0 w 1000 10 0 1000 0 0 s 30 30 1 300 0 0 1 1 1 2 0 0 true true false false 0 0 1 1 0 99 0 0 1 1 0 1 0 0 1 1 0 1 0 0 50 50 0 100 0 0 50 50 0 100 0 0 true true false false 0 0 2017-05-12 12:30:15 2017-05-12 12:30:15 0 s 0.03891115694212964 0 0 2147483647 0 0 s 0.038911156868055567 0 0 2147483647 0 0 days 30 30 0 365 0 0 true true false false 0 0 2017-05-12 12:30:15 2017-05-12 12:30:15 0 s 6.3573663615705982 0 0 2147483647 0 0 s 6.3573663622036989 0 0 2147483647 0 0 days 30 30 0 365 0 0 true true false false 0 0 mTorr 1000 1000 0 3000 0 0 ms 3000 3000 0 36000000 0 0 true true false false 0 0 false false false false 0 0 127.0.0.1 127.0.0.1 0 22 0 0 稷以打胶机 0 0 http://192.168.1.207:86 http://192.168.1.207:86/swagger 0 \\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder \\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder 0 true true false false 0 0 true true false false 0 0 1 12 1 50 0 0 18 18 1 100 0 0 5 5 1 100 0 0 1 12 1 50 0 0 18 18 1 100 0 0 1 1 1 10 0 0 true true false false 0 0 false true false false 0 0 false true false false 0 0 true true false false 0 0 w 1200 1200 100 9999999 0 0 1 1 0 999 0 0 1 1 0 9999999 0 0 Gas7 Gas1 0 true true false false 0 0 sccm 100 100 0 9999 0 0 1 1 0 9999 0 0 true true false false 0 0 sccm 100 100 0 9999 0 0 s 10 10 0 9999 0 0 sccm 0 0 0 999999 0 0 mTorr 50 50 0 999999 0 0 mTorr 50 50 0 999999 0 0 s 30 30 0 999999 0 0 s 120 120 0 999999 0 0 1 1 0 9999999 0 0 Gas2 Gas2 0 true true false false 0 0 sccm 100 100 0 9999 0 0 1 1 0 9999 0 0 true true false false 0 0 sccm 100 100 0 9999 0 0 s 10 10 0 9999 0 0 sccm 0 0 0 999999 0 0 mTorr 50 50 0 999999 0 0 mTorr 50 50 0 999999 0 0 s 30 30 0 999999 0 0 s 120 120 0 999999 0 0 1 1 0 9999999 0 0 O2 Gas3 0 true true false false 0 0 sccm 100 100 0 9999 0 0 1 1 0 9999 0 0 true true false false 0 0 sccm 100 100 0 9999 0 0 s 10 10 0 9999 0 0 sccm 0 0 0 999999 0 0 mTorr 50 50 0 999999 0 0 mTorr 50 50 0 999999 0 0 s 30 30 0 999999 0 0 s 120 120 0 999999 0 0 1 1 0 9999999 0 0 Gas4 Gas4 0 true true false false 0 0 sccm 100 100 0 9999 0 0 1 1 0 9999 0 0 true true false false 0 0 sccm 100 100 0 9999 0 0 s 10 10 0 9999 0 0 sccm 0 0 0 999999 0 0 mTorr 50 50 0 999999 0 0 mTorr 50 50 0 999999 0 0 s 30 30 0 999999 0 0 s 120 120 0 999999 0 0 1 1 0 9999999 0 0 Gas5 Gas5 0 true true false false 0 0 sccm 100 100 0 9999 0 0 1 1 0 9999 0 0 true true false false 0 0 sccm 100 100 0 9999 0 0 s 10 10 0 9999 0 0 sccm 0 0 0 999999 0 0 mTorr 50 50 0 999999 0 0 mTorr 50 50 0 999999 0 0 s 30 30 0 999999 0 0 s 120 120 0 999999 0 0 1 1 0 9999999 0 0 mTorr 50 50 0 999999 0 0 mTorr 50 50 0 999999 0 0 s 30 30 0 999999 0 0 s 120 120 0 999999 0 0 mTorr 50 50 0 999999 0 0 mTorr 50 50 0 999999 0 0 s 30 30 0 999999 0 0 s 120 120 0 999999 0 0 Vapor1 Vapor1 0 true true false false 0 0 true true false false 0 0 sccm 100 100 0 9999 0 0 1 1 0 9999 0 0 true true false false 0 0 sccm 100 100 0 9999 0 0 s 10 10 0 9999 0 0 sccm 0 0 0 999999 0 0 Vapor2 Vapor2 0 true true false false 0 0 true true false false 0 0 sccm 100 100 0 9999 0 0 1 1 0 9999 0 0 true true false false 0 0 sccm 100 100 0 9999 0 0 s 10 10 0 9999 0 0 sccm 0 0 0 999999 0 0 Vapor3 Vapor3 0 true true false false 0 0 true true false false 0 0 sccm 100 100 0 9999 0 0 1 1 0 9999 0 0 true true false false 0 0 sccm 100 100 0 9999 0 0 s 10 10 0 9999 0 0 sccm 0 0 0 999999 0 0 true true false false 0 0 true true false false 0 0 false false false false 0 0 true true false false 0 0 true true false false 0 0 mTorr 100000 100000 100 9999999 0 0 true true false false 0 0 mTorr 0 0 0 9999999 0 0 mTorr 1 1 0.01 1 0 0 s 30 30 0 9999999 0 0 s 300 300 0 9999999 0 0 true true false false 0 0 slm 0 0 0 9999999 0 0 slm 999999 999999 1 9999999 0 0 s 30 30 0 9999999 0 0 s 300 300 0 9999999 0 0 s 600 600 0 9999999 0 0 Torr 100 100 10 1000 0 0 mTorr 500000 500000 10 999999999 0 0 mTorr 100000 100000 1 9999999 0 0 false false false false 0 0 0 0 0 0 0 0 false false false false 0 0 s 120 10 1 3000 0 0 s 120 10 1 3000 0 0 s 10 10 1 300 0 0 s 10 10 1 300 0 0 mTorr 100 100 10 756000 0 0 mTorr 700000 700000 100 756000 0 0 3 3 0 30 0 0 s 10 10 0 9999 0 0 ℃ 10 10 0 9999 0 0 s 10 10 0 9999 0 0 ℃ 80 80 0 9999 0 0 s 0 0 0 99 0 0 s 0 0 0 99 0 0 true true false false 0 0 ℃ 10 10 0 999 0 0 ℃ 80 80 0 999 0 0 s 10 10 0 999 0 0 s 10 10 0 999 0 0 s 900 900 0 999999 0 0 s 600 600 0 999999 0 0 slm 0 0 0 9999 0 0 slm 999 999 0 9999 0 0 s 15 15 0 9999 0 0 s 30 30 0 9999 0 0 slm 0 0 0 9999 0 0 slm 999 999 0 9999 0 0 s 15 15 0 9999 0 0 s 30 30 0 9999 0 0 ℃ 10 10 0 999 0 0 ℃ 30 30 0 999 0 0 s 15 15 0 999 0 0 s 60 60 0 999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0 0 s 180 180 0 999999 0