ToolLayoutConfiguration.xml 6.1 KB

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <ToolLayoutXmlRoot xmlns:i="http://www.w3.org/2001/XMLSchema-instance">
  3. <Items>
  4. <!-- PLATING POWER SUPPLIES -->
  5. <Item i:type="PlatingPowerSupply">
  6. <Installed>true</Installed>
  7. <PowerSupplyID>1</PowerSupplyID>
  8. <Count>1</Count>
  9. <SubType>Lumina1ChannelCurrent</SubType>
  10. </Item>
  11. <Item i:type="PlatingPowerSupply">
  12. <Installed>true</Installed>
  13. <PowerSupplyID>2</PowerSupplyID>
  14. <Count>1</Count>
  15. <SubType>Lumina1ChannelCurrent</SubType>
  16. </Item>
  17. <Item i:type="PlatingPowerSupply">
  18. <Installed>true</Installed>
  19. <PowerSupplyID>3</PowerSupplyID>
  20. <Count>1</Count>
  21. <SubType>Lumina1ChannelCurrent</SubType>
  22. </Item>
  23. <Item i:type="PlatingPowerSupply">
  24. <Installed>true</Installed>
  25. <PowerSupplyID>4</PowerSupplyID>
  26. <Count>1</Count>
  27. <SubType>Lumina1ChannelCurrent</SubType>
  28. </Item>
  29. <Item i:type="PlatingPowerSupply">
  30. <Installed>true</Installed>
  31. <PowerSupplyID>5</PowerSupplyID>
  32. <Count>1</Count>
  33. <SubType>Lumina1ChannelCurrent</SubType>
  34. </Item>
  35. <Item i:type="PlatingPowerSupply">
  36. <Installed>true</Installed>
  37. <PowerSupplyID>6</PowerSupplyID>
  38. <Count>1</Count>
  39. <SubType>Lumina1ChannelCurrent</SubType>
  40. </Item>
  41. <Item i:type="PlatingPowerSupply">
  42. <Installed>true</Installed>
  43. <PowerSupplyID>7</PowerSupplyID>
  44. <Count>1</Count>
  45. <SubType>Lumina1ChannelCurrent</SubType>
  46. </Item>
  47. <Item i:type="PlatingPowerSupply">
  48. <Installed>true</Installed>
  49. <PowerSupplyID>8</PowerSupplyID>
  50. <Count>1</Count>
  51. <SubType>Lumina1ChannelCurrent</SubType>
  52. </Item>
  53. <Item i:type="PlatingPowerSupply">
  54. <Installed>true</Installed>
  55. <PowerSupplyID>9</PowerSupplyID>
  56. <Count>1</Count>
  57. <SubType>Lumina1ChannelCurrent</SubType>
  58. </Item>
  59. <Item i:type="PlatingPowerSupply">
  60. <Installed>true</Installed>
  61. <PowerSupplyID>10</PowerSupplyID>
  62. <Count>1</Count>
  63. <SubType>Lumina1ChannelCurrent</SubType>
  64. </Item>
  65. <Item i:type="PlatingPowerSupply">
  66. <Installed>true</Installed>
  67. <PowerSupplyID>11</PowerSupplyID>
  68. <Count>1</Count>
  69. <SubType>Lumina1ChannelCurrent</SubType>
  70. </Item>
  71. <Item i:type="PlatingPowerSupply">
  72. <Installed>true</Installed>
  73. <PowerSupplyID>12</PowerSupplyID>
  74. <Count>1</Count>
  75. <SubType>Lumina1ChannelCurrent</SubType>
  76. </Item>
  77. <Item i:type="PlatingPowerSupply">
  78. <Installed>true</Installed>
  79. <PowerSupplyID>13</PowerSupplyID>
  80. <Count>1</Count>
  81. <SubType>Lumina1ChannelCurrent</SubType>
  82. </Item>
  83. <Item i:type="PlatingPowerSupply">
  84. <Installed>true</Installed>
  85. <PowerSupplyID>14</PowerSupplyID>
  86. <Count>1</Count>
  87. <SubType>Lumina2ChannelCurrent</SubType>
  88. </Item>
  89. <!-- CMM POWER SUPPLIES -->
  90. <Item i:type="CMMPowerSupply">
  91. <Installed>true</Installed>
  92. <PowerSupplyID>1</PowerSupplyID>
  93. <Count>1</Count>
  94. <SubType>Lumina1ChannelCurrent</SubType>
  95. </Item>
  96. <!-- UPS -->
  97. <Item i:type="UPS">
  98. <Installed>false</Installed>
  99. <SubType>Eaton5PX</SubType>
  100. </Item>
  101. <!-- HEDs -->
  102. <Item i:type="TempControl">
  103. <Installed>true</Installed>
  104. <Count>4</Count>
  105. <TCID>1</TCID>
  106. <SubType>SMC</SubType>
  107. </Item>
  108. <!-- RESISTIVITY PROBES -->
  109. <Item i:type="ResistivityProbe">
  110. <Installed>true</Installed>
  111. <Count>1</Count>
  112. <ResistivityProbeID>2</ResistivityProbeID>
  113. <SubType>STDThornton</SubType>
  114. </Item>
  115. <!-- FFU -->
  116. <Item i:type="FFU">
  117. <Installed>true</Installed>
  118. <FFUID>1</FFUID>
  119. <SubType>FFUType2</SubType>
  120. </Item>
  121. <!--VPW-->
  122. <Item i:type="VpwMain">
  123. <Installed>true</Installed>
  124. <CellID>20</CellID>
  125. <NominalGantryPositionInMilliMeters>1135</NominalGantryPositionInMilliMeters>
  126. <VpwMainID>1</VpwMainID>
  127. <SubType>Scanning</SubType>
  128. <Cells>
  129. <Item i:type="VpwCell">
  130. <Installed>true</Installed>
  131. <CellID>14</CellID>
  132. <NominalGantryPositionInMilliMeters>2219</NominalGantryPositionInMilliMeters>
  133. <VpwCellID>1</VpwCellID>
  134. <ResistivityID>RP1-1</ResistivityID>
  135. <SubType>Stratus</SubType>
  136. </Item>
  137. <Item i:type="VpwCell">
  138. <Installed>true</Installed>
  139. <CellID>15</CellID>
  140. <NominalGantryPositionInMilliMeters>2219</NominalGantryPositionInMilliMeters>
  141. <VpwCellID>2</VpwCellID>
  142. <ResistivityID>RP1-2</ResistivityID>
  143. <SubType>Stratus</SubType>
  144. </Item>
  145. </Cells>
  146. </Item>
  147. <!-- SRDs -->
  148. <Item i:type="SRD">
  149. <Installed>true</Installed>
  150. <PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
  151. <ResourceID>SRD1</ResourceID>
  152. <Type>SRD</Type>
  153. <SRDID>1</SRDID>
  154. <SubType>VacuumChuckWithFan</SubType>
  155. </Item>
  156. <Item i:type="SRD">
  157. <Installed>true</Installed>
  158. <PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
  159. <ResourceID>SRD2</ResourceID>
  160. <Type>SRD</Type>
  161. <SRDID>2</SRDID>
  162. <SubType>VacuumChuckWithFan</SubType>
  163. </Item>
  164. <!-- SYSTEM FACILITIES -->
  165. <Item i:type="SystemFacilities">
  166. <Installed>true</Installed>
  167. <Type>SystemFacilities</Type>
  168. <ExternalPumpBox>false</ExternalPumpBox>
  169. <SampleStation1Installed>true</SampleStation1Installed>
  170. <SampleStation2Installed>false</SampleStation2Installed>
  171. <SlipstreamInterfaceInstalled>true</SlipstreamInterfaceInstalled>
  172. <RecirculationFlowPressure>false</RecirculationFlowPressure>
  173. </Item>
  174. <!-- SAFETY -->
  175. <Item i:type="SystemSafety">
  176. <Installed>true</Installed>
  177. <Type>SystemSafety</Type>
  178. <ReservoirOverflowSensor>true</ReservoirOverflowSensor>
  179. </Item>
  180. <!-- DUMMYs -->
  181. <Item i:type="DummyCassette">
  182. <Installed>true</Installed>
  183. <PermittedWaferSizeInMM>200</PermittedWaferSizeInMM>
  184. <ResourceID>Dummy1</ResourceID>
  185. <Type>Dummy</Type>
  186. <MaxNumberOfSlots>25</MaxNumberOfSlots>
  187. <DummyCassetteID>1</DummyCassetteID>
  188. </Item>
  189. <Item i:type="DummyCassette">
  190. <Installed>true</Installed>
  191. <PermittedWaferSizeInMM>200</PermittedWaferSizeInMM>
  192. <ResourceID>Dummy1</ResourceID>
  193. <Type>Dummy</Type>
  194. <MaxNumberOfSlots>25</MaxNumberOfSlots>
  195. <DummyCassetteID>2</DummyCassetteID>
  196. </Item>
  197. </Items>
  198. </ToolLayoutXmlRoot>