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- <?xml version="1.0" encoding="utf-8"?>
- <BeckhoffCfg>
- <Controller Name="MASTER" IPAddress="10.4.6.75.1.1" PortAddress="851">
- <!-- Need to have at least one input and one output before Axis stuff -->
- <!-- All inputs first, then all outputs -->
- <!--////////////////////////////////////////////////// ALL INPUTS START //////////////////////////////////////////////////-->
- <!--VPW Main Start-->
- <Input Name="r_VPW_CHAMBER_CLOSED" Address="MAIN.VPW_DI_16CHANNEL_EL1819_N100_1" Invert="true" Type="Digital" DataType="bool"/>
- <Input Name="r_VPW_CHAMBER_OPENED" Address="MAIN.VPW_DI_16CHANNEL_EL1819_N100_2" Invert="true" Type="Digital" DataType="bool"/>
- <Input Name="r_VPW_LEAK_DETECT" Address="MAIN.VPW_DI_16CHANNEL_EL1819_N100_3" Invert="true" Type="Digital" DataType="bool"/>
- <Input Name="r_VPW_VAC_PUMP_PRESSURE" Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_6" Scaling="758=0,0=32767" Type="Analog" DataType="int"/>
- <Input Name="r_VPW_BOOSTER_PUMP_STATUS" Address="MAIN.VPW_DI_16CHANNEL_EL1819_N100_9" Invert="true" Type="Digital" DataType="bool"/>
- <Input Name="r_VPW_DIW_TOTAL_FLOW" Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_1" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
- <Input Name="r_VPW_DIW_PRESSURE" Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_4" Scaling="0=0,100=32767" Type="Analog" DataType="int"/>
- <Input Name="r_VPW_DEGAS_PUMP_PRESSURE" Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_5" Scaling="758=0,100=32767" Type="Analog" DataType="int"/>
- <Input Name="r_VPW_BOOSTER_PUMP_CURRENT" Address="MAIN.VPW_AO_8CHANNEL_0_10V_EL4008_N104_5" Scaling="0=0, 10=32767" Type="Analog" DataType="int"/>
- <!--VPW Main End-->
- <!--VPW1 Start-->
- <Input Name="r_VPW_DIW_CELL_1_FLOW" Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_2" Scaling="0=0,8=32767" Type="Analog" DataType="int"/>
- <Input Name="r_VPW_CELL_1_VAC_PRESSURE" Address="MAIN.VPW_AI_8CHANNEL_0_10V_EL3068_N105_1" Scaling="0=0,10=32767" Type="Analog" DataType="int"/>
- <!--VPW1 End-->
- <!--VPW2 Start-->
- <Input Name="r_VPW_DIW_CELL_2_FLOW" Address="MAIN.VPW_AI_8CHANNEL_4_20mA_EL3058_N102_3" Scaling="0=0,8=32767" Type="Analog" DataType="int"/>
- <Input Name="r_VPW_CELL_2_VAC_PRESSURE" Address="MAIN.VPW_AI_8CHANNEL_0_10V_EL3068_N105_2" Scaling="0=0,10=32767" Type="Analog" DataType="int"/>
- <!--VPW2 End-->
- <!--////////////////////////////////////////////////// ALL INPUTS END //////////////////////////////////////////////////-->
- <!--////////////////////////////////////////////////// ALL OUTPUTS BEGIN //////////////////////////////////////////////////-->
- <!--VPW Main Start-->
- <Output Name="c_VPW_CHAMBER_CLOSE" Address="MAIN.MOTION_DO_16CHANNEL_EL2809_N401_15" Type="Digital" Invert="true" DataType="bool"/>
- <Output Name="c_VPW_VACUUM_PUMP_POWER" Address="MAIN.VPW_DO_16CHANNEL_EL2809_101_5" Type="Digital" Invert="false" DataType="bool"/>
- <Output Name="c_VPW_DEGAS_PUMP_ENABLE" Address="MAIN.VPW_DO_16CHANNEL_EL2809_101_6" Type="Digital" Invert="false" DataType="bool"/>
- <Output Name="c_VPW_BOOSTER_PUMP_ENABLE" Address="MAIN.VPW_DO_16CHANNEL_EL2809_101_7" Type="Digital" Invert="false" DataType="bool"/>
- <Output Name="c_VPW_VACUUM_PUMP_ENABLE" Address="MAIN.MAIN_IO_RELAY_4CHANNEL_EL2624_N106_1" Type="Digital" Invert="false" DataType="bool"/>
- <Output Name="c_VPW_VACUUM_PUMP_SPEED_ENABLE" Address="MAIN.MAIN_IO_RELAY_4CHANNEL_EL2624_N106_2" Type="Digital" Invert="false" DataType="bool"/>
- <Output Name="c_VPW_VACUUM_PUMP_SPEED" Address="MAIN.VPW_AO_8CHANNEL_0_10V_EL4008_N104_1" Scaling="0=0,20=32767" Type="Analog" DataType="int"/>
- <Output Name="c_VPW_BOOSTER_PUMP_SPPED" Address="MAIN.VPW_AO_8CHANNEL_0_10V_EL4008_N104_5" Scaling="300=0,10000=32767" Type="Analog" DataType="int"/>
- <Output Name="c_VPW_DIW_ENABLE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
- <Output Name="c_VPW_DIW_PROCESS" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
- <Output Name="c_VPW_DIW_DEGAS" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
- <Output Name="c_VPW_DEGAS_ADJUST" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
- <Output Name="c_VPW_DEGAS_PURGE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
- <!--VPW Main End-->
- <!--VPW1 Start-->
- <Output Name="c_VPW_1_FLOW_DRIP" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="2" DataType="byte"/>
- <Output Name="c_VPW_1_FLOW_SMALL" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
- <Output Name="c_VPW_1_FLOW_LARGE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="4" DataType="byte"/>
- <Output Name="c_VPW_1_VACUUM_VALVE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="3" DataType="byte"/>
- <Output Name="c_VPW_1_VENT_VALVE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
- <Output Name="c_VPW_1_DIW_DRAIN" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE2" Type="Digital" BitOperated="true" Bit="0" DataType="byte"/>
- <!--VPW1 End-->
- <!--VPW2 Start-->
- <Output Name="c_VPW_2_FLOW_DRIP" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="5" DataType="byte"/>
- <Output Name="c_VPW_2_FLOW_SMALL" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
- <Output Name="c_VPW_2_FLOW_LARGE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE0" Type="Digital" BitOperated="true" Bit="7" DataType="byte"/>
- <Output Name="c_VPW_2_VACUUM_VALVE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="4" DataType="byte"/>
- <Output Name="c_VPW_2_VENT_VALVE" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE1" Type="Digital" BitOperated="true" Bit="6" DataType="byte"/>
- <Output Name="c_VPW_2_DIW_DRAIN" Address="MAIN.VPW_PNEU_SMC_EX260_BYTE2" Type="Digital" BitOperated="true" Bit="1" DataType="byte"/>
- <!--VPW2 End-->
- <!--////////////////////////////////////////////////// ALL OUTPUTS END //////////////////////////////////////////////////-->
- <!--////////////////////////////////////////////////// ALL COUNTERS BEGIN //////////////////////////////////////////////////-->
- <!--////////////////////////////////////////////////// ALL COUNTERS END //////////////////////////////////////////////////-->
- <!--////////////////////////////////////////////////// ALL AXIS BEGIN //////////////////////////////////////////////////-->
- <Axis Name="VPW1.Rotation" MotorType="Yaskawa" COEAddress="192.168.0.14.4.1" COEPort="1016" DebugLogging="false">
- <Input Address="MAIN.VPW1RotationStatusWord" Type="StatusWord" DataType="uint"/>
- <Input Address="MAIN.VPW1RotationDigitalInputs" Type="DigitalInputs" DataType="udint"/>
- <Input Address="MAIN.VPW1RotationMotorPosition" Type="MotorPosition" DataType="dint"/>
- <Input Address="MAIN.VPW1RotationPositionError" Type="PositionError" DataType="dint"/>
- <Input Address="MAIN.VPW1RotationActualVelocity" Type="ActualVelocity" DataType="dint"/>
- <Input Address="MAIN.VPW1RotationActualTorque" Type="ActualTorque" DataType="int"/>
- <!-- Input Address="MAIN.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
- <Input Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
- <Input Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
- <Input Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
- <Input Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
- <Input Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
- <Input Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
- <Input Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
- <Input Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
- <Input Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
- <Input Address="0x6085:00" Type="EStopDecel" DataType="udint"/>
- <Input Address="0x2406:00" Type="EStopTorque" DataType="uint"/>
- <Input Address="0x607F:00" Type="VelocityLimit" DataType="udint"/>
- <Input Address="0x2522:00" Type="PositionWindow" DataType="udint"/>
- <Input Address="0x2520:00" Type="FollowingErrorWindow" DataType="udint"/>
- <Input Address="0x603F:00" Type="ErrorCode" DataType="uint"/>
- <Output Address="MAIN.VPW1RotationControlWord" Type="ControlWord" DataType="uint"/>
- <Output Address="MAIN.VPW1RotationModeOfOperation" Type="ModeOfOperation" DataType="byte"/>
- <Output Address="MAIN.VPW1RotationTargetPosition" Type="TargetPosition" DataType="dint"/>
- <Output Address="MAIN.VPW1RotationProfileVelocity" Type="ProfileVelocity" DataType="dint"/>
- <Output Address="MAIN.VPW1RotationProfileAccel" Type="ProfileAccel" DataType="dint"/>
- <Output Address="MAIN.VPW1RotationProfileDecel" Type="ProfileDecel" DataType="dint"/>
- <!-- Output Address="MAIN.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
- <Output Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
- <Output Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
- <Output Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
- <Output Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
- <Output Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
- <Output Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
- <Output Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
- <Output Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
- <Output Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
- <MotorType>Servo</MotorType>
- <MotorDriveDirection>0</MotorDriveDirection>
- <EncoderFeedbackDirectionMValue>0</EncoderFeedbackDirectionMValue>
- <EncoderFeedbackDirectionNValue>0</EncoderFeedbackDirectionNValue>
- <ReverseLimitSwitchPolarity>0</ReverseLimitSwitchPolarity>
- <ForwardLimitSwitchPolarity>0</ForwardLimitSwitchPolarity>
- <HomeSwitchPolarity>0</HomeSwitchPolarity>
- <HomingMethod>24</HomingMethod>
- <HomeConfig>0</HomeConfig>
- <HomingOffset>0</HomingOffset>
- <HomingSpeedHomeSwitch>1500000</HomingSpeedHomeSwitch>
- <HomingSpeedEncoderIndex>0</HomingSpeedEncoderIndex>
- <HomingAccelDecel>10000000</HomingAccelDecel>
- <HomingTimeOut>60000</HomingTimeOut>
- <ProportionalGain>0</ProportionalGain>
- <IntegralGain>0</IntegralGain>
- <DerivativeGain>0</DerivativeGain>
- <IntegralLimit>0</IntegralLimit>
- <ErrorLimit>6766</ErrorLimit>
- <VoltageOffset>0</VoltageOffset>
- <!-- -193 degrees * 169161 = -32648073 -->
- <ReverseSoftwareLimit>-46180953</ReverseSoftwareLimit>
- <!-- 13 degrees * 169161 = 2199093 -->
- <ForwardSoftwareLimit>2706576</ForwardSoftwareLimit>
- <Speed>360</Speed>
- <Acceleration>1000</Acceleration>
- <Deceleration>1000</Deceleration>
- <Jerk>0</Jerk>
- <FeedforwardVelocity>0</FeedforwardVelocity>
- <FeedforwardAcceleration>0</FeedforwardAcceleration>
- <OffOnError>0</OffOnError>
- </Axis>
- <Axis Name="VPW2.Rotation" MotorType="Yaskawa" COEAddress="192.168.0.14.4.1" COEPort="1016" DebugLogging="false">
- <Input Address="MAIN.VPW2RotationStatusWord" Type="StatusWord" DataType="uint"/>
- <Input Address="MAIN.VPW2RotationDigitalInputs" Type="DigitalInputs" DataType="udint"/>
- <Input Address="MAIN.VPW2RotationMotorPosition" Type="MotorPosition" DataType="dint"/>
- <Input Address="MAIN.VPW2RotationPositionError" Type="PositionError" DataType="dint"/>
- <Input Address="MAIN.VPW2RotationActualVelocity" Type="ActualVelocity" DataType="dint"/>
- <Input Address="MAIN.VPW2RotationActualTorque" Type="ActualTorque" DataType="int"/>
- <!-- Input Address="MAIN.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
- <Input Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
- <Input Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
- <Input Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
- <Input Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
- <Input Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
- <Input Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
- <Input Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
- <Input Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
- <Input Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
- <Input Address="0x6085:00" Type="EStopDecel" DataType="udint"/>
- <Input Address="0x2406:00" Type="EStopTorque" DataType="uint"/>
- <Input Address="0x607F:00" Type="VelocityLimit" DataType="udint"/>
- <Input Address="0x2522:00" Type="PositionWindow" DataType="udint"/>
- <Input Address="0x2520:00" Type="FollowingErrorWindow" DataType="udint"/>
- <Input Address="0x603F:00" Type="ErrorCode" DataType="uint"/>
- <Output Address="MAIN.VPW2RotationControlWord" Type="ControlWord" DataType="uint"/>
- <Output Address="MAIN.VPW2RotationModeOfOperation" Type="ModeOfOperation" DataType="byte"/>
- <Output Address="MAIN.VPW2RotationTargetPosition" Type="TargetPosition" DataType="dint"/>
- <Output Address="MAIN.VPW2RotationProfileVelocity" Type="ProfileVelocity" DataType="dint"/>
- <Output Address="MAIN.VPW2RotationProfileAccel" Type="ProfileAccel" DataType="dint"/>
- <Output Address="MAIN.VPW2RotationProfileDecel" Type="ProfileDecel" DataType="dint"/>
- <!-- Output Address="MAIN.Loader1Rotation_DigitalOutputs" Type="DigitalOutputs" DataType="dint"/ -->
- <Output Address="0x607D:01" Type="SoftwareLimitMinus" DataType="dint"/>
- <Output Address="0x607D:02" Type="SoftwareLimitPlus" DataType="dint"/>
- <Output Address="0x607C:00" Type="HomeOffset" DataType="dint"/>
- <Output Address="0x6098:00" Type="HomingMethod" DataType="byte"/>
- <Output Address="0x6099:01" Type="HomingVelocity" DataType="dint"/>
- <Output Address="0x6099:02" Type="HomingVelocitySlow" DataType="dint"/>
- <Output Address="0x609A:00" Type="HomingAccel" DataType="dint"/>
- <Output Address="0x2403:00" Type="NegativeTorqueLimit" DataType="uint"/>
- <Output Address="0x2402:00" Type="PositiveTorqueLimit" DataType="uint"/>
- <MotorType>Servo</MotorType>
- <MotorDriveDirection>0</MotorDriveDirection>
- <EncoderFeedbackDirectionMValue>0</EncoderFeedbackDirectionMValue>
- <EncoderFeedbackDirectionNValue>0</EncoderFeedbackDirectionNValue>
- <ReverseLimitSwitchPolarity>0</ReverseLimitSwitchPolarity>
- <ForwardLimitSwitchPolarity>0</ForwardLimitSwitchPolarity>
- <HomeSwitchPolarity>0</HomeSwitchPolarity>
- <HomingMethod>24</HomingMethod>
- <HomeConfig>0</HomeConfig>
- <HomingOffset>0</HomingOffset>
- <HomingSpeedHomeSwitch>1500000</HomingSpeedHomeSwitch>
- <HomingSpeedEncoderIndex>0</HomingSpeedEncoderIndex>
- <HomingAccelDecel>10000000</HomingAccelDecel>
- <HomingTimeOut>60000</HomingTimeOut>
- <ProportionalGain>0</ProportionalGain>
- <IntegralGain>0</IntegralGain>
- <DerivativeGain>0</DerivativeGain>
- <IntegralLimit>0</IntegralLimit>
- <ErrorLimit>6766</ErrorLimit>
- <VoltageOffset>0</VoltageOffset>
- <!-- -193 degrees * 169161 = -32648073 -->
- <ReverseSoftwareLimit>-46180953</ReverseSoftwareLimit>
- <!-- 13 degrees * 169161 = 2199093 -->
- <ForwardSoftwareLimit>2706576</ForwardSoftwareLimit>
- <Speed>15000000</Speed>
- <Acceleration>10000000</Acceleration>
- <Deceleration>10000000</Deceleration>
- <Jerk>0</Jerk>
- <FeedforwardVelocity>0</FeedforwardVelocity>
- <FeedforwardAcceleration>0</FeedforwardAcceleration>
- <OffOnError>0</OffOnError>
- </Axis>
- </Controller>
- </BeckhoffCfg>
|