PlatingCellRunRecipeRoutine.cs 22 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.Routine;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Beckhoff.AxisProvider;
  6. using MECF.Framework.Common.Beckhoff.Station;
  7. using MECF.Framework.Common.CommonData.PowerSupplier;
  8. using MECF.Framework.Common.RecipeCenter;
  9. using MECF.Framework.Common.Routine;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using MECF.Framework.Common.ToolLayout;
  12. using MECF.Framework.Common.Utilities;
  13. using PunkHPX8_Core;
  14. using PunkHPX8_RT.Devices.AXIS;
  15. using PunkHPX8_RT.Devices.Facilities;
  16. using PunkHPX8_RT.Devices.PlatingCell;
  17. using PunkHPX8_RT.Devices.PowerSupplier;
  18. using PunkHPX8_RT.Modules.Reservoir;
  19. using SecsGem.Core.ItemModel;
  20. using System;
  21. using System.Collections.Generic;
  22. using System.Diagnostics;
  23. using System.Linq;
  24. using System.Text;
  25. using System.Threading.Tasks;
  26. using System.Windows.Navigation;
  27. using static Mono.Security.X509.X520;
  28. namespace PunkHPX8_RT.Modules.PlatingCell
  29. {
  30. public class PlatingCellRunRecipeRoutine : RoutineBase, IRoutine
  31. {
  32. private enum RunRecipeStep
  33. {
  34. LoopStart,
  35. InterRinse,
  36. CheckInterRinse,
  37. Entry,
  38. CheckEntry,
  39. Deposition,
  40. CheckDeposition,
  41. Reclaim,
  42. CheckReclaim,
  43. Rinse,
  44. CheckRinse,
  45. Dry,
  46. CheckDry,
  47. LoopEnd,
  48. End
  49. }
  50. #region 常量
  51. private const int ALL_DAY_MILLOSECONDS = 24 * 60 * 60 * 1000;
  52. /// <summary>
  53. /// ROTATION电机转速比例
  54. /// </summary>
  55. private const int SPEED_RATIO = 1;
  56. /// <summary>
  57. /// 电机以500rmp 运行12个小时的位置
  58. /// </summary>
  59. private const int LARGETARGETPOSITION = 12 * 60 * 60 * 500 * 6;
  60. #endregion
  61. #region 内部变量
  62. /// <summary>
  63. /// recipe
  64. /// </summary>
  65. private DepRecipe _recipe;
  66. /// <summary>
  67. /// Platingcell device
  68. /// </summary>
  69. private PlatingCellDevice _device;
  70. /// <summary>
  71. /// Rotation axis
  72. /// </summary>
  73. private JetAxisBase _rotationAxis;
  74. /// <summary>
  75. ///rotation Provider对象
  76. /// </summary>
  77. private BeckhoffProviderAxis _rotationProviderAxis;
  78. ///是否选中dummy load
  79. /// </summary>
  80. private bool _isDummyLoad;
  81. /// cycle次数
  82. /// </summary>
  83. private int _cycle;
  84. /// <summary>
  85. /// 当前完成的Cycle次数
  86. /// </summary>
  87. private int _currentCycle;
  88. /// <summary>
  89. /// platingcell entity
  90. /// </summary>
  91. private PlatingCellEntity _platingCellEntity;
  92. /// <summary>
  93. /// 另一边的platingcell entity
  94. /// </summary>
  95. private PlatingCellEntity _matchPlatingCellEntity;
  96. /// <summary>
  97. /// 对应reservoir entity
  98. /// </summary>
  99. private ReservoirEntity _reservoirEntity;
  100. /// <summary>
  101. /// vertical axis entity
  102. /// </summary>
  103. private PlatingCellVerticalEntity _verticalEntity;
  104. /// <summary>
  105. /// vertical 轴的位置数据
  106. /// </summary>
  107. private BeckhoffStationAxis _verticalBeckhoffStation;
  108. /// <summary>
  109. /// recipe中是否存在电机反转
  110. /// </summary>
  111. private bool _isRecipeContainsRevserseRotation = false;
  112. /// <summary>
  113. /// run recipe 过程中电机会停的位置(需要根据recipe计算出来)
  114. /// </summary>
  115. #region 电镀通电相关
  116. /// <summary>
  117. /// 不通电
  118. /// </summary>
  119. private bool _isZeroCurrent = false;
  120. /// <summary>
  121. /// Power step集合
  122. /// </summary>
  123. List<PowerSupplierStepPeriodData> _powerSupplierStepPeriodDatas = new List<PowerSupplierStepPeriodData>();
  124. /// <summary>
  125. /// 记录dep recipe中出现的最大电流,用于启动电源前切换挡位
  126. /// </summary>
  127. private double _maxCurrent = 0;
  128. /// <summary>
  129. /// 通电总时长
  130. /// </summary>
  131. private int _totalMicrosecond = 0;
  132. /// <summary>
  133. /// Plating启动时间
  134. /// </summary>
  135. private DateTime _platingStartTime;
  136. #endregion
  137. #region routine
  138. /// <summary>
  139. /// interbal rinse routien
  140. /// </summary>
  141. private PlatingCellInterRinseRoutine _interRinseRoutine;
  142. /// <summary>
  143. /// entry routien
  144. /// </summary>
  145. private PlatingCellEntryRoutine _entryRoutine;
  146. /// <summary>
  147. /// entry routien
  148. /// </summary>
  149. private PlatingCellDepositionRoutine _depositionRoutine;
  150. /// <summary>
  151. /// reclaim routien
  152. /// </summary>
  153. private PlatingCellReclaimRoutine _reclaimRoutine;
  154. /// <summary>
  155. /// Rinse routien
  156. /// </summary>
  157. private PlatingCellRinseRoutine _rinseRoutine;
  158. /// <summary>
  159. /// Dry routien
  160. /// </summary>
  161. private PlatingCellDryRoutine _dryRoutine;
  162. #endregion
  163. #region 属性
  164. #endregion
  165. #endregion
  166. /// <summary>
  167. /// 构造函数
  168. /// </summary>
  169. /// <param name="module"></param>
  170. public PlatingCellRunRecipeRoutine(string module) : base(module)
  171. {
  172. _interRinseRoutine = new PlatingCellInterRinseRoutine(module);
  173. _entryRoutine = new PlatingCellEntryRoutine(module);
  174. _depositionRoutine = new PlatingCellDepositionRoutine(module);
  175. _reclaimRoutine = new PlatingCellReclaimRoutine(module);
  176. _rinseRoutine = new PlatingCellRinseRoutine(module);
  177. _dryRoutine = new PlatingCellDryRoutine(module);
  178. }
  179. /// <summary>
  180. /// 中止
  181. /// </summary>
  182. public void Abort()
  183. {
  184. Runner.Stop("Manual Abort");
  185. }
  186. /// <summary>
  187. /// 监控
  188. /// </summary>
  189. /// <returns></returns>
  190. public RState Monitor()
  191. {
  192. Runner.LoopStart(RunRecipeStep.LoopStart, "Loop Start Cycle Run Platingcell Recipe Routine", _cycle, NullFun, _delay_1ms)
  193. //interval rinse
  194. .LoopRunIf(RunRecipeStep.InterRinse, _recipe.RinseBeforeEntryEnable, () => { return _interRinseRoutine.Start(_recipe, LARGETARGETPOSITION) == RState.Running; })
  195. .LoopRunIfWithStopStatus(RunRecipeStep.CheckInterRinse, _recipe.RinseBeforeEntryEnable, CheckInterRinseEndStatus,
  196. () => CommonFunction.CheckRoutineStopState(_interRinseRoutine))
  197. //entry
  198. .LoopRun(RunRecipeStep.Entry, () => { return _entryRoutine.Start(_recipe, LARGETARGETPOSITION, _powerSupplierStepPeriodDatas) == RState.Running; })
  199. .LoopRunWithStopStatus(RunRecipeStep.CheckEntry, CheckEntryEndStatus, () => CommonFunction.CheckRoutineStopState(_entryRoutine))
  200. //Deposition
  201. .LoopRun(RunRecipeStep.Deposition, () => { return _depositionRoutine.Start(_recipe, _isZeroCurrent,_powerSupplierStepPeriodDatas) == RState.Running; })
  202. .LoopRunWithStopStatus(RunRecipeStep.CheckDeposition, CheckDepositionEndStatus,() => CommonFunction.CheckRoutineStopState(_depositionRoutine))
  203. //Reclaim
  204. .LoopRun(RunRecipeStep.Reclaim, () => { return _reclaimRoutine.Start(_recipe, _isZeroCurrent,_device.PowerSupplier) == RState.Running; })
  205. .LoopRunWithStopStatus(RunRecipeStep.CheckReclaim, CheckReclaimEndStatus, () => CommonFunction.CheckRoutineStopState(_reclaimRoutine))
  206. //Rinse
  207. .LoopRun(RunRecipeStep.Rinse, () => { return _rinseRoutine.Start(_recipe) == RState.Running; })
  208. .LoopRunWithStopStatus(RunRecipeStep.CheckRinse, CheckRinseEndStatus,
  209. () => CommonFunction.CheckRoutineStopState(_rinseRoutine))
  210. //Dry
  211. .LoopRun(RunRecipeStep.Dry, () => { return _dryRoutine.Start(_recipe) == RState.Running; })
  212. .LoopRunWithStopStatus(RunRecipeStep.CheckDry, CheckDryEndStatus, () => CommonFunction.CheckRoutineStopState(_dryRoutine))
  213. .LoopEnd(RunRecipeStep.LoopEnd, UpdateCycleCount, _delay_1ms)
  214. .End(RunRecipeStep.End, NullFun);
  215. return Runner.Status;
  216. }
  217. /// 统计完成的Cycle次数
  218. /// </summary>
  219. /// <returns></returns>
  220. private bool UpdateCycleCount()
  221. {
  222. _currentCycle += 1;
  223. return true;
  224. }
  225. /// <summary>
  226. /// 获取当前Cycle次数
  227. /// </summary>
  228. /// <returns></returns>
  229. public int GetCurrentCycle()
  230. {
  231. return _currentCycle;
  232. }
  233. /// <summary>
  234. /// 检查interval rinse是否完成
  235. /// </summary>
  236. /// <returns></returns>
  237. private bool CheckInterRinseEndStatus()
  238. {
  239. bool result = CommonFunction.CheckRoutineEndState(_interRinseRoutine);
  240. SubRoutineStep = _interRinseRoutine.CurrentStep;
  241. return result;
  242. }
  243. /// <summary>
  244. /// 检查entry是否完成
  245. /// </summary>
  246. /// <returns></returns>
  247. private bool CheckEntryEndStatus()
  248. {
  249. bool result = CommonFunction.CheckRoutineEndState(_entryRoutine);
  250. SubRoutineStep = _entryRoutine.CurrentStep;
  251. return result;
  252. }
  253. /// <summary>
  254. /// 检查Deposition是否完成
  255. /// </summary>
  256. /// <returns></returns>
  257. private bool CheckDepositionEndStatus()
  258. {
  259. bool result = CommonFunction.CheckRoutineEndState(_depositionRoutine);
  260. SubRoutineStep = _depositionRoutine.CurrentStep;
  261. return result;
  262. }
  263. /// <summary>
  264. /// 检查Reclaim是否完成
  265. /// </summary>
  266. /// <returns></returns>
  267. private bool CheckReclaimEndStatus()
  268. {
  269. bool result = CommonFunction.CheckRoutineEndState(_reclaimRoutine);
  270. SubRoutineStep = _reclaimRoutine.CurrentStep;
  271. return result;
  272. }
  273. /// <summary>
  274. /// 检查Rinse是否完成
  275. /// </summary>
  276. /// <returns></returns>
  277. private bool CheckRinseEndStatus()
  278. {
  279. bool result = CommonFunction.CheckRoutineEndState(_rinseRoutine);
  280. SubRoutineStep = _rinseRoutine.CurrentStep;
  281. return result;
  282. }
  283. /// <summary>
  284. /// 检查Dry是否完成
  285. /// </summary>
  286. /// <returns></returns>
  287. private bool CheckDryEndStatus()
  288. {
  289. bool result = CommonFunction.CheckRoutineEndState(_dryRoutine);
  290. SubRoutineStep = _dryRoutine.CurrentStep;
  291. return result;
  292. }
  293. /// <summary>
  294. /// 启动
  295. /// </summary>
  296. /// <param name="objs"></param>
  297. /// <returns></returns>
  298. public RState Start(params object[] objs)
  299. {
  300. _recipe = objs[0] as DepRecipe;
  301. if (_recipe == null)
  302. {
  303. LOG.WriteLog(eEvent.ERR_METAL, Module, "recipe is null");
  304. return RState.Failed;
  305. }
  306. if (objs.Length > 1)
  307. {
  308. _isDummyLoad = (bool)objs[1];
  309. }
  310. if (objs.Length > 2)
  311. {
  312. _cycle = (int)objs[2];
  313. }
  314. _device = DEVICE.GetDevice<PlatingCellDevice>(Module);
  315. _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
  316. _rotationProviderAxis = BeckhoffAxisProviderManager.Instance.GetAxisProvider($"{Module}.Rotation");
  317. if (_rotationProviderAxis == null)
  318. {
  319. NotifyError(eEvent.ERR_PLATINGCELL, $"{Module}.Rotation Provider is not exist", 0);
  320. return RState.Failed;
  321. }
  322. //获取vertical entity
  323. string vertical = ModuleMatcherManager.Instance.GetPlatingVerticalByCell(Module);
  324. _verticalEntity = Singleton<RouteManager>.Instance.GetModule<PlatingCellVerticalEntity>(vertical);
  325. //获取platingcell eneity
  326. _platingCellEntity = Singleton<RouteManager>.Instance.GetModule<PlatingCellEntity>(Module);
  327. //获取对应reservoir eneity
  328. string reservoir = ReservoirItemManager.Instance.GetReservoirByPlatingCell(Module);
  329. _reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
  330. //获取vertical station信息对象
  331. _verticalBeckhoffStation = BeckhoffStationLocationManager.Instance.GetStationAxis($"{_verticalEntity.Module}", "Vertical");
  332. //获取另一边platingcell的entity
  333. string MatchModule = ModuleMatcherManager.Instance.GetMatcherByModule(Module);
  334. _matchPlatingCellEntity = Singleton<RouteManager>.Instance.GetModule<PlatingCellEntity>(MatchModule);
  335. if (!CheckPreCondition())
  336. {
  337. return RState.Failed;
  338. }
  339. CalculatVerticalPosition(_recipe);
  340. if (!UpdatePowerStepDatas())
  341. {
  342. NotifyError(eEvent.ERR_PLATINGCELL, $"Update Power StepDatas Failed!", 0);
  343. return RState.Failed;
  344. }
  345. _currentCycle = 0;
  346. return Runner.Start(Module, "PlatingCell Run Recipe");
  347. }
  348. /// <summary>
  349. /// 初始化Power step步骤
  350. /// </summary>
  351. private bool UpdatePowerStepDatas()
  352. {
  353. _isZeroCurrent = false;
  354. _isRecipeContainsRevserseRotation = false;
  355. double current = 0;
  356. _totalMicrosecond = 0;
  357. _powerSupplierStepPeriodDatas.Clear();
  358. if (!_recipe.IsEntryTypeCold)//如果entry带上电保护,那么把上电保护的部分加到步阶电流的第一步
  359. {
  360. PowerSupplierStepPeriodData step = new PowerSupplierStepPeriodData(); //上电保护时间(提前上电时间+延迟时间)
  361. step.Hour = 0;
  362. step.Minute = (ushort)((_recipe.PlatingDelay) / 60);
  363. step.Second = (ushort)(_recipe.PlatingDelay % 60);
  364. step.Microsecond = 110; //到达entry位置提前100ms上电,提前一丢丢
  365. step.Voltage = _recipe.DepMaxVoltageWarning;
  366. step.Current = _recipe.EntryCurrent * 0.001; //recipe的entry current单位是毫安
  367. _powerSupplierStepPeriodDatas.Add(step);
  368. }
  369. foreach (var item in _recipe.DepSteps)
  370. {
  371. PowerSupplierStepPeriodData step = new PowerSupplierStepPeriodData();
  372. step.Current = item.CurrentValue;
  373. if(item.CurrentValue > _maxCurrent)
  374. {
  375. _maxCurrent = item.CurrentValue;
  376. }
  377. step.Hour = (ushort)(item.DurartionSeconds / 3600);
  378. step.Minute = (ushort)((item.DurartionSeconds - step.Hour * 3600) / 60);
  379. step.Second = (ushort)(item.DurartionSeconds % 60);
  380. step.Microsecond = 0;
  381. step.Voltage = _recipe.DepMaxVoltageWarning;
  382. _powerSupplierStepPeriodDatas.Add(step);
  383. current += step.Current;
  384. _totalMicrosecond += item.DurartionSeconds * 1000;
  385. }
  386. if (current == 0)
  387. {
  388. _isZeroCurrent = true;
  389. }
  390. if(_maxCurrent < _recipe.EntryCurrent)//记录最大电流要考虑entry current
  391. {
  392. _maxCurrent = _recipe.EntryCurrent;
  393. }
  394. if(_maxCurrent > 0.6) //设置电源挡位,有超过0.6A的电流则用高档,否则用中挡
  395. {
  396. return _device.PowerSupplier.SetPowerGrade("set power grade high", new object[] { (byte)2 });
  397. }
  398. else
  399. {
  400. return _device.PowerSupplier.SetPowerGrade("set power grade middle", new object[] { (byte)1 });
  401. }
  402. }
  403. /// <summary>
  404. /// 根据dep recipe计算出整个电镀过程中Rotation profile position可能去到的位置
  405. /// </summary>
  406. private void CalculatVerticalPosition(DepRecipe recipe)
  407. {
  408. foreach(var item in recipe.DepSteps)
  409. {
  410. if (item.BiDireaction)
  411. {
  412. _isRecipeContainsRevserseRotation = true;
  413. }
  414. else
  415. {
  416. continue;
  417. }
  418. }
  419. }
  420. /// <summary>
  421. /// 检验前置条件
  422. /// </summary>
  423. /// <returns></returns>
  424. private bool CheckPreCondition()
  425. {
  426. if (_recipe == null)
  427. {
  428. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Recipe is null");
  429. return false;
  430. }
  431. //if (_recipe.DepSteps.Count == 0)
  432. //{
  433. // LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Recipe DepSteps count is 0");
  434. // return false;
  435. //}
  436. if (!CheckAxisHome())
  437. {
  438. NotifyError(eEvent.ERR_PLATINGCELL, "Check Axis home error",0);
  439. return false;
  440. }
  441. if (!CheckFacility())
  442. {
  443. NotifyError(eEvent.ERR_PLATINGCELL, "Check facility error", 0);
  444. return false;
  445. }
  446. if (!CheckModuleAndReservoir())
  447. {
  448. NotifyError(eEvent.ERR_PLATINGCELL, "Check ModuleAndReservoir error", 0);
  449. return false;
  450. }
  451. return true;
  452. }
  453. private bool CheckModuleAndReservoir()
  454. {
  455. if (!_platingCellEntity.IsIdle)
  456. {
  457. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"{Module} is not initialized");
  458. return false;
  459. }
  460. if (!_reservoirEntity.IsIdle)
  461. {
  462. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Releated reseroivr is not initialized");
  463. return false;
  464. }
  465. if (!_reservoirEntity.TemperatureReached)
  466. {
  467. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Releated reseroivr temperature is not reached");
  468. return false;
  469. }
  470. if ("Manual".Equals(_reservoirEntity.PersistentValue.OperatingMode) && !WaferManager.Instance.CheckHasWafer(Module, 0))
  471. {
  472. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Run recipe in manual must has wafer!");
  473. return false;
  474. }
  475. return true;
  476. }
  477. /// <summary>
  478. /// 检查马达是否上电且home
  479. /// </summary>
  480. /// <returns></returns>
  481. private bool CheckAxisHome()
  482. {
  483. if (!_rotationAxis.IsSwitchOn)
  484. {
  485. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Rotation Axis is off");
  486. return false;
  487. }
  488. if (!_rotationAxis.IsHomed)
  489. {
  490. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Rotation Axis is not home");
  491. return false;
  492. }
  493. if (!_verticalEntity.AxisIsHome)
  494. {
  495. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Vertical Axis is not home");
  496. return false;
  497. }
  498. return true;
  499. }
  500. /// <summary>
  501. /// 检查facility
  502. /// </summary>
  503. /// <returns></returns>
  504. private bool CheckFacility()
  505. {
  506. SystemFacilities systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");
  507. if (systemFacilities == null)
  508. {
  509. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility is null");
  510. return false;
  511. }
  512. if (!systemFacilities.CDAEnable)
  513. {
  514. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility CDA is off");
  515. return false;
  516. }
  517. if (!systemFacilities.N2Enable)
  518. {
  519. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility N2 is off");
  520. return false;
  521. }
  522. if (!systemFacilities.DIFillEnable)
  523. {
  524. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility DIW is off");
  525. return false;
  526. }
  527. if (systemFacilities.FacilitiesDataDic["CDA1Pressure"].IsError || systemFacilities.FacilitiesDataDic["CDA2Pressure"].IsError)
  528. {
  529. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility CDA Data is in error range");
  530. return false;
  531. }
  532. if (systemFacilities.FacilitiesDataDic["Nitrogen1APressure"].IsError ||
  533. systemFacilities.FacilitiesDataDic["Nitrogen1BPressure"].IsError ||
  534. systemFacilities.FacilitiesDataDic["Nitrogen2APressure"].IsError ||
  535. systemFacilities.FacilitiesDataDic["Nitrogen2BPressure"].IsError)
  536. {
  537. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility N2 Data is in error range");
  538. return false;
  539. }
  540. if (systemFacilities.FacilitiesDataDic["DiWaterPressure"].IsError)
  541. {
  542. LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility Diw Pressure value is in error range");
  543. return false;
  544. }
  545. return true;
  546. }
  547. }
  548. }