SchedulerRobot.cs 17 KB

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  1. using Aitex.Core.RT.Fsm;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.Routine;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.Schedulers;
  7. using PunkHPX8_Core;
  8. using PunkHPX8_RT.Modules;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Linq;
  12. using System.Text;
  13. using System.Threading.Tasks;
  14. using MECF.Framework.Common.SubstrateTrackings;
  15. using PunkHPX8_RT.Modules.SRD;
  16. using PunkHPX8_RT.Modules.VpwMain;
  17. using PunkHPX8_RT.Modules.VpwCell;
  18. using MECF.Framework.Common.RecipeCenter;
  19. using PunkHPX8_RT.Modules.PlatingCell;
  20. using Aitex.Sorter.Common;
  21. using PunkHPX8_RT.Dispatch;
  22. using MECF.Framework.Common.ToolLayout;
  23. using Aitex.Core.Common;
  24. using PunkHPX8_RT.Devices.VpwMain;
  25. using PunkHPX8_RT.Devices.PlatingCell;
  26. using Aitex.Core.RT.Device;
  27. namespace PunkHPX8_RT.Schedulers.EfemRobot
  28. {
  29. public class SchedulerRobot : SchedulerModule
  30. {
  31. private enum SchedulerRobotOperation
  32. {
  33. None,
  34. Pick,
  35. PickWait,
  36. Place,
  37. PlaceWait
  38. }
  39. #region 内部变量
  40. private EfemEntity _efemEntity;
  41. #endregion
  42. #region 属性
  43. /// <summary>
  44. /// 是否空闲
  45. /// </summary>
  46. public override bool IsIdle
  47. {
  48. get { return _state == RState.End; }
  49. }
  50. /// <summary>
  51. /// 是否错误
  52. /// </summary>
  53. public override bool IsError
  54. {
  55. get { return _state == RState.Failed || _state == RState.Timeout; }
  56. }
  57. #endregion
  58. /// <summary>
  59. /// 构造函数
  60. /// </summary>
  61. /// <param name="module"></param>
  62. public SchedulerRobot(ModuleName module) : base(module.ToString())
  63. {
  64. _efemEntity = Singleton<RouteManager>.Instance.EFEM;
  65. }
  66. /// <summary>
  67. /// 执行
  68. /// </summary>
  69. /// <param name="parameter"></param>
  70. /// <returns></returns>
  71. public override bool RunProcess(object recipe, object parameter, List<SchedulerSyncModuleMessage> syncMessages)
  72. {
  73. if (_efemEntity.IsBusy)
  74. {
  75. return false;
  76. }
  77. MoveItem moveItem = (MoveItem)parameter;
  78. if (moveItem.SourceModule != ModuleName.Unknown&&moveItem.DestinationModule!=ModuleName.Unknown)
  79. {
  80. SynchorinzeModuleMessages(syncMessages);
  81. _state = RState.Running;
  82. if (RobotMoveHelper.Instance.IsIdle)
  83. {
  84. RobotMoveHelper.Instance.Start(moveItem, Module.ToString());
  85. return true;
  86. }
  87. }
  88. return false;
  89. }
  90. /// <summary>
  91. /// 监控执行
  92. /// </summary>
  93. /// <returns></returns>
  94. public override bool MonitorProcess(SchedulerSequence schedulerSequence, bool hasMatchWafer)
  95. {
  96. RobotMoveHelper.Instance.Monitor(Module.ToString());
  97. if (RobotMoveHelper.Instance.IsIdle)
  98. {
  99. _state = RState.End;
  100. }
  101. return true;
  102. }
  103. /// <summary>
  104. /// 检验前置条件
  105. /// </summary>
  106. /// <param name="sequenceIndex"></param>
  107. /// <param name="parameter"></param>
  108. /// <returns></returns>
  109. public override bool CheckPrecondition(List<SchedulerSequence> schedulerSequences, int sequenceIndex, object parameter,string materialId, ref string reason)
  110. {
  111. if (parameter == null)
  112. {
  113. reason = "parameter is null";
  114. return true;
  115. }
  116. if (_state == RState.Running)
  117. {
  118. reason = "scheduler module is already running";
  119. return false;
  120. }
  121. if(_efemEntity.IsBusy)
  122. {
  123. reason = "efem is busy";
  124. return false;
  125. }
  126. if(_efemEntity.IsError)
  127. {
  128. reason = "efem is error";
  129. return false;
  130. }
  131. MoveItem moveItem = (MoveItem)parameter;
  132. if(WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)Hand.Blade1))
  133. {
  134. reason = "robot lower hand has wafer";
  135. return false;
  136. }
  137. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)Hand.Blade2))
  138. {
  139. reason = "robot upper hand has wafer";
  140. return false;
  141. }
  142. if (!CheckPreTaskComplete(materialId,schedulerSequences,sequenceIndex))
  143. {
  144. reason = "last wafer task has not completed";
  145. return false;
  146. }
  147. if (moveItem.SourceModule == ModuleName.Unknown)
  148. {
  149. UpdateUnkownSourceModule(schedulerSequences, moveItem, sequenceIndex);
  150. }
  151. if (moveItem.DestinationModule == ModuleName.Unknown)
  152. {
  153. bool result= UpdateUnkownTargetModule(schedulerSequences, moveItem, sequenceIndex);
  154. if (!result)
  155. {
  156. reason = "efem robot confirm target module failed";
  157. return false;
  158. }
  159. }
  160. if (!WaferManager.Instance.CheckHasWafer(moveItem.SourceModule, moveItem.SourceSlot))
  161. {
  162. reason = $"{moveItem.SourceModule} slot {moveItem.SourceSlot} has no wafer";
  163. return false;
  164. }
  165. if (WaferManager.Instance.CheckHasWafer(moveItem.DestinationModule, moveItem.DestinationSlot))
  166. {
  167. reason = $"{moveItem.DestinationModule} slot {moveItem.DestinationSlot} has wafer";
  168. return false;
  169. }
  170. if (ModuleHelper.IsVPWCell(moveItem.DestinationModule))
  171. {
  172. return CheckVpw(moveItem, schedulerSequences, sequenceIndex, ref reason);
  173. }
  174. if (ModuleHelper.IsPlatingCell(moveItem.DestinationModule))
  175. {
  176. return CheckPlatingCell(moveItem, ref reason);
  177. }
  178. return true;
  179. }
  180. /// <summary>
  181. /// 检验VPW
  182. /// </summary>
  183. /// <param name="moveItem"></param>
  184. /// <param name="schedulerSequences"></param>
  185. /// <param name="sequenceIndex"></param>
  186. /// <param name="reason"></param>
  187. /// <returns></returns>
  188. private bool CheckVpw(MoveItem moveItem,List<SchedulerSequence> schedulerSequences, int sequenceIndex,ref string reason)
  189. {
  190. VpwCellEntity vpwEntity = Singleton<RouteManager>.Instance.GetModule<VpwCellEntity>(moveItem.DestinationModule.ToString());
  191. if (vpwEntity != null)
  192. {
  193. bool nextVpwRecipe = false;
  194. if (sequenceIndex + 1 < schedulerSequences.Count)
  195. {
  196. SchedulerSequence nextSequence = schedulerSequences[sequenceIndex + 1];
  197. if (nextSequence.ModuleType == ModuleType.VPW)
  198. {
  199. nextVpwRecipe = true;
  200. }
  201. }
  202. if (nextVpwRecipe)
  203. {
  204. if (vpwEntity.State == (int)VPWCellState.WaitForRunRecipe)
  205. {
  206. return true;
  207. }
  208. else
  209. {
  210. if (vpwEntity.IsIdle)
  211. {
  212. SchedulerSequence nextSequence = schedulerSequences[sequenceIndex + 1];
  213. vpwEntity.CheckToPostMessage<VPWCellState, VPWCellMsg>(eEvent.INFO_VPW, Module.ToString(),
  214. (int)VPWCellMsg.Prepare, nextSequence.Recipe);
  215. }
  216. reason = $"{vpwEntity.Module} state is not WaitForRunRecipe";
  217. return false;
  218. }
  219. }
  220. else
  221. {
  222. VpwMainEntity vpwMainEntity = Singleton<RouteManager>.Instance.GetModule<VpwMainEntity>(ModuleName.VPWMain1.ToString());
  223. if (vpwMainEntity.IsIdle)
  224. {
  225. if (vpwMainEntity.IsChamberOpened)
  226. {
  227. return true;
  228. }
  229. else
  230. {
  231. vpwMainEntity.CheckToPostMessage<VPWMainState, VPWMainMsg>(eEvent.INFO_VPW, Module.ToString(), (int)VPWMainMsg.ChamberDown);
  232. reason = $"{vpwEntity.Module} chamber is not opened";
  233. return false;
  234. }
  235. }
  236. else
  237. {
  238. reason = $"{vpwMainEntity.Module} is not idle";
  239. return false;
  240. }
  241. }
  242. }
  243. else
  244. {
  245. reason = $"{moveItem.DestinationModule} is null";
  246. }
  247. return false;
  248. }
  249. /// <summary>
  250. /// 检验VPW
  251. /// </summary>
  252. /// <param name="moveItem"></param>
  253. /// <param name="schedulerSequences"></param>
  254. /// <param name="sequenceIndex"></param>
  255. /// <param name="reason"></param>
  256. /// <returns></returns>
  257. private bool CheckPlatingCell(MoveItem moveItem,ref string reason)
  258. {
  259. PlatingCellEntity entity = Singleton<RouteManager>.Instance.GetModule<PlatingCellEntity>(moveItem.DestinationModule.ToString());
  260. PlatingCellDevice platingCellDevice = DEVICE.GetDevice<PlatingCellDevice>(moveItem.DestinationModule.ToString());
  261. if (entity != null&&platingCellDevice!=null)
  262. {
  263. if (entity.State == (int)PlatingCellState.Idle&&platingCellDevice.PlatingCellDeviceData.ClamShellOpened)
  264. {
  265. return true;
  266. }
  267. else
  268. {
  269. if (entity.IsIdle)
  270. {
  271. entity.CheckToPostMessage<PlatingCellState, PlatingCellMsg>(eEvent.INFO_PLATINGCELL, Module.ToString(),
  272. (int)PlatingCellMsg.Unload);
  273. }
  274. reason = $"{moveItem.DestinationModule} state is not idle";
  275. return false;
  276. }
  277. }
  278. else
  279. {
  280. reason = $"{moveItem.DestinationModule} is null";
  281. }
  282. return false;
  283. }
  284. /// <summary>
  285. /// 更新未知源模块
  286. /// </summary>
  287. private void UpdateUnkownSourceModule(List<SchedulerSequence> schedulerSequences, MoveItem moveItem, int sequenceIndex)
  288. {
  289. if (moveItem.SourceModule == ModuleName.Unknown)
  290. {
  291. if (sequenceIndex >= 1 && sequenceIndex - 1 < schedulerSequences.Count)
  292. {
  293. SchedulerSequence preSchedulerSequence = schedulerSequences[sequenceIndex - 1];
  294. if (preSchedulerSequence != null && preSchedulerSequence.SchedulerModule != null)
  295. {
  296. moveItem.SourceModule = preSchedulerSequence.SchedulerModule.Module;
  297. }
  298. }
  299. }
  300. }
  301. /// <summary>
  302. /// 更新未知目标模块
  303. /// </summary>
  304. private bool UpdateUnkownTargetModule(List<SchedulerSequence> schedulerSequences, MoveItem moveItem, int sequenceIndex)
  305. {
  306. SchedulerSequence currentSchedulerSequence= schedulerSequences[sequenceIndex];
  307. if (sequenceIndex >= schedulerSequences.Count - 1)
  308. {
  309. return false;
  310. }
  311. SchedulerSequence nextSequence=schedulerSequences[sequenceIndex+1];
  312. ModuleName moduleName = ModuleName.Unknown;
  313. if (moveItem.DestinationType == ModuleType.SRD)
  314. {
  315. SRDEntity srd1Entity = Singleton<RouteManager>.Instance.GetModule<SRDEntity>(ModuleName.SRD1.ToString());
  316. if (srd1Entity != null&&srd1Entity.IsIdle&&srd1Entity.IsAuto&&WaferManager.Instance.CheckNoWafer(ModuleName.SRD1.ToString(),0))
  317. {
  318. moduleName = ModuleName.SRD1;
  319. }
  320. else
  321. {
  322. SRDEntity srd2Entity= Singleton<RouteManager>.Instance.GetModule<SRDEntity>(ModuleName.SRD2.ToString());
  323. if (srd2Entity != null && srd2Entity.IsIdle&&srd2Entity.IsAuto && WaferManager.Instance.CheckNoWafer(ModuleName.SRD2.ToString(), 0))
  324. {
  325. moduleName=ModuleName.SRD2;
  326. }
  327. }
  328. }
  329. else if (moveItem.DestinationType == ModuleType.PlatingCell)
  330. {
  331. DepRecipe depRecipe = (DepRecipe)nextSequence.Recipe;
  332. List<PlatingCellEntity> platingCellEntities= SchedulerSequenceManager.Instance.GetAvaiblePlatingCellList(depRecipe.Chemistry, nextSequence.SequenceType, nextSequence.WaferSize, true);
  333. if (platingCellEntities.Count > 0)
  334. {
  335. moduleName = platingCellEntities[0].Module;
  336. }
  337. }
  338. else
  339. {
  340. return false;
  341. }
  342. if (moduleName == ModuleName.Unknown)
  343. {
  344. return false;
  345. }
  346. else
  347. {
  348. if(WaferManager.Instance.CheckHasWafer(moduleName,0))
  349. {
  350. return false;
  351. }
  352. IModuleEntity moduleEntity = Singleton<RouteManager>.Instance.GetModule<IModuleEntity>(moduleName.ToString());
  353. if (moduleEntity==null)
  354. {
  355. return false;
  356. }
  357. if (moduleEntity.IsBusy)
  358. {
  359. return false;
  360. }
  361. moveItem.DestinationModule = moduleName;
  362. if (sequenceIndex + 1 < schedulerSequences.Count)
  363. {
  364. SchedulerSequence sequence = schedulerSequences[sequenceIndex + 1];
  365. if (sequence.SchedulerModule == null)
  366. {
  367. sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(moduleName);
  368. sequence.ModuleName = moduleName;
  369. }
  370. }
  371. }
  372. return true;
  373. }
  374. /// <summary>
  375. /// 检验上一个任务是否完成
  376. /// </summary>
  377. /// <param name="materialId"></param>
  378. /// <returns></returns>
  379. private bool CheckPreTaskComplete(string materialId, List<SchedulerSequence> schedulerSequences, int sequenceIndex)
  380. {
  381. WaferTask waferTask = WaferTaskManager.Instance.GetWaferTask(materialId);
  382. if(waferTask == null)
  383. {
  384. return true;
  385. }
  386. WaferInfo waferInfo = WaferManager.Instance.GetWaferByWaferId(materialId);
  387. if (waferInfo == null || waferInfo.IsEmpty)
  388. {
  389. return true;
  390. }
  391. if (!string.IsNullOrEmpty(waferTask.MateWaferTask))
  392. {
  393. return true;
  394. }
  395. if (sequenceIndex < 1)
  396. {
  397. return true;
  398. }
  399. SchedulerSequence preSequence=schedulerSequences[sequenceIndex-1];
  400. if (preSequence==null)
  401. {
  402. return true;
  403. }
  404. if (preSequence.ModuleName!=ModuleName.Aligner1)
  405. {
  406. return true;
  407. }
  408. List<string> platingCells = PlatingCellItemManager.Instance.InstalledModules;
  409. foreach(string item in platingCells)
  410. {
  411. PlatingCellEntity platingCellEntity = Singleton<RouteManager>.Instance.GetModule<PlatingCellEntity>(item);
  412. if (!platingCellEntity.IsAuto)
  413. {
  414. continue;
  415. }
  416. if (platingCellEntity.MetalWaferSize != (int)waferInfo.Size)
  417. {
  418. continue;
  419. }
  420. if (WaferManager.Instance.CheckHasWafer(item, 0))
  421. {
  422. return false;
  423. }
  424. }
  425. List<string> vpwCells = VpwCellItemManager.Instance.InstalledModules;
  426. foreach (string item in vpwCells)
  427. {
  428. VpwCellEntity entity = Singleton<RouteManager>.Instance.GetModule<VpwCellEntity>(item);
  429. if (!entity.IsAuto)
  430. {
  431. continue;
  432. }
  433. if (entity.VpwWaferSize != (int)waferInfo.Size)
  434. {
  435. continue;
  436. }
  437. if (WaferManager.Instance.CheckHasWafer(item, 0))
  438. {
  439. return false;
  440. }
  441. }
  442. return true;
  443. }
  444. public override void ResetTask()
  445. {
  446. base.ResetTask();
  447. RobotMoveHelper.Instance.Reset();
  448. }
  449. }
  450. }