VpwCellEntity.cs 27 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Fsm;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.OperationCenter;
  7. using Aitex.Core.RT.RecipeCenter;
  8. using Aitex.Core.RT.Routine;
  9. using Aitex.Core.Util;
  10. using Aitex.Core.Utilities;
  11. using CyberX12_RT.Modules.VpwCell;
  12. using MECF.Framework.Common.Alarm;
  13. using MECF.Framework.Common.CommonData;
  14. using MECF.Framework.Common.Equipment;
  15. using MECF.Framework.Common.Persistent.Temperature;
  16. using MECF.Framework.Common.Persistent.VpwCell;
  17. using MECF.Framework.Common.Persistent.VpwMain;
  18. using MECF.Framework.Common.RecipeCenter;
  19. using MECF.Framework.Common.Routine;
  20. using MECF.Framework.Common.SubstrateTrackings;
  21. using MECF.Framework.Common.ToolLayout;
  22. using PunkHPX8_Core;
  23. using PunkHPX8_RT.Devices.LinMot;
  24. using PunkHPX8_RT.Devices.VpwCell;
  25. using PunkHPX8_RT.Modules.VpwCell;
  26. using System;
  27. using System.Collections.Generic;
  28. using System.Linq;
  29. using System.Text;
  30. using System.Threading;
  31. using System.Threading.Tasks;
  32. namespace PunkHPX8_RT.Modules.VpwMain
  33. {
  34. public class VpwCellEntity : Entity, IEntity, IModuleEntity
  35. {
  36. #region 常量
  37. private const string STRATUS = "Stratus";
  38. private const string AUTO = "Auto";
  39. private const string MANUAL = "Manual";
  40. private const string DISABLED = "Disabled";
  41. private const string ENGINEERING = "Engineering";
  42. private const string PRODUCTION = "Production";
  43. #endregion
  44. #region 内部变量
  45. /// <summary>
  46. /// 持久化数值
  47. /// </summary>
  48. private VpwCellPersistentValue _persistentValue;
  49. /// <summary>
  50. /// VPW cell集合
  51. /// </summary>
  52. private List<VpwCellDevice> _vpwCellDevices = new List<VpwCellDevice>();
  53. /// <summary>
  54. /// Home Routine
  55. /// </summary>
  56. private VPWHomeRoutine _homeRoutine;
  57. /// <summary>
  58. /// Prepare
  59. /// </summary>
  60. private VpwPrepareRoutine _prepareRoutine;
  61. /// <summary>
  62. /// recipe routine
  63. /// </summary>
  64. private VpwRecipeRoutine _recipeRoutine;
  65. /// <summary>
  66. /// Chamber down
  67. /// </summary>
  68. private VpwChamberDownRoutine _chamberDownRoutine;
  69. /// <summary>
  70. /// Chamber Up
  71. /// </summary>
  72. private VpwChamberUpRoutine _chamberUpRoutine;
  73. /// <summary>
  74. /// 循环routine
  75. /// </summary>
  76. private VpwCycleManualProcessRecipeRoutine _cycleManualProcessRoutine;
  77. /// <summary>
  78. /// recipe完成次数
  79. /// </summary>
  80. private int _achievedCycle;
  81. /// <summary>
  82. /// Cycle次数
  83. /// </summary>
  84. private int _cycle = 0;
  85. /// <summary>
  86. /// 是否Retry
  87. /// </summary>
  88. private bool _isRetry = false;
  89. /// <summary>
  90. /// recipe时长
  91. /// </summary>
  92. private int _recipeTime;
  93. /// <summary>
  94. /// 当前Recipe
  95. /// </summary>
  96. private VpwRecipe _currentRecipe;
  97. /// <summary>
  98. /// run recipe start time
  99. /// </summary>
  100. private DateTime _runRecipeStartTime;
  101. /// <summary>
  102. /// run recipe complete time
  103. /// </summary>
  104. private DateTime _runRecipeCompleteTime;
  105. /// <summary>
  106. /// 工艺当前执行小步骤
  107. /// </summary>
  108. private string _currentStepState = "Init";
  109. /// <summary>
  110. /// 工艺当前执行大步骤
  111. /// </summary>
  112. private string _currentStatus = "Init";
  113. #endregion
  114. #region 属性
  115. public ModuleName Module { get; private set; }
  116. /// <summary>
  117. /// 是否Init
  118. /// </summary>
  119. public bool IsInit
  120. {
  121. get { return fsm.State == (int)VPWCellState.Init; }
  122. }
  123. /// <summary>
  124. /// 是否Idle
  125. /// </summary>
  126. public bool IsIdle
  127. {
  128. get
  129. {
  130. return fsm.State == (int)VPWCellState.Idle;
  131. }
  132. }
  133. /// <summary>
  134. /// 是否错误
  135. /// </summary>
  136. public bool IsError
  137. {
  138. get { return fsm.State == (int)VPWCellState.Error; }
  139. }
  140. /// <summary>
  141. /// 正在忙碌
  142. /// </summary>
  143. public bool IsBusy
  144. {
  145. get { return fsm.State == (int)VPWCellState.Initializing; }
  146. }
  147. /// <summary>
  148. /// 是否禁用
  149. /// </summary>
  150. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  151. /// <summary>
  152. /// 自动模式
  153. /// </summary>
  154. public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
  155. /// <summary>
  156. /// 自动模式
  157. /// </summary>
  158. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  159. /// <summary>
  160. /// 是否为工程模式
  161. /// </summary>
  162. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  163. /// <summary>
  164. /// 是否为产品模式
  165. /// </summary>
  166. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  167. /// <summary>
  168. /// recipe时长
  169. /// </summary>
  170. public int RecipeTime { get { return _recipeTime; } }
  171. /// <summary>
  172. /// 当前Vpw设置的WaferSize
  173. /// </summary>
  174. public int VpwWaferSize { get { return _persistentValue.VpwCellWaferSize; } }
  175. /// <summary>
  176. /// Wafer信息
  177. /// </summary>
  178. public WaferInfo WaferInfo { get { return WaferManager.Instance.GetWafer(Module, 0); } }
  179. /// <summary>
  180. /// 当前状态机状态
  181. /// </summary>
  182. public int State { get { return fsm.State; } }
  183. /// <summary>
  184. /// 当前执行步骤
  185. /// </summary>
  186. public string CurrentStepState { get { return _currentStepState; } }
  187. #endregion
  188. /// <summary>
  189. /// 构造函数
  190. /// </summary>
  191. /// <param name="module"></param>
  192. public VpwCellEntity(ModuleName module)
  193. {
  194. Module = module;
  195. }
  196. /// <summary>
  197. /// 初始化
  198. /// </summary>
  199. /// <returns></returns>
  200. protected override bool Init()
  201. {
  202. InitialFsm();
  203. InitializeParameter();
  204. InitializeRoutine();
  205. InitializeDATA();
  206. InitializeOperation();
  207. return true;
  208. }
  209. /// <summary>
  210. /// 初始化参数
  211. /// </summary>
  212. private void InitializeParameter()
  213. {
  214. WaferManager.Instance.SubscribeLocation(Module, 1);
  215. _persistentValue = VpwCellPersistentManager.Instance.GetPersistentValue(Module.ToString());
  216. if (_persistentValue == null)
  217. {
  218. LOG.WriteLog(eEvent.ERR_VPW, Module.ToString(), "Persistent Value Object is not exist");
  219. }
  220. _vpwCellDevices.Clear();
  221. VpwMainItem vpwMainItem = VpwMainItemManager.Instance.GetItem(ModuleName.VPWMain1.ToString());
  222. if (vpwMainItem == null || vpwMainItem.VpwCells == null)
  223. {
  224. return;
  225. }
  226. foreach (var item in vpwMainItem.VpwCells)
  227. {
  228. VpwCellDevice cellDevice = DEVICE.GetDevice<VpwCellDevice>(item.ModuleName);
  229. _vpwCellDevices.Add(cellDevice);
  230. }
  231. }
  232. /// <summary>
  233. /// 初始化状态机
  234. /// </summary>
  235. private void InitialFsm()
  236. {
  237. fsm = new StateMachine<VpwCellEntity>(Module.ToString(), (int)VPWCellState.Init, 100);
  238. fsm.EnableRepeatedMsg(true);
  239. AnyStateTransition(VPWCellMsg.Error, NullFunc, VPWCellState.Error);
  240. AnyStateTransition(VPWCellMsg.MainInitialize, NullFunc, VPWCellState.MainInitializing);
  241. //Initialized
  242. Transition(VPWCellState.Error, VPWCellMsg.Initialize, InitializeAll, VPWCellState.Initializing);
  243. Transition(VPWCellState.Aborting, VPWCellMsg.Initialize, InitializeAll, VPWCellState.Initializing);
  244. Transition(VPWCellState.Init, VPWCellMsg.Initialize, InitializeAll, VPWCellState.Initializing);
  245. Transition(VPWCellState.Idle, VPWCellMsg.Initialize, InitializeAll, VPWCellState.Initializing);
  246. Transition(VPWCellState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, VPWCellState.Idle);
  247. Transition(VPWCellState.Error, VPWCellMsg.EnterIdle, NullFunc, VPWCellState.Idle);
  248. Transition(VPWCellState.MainInitializing, VPWCellMsg.EnterIdle, NullFunc, VPWCellState.Idle);
  249. Transition(VPWCellState.Init, VPWCellMsg.EnterIdle, NullFunc, VPWCellState.Idle);
  250. Transition(VPWCellState.Idle, VPWCellMsg.EnterIdle, NullFunc, VPWCellState.Idle);
  251. //Enter Init
  252. Transition(VPWCellState.Idle, VPWCellMsg.Init, NullFunc, VPWCellState.Init);
  253. //Cycle Manual Process
  254. Transition(VPWCellState.Idle, VPWCellMsg.CycleProcessRecipe, CycleManualProcess, VPWCellState.CycleManualProcessing);
  255. Transition(VPWCellState.CycleManualProcessing, FSM_MSG.TIMER, CycleManualMonitor, VPWCellState.Idle);
  256. Transition(VPWCellState.CycleManualProcessing, VPWCellMsg.Abort, RunRecipeAbort, VPWCellState.Aborting);
  257. //Prepare
  258. Transition(VPWCellState.Idle, VPWCellMsg.Prepare, Prepare, VPWCellState.Preparing);
  259. Transition(VPWCellState.Preparing, FSM_MSG.TIMER, PrepareMonitor, VPWCellState.WaitForRunRecipe);
  260. Transition(VPWCellState.WaitForRunRecipe, VPWCellMsg.RunRecipe, RunRecipe, VPWCellState.RunReciping);
  261. Transition(VPWCellState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, VPWCellState.Idle);
  262. //ChamberUp
  263. Transition(VPWCellState.Idle, VPWCellMsg.ChamberUp, ChamberUp, VPWCellState.ChamberUping);
  264. Transition(VPWCellState.ChamberUping, FSM_MSG.TIMER, ChamberUpMonitor, VPWCellState.Idle);
  265. //ChamberDown
  266. Transition(VPWCellState.Idle, VPWCellMsg.ChamberDown, ChamberDown, VPWCellState.ChamberDowning);
  267. Transition(VPWCellState.ChamberDowning, FSM_MSG.TIMER, ChamberDownMonitor, VPWCellState.Idle);
  268. //Retry
  269. Transition(VPWCellState.Error, VPWCellMsg.Retry, NullFunc, VPWCellState.Retrying);
  270. Transition(VPWCellState.Retrying, FSM_MSG.TIMER, VpwCellRetry, VPWCellState.Retrying);
  271. Transition(VPWCellState.Retrying, VPWCellMsg.Prepare, RetryPrepare, VPWCellState.Preparing);
  272. Transition(VPWCellState.Retrying, VPWCellMsg.RunRecipe, RetryRunRecipe, VPWCellState.RunReciping);
  273. EnumLoop<VPWCellState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  274. EnumLoop<VPWCellMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  275. }
  276. /// <summary>
  277. /// 初始化数据
  278. /// </summary>
  279. private void InitializeDATA()
  280. {
  281. InitializeSVID();
  282. DATA.Subscribe($"{Module}.FsmState", () => ((VPWCellState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  283. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  284. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  285. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  286. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  287. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  288. DATA.Subscribe($"{Module}.AchievedCycle", () => _achievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  289. }
  290. /// <summary>
  291. /// 初始化SVID
  292. /// </summary>
  293. private void InitializeSVID()
  294. {
  295. DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  296. }
  297. /// <summary>
  298. /// 初始化Routine
  299. /// </summary>
  300. private void InitializeRoutine()
  301. {
  302. _homeRoutine = new VPWHomeRoutine(Module.ToString());
  303. _prepareRoutine=new VpwPrepareRoutine(Module.ToString());
  304. _recipeRoutine=new VpwRecipeRoutine(Module.ToString());
  305. _chamberDownRoutine=new VpwChamberDownRoutine(Module.ToString());
  306. _chamberUpRoutine=new VpwChamberUpRoutine(Module.ToString());
  307. _cycleManualProcessRoutine = new VpwCycleManualProcessRecipeRoutine(Module.ToString());
  308. }
  309. /// <summary>
  310. /// 初始化操作
  311. /// </summary>
  312. private void InitializeOperation()
  313. {
  314. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<VPWCellState, VPWCellMsg>(eEvent.ERR_VPW, Module.ToString(), (int)VPWCellMsg.Initialize); });
  315. OP.Subscribe($"{Module}.Prepare", (cmd, args) => { return CheckToPostMessage<VPWCellState, VPWCellMsg>(eEvent.ERR_VPW, Module.ToString(), (int)VPWCellMsg.Prepare); });
  316. OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<VPWCellState, VPWCellMsg>(eEvent.ERR_VPW, Module.ToString(), (int)VPWCellMsg.Abort); });
  317. OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
  318. {
  319. VpwRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<VpwRecipe>(args[0].ToString());
  320. if (recipe == null)
  321. {
  322. LOG.WriteLog(eEvent.ERR_VPW, Module.ToString(), $"{args[0]} recipe is null");
  323. return false;
  324. }
  325. object[] objects = new object[args.Length];
  326. objects[0] = recipe;
  327. for (int i = 1; i < args.Length; i++)
  328. {
  329. objects[i] = args[i];
  330. }
  331. return CheckToPostMessage<VPWCellState, VPWCellMsg>(eEvent.ERR_PREWET, Module.ToString(), (int)VPWCellMsg.CycleProcessRecipe, objects);
  332. });
  333. }
  334. #region InitializeAll
  335. /// <summary>
  336. /// Initialize
  337. /// </summary>
  338. /// <param name="param"></param>
  339. /// <returns></returns>
  340. private bool InitializeAll(object[] param)
  341. {
  342. if (_vpwCellDevices == null || _vpwCellDevices.Count == 0)
  343. {
  344. LOG.WriteLog(eEvent.ERR_VPW, Module.ToString(), "cell device is empty");
  345. return false;
  346. }
  347. foreach (var device in _vpwCellDevices)
  348. {
  349. VpwCellEntity vpwCellEntity = Singleton<RouteManager>.Instance.GetModule<VpwCellEntity>(device.Module);
  350. if (vpwCellEntity.IsBusy)
  351. {
  352. LOG.WriteLog(eEvent.ERR_VPW, Module.ToString(), $"cell device {device.Module} is busy,cannot initialize");
  353. return false;
  354. }
  355. }
  356. VpwMainEntity vpwMainEntity = Singleton<RouteManager>.Instance.GetModule<VpwMainEntity>(ModuleName.VPWMain1.ToString());
  357. if (vpwMainEntity!=null&&vpwMainEntity.IsBusy)
  358. {
  359. LOG.WriteLog(eEvent.ERR_VPW, Module.ToString(), $"VPWMain is busy,cannot initialize");
  360. return false;
  361. }
  362. return _homeRoutine.Start(_vpwCellDevices) == RState.Running;
  363. }
  364. /// <summary>
  365. /// Initialize 监控
  366. /// </summary>
  367. /// <param name="param"></param>
  368. /// <returns></returns>
  369. private bool InitializeAllMonitor(object[] param)
  370. {
  371. RState ret = _homeRoutine.Monitor();
  372. if (ret == RState.Failed || ret == RState.Timeout)
  373. {
  374. PostMsg(VPWCellMsg.Error);
  375. return false;
  376. }
  377. return ret == RState.End;
  378. }
  379. #endregion
  380. #region Prepare
  381. /// <summary>
  382. /// Prepare
  383. /// </summary>
  384. /// <param name="param"></param>
  385. /// <returns></returns>
  386. private bool Prepare(object[] param)
  387. {
  388. VpwRecipe recipe = param[0] as VpwRecipe;
  389. return _prepareRoutine.Start(recipe) == RState.Running;
  390. }
  391. /// <summary>
  392. /// Prepare 监控
  393. /// </summary>
  394. /// <param name="param"></param>
  395. /// <returns></returns>
  396. private bool PrepareMonitor(object[] param)
  397. {
  398. RState ret = _prepareRoutine.Monitor();
  399. if (ret == RState.Failed || ret == RState.Timeout)
  400. {
  401. AlarmList alarmList = new AlarmList(Module.ToString(), ((VPWCellState)fsm.State).ToString(), (int)VPWCellMsg.Prepare,
  402. _prepareRoutine.ErrorMsg, _prepareRoutine.ErrorStep, (int)AlarmType.Error);
  403. AlarmListManager.Instance.AddAlarm(alarmList);
  404. PostMsg(VPWCellMsg.Error);
  405. _currentStepState = "";
  406. return false;
  407. }
  408. _currentStepState = _prepareRoutine.CurrentStep;
  409. bool result= ret == RState.End;
  410. if (result)
  411. {
  412. _currentStepState = "";
  413. }
  414. return result;
  415. }
  416. /// <summary>
  417. /// Retry Prepare
  418. /// </summary>
  419. /// <param name="param"></param>
  420. /// <returns></returns>
  421. private bool RetryPrepare(object[] param)
  422. {
  423. int stepIndex = (int)param[0];
  424. bool result = _prepareRoutine.Retry(stepIndex) == RState.Running;
  425. return result;
  426. }
  427. #endregion
  428. #region Run Recipe
  429. /// <summary>
  430. /// run recipe
  431. /// </summary>
  432. /// <param name="param"></param>
  433. /// <returns></returns>
  434. private bool RunRecipe(object[] param)
  435. {
  436. VpwRecipe recipe = param[0] as VpwRecipe;
  437. return _recipeRoutine.Start(recipe) == RState.Running;
  438. }
  439. /// <summary>
  440. /// Prepare 监控
  441. /// </summary>
  442. /// <param name="param"></param>
  443. /// <returns></returns>
  444. private bool RunRecipeMonitor(object[] param)
  445. {
  446. RState ret = _recipeRoutine.Monitor();
  447. if (ret == RState.Failed || ret == RState.Timeout)
  448. {
  449. AlarmList alarmList = new AlarmList(Module.ToString(), ((VPWCellState)fsm.State).ToString(), (int)VPWCellMsg.RunRecipe,
  450. _recipeRoutine.ErrorMsg, _recipeRoutine.ErrorStep, (int)AlarmType.Error);
  451. AlarmListManager.Instance.AddAlarm(alarmList);
  452. PostMsg(VPWCellMsg.Error);
  453. _currentStepState = "";
  454. return false;
  455. }
  456. _currentStepState = _prepareRoutine.CurrentStep;
  457. bool result= ret == RState.End;
  458. if (result)
  459. {
  460. _currentStepState = "";
  461. }
  462. return result;
  463. }
  464. /// <summary>
  465. /// Retry RunRecipe
  466. /// </summary>
  467. /// <param name="param"></param>
  468. /// <returns></returns>
  469. private bool RetryRunRecipe(object[] param)
  470. {
  471. int stepIndex = (int)param[0];
  472. bool result = _recipeRoutine.Retry(stepIndex) == RState.Running;
  473. return result;
  474. }
  475. #endregion
  476. #region cycle manual process
  477. private bool CycleManualProcess(object[] param)
  478. {
  479. VpwRecipe recipe = param[0] as VpwRecipe;
  480. _cycle = (int)param[1];
  481. bool result = _cycleManualProcessRoutine.Start(param) == RState.Running;
  482. if (result)
  483. {
  484. _isRetry = false;
  485. if (CellItemRecipeTimeManager.Instance.ContainRecipe(recipe.Ppid))
  486. {
  487. _recipeTime = _cycle * CellItemRecipeTimeManager.Instance.GetRecipeTotalTime(recipe.Ppid);
  488. }
  489. else
  490. {
  491. _recipeTime = 0;
  492. }
  493. _currentRecipe = recipe;
  494. _runRecipeStartTime = DateTime.Now;
  495. }
  496. return result;
  497. }
  498. private bool CycleManualMonitor(object[] param)
  499. {
  500. RState state = _cycleManualProcessRoutine.Monitor();
  501. _currentStatus = _cycleManualProcessRoutine.CurrentStatus;
  502. _currentStepState = _cycleManualProcessRoutine.CurrentStateMachine;
  503. if (state == RState.Failed || state == RState.Timeout)
  504. {
  505. PostMsg(VPWCellMsg.Error);
  506. _currentStepState = "Error";
  507. _currentStatus = "Error";
  508. _runRecipeCompleteTime = DateTime.Now;
  509. _cycleManualProcessRoutine.VpwLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  510. //导出lotTrack数据
  511. VpwLotTrackUtil.ExportVpwLotTrack(Module.ToString(), _cycleManualProcessRoutine.VpwLotTrackDatas,
  512. _cycleManualProcessRoutine.VpwLotTrackHeaderDatas, IsAuto, _isRetry);
  513. return false;
  514. }
  515. _achievedCycle = _cycleManualProcessRoutine.GetAchievedCycle();
  516. bool result = state == RState.End;
  517. if (result)
  518. {
  519. double elapsedMilliseconds = _cycleManualProcessRoutine.ElapsedMilliseconds;
  520. int recipeTime = (int)Math.Floor(elapsedMilliseconds / _cycle / 1000);
  521. CellItemRecipeTimeManager.Instance.UpdateRecipeTime(_currentRecipe.Ppid, recipeTime);
  522. _runRecipeCompleteTime = DateTime.Now;
  523. _cycleManualProcessRoutine.VpwLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  524. //导出lotTrack数据
  525. VpwLotTrackUtil.ExportVpwLotTrack(Module.ToString(), _cycleManualProcessRoutine.VpwLotTrackDatas,
  526. _cycleManualProcessRoutine.VpwLotTrackHeaderDatas, IsAuto, _isRetry);
  527. }
  528. return result;
  529. }
  530. private bool RunRecipeAbort(object[] param)
  531. {
  532. _cycleManualProcessRoutine.Abort();
  533. VpwMainEntity vpwMainEntity = Singleton<RouteManager>.Instance.GetModule<VpwMainEntity>("VPWMain1");
  534. if (vpwMainEntity != null)
  535. {
  536. //把main的状态置为暂停
  537. vpwMainEntity.PostMsg(VPWMainMsg.Abort);
  538. }
  539. //记录LotTrack
  540. _runRecipeCompleteTime = DateTime.Now;
  541. _cycleManualProcessRoutine.VpwLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  542. VpwLotTrackUtil.ExportVpwLotTrack(Module.ToString(), _cycleManualProcessRoutine.VpwLotTrackDatas,
  543. _cycleManualProcessRoutine.VpwLotTrackHeaderDatas, IsAuto, _isRetry);
  544. return true;
  545. }
  546. #endregion
  547. #region VpwCell Retry
  548. /// <summary>
  549. /// VpwCell
  550. /// </summary>
  551. /// <param name="param"></param>
  552. /// <returns></returns>
  553. private bool VpwCellRetry(object[] param)
  554. {
  555. AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString());
  556. if (alarmList != null)
  557. {
  558. CheckToPostMessage<VPWCellState, VPWCellMsg>(eEvent.WARN_VPW, Module.ToString(), alarmList.ModuleCmd,
  559. alarmList.ModuleStep);
  560. }
  561. return false;
  562. }
  563. #endregion
  564. #region ChamberUp
  565. /// <summary>
  566. /// Chamber Up
  567. /// </summary>
  568. /// <param name="param"></param>
  569. /// <returns></returns>
  570. private bool ChamberUp(object[] param)
  571. {
  572. return _chamberUpRoutine.Start(param) == RState.Running;
  573. }
  574. /// <summary>
  575. /// ChamberUp Monitor
  576. /// </summary>
  577. /// <param name="param"></param>
  578. /// <returns></returns>
  579. private bool ChamberUpMonitor(object[] param)
  580. {
  581. RState state = _chamberUpRoutine.Monitor();
  582. if (state == RState.Failed || state == RState.Timeout)
  583. {
  584. PostMsg(VPWCellMsg.Error);
  585. return false;
  586. }
  587. return state == RState.End;
  588. }
  589. #endregion
  590. #region ChamberDown
  591. /// <summary>
  592. /// Chamber Down
  593. /// </summary>
  594. /// <param name="param"></param>
  595. /// <returns></returns>
  596. private bool ChamberDown(object[] param)
  597. {
  598. return _chamberDownRoutine.Start(param) == RState.Running;
  599. }
  600. /// <summary>
  601. /// ChamberUp Monitor
  602. /// </summary>
  603. /// <param name="param"></param>
  604. /// <returns></returns>
  605. private bool ChamberDownMonitor(object[] param)
  606. {
  607. RState state = _chamberDownRoutine.Monitor();
  608. if (state == RState.Failed || state == RState.Timeout)
  609. {
  610. PostMsg(VPWCellMsg.Error);
  611. return false;
  612. }
  613. return state == RState.End;
  614. }
  615. #endregion
  616. public bool Check(int msg, out string reason, params object[] args)
  617. {
  618. reason = "";
  619. return false;
  620. }
  621. public bool CheckAcked(int msg)
  622. {
  623. return false;
  624. }
  625. /// <summary>
  626. /// EnterInit
  627. /// </summary>
  628. public void EnterInit()
  629. {
  630. }
  631. public int Invoke(string function, params object[] args)
  632. {
  633. switch (function)
  634. {
  635. case "HomeAll":
  636. if (IsIdle)
  637. {
  638. return (int)FSM_MSG.NONE;
  639. }
  640. if (CheckToPostMessage<VPWCellState, VPWCellMsg>(eEvent.ERR_VPW, Module.ToString(), (int)VPWCellMsg.Initialize))
  641. {
  642. return (int)VPWCellMsg.Initialize;
  643. }
  644. else
  645. {
  646. return (int)FSM_MSG.NONE;
  647. }
  648. }
  649. return (int)FSM_MSG.NONE;
  650. }
  651. }
  652. }