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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Beckhoff.AxisProvider;
- using MECF.Framework.Common.Beckhoff.Station;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.Common.ToolLayout;
- using MECF.Framework.Common.Utilities;
- using PunkHPX8_Core;
- using PunkHPX8_RT.Devices.AXIS;
- using PunkHPX8_RT.Devices.Facilities;
- using PunkHPX8_RT.Devices.PlatingCell;
- using PunkHPX8_RT.Modules.Reservoir;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using static Mono.Security.X509.X520;
- namespace PunkHPX8_RT.Modules.PlatingCell
- {
- public class PlatingCellRunRecipeRoutine : RoutineBase, IRoutine
- {
- private enum RunRecipeStep
- {
- Delay,
- VerticalGotoRinse,
- CheckVerticalGotoRinse,
- InterRinse,
- CheckInterRinse,
- RotationStartEntry,
- RotationChangeToEntrySpeed,
- AngleTilt,
- VerticalGotoPlate,
- WaitEntryCurrentProtectedFromRinse,
- WaitEntryCurrentProtectedFromHome,
- EntryCurrentProtected,
- CheckVertical,
- End
- }
- #region 常量
- private const int ALL_DAY_MILLOSECONDS = 24 * 60 * 60 * 1000;
- /// <summary>
- /// ROTATION电机转速比例
- /// </summary>
- private const int SPEED_RATIO = 1;
- #endregion
- #region 内部变量
- /// <summary>
- /// recipe
- /// </summary>
- private DepRecipe _recipe;
- /// <summary>
- /// Platingcell device
- /// </summary>
- private PlatingCellDevice _device;
- /// <summary>
- /// Rotation axis
- /// </summary>
- private JetAxisBase _rotationAxis;
- /// <summary>
- ///rotation Provider对象
- /// </summary>
- private BeckhoffProviderAxis _rotationProviderAxis;
- /// cycle次数
- /// </summary>
- private int _cycle;
- /// <summary>
- /// 当前完成的Cycle次数
- /// </summary>
- private int _currentCycle;
- /// <summary>
- /// platingcell entity
- /// </summary>
- private PlatingCellEntity _platingCellEntity;
- /// <summary>
- /// 对应reservoir entity
- /// </summary>
- private ReservoirEntity _reservoirEntity;
- /// <summary>
- /// interbal rinse routien
- /// </summary>
- private PlatingCellInterRinseRoutine _interRinseRoutine;
- /// <summary>
- /// vertical axis entity
- /// </summary>
- private PlatingCellVerticalEntity _verticalEntity;
- /// <summary>
- /// vertical 轴的位置数据
- /// </summary>
- private BeckhoffStationAxis _verticalBeckhoffStation;
- /// <summary>
- /// recipe中是否存在电机反转
- /// </summary>
- private bool _isRecipeContainsRevserseRotation = false;
- /// <summary>
- /// run recipe 过程中电机会停的位置(需要根据recipe计算出来)
- /// </summary>
- private List<int> _targetPositionList = new List<int>();
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public PlatingCellRunRecipeRoutine(string module) : base(module)
- {
- _interRinseRoutine = new PlatingCellInterRinseRoutine(module);
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- Runner.Stop("Manual Abort");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- { //vertical去rinse位置
- Runner.RunIf(RunRecipeStep.VerticalGotoRinse, _recipe.RinseBeforeEntryEnable, () => { return StartVertical("Rinse",_recipe.IntervalRinseZoffset); }, _delay_1ms)
- .WaitWithStopConditionIf(RunRecipeStep.CheckVerticalGotoRinse, _recipe.RinseBeforeEntryEnable, CheckVerticalEnd, CheckVerticalError)
- //执行interval rinse
- .RunIf(RunRecipeStep.InterRinse, _recipe.RinseBeforeEntryEnable, () => { return _interRinseRoutine.Start(_recipe, _rotationAxis, _device, _rotationProviderAxis, _targetPositionList[0]) == RState.Running; })
- .WaitWithStopConditionIf(RunRecipeStep.CheckInterRinse, _recipe.RinseBeforeEntryEnable, CheckInterRinseEndStatus,
- () => CommonFunction.CheckRoutineStopState(_interRinseRoutine))
- //启动Rotation/Rotation 设置为entry 转速
- .RunIf(RunRecipeStep.RotationStartEntry, !_recipe.RinseBeforeEntryEnable, RotationStartEntry, _delay_1ms) //没有intercal rinse 在entry开始的时候启动rotation
- .RunIf(RunRecipeStep.RotationChangeToEntrySpeed, _recipe.RinseBeforeEntryEnable, () => { return ChangeSpeed(_recipe.EntrySpinSpeed); }, _delay_1ms) //有intercal rinse 直接变速
- //Angle tilt 操作
- .Run(RunRecipeStep.AngleTilt, _device.HeadtTiltAction, () => { return _device.PlatingCellDeviceData.HeadTilt; }, _delay_1s)
- .Run(RunRecipeStep.VerticalGotoPlate, () => { return StartVertical("Plate", _recipe.EntryZoffset); }, _delay_1ms)
- .DelayIf(RunRecipeStep.WaitEntryCurrentProtectedFromRinse, !_recipe.RinseBeforeEntryEnable,CalculateVerticaMoveTime("Rinse","Entry") - 110 > 0 ? CalculateVerticaMoveTime("Rinse", "Entry"):0) //提前110ms,多10ms
- .DelayIf(RunRecipeStep.WaitEntryCurrentProtectedFromHome, _recipe.RinseBeforeEntryEnable,CalculateVerticaMoveTime("Home","Entry") - 110 > 0 ? CalculateVerticaMoveTime("Home", "Entry") : 0)
- .End(RunRecipeStep.End, NullFun);
- return Runner.Status;
- }
- /// <summary>
- /// 计算vertical 从一个位置移动到另一个位置用时
- /// </summary>
- /// <param name="sourceLocation"></param>
- /// <param name="destinationLocation"></param>
- /// <returns>返回值单位毫秒</returns>
- private int CalculateVerticaMoveTime(string sourceLocation,string destinationLocation)
- {
- Station sourceStation = _verticalBeckhoffStation.Stations.FirstOrDefault(p => p.Name == $"{_verticalEntity.Module}.{sourceLocation}");
- Station destinationStation = _verticalBeckhoffStation.Stations.FirstOrDefault(p => p.Name == $"{_verticalEntity.Module}.{destinationLocation}");
- Double.TryParse(sourceStation.Position, out double sourcePosition);
- Double.TryParse(destinationStation.Position, out double destinationPosition);
- double time = Math.Abs(destinationPosition - sourcePosition) / _verticalEntity.MotionData.ProfileVelocity * 10;
- if (time <= 0)
- {
- NotifyError(eEvent.WARN_PLATINGCELL, "Calculate Vertica Move Time is 0", 0);
- return 0;
- }
- return (int)time;
- }
- /// <summary>
- /// change speed
- /// </summary>
- /// <returns></returns>
- private bool ChangeSpeed(int speed) //参数speed单位是rmp
- {
- double realSpeed = BeckhoffVelocityUtil.ConvertVelocityToDegPerSecondByRPM(speed);
- bool result = _rotationAxis.ChangeSpeed((int)realSpeed);
- if (!result)
- {
- NotifyError(eEvent.ERR_PLATINGCELL, "Change Speed failed", 0);
- return false;
- }
- return true;
- }
- private bool CheckInterRinseEndStatus()
- {
- bool result = CommonFunction.CheckRoutineEndState(_interRinseRoutine);
- SubRoutineStep = _interRinseRoutine.CurrentStep;
- return result;
- }
- /// <summary>
- /// rotation 从entry步骤开始旋转
- /// </summary>
- /// <returns></returns>
- private bool RotationStartEntry()
- {
- bool result = _rotationAxis.ProfilePosition(_targetPositionList[0], _recipe.IntervalRinseSpeed * SPEED_RATIO, 0, 0);
- if (!result)
- {
- NotifyError(eEvent.ERR_PLATINGCELL, "Start Rotation is failed", 0);
- return false;
- }
- return true;
- }
- /// <summary>
- /// vertical 运行
- /// </summary>
- /// <param name="positionName"></param> 目标位置名称
- /// <param name="offset"></param> 偏移量
- /// <returns></returns>
- private bool StartVertical(string positionName,double offset)
- {
- double position = 0;
- Station station = _verticalBeckhoffStation.Stations.FirstOrDefault(p => p.Name == $"{_verticalEntity.Module}.{positionName}");
- if (station != null)
- {
- if(!Double.TryParse(station.Position, out position))
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "vertical station position is error");
- return false;
- }
- }
- else
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"vertical station {_verticalEntity.Module}.{positionName} is null");
- return false;
- }
- return _verticalEntity.CheckToPostMessage<PlatingCellVerticalState, PlatingCellVerticalEntity.VerticalMsg>(Aitex.Core.RT.Log.eEvent.INFO_PLATINGCELL,
- Module, (int)PlatingCellVerticalEntity.VerticalMsg.Position, position + offset);
- }
- /// <summary>
- /// 检验垂直电机是否运动完成
- /// </summary>
- /// <returns></returns>
- private bool CheckVerticalEnd()
- {
- return _verticalEntity.IsIdle;
- }
- /// <summary>
- /// 检验垂直是否出现错误
- /// </summary>
- /// <returns></returns>
- private bool CheckVerticalError()
- {
- return _verticalEntity.IsError;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _recipe = objs[0] as DepRecipe;
- if (_recipe == null)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module, "recipe is null");
- return RState.Failed;
- }
- if (objs.Length > 1)
- {
- _cycle = (int)objs[1];
- }
- _device = DEVICE.GetDevice<PlatingCellDevice>(Module);
- _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
- _rotationProviderAxis = BeckhoffAxisProviderManager.Instance.GetAxisProvider($"{Module}.Rotation");
- if (_rotationProviderAxis == null)
- {
- NotifyError(eEvent.ERR_PLATINGCELL, $"{Module}.Rotation Provider is not exist", 0);
- return RState.Failed;
- }
- //获取vertical entity
- string vertical = ModuleMatcherManager.Instance.GetPlatingVerticalByCell(Module);
- _verticalEntity = Singleton<RouteManager>.Instance.GetModule<PlatingCellVerticalEntity>(vertical);
- //获取platingcell eneity
- _platingCellEntity = Singleton<RouteManager>.Instance.GetModule<PlatingCellEntity>(Module);
- //获取对应reservoir eneity
- string reservoir = ReservoirItemManager.Instance.GetReservoirByPlatingCell(Module);
- _reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
- //获取vertical station信息对象
- _verticalBeckhoffStation = BeckhoffStationLocationManager.Instance.GetStationAxis($"{_verticalEntity.Module}", "Vertical");
- if (!CheckPreCondition())
- {
- return RState.Failed;
- }
- CalculatVerticalPosition(_recipe);
- _currentCycle = 0;
-
- return Runner.Start(Module, "Run Recipe");
- }
- /// <summary>
- /// 根据dep recipe计算出整个电镀过程中Rotation profile position可能去到的位置
- /// </summary>
- private void CalculatVerticalPosition(DepRecipe recipe)
- {
- foreach(var item in recipe.DepSteps)
- {
- if (item.BiDireaction)
- {
- _isRecipeContainsRevserseRotation = true;
- }
- else
- {
- continue;
- }
- }
- //不存在双向旋转直接给roation一个很大的值,电镀完成后再停止
- if (!_isRecipeContainsRevserseRotation)
- {
- _targetPositionList.Add(12 * 60 * 60 * 500 * 6); //以500rmp 运行12个小时的位置
- }
- else
- {
- }
- }
- /// <summary>
- /// 检验前置条件
- /// </summary>
- /// <returns></returns>
- private bool CheckPreCondition()
- {
- if (_recipe == null)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Recipe is null");
- return false;
- }
- //if (_recipe.DepSteps.Count == 0)
- //{
- // LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Recipe DepSteps count is 0");
- // return false;
- //}
- CheckAxisHome();
- CheckFacility();
- CheckModuleAndReservoir();
- return true;
- }
- private bool CheckModuleAndReservoir()
- {
- if (!_platingCellEntity.IsIdle)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"{Module} is not initialized");
- return false;
- }
- if (!_reservoirEntity.IsIdle)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Releated reseroivr is not initialized");
- return false;
- }
- if (!_reservoirEntity.TemperatureReached)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Releated reseroivr temperature is not reached");
- return false;
- }
- if ("Manual".Equals(_reservoirEntity.PersistentValue.OperatingMode) && !WaferManager.Instance.CheckHasWafer(Module, 0))
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Run recipe in manual must has wafer!");
- return false;
- }
- return true;
- }
- /// <summary>
- /// 检查马达是否上电且home
- /// </summary>
- /// <returns></returns>
- private bool CheckAxisHome()
- {
- if (!_rotationAxis.IsSwitchOn)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Rotation Axis is off");
- return false;
- }
- if (!_rotationAxis.IsHomed)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Rotation Axis is not home");
- return false;
- }
- if (!_verticalEntity.IsIdle)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Vertical Axis is not home");
- return false;
- }
- return true;
- }
- /// <summary>
- /// 检查facility
- /// </summary>
- /// <returns></returns>
- private bool CheckFacility()
- {
- SystemFacilities systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");
- if (systemFacilities == null)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility is null");
- return false;
- }
- if (!systemFacilities.CDAEnable)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility CDA is off");
- return false;
- }
- if (!systemFacilities.N2Enable)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility N2 is off");
- return false;
- }
- if (!systemFacilities.DIFillEnable)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility DIW is off");
- return false;
- }
- if (systemFacilities.FacilitiesDataDic["CDA1Pressure"].IsError || systemFacilities.FacilitiesDataDic["CDA2Pressure"].IsError)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility CDA Data is in errro range");
- return false;
- }
- if (systemFacilities.FacilitiesDataDic["Nitrogen1APressure"].IsError ||
- systemFacilities.FacilitiesDataDic["Nitrogen1BPressure"].IsError ||
- systemFacilities.FacilitiesDataDic["Nitrogen2APressure"].IsError ||
- systemFacilities.FacilitiesDataDic["Nitrogen2BPressure"].IsError)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility N2 Data is in errro range");
- return false;
- }
- if (systemFacilities.FacilitiesDataDic["DiWaterPressure"].IsError)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility Diw Pressure value is in errro range");
- return false;
- }
- return true;
- }
- }
- }
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