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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Beckhoff.AxisProvider;
- using MECF.Framework.Common.Beckhoff.Station;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.Common.ToolLayout;
- using MECF.Framework.Common.Utilities;
- using PunkHPX8_Core;
- using PunkHPX8_RT.Devices.AXIS;
- using PunkHPX8_RT.Devices.Facilities;
- using PunkHPX8_RT.Devices.PlatingCell;
- using PunkHPX8_RT.Modules.Reservoir;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace PunkHPX8_RT.Modules.PlatingCell
- {
- public class DummyRinseRunRecipeRoutine : RoutineBase, IRoutine
- {
- private enum RunRecipeStep
- {
- LoopStart,
-
- //interval rinse
- LoopCheckVerticalIntervalRinseStation,
- IntervalRinseOpenRinseValve,
- StartRotation,
- WaitRotation,
- IntervalRinseCloseRinseValve,
- //reclaim
- LoopCheckVerticalReclaimStation,
- ReclaimStartRotation,
- ReclaimChangeRotationSpeed,
- ReclaimRotationDelay,
- //rinse
- LoopCheckVerticalRinseStation,
- RinseOpenRinseValve,
- RinseChangeRotationSpeed,
- RinseRotationDelay,
- RinseCloseRinseValve,
- //Dry
- LoopCheckVerticalDryStation,
- DryChangeRotationSpeed,
- DryRotationDelay,
- RotationStop,
- CheckRotationStoped,
- LoopEnd,
- End
- }
- #region 常量
- private const int ALL_DAY_MILLOSECONDS = 24 * 60 * 60 * 1000;
- /// <summary>
- /// ROTATION电机转速比例
- /// </summary>
- private const int SPEED_RATIO = 1;
- /// <summary>
- /// 电机以500rmp 运行12个小时的位置
- /// </summary>
- private const int LARGETARGETPOSITION = 12 * 60 * 60 * 500 * 6;
- #endregion
- #region 内部变量
- /// <summary>
- /// recipe
- /// </summary>
- private DqdrRecipe _recipe;
- /// <summary>
- /// 匹配的platingcell的dep recipe
- /// </summary>
- private DepRecipe _matchPlatingCellDepDeprecipe;
- /// <summary>
- /// Platingcell device
- /// </summary>
- private PlatingCellDevice _device;
- /// <summary>
- /// Rotation axis
- /// </summary>
- private JetAxisBase _rotationAxis;
- /// <summary>
- ///rotation Provider对象
- /// </summary>
- private BeckhoffProviderAxis _rotationProviderAxis;
- /// cycle次数
- /// </summary>
- private int _cycle;
- /// <summary>
- /// 当前完成的Cycle次数
- /// </summary>
- private int _currentCycle;
- /// <summary>
- /// platingcell entity
- /// </summary>
- private PlatingCellEntity _platingCellEntity;
- /// <summary>
- /// 另一边的platingcell entity
- /// </summary>
- private PlatingCellEntity _matchPlatingCellEntity;
- /// <summary>
- /// 对应reservoir entity
- /// </summary>
- private ReservoirEntity _reservoirEntity;
- /// <summary>
- /// vertical axis entity
- /// </summary>
- private PlatingCellVerticalEntity _verticalEntity;
- /// <summary>
- /// run recipe 过程中电机会停的位置(需要根据recipe计算出来)
- /// </summary>
- #region 属性
- #endregion
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public DummyRinseRunRecipeRoutine(string module) : base(module)
- {
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- Runner.Stop("Manual Abort");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- Runner.LoopStart(RunRecipeStep.LoopStart, "Loop Start Cycle Run DummyRinse Recipe Routine", _cycle, NullFun, _delay_1ms)
- //interval risne
- .LoopRunIfWithStopStatus(RunRecipeStep.LoopCheckVerticalIntervalRinseStation, _matchPlatingCellEntity.IsInRecipe && _recipe.RinseBeforeEntryEnable,
- () => CheckVerticalInStation("Rinse", _matchPlatingCellDepDeprecipe.IntervalRinseZoffset), () => { return _matchPlatingCellEntity.IsError; })
- .LoopRunIf(RunRecipeStep.IntervalRinseOpenRinseValve, _matchPlatingCellEntity.IsInRecipe && _recipe.RinseBeforeEntryEnable, _device.RinseEnableAction, _delay_1ms)
- .LoopRunIf(RunRecipeStep.StartRotation, _matchPlatingCellEntity.IsInRecipe && _recipe.RinseBeforeEntryEnable, () => { return StartRotation(LARGETARGETPOSITION); }, _delay_1ms)
- .LoopDelayIf(RunRecipeStep.WaitRotation, _matchPlatingCellEntity.IsInRecipe && _recipe.RinseBeforeEntryEnable, _recipe.IntervalRinseTime * 1000)
- .LoopRunIf(RunRecipeStep.IntervalRinseCloseRinseValve, _matchPlatingCellEntity.IsInRecipe && _recipe.RinseBeforeEntryEnable, _device.RinseDisableAction, _delay_1ms)
- //Reclaim
- .LoopRunIfWithStopStatus(RunRecipeStep.LoopCheckVerticalReclaimStation, _matchPlatingCellEntity.IsInRecipe,
- () => CheckVerticalInStation("Reclaim", _matchPlatingCellDepDeprecipe.ReclaimZoffset), () => { return _matchPlatingCellEntity.IsError; })
- .LoopRunIf(RunRecipeStep.ReclaimStartRotation, _matchPlatingCellEntity.IsInRecipe && !_recipe.RinseBeforeEntryEnable, () => { return StartReclaimRotation(LARGETARGETPOSITION); }, _delay_1ms)
- .LoopRunIf(RunRecipeStep.ReclaimChangeRotationSpeed, _matchPlatingCellEntity.IsInRecipe && _recipe.RinseBeforeEntryEnable, () => { return ChangeRotationSpeed(_recipe.ReclaimSpeed); }, _delay_1ms)
- .LoopDelayIf(RunRecipeStep.ReclaimRotationDelay, _matchPlatingCellEntity.IsInRecipe , _recipe.ReclaimTime * 1000)
- //Rinse
- .LoopRunIfWithStopStatus(RunRecipeStep.LoopCheckVerticalRinseStation, _matchPlatingCellEntity.IsInRecipe,
- () => CheckVerticalInStation("Rinse", _matchPlatingCellDepDeprecipe.RinseZoffset), () => { return _matchPlatingCellEntity.IsError; })
- .LoopRunIf(RunRecipeStep.RinseOpenRinseValve, _matchPlatingCellEntity.IsInRecipe, _device.RinseEnableAction, _delay_1ms)
- .LoopRunIf(RunRecipeStep.RinseChangeRotationSpeed, _matchPlatingCellEntity.IsInRecipe, () => { return ChangeRotationSpeed(_recipe.RinseSpeed); }, _delay_1ms)
- .LoopDelayIf(RunRecipeStep.RinseRotationDelay, _matchPlatingCellEntity.IsInRecipe, _recipe.RinseTime * 1000)
- .LoopRunIf(RunRecipeStep.RinseCloseRinseValve, _matchPlatingCellEntity.IsInRecipe, _device.RinseDisableAction, _delay_1ms)
- //Dry
- .LoopRunIfWithStopStatus(RunRecipeStep.LoopCheckVerticalDryStation, _matchPlatingCellEntity.IsInRecipe && _matchPlatingCellDepDeprecipe.RinseZoffset != _matchPlatingCellDepDeprecipe.DryZoffset,
- () => CheckVerticalInStation("Rinse", _matchPlatingCellDepDeprecipe.DryZoffset), () => { return _matchPlatingCellEntity.IsError; })
- .LoopRunIf(RunRecipeStep.DryChangeRotationSpeed, _matchPlatingCellEntity.IsInRecipe, () => { return ChangeRotationSpeed(_recipe.DrySpeed); }, _delay_1ms)
- .LoopDelayIf(RunRecipeStep.DryRotationDelay, _matchPlatingCellEntity.IsInRecipe, _recipe.DryTime * 1000)
- .LoopRun(RunRecipeStep.RotationStop, _rotationAxis.StopPositionOperation, _delay_1ms)
- .LoopRunWithStopStatus(RunRecipeStep.CheckRotationStoped, CheckRotationPositionStatus, CheckRotationPositionRunStop)
- .LoopEnd(RunRecipeStep.LoopEnd, UpdateCycleCount, _delay_1ms)
- .End(RunRecipeStep.End, NullFun);
- return Runner.Status;
- }
- /// <summary>
- /// 查询vertical是否到达某个位置
- /// </summary>
- /// <returns></returns>
- private bool CheckVerticalInStation(string station,double offset)
- {
- return _verticalEntity.ChecVerticalInPosition(station, offset);
- }
- /// <summary>
- /// rotation开始旋转
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool StartRotation(int targetPosition)
- {
- bool result = _rotationAxis.ProfilePosition(targetPosition, _recipe.IntervalRinseSpeed * SPEED_RATIO * 6, 0, 0); //rpm->deg/s
- if (!result)
- {
- NotifyError(eEvent.ERR_PLATINGCELL, "Start Rotation is failed", 0);
- return false;
- }
- return true;
- }
- /// <summary>
- /// rotation开始旋转以Reclaim时的转速
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool StartReclaimRotation(int targetPosition)
- {
- bool result = _rotationAxis.ProfilePosition(targetPosition, _recipe.ReclaimSpeed * SPEED_RATIO * 6, 0, 0); //rpm->deg/s
- if (!result)
- {
- NotifyError(eEvent.ERR_PLATINGCELL, "Start Rotation is failed", 0);
- return false;
- }
- return true;
- }
- /// <summary>
- /// rotation改变速度
- /// </summary>
- /// <param name="speed"></param>
- /// <returns></returns>
- private bool ChangeRotationSpeed(int speed)
- {
- double _scale = _rotationAxis.ScaleFactor;
- speed = (int)Math.Round(_scale * BeckhoffVelocityUtil.ConvertVelocityToDegPerSecondByRPM(speed), 0);
- return _rotationAxis.ChangeSpeed(speed);
- }
- /// <summary>
- /// 检验Rotation移动状态
- /// </summary>
- /// <returns></returns>
- private bool CheckRotationPositionStatus()
- {
- return _rotationAxis.Status == RState.End;
- }
- /// <summary>
- /// 检验Rotation是否运动失败
- /// </summary>
- /// <returns></returns>
- private bool CheckRotationPositionRunStop()
- {
- return _rotationAxis.Status == RState.Failed || _rotationAxis.Status == RState.Timeout;
- }
- /// 统计完成的Cycle次数
- /// </summary>
- /// <returns></returns>
- private bool UpdateCycleCount()
- {
- _currentCycle += 1;
- return true;
- }
- /// <summary>
- /// 获取当前Cycle次数
- /// </summary>
- /// <returns></returns>
- public int GetCurrentCycle()
- {
- return _currentCycle;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _recipe = objs[0] as DqdrRecipe;
- if (_recipe == null)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module, "recipe is null");
- return RState.Failed;
- }
- if (objs.Length > 2)
- {
- _cycle = (int)objs[2];
- }
- _device = DEVICE.GetDevice<PlatingCellDevice>(Module);
- _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
- _rotationProviderAxis = BeckhoffAxisProviderManager.Instance.GetAxisProvider($"{Module}.Rotation");
- if (_rotationProviderAxis == null)
- {
- NotifyError(eEvent.ERR_PLATINGCELL, $"{Module}.Rotation Provider is not exist", 0);
- return RState.Failed;
- }
- //获取相匹配的platingcell 的 vertical entity
- string MatchModule = ModuleMatcherManager.Instance.GetMatcherByModule(Module);
- string vertical = ModuleMatcherManager.Instance.GetPlatingVerticalByCell(MatchModule);
- _verticalEntity = Singleton<RouteManager>.Instance.GetModule<PlatingCellVerticalEntity>(vertical);
- //获取platingcell eneity
- _platingCellEntity = Singleton<RouteManager>.Instance.GetModule<PlatingCellEntity>(Module);
- //获取match的platingcell的dep recipe
- _matchPlatingCellEntity = Singleton<RouteManager>.Instance.GetModule<PlatingCellEntity>(MatchModule);
- _matchPlatingCellDepDeprecipe = _matchPlatingCellEntity.CurrentRecipe;
- //获取对应reservoir eneity
- string reservoir = ReservoirItemManager.Instance.GetReservoirByPlatingCell(Module);
- _reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
- if (!CheckPreCondition())
- {
- return RState.Failed;
- }
- _currentCycle = 0;
- return Runner.Start(Module, "PlatingCell Run DummyRecipe Recipe");
- }
-
- /// <summary>
- /// 检验前置条件
- /// </summary>
- /// <returns></returns>
- private bool CheckPreCondition()
- {
- if (_recipe == null)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Recipe is null");
- return false;
- }
- if (!CheckAxisHome())
- {
- NotifyError(eEvent.ERR_PLATINGCELL, "Check Axis home error", 0);
- return false;
- }
- if (!CheckFacility())
- {
- NotifyError(eEvent.ERR_PLATINGCELL, "Check facility error", 0);
- return false;
- }
- if (!CheckModuleAndReservoir())
- {
- NotifyError(eEvent.ERR_PLATINGCELL, "Check ModuleAndReservoir error", 0);
- return false;
- }
- return true;
- }
- private bool CheckModuleAndReservoir()
- {
- if (!_platingCellEntity.IsIdle)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"{Module} is not initialized");
- return false;
- }
- if (!_reservoirEntity.IsIdle)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Releated reseroivr is not initialized");
- return false;
- }
- if (!_reservoirEntity.TemperatureReached)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Releated reseroivr temperature is not reached");
- return false;
- }
- if ("Manual".Equals(_reservoirEntity.PersistentValue.OperatingMode) && !WaferManager.Instance.CheckHasWafer(Module, 0))
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, $"Run recipe in manual must has wafer!");
- return false;
- }
- return true;
- }
- /// <summary>
- /// 检查马达是否上电且home
- /// </summary>
- /// <returns></returns>
- private bool CheckAxisHome()
- {
- if (!_rotationAxis.IsSwitchOn)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Rotation Axis is off");
- return false;
- }
- if (!_rotationAxis.IsHomed)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Rotation Axis is not home");
- return false;
- }
- if (!_verticalEntity.AxisIsHome)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Vertical Axis is not home");
- return false;
- }
- return true;
- }
- /// <summary>
- /// 检查facility
- /// </summary>
- /// <returns></returns>
- private bool CheckFacility()
- {
- SystemFacilities systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");
- if (systemFacilities == null)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility is null");
- return false;
- }
- if (!systemFacilities.CDAEnable)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility CDA is off");
- return false;
- }
- if (!systemFacilities.N2Enable)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility N2 is off");
- return false;
- }
- if (!systemFacilities.DIFillEnable)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility DIW is off");
- return false;
- }
- if (systemFacilities.FacilitiesDataDic["CDA1Pressure"].IsError || systemFacilities.FacilitiesDataDic["CDA2Pressure"].IsError)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility CDA Data is in error range");
- return false;
- }
- if (systemFacilities.FacilitiesDataDic["Nitrogen1APressure"].IsError ||
- systemFacilities.FacilitiesDataDic["Nitrogen1BPressure"].IsError ||
- systemFacilities.FacilitiesDataDic["Nitrogen2APressure"].IsError ||
- systemFacilities.FacilitiesDataDic["Nitrogen2BPressure"].IsError)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility N2 Data is in error range");
- return false;
- }
- if (systemFacilities.FacilitiesDataDic["DiWaterPressure"].IsError)
- {
- LOG.WriteLog(eEvent.ERR_PLATINGCELL, Module, "Facility Diw Pressure value is in error range");
- return false;
- }
- return true;
- }
- }
- }
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