| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523 | using Aitex.Core.Common;using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using PunkHPX8_Core;using PunkHPX8_RT.Devices.AXIS;using PunkHPX8_RT.Devices.Facilities;using PunkHPX8_RT.Devices.SRD;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Routine;using MECF.Framework.Common.SubstrateTrackings;namespace PunkHPX8_RT.Modules.SRD{    public class SRDUnloaderRoutine : RoutineBase, IRoutine    {                 private enum SRDUnloaderStep        {            Unload_FlippersOut,            Unload_ChuckVacuumOff,            Unload_ChuckATMOn,            Unload_CheckVacuum,            Unload_LiftUpOn,            Unload_CheckWaferPresent,            Unload_OpenDoor,            End        }        #region 常量         private const int RETRY_TIMES = 3;        #endregion        #region 内部变量        /// <summary>        /// Rotation Axis        /// </summary>        private JetAxisBase _rotationAxis;        /// <summary>        /// SRD Common        /// </summary>        private SrdCommonDevice _srdCommon;        /// <summary>        /// Total SRD        /// </summary>        private TotalSRDDevice _totalSRDDevice;        /// <summary>        /// System Facility        /// </summary>        private SystemFacilities _systemFacilities;        /// <summary>        /// 当前WaferSize        /// </summary>        private int _waferSize = 200;        /// <summary>        /// 当前Retry次数        /// </summary>        private int _currentRetryTimes = 0;        /// <summary>        /// 真空值        /// </summary>        private int _vacuumOffLimit = 0;        /// <summary>        /// Process Error状态        /// </summary>        private bool _isProcessError = false;        #endregion        #region 属性        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public SRDUnloaderRoutine(string module) : base(module)        {        }        /// <summary>        /// 中止        /// </summary>        public void Abort()        {            Runner.Stop("SRD Loader Abort");        }        /// <summary>        /// 监控        /// </summary>        /// <returns></returns>        public RState Monitor()        {            Runner.RunIf(SRDUnloaderStep.Unload_FlippersOut, _isProcessError, FlippersOut, CheckFlippersOutEndStatus, CheckFlippersOutStopStatus)                .Run(SRDUnloaderStep.Unload_ChuckVacuumOff, ChuckVacuumOff, CheckChuckVacuumOffEndStatus, CheckChuckVacuumOffStopStatus)                .Run(SRDUnloaderStep.Unload_ChuckATMOn, ChuckATMOn, CheckChuckATMEndStatus, CheckChuckATMStopStatus)                .WaitWithStopCondition(SRDUnloaderStep.Unload_CheckVacuum, CheckVacuumEndStatus, CheckVacuumStopStatus)                .Run(SRDUnloaderStep.Unload_LiftUpOn, LiftUpOn, CheckLiftUpOnEndStatus, CheckLiftUpOnStopStatus)                .Run(SRDUnloaderStep.Unload_CheckWaferPresent, CheckWaferPresent, _delay_1ms)                .Run(SRDUnloaderStep.Unload_OpenDoor, OpenDoor, CheckDoorOpenedEndStatus, CheckDoorOpenedStopStatus)                .End(SRDUnloaderStep.End, NullFun, _delay_1ms);            return Runner.Status;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            _srdCommon = DEVICE.GetDevice<SrdCommonDevice>($"{Module}.Common");            _totalSRDDevice = DEVICE.GetDevice<TotalSRDDevice>("SRD");            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");            _systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");            _vacuumOffLimit = SC.GetValue<int>("SRD.ChuckVacuumOffLimit");            if (objs.Length >= 1)            {                _isProcessError = (bool)objs[0];            }             if (!_isProcessError && !CheckPreCondition())            {                return RState.Failed;            }            if (!GetWaferSize())            {                NotifyError(eEvent.ERR_SRD, "Wafer Size is invalid", 0);                return RState.Failed;            }            return Runner.Start(Module, "SRD Unloader Start");        }        /// <summary>        /// Check Pre Condition        /// </summary>        /// <returns></returns>        private bool CheckPreCondition()        {            //Check Rotation Home            if (!_rotationAxis.IsHomed)            {                NotifyError(eEvent.ERR_SRD, "Rotation is not homed", 0);                return false;            }            //Check LiftUp            if (_srdCommon.CommonData.LiftUp)            {                NotifyError(eEvent.ERR_SRD, "LiftUp is on", 0);                return false;            }            //Check LiftUp Status            if (_srdCommon.CommonData.LiftUpStatus)            {                NotifyError(eEvent.ERR_SRD, "LiftUp sensor is on", 0);                return false;            }            //Check Wafer Present            if (!_srdCommon.CommonData.WaferPresent)            {                NotifyError(eEvent.ERR_SRD, "WaferPresent sensor is off", 0);                return false;            }            //Check LoaderDI            if (!_systemFacilities.LoaderDiEnable)            {                NotifyError(eEvent.ERR_SRD, "Load DI Is Disable", 0);                return false;            }            //Check Vacuum            int vacuumOnLimit = SC.GetValue<int>("SRD.ChuckVacuumOnLimit");            if (!_srdCommon.CommonData.ChuckVacuum)            {                if(_srdCommon.CommonData.VacuumValue >= vacuumOnLimit)                {                    LOG.WriteLog(eEvent.ERR_SRD, Module, $"VacuumValue:{_srdCommon.CommonData.VacuumValue}, VacuumOn Limit:{vacuumOnLimit}");                    return false;                }                          }            else            {                LOG.WriteLog(eEvent.ERR_SRD, Module, $"Chuck Vacuum is off");                return false;            }            //Check Flippers            if (_srdCommon.CommonData.FlippersIn150 || _srdCommon.CommonData.FlippersIn200) //|| _srdCommon.CommonData.FlippersIn100            {                NotifyError(eEvent.ERR_SRD, "FlippersIn is on", 0);                return false;            }            if (!_srdCommon.CommonData.Flipper1Out150Status || !_srdCommon.CommonData.Flipper2Out150Status || !_srdCommon.CommonData.Flipper3Out150Status                || !_srdCommon.CommonData.Flipper1Out200Status || !_srdCommon.CommonData.Flipper2Out200Status || !_srdCommon.CommonData.Flipper3Out200Status)            //|| !_srdCommon.CommonData.Flipper1Out100Status || !_srdCommon.CommonData.Flipper2Out100Status || !_srdCommon.CommonData.Flipper3Out100Status            {                NotifyError(eEvent.ERR_SRD, "Flippers are at In position", 0);                return false;            }            return true;        }        /// <summary>        /// ChuckATMOn        /// </summary>        /// <returns></returns>        private bool ChuckATMOn()        {            bool result = _srdCommon.ChuckATMAction("", null);            if (!result)            {                NotifyError(eEvent.ERR_SRD, "Chuck ATM Action is failed", 0);                return result;            }            return true;        }        /// <summary>        /// Chuck ATM On End        /// </summary>        /// <returns></returns>        private bool CheckChuckATMEndStatus()        {            return _srdCommon.Status == RState.End && !_srdCommon.CommonData.ChuckATMOn;        }        /// <summary>        /// Chuck ATM On Stop        /// </summary>        /// <returns></returns>        private bool CheckChuckATMStopStatus()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_SRD, "Check ChuckATM is failed", 0);                return true;            }            return false;        }        /// <summary>        /// Check Vacuum End        /// </summary>        /// <returns></returns>        private bool CheckVacuumEndStatus()        {            if(_srdCommon.Status == RState.End && CheckVacuumValue())            {                return true;            }                      return false;        }        /// <summary>        /// Check Vacuum Stop        /// </summary>        /// <returns></returns>        private bool CheckVacuumStopStatus()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_SRD, "Check ChuckATM is failed", 0);                return true;            }            else if (_srdCommon.Status == RState.End)            {                if (_currentRetryTimes < RETRY_TIMES)                {                    _currentRetryTimes++;                    NotifyError(eEvent.WARN_SRD, $"Current Chuck ATM Retry Times is {_currentRetryTimes}", 0);                    _srdCommon.ChuckATMAction("", null);                }                else                {                    NotifyError(eEvent.ERR_SRD, $"Chuck ATM Retry Times is over {RETRY_TIMES}. ChuckATM is failed!", 0);                    return true;                }            }                                return false;        }        /// <summary>        /// Check Vacuum Value        /// </summary>        /// <returns></returns>        private bool CheckVacuumValue()        {            if (_srdCommon.CommonData.VacuumValue >= _vacuumOffLimit)            {                //LOG.WriteLog(eEvent.INFO_SRD, Module, $"VacuumValue:{_srdCommon.CommonData.VacuumValue}, VacuumOn Limit:{_vacuumOffLimit}");                return true;            }            else            {                LOG.WriteLog(eEvent.WARN_SRD, Module, $"VacuumValue:{_srdCommon.CommonData.VacuumValue}, VacuumOn Limit:{_vacuumOffLimit}");                return false;            }        }        /// <summary>        /// LiftUpOff        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool LiftUpOn()        {            bool result = _srdCommon.LiftUpOnAction("", null);            if (!result)            {                NotifyError(eEvent.ERR_SRD, "Lift Up On Action is failed", 0);                return result;            }            return true;        }        /// <summary>        /// 检验LiftUpOff结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckLiftUpOnEndStatus()        {            return _srdCommon.Status == RState.End && _srdCommon.CommonData.LiftUpStatus;        }        /// <summary>        /// 检验LiftUpOff结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckLiftUpOnStopStatus()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_SRD, "Check LiftUpOn is failed", 0);                return true;            }            return false;        }                /// <summary>        /// ChuckVacuumOn        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool ChuckVacuumOff()        {            bool result = _srdCommon.ChuckVacuumOffAction("", null);            if (!result)            {                NotifyError(eEvent.ERR_SRD, "ChuckVacuumOff Action is failed", 0);                return result;            }            return true;        }        /// <summary>        /// 检验ChuckVacuumOn结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckChuckVacuumOffEndStatus()        {            return _srdCommon.Status == RState.End && _srdCommon.CommonData.ChuckVacuum;        }        /// <summary>        /// 检验ChuckVacuumOn结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckChuckVacuumOffStopStatus()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_SRD, "Check ChuckVacuumOff is failed", 0);                return true;            }            return false;        }        /// <summary>        /// Check WaferPresent        /// </summary>        /// <returns></returns>        private bool CheckWaferPresent()        {            if (!_srdCommon.CommonData.WaferPresent)            {                NotifyError(eEvent.ERR_SRD, "WaferPresent sensor is off", 0);                return false;            }            return true;        }        /// <summary>        /// Open Door        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool OpenDoor()        {            return _srdCommon.DoorOpenAction("", null);        }        /// <summary>        /// 检验DoorOpened        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckDoorOpenedEndStatus()        {            bool result = _srdCommon.Status == RState.End;            if (result)            {                if (_srdCommon.CommonData.DoorOpened && !_srdCommon.CommonData.DoorClosed)                {                    return true;                }                else                {                    NotifyError(eEvent.ERR_SRD, $"Opened {_srdCommon.CommonData.DoorOpened}&&Closed {_srdCommon.CommonData.DoorClosed}", 0);                    return false;                }            }            return false;        }        /// <summary>        /// 检验Door        /// </summary>        /// <returns></returns>        private bool CheckDoorOpenedStopStatus()        {            return _srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout;        }        /// <summary>        /// Flippers Out        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool FlippersOut()        {            bool result = false;            object[] objects = new object[1];            objects[0] = _waferSize;            result = _srdCommon.FlipperOutAction("", objects);            if (!result)            {                NotifyError(eEvent.ERR_SRD, $"FlipperOut{_waferSize} Action is failed", 0);                return result;            }            return true;        }        /// <summary>        /// 检验FlippersOut结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckFlippersOutEndStatus()        {            return _srdCommon.Status == RState.End;        }        /// <summary>        /// 检验FlippersOut结束状态        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool CheckFlippersOutStopStatus()        {            if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_SRD, $"Check FlipperOut{_waferSize} Action is failed", 0);                return true;            }            return false;        }        /// <summary>        /// Get current WaferSize        /// </summary>        /// <returns></returns>        private bool GetWaferSize()        {            WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleNameString.ToEnum(Module), 0);            if (waferInfo == null)            {                return false;            }            switch (waferInfo.Size)            {                case WaferSize.WS4:                    _waferSize = 100;                    break;                case WaferSize.WS6:                case WaferSize.WS150:                case WaferSize.WS159:                    _waferSize = 150;                    break;                case WaferSize.WS0:                case WaferSize.WS8:                    _waferSize = 200;                    break;                default:                    return false;            }            return true;        }        /// <summary>        /// 关闭 Wafer N2        /// </summary>        /// <returns></returns>        private bool N2Off()        {            if(!_srdCommon.CommonData.N2On) return true;            bool result = _srdCommon.N2OffAction("", null);            if (!result)            {                NotifyError(eEvent.ERR_SRD, $"N2 Off Action is failed", 0);            }            return result;        }        /// <summary>        /// Water Off        /// </summary>        /// <param name="param"></param>        /// <returns></returns>        private bool WaterOff()        {            if (_srdCommon.CommonData.WaterOn)            {                bool result = _srdCommon.WaterOff();                if (!result)                               {                    NotifyError(eEvent.ERR_SRD, "Water On is failed", 0);                }                return result;            }            return true;        }    }}
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