| 1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950 | using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;namespace MECF.Framework.Common.CommonData.Vpw{    public class VpwLotTrackData    {        public DateTime TimeStamp { get; set; }        /// <summary>        /// 状态机        /// </summary>        public string StateMachine { get; set; }        /// <summary>        /// 真空值        /// </summary>        public double VacuumPressure { get; set; }        /// <summary>        /// cell流量        /// </summary>        public double CellFlow { get; set; }        /// <summary>        /// DO        /// </summary>        public double DiwLoopDo { get; set; }        /// <summary>        /// 水压        /// </summary>        public double WaterPressure { get; set; }        /// <summary>        /// DripValve        /// </summary>        public bool DripValve { get; set; }        /// <summary>        /// SmallValve        /// </summary>        public bool SmallValve { get; set; }        /// <summary>        /// LargeValve        /// </summary>        public bool LargeValve { get; set; }        /// <summary>        /// chamber closed        /// </summary>        public bool ChamberClosed { get; set; }    }}
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