| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187 | <?xml version='1.0'?><IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>  <Dig_In>    <DI_ITEM Index="0" Name="DI_TM_DI1" Device="" Addr="w0.00" Note="System CDA Pressure ok" />    <DI_ITEM Index="1" Name="DI_TM_DI2" Device="" Addr="w0.01" Note="System N2 Pressure ok"/>    <DI_ITEM Index="2" Name="DI_TM_DI3" Device="" Addr="w0.02" Note="VCE SLIT DOOR OPEN ENABLE" />    <DI_ITEM Index="3" Name="DI_TM_DI5" Device="" Addr="w0.03" Note="PMA SLIT DOOR OPEN  ENABLE" />    <DI_ITEM Index="4" Name="DI_TM_DI7" Device="" Addr="w0.04" Note="PMB SLIT DOOR OPEN  ENABLE" />    <DI_ITEM Index="5" Name="DI_TM_DI9" Device="" Addr="w0.05" Note="PMC SLIT DOOR OPEN  ENABLE" />    <DI_ITEM Index="6" Name="DI_TM_DI4" Device="" Addr="w0.06" Note="TM RB EXTEND VCE  ENABLE" />    <DI_ITEM Index="7" Name="DI_TM_DI6" Device="" Addr="w0.07" Note="TM RB EXTEND PMA  ENABLE" />    <DI_ITEM Index="8" Name="DI_TM_DI8" Device="" Addr="w0.08" Note="TM RB EXTEND PMB  ENABLE" />    <DI_ITEM Index="9" Name="DI_TM_DI10" Device="" Addr="w0.09" Note="TM RB EXTEND PMC  ENABLE" />    <DI_ITEM Index="10" Name="DI_SYS_C1" Device="" Addr="w0.10" Note="AC RACK FAN OK" />    <DI_ITEM Index="11" Name="DI_SYS_C2" Device="" Addr="w0.11" Note="AC RACK Smoke Detector out1" />    <DI_ITEM Index="12" Name="DI_SYS_C3" Device="" Addr="w0.12" Note="AC RACK Smoke Detector out2" />    <DI_ITEM Index="13" Name="DI_SYS_C4" Device="" Addr="w0.13" Note="Factory Smoke Detector Out" />    <DI_ITEM Index="14" Name="DI_TSYS_C5" Device="" Addr="w0.14" Note="Abnormal exhaust gas treatment" />    <DI_ITEM Index="15" Name="DI_TM_N2_1" Device="" Addr="w0.15" Note="TM N2气压表1" />    <DI_ITEM Index="16" Name="DI_VCE_TM_OPS" Device="" Addr="w1.00" Note="VCE到TM门阀开信号" />    <DI_ITEM Index="17" Name="DI_VCE_TM_CLS" Device="" Addr="w1.01" Note="VCE到TM门阀关信号" />    <DI_ITEM Index="18" Name="DI_TM_PMA_OPS" Device="" Addr="w1.02" Note="TM到PMA门阀开信号" />    <DI_ITEM Index="19" Name="DI_TM_PMA_CLS" Device="" Addr="w1.03" Note="TM到PMA门阀关信号" />    <DI_ITEM Index="20" Name="DI_TM_PMB_OPS" Device="" Addr="w1.04" Note="TM到PMB门阀开信号" />    <DI_ITEM Index="21" Name="DI_TM_PMB_CLS" Device="" Addr="w1.05" Note="TM到PMB门阀关信号" />    <DI_ITEM Index="22" Name="DI_TM_N2_2" Device="" Addr="w1.06" Note="TM N2气压表2" />    <DI_ITEM Index="23" Name="DI_TM_CDA" Device="" Addr="w1.07" Note="TM CDA气压表" />    <DI_ITEM Index="24" Name="DI_TM_HE" Device="" Addr="w1.08" Note="TM He气压表" />    <DI_ITEM Index="25" Name="DI_TM_LEAK" Device="" Addr="w1.09" Note="漏液检测器" />    <DI_ITEM Index="26" Name="DI_VCE_V" Device="" Addr="w1.10" Note="VCE真空信号" />    <DI_ITEM Index="27" Name="DI_TM_V" Device="" Addr="w1.11" Note="TM真空信号" />    <DI_ITEM Index="28" Name="DI_VCE_RB_RET" Device="" Addr="w1.12" Note="ROBOT TO VCE RETRACT" />    <DI_ITEM Index="29" Name="DI_PMA_RB_RET" Device="" Addr="w1.13" Note="ROBOT TO PMA RETRACT" />    <DI_ITEM Index="30" Name="DI_PMB_RB_RET" Device="" Addr="w1.14" Note="ROBOT TO PMB RETRACT" />    <DI_ITEM Index="31" Name="DI_PMC_RB_RET" Device="" Addr="w1.15" Note="ROBOT TO PMC RETRACT" />    <DI_ITEM Index="32" Name="DI_PMD_RB_RET" Device="" Addr="w2.00" Note="ROBOT TO PMD RETRACT" />    <DI_ITEM Index="33" Name="DI_TM_PMC_OPS" Device="" Addr="w2.01" Note="TM到PMC门阀开信号" />    <DI_ITEM Index="34" Name="DI_TM_PMC_CLS" Device="" Addr="w2.02" Note="TM到PMC门阀关信号" />    <DI_ITEM Index="35" Name="DI_TM_PMD_OPS" Device="" Addr="w2.03" Note="TM到PMD门阀开信号" />    <DI_ITEM Index="36" Name="DI_TM_PMD_CLS" Device="" Addr="w2.04" Note="TM到PMD门阀关信号" />  </Dig_In>  <Dig_Out>    <DO_ITEM Index="0" Name="" Device="" Addr="" />    <DO_ITEM Index="1" Name="" Device="" Addr="" />    <DO_ITEM Index="2" Name="" Device="" Addr="" />    <DO_ITEM Index="3" Name="" Device="" Addr="" />    <DO_ITEM Index="4" Name="" Device="" Addr="" />    <DO_ITEM Index="5" Name="" Device="" Addr="" />    <DO_ITEM Index="6" Name="" Device="" Addr="" />    <DO_ITEM Index="7" Name="" Device="" Addr="" />    <DO_ITEM Index="8" Name="" Device="" Addr="" />    <DO_ITEM Index="9" Name="" Device="" Addr="" />    <DO_ITEM Index="10" Name="" Device="" Addr="" />    <DO_ITEM Index="11" Name="DO_TM_PMD_OP" Device="" Addr="w199.14" Note="TM到PMD门阀开"/>    <DO_ITEM Index="12" Name="DO_TM_PMD_CL" Device="" Addr="w199.15" Note="TM到PMD门阀关" />    <DO_ITEM Index="13" Name="DO_VCE_TM_OP" Device="" Addr="w200.00" Note="VCE到TM门阀开" />    <DO_ITEM Index="14" Name="DO_VCE_TM_CL" Device="" Addr="w200.01" Note="VCE到TM门阀关" />    <DO_ITEM Index="15" Name="DO_TM_PMA_OP" Device="" Addr="w200.02" Note="TM到PMA门阀开"/>    <DO_ITEM Index="16" Name="DO_TM_PMA_CL" Device="" Addr="w200.03" Note="TM到PMA门阀关"/>    <DO_ITEM Index="17" Name="DO_TM_PMB_OP" Device="" Addr="w200.04" Note="TM到PMB门阀开"/>    <DO_ITEM Index="18" Name="DO_TM_PMB_CL" Device="" Addr="w200.05" Note="TM到PMB门阀关"/>    <DO_ITEM Index="19" Name="DO_TM_PMC_OP" Device="" Addr="w200.06" Note="TM到PMC门阀开"/>    <DO_ITEM Index="20" Name="DO_TM_PMC_CL" Device="" Addr="w200.07" Note="TM到PMC门阀关"/>    <DO_ITEM Index="21" Name="DO_TM_V_HS" Device="" Addr="w200.08" Note="TM腔快抽真空"/>    <DO_ITEM Index="22" Name="DO_TM_V_LS" Device="" Addr="w200.09" Note="TM腔慢抽真空"/>    <DO_ITEM Index="23" Name="DO_TM_B_HS" Device="" Addr="w200.10" Note="TM腔快破真空"/>    <DO_ITEM Index="24" Name="DO_TM_B_LS" Device=""  Addr="w200.11" Note="TM腔慢破真空"/>    <DO_ITEM Index="25" Name="DO_VCE_V_HS" Device="" Addr="w200.12" Note="VCE腔快抽真空"/>    <DO_ITEM Index="26" Name="DO_VCE_V_LS" Device="" Addr="w200.13" Note="VCE腔慢抽真空" />    <DO_ITEM Index="27" Name="DO_VCE_B_HS" Device="" Addr="w200.14" Note="VCE腔快破真空"/>    <DO_ITEM Index="28" Name="DO_VCE_B_LS" Device="" Addr="w200.15" Note="VCE腔慢破真空"/>    <DO_ITEM Index="29" Name="DO_V_220V" Device="" Addr="w201.00" Note="220V线圈"/>    <DO_ITEM Index="30" Name="DO_TM_C1" Device=""  Addr="w201.01" Note="系统允许断电"/>    <DO_ITEM Index="31" Name="DO_TM_C2" Device=""  Addr="w201.02" Note="备用"/>    <DO_ITEM Index="32" Name="" Device="" Addr="" />    <DO_ITEM Index="33" Name="" Device="" Addr="" />    <DO_ITEM Index="34" Name="" Device="" Addr="" />    <DO_ITEM Index="35" Name="" Device="" Addr="" />    <DO_ITEM Index="36" Name="" Device="" Addr="" />  </Dig_Out>  <Ana_Out>    <AO_ITEM Index="0" Name="AO_MFC_Flow_Setpoint" BufferOffset="0" Device="" Addr="d200"  Note="MFC Flow Setpoint" />    <AO_ITEM Index="1" Name="AO_TM_Vacuum_Gauge" BufferOffset="1"  Device="" Addr="d201" Note="TM"/>    <AO_ITEM Index="2" Name="" BufferOffset=""  />    <AO_ITEM Index="3" Name="" BufferOffset="" />    <AO_ITEM Index="4" Name="" BufferOffset="" />    <AO_ITEM Index="5" Name="" BufferOffset=""  />    <AO_ITEM Index="6" Name="" BufferOffset="" />    <AO_ITEM Index="7" Name="" BufferOffset=""  />    <AO_ITEM Index="8" Name="" BufferOffset=""/>    <AO_ITEM Index="9" Name="" BufferOffset="" />    <AO_ITEM Index="10" Name="" BufferOffset="" />    <AO_ITEM Index="11" Name="" BufferOffset=""  />    <AO_ITEM Index="12" Name="" BufferOffset="" />    <AO_ITEM Index="13" Name="" BufferOffset="" />    <AO_ITEM Index="14" Name="" BufferOffset="" />    <AO_ITEM Index="15" Name="" BufferOffset="" />    <AO_ITEM Index="16" Name="" BufferOffset="" />    <AO_ITEM Index="17" Name="" BufferOffset="" />    <AO_ITEM Index="18" Name="" BufferOffset="" />    <AO_ITEM Index="19" Name="" BufferOffset="" />    <AO_ITEM Index="20" Name="" BufferOffset="" />    <AO_ITEM Index="21" Name="" />    <AO_ITEM Index="22" Name="" />    <AO_ITEM Index="23" Name="" />    <AO_ITEM Index="24" Name="" />    <AO_ITEM Index="25" Name="" />    <AO_ITEM Index="26" Name="" />    <AO_ITEM Index="27" Name="" />    <AO_ITEM Index="28" Name="" />    <AO_ITEM Index="29" Name="" />    <AO_ITEM Index="30" Name="" />    <AO_ITEM Index="31" Name="" />    <AO_ITEM Index="32" Name="" />    <AO_ITEM Index="33" Name="" />    <AO_ITEM Index="34" Name="" />    <AO_ITEM Index="35" Name="" />    <AO_ITEM Index="36" Name="" />    <AO_ITEM Index="37" Name="" />    <AO_ITEM Index="38" Name="" />    <AO_ITEM Index="39" Name="" />    <AO_ITEM Index="40" Name="" />    <AO_ITEM Index="41" Name="" />    <AO_ITEM Index="42" Name="" />    <AO_ITEM Index="43" Name="" />    <AO_ITEM Index="44" Name="" />    <AO_ITEM Index="45" Name="" />    <AO_ITEM Index="46" Name="" />    <AO_ITEM Index="47" Name="" />    <AO_ITEM Index="48" Name="" />    <AO_ITEM Index="49" Name="" />  </Ana_Out>  <Ana_In>    <AI_ITEM Index="0" Name="AI_MFC_Flow_Setpoint"  BufferOffset="2" Device="" Addr="D100" />    <AI_ITEM Index="1" Name="AI_VCE_Vacuum_Gauge"  BufferOffset="10" Device="" Addr="D101" />    <AI_ITEM Index="2" Name="AI_TM_Vacuum_Gauge"  BufferOffset="2" Device="" Addr="D102"/>    <AI_ITEM Index="3" Name="AI_VCE_Pipeline_Vacuum_Gauge"  BufferOffset="10" Device="" Addr="D103"/>    <AI_ITEM Index="4" Name="AI_TM_Pipeline_Vacuum_Gauge"  BufferOffset="22" Device="" Addr="D104"/>    <AI_ITEM Index="5" Name=""/>    <AI_ITEM Index="6" Name="" />    <AI_ITEM Index="7" Name=""/>    <AI_ITEM Index="8" Name=""/>    <AI_ITEM Index="9" Name=""/>    <AI_ITEM Index="10" Name="" />    <AI_ITEM Index="11" Name=""/>    <AI_ITEM Index="12" Name=""/>    <AI_ITEM Index="13" Name=""/>    <AI_ITEM Index="14" Name=""/>    <AI_ITEM Index="15" Name=""/>    <AI_ITEM Index="16" Name=""/>    <AI_ITEM Index="17" Name=""/>    <AI_ITEM Index="18" Name=""/>    <AI_ITEM Index="19" Name=""/>    <AI_ITEM Index="20" Name=""/>    <AI_ITEM Index="21" Name="" />    <AI_ITEM Index="22" Name=""/>    <AI_ITEM Index="23" Name=""/>    <AI_ITEM Index="24" Name=""/>    <AI_ITEM Index="25" Name=""/>    <AI_ITEM Index="26" Name="" />    <AI_ITEM Index="27" Name="" />    <AI_ITEM Index="28" Name="" />    <AI_ITEM Index="29" Name="" />    <AI_ITEM Index="30" Name="" />    <AI_ITEM Index="31" Name="" />    <AI_ITEM Index="32" Name="" />    <AI_ITEM Index="33" Name="" />    <AI_ITEM Index="34" Name="" />    <AI_ITEM Index="35" Name="" />    <AI_ITEM Index="36" Name="" />    <AI_ITEM Index="37" Name="" />    <AI_ITEM Index="38" Name="" />    <AI_ITEM Index="39" Name="" />    <AI_ITEM Index="40" Name="" />    <AI_ITEM Index="41" Name="" />    <AI_ITEM Index="42" Name="" />    <AI_ITEM Index="43" Name="" />    <AI_ITEM Index="44" Name="" />    <AI_ITEM Index="45" Name="" />    <AI_ITEM Index="46" Name="" />    <AI_ITEM Index="47" Name="" />    <AI_ITEM Index="48" Name="" />    <AI_ITEM Index="49" Name="" />  </Ana_In></IO_DEFINE>
 |